Quartz combustion chamber

- Tokyo Electron Limited
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Description

FIG. 1 a perspective view of a quartz combustion chamber.

FIG. 2 a left side view thereof.

FIG. 3 a front elevational view thereof, the rear elevational view being a mirror image of the front view.

FIG. 4 a right side view thereof.

FIG. 5 a top plan view thereof.

FIG. 6 a bottom plan view thereof.

FIG. 7 a cross sectional view thereof taken along line 7--7 in FIG. 3; and,

FIG. 8 a cross sectional view thereof taken along line 8--8 in FIG. 5.

Referenced Cited
U.S. Patent Documents
5303671 April 19, 1994 Kondo et al.
5584934 December 17, 1996 Lin
Patent History
Patent number: D424023
Type: Grant
Filed: Jul 24, 1997
Date of Patent: May 2, 2000
Assignee: Tokyo Electron Limited (Tokyo-To)
Inventor: Kazuo Akimoto (Kanagawa)
Primary Examiner: Lisa Lichtenstein
Law Firm: Ladas & Parry
Application Number: 0/74,292
Classifications
Current U.S. Class: Semiconductor, Transistor Or Integrated Circuit (24) (D13/182)
International Classification: 1303;