Vacuum processing equipment configuration
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Description
FIG. 1 is front, top and right side perspective view of cassettes storage eguipment in relation to a conveyor equipped robot and load and unload chambers showing our new design;
FIG. 2 is a top plan view;
FIG. 3 is a front side elevational view;
FIG. 4 is a right side elevational view;
FIG. 5 is a rear side elevational view;
FIG. 6 is a left side elevational view;
FIG. 7 is a bottom plan view; and,
FIG. 8 is a right side elevational view along line 8—8 of FIG. 2.
The details shown in broken lines in all views is for illustrative purposes only and form no part of the claimed design.
Claims
The ornamental design for a vacuum processing equipment configuration, as shown and described.
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Patent History
Patent number: D473354
Type: Grant
Filed: Jan 12, 1999
Date of Patent: Apr 15, 2003
Assignee: Hitachi, Ltd. (Tokyo)
Inventors: Shigekazu Kato (Kudamatsu), Kouji Nishihata (Tokuyama), Tsunehiko Tsubone (Hikari), Atsushi Itou (Kudamatsu)
Primary Examiner: Ruth McInroy
Attorney, Agent or Law Firm: Antonelli, Terry, Stout & Kraus, LLP
Application Number: 29/099,071
Type: Grant
Filed: Jan 12, 1999
Date of Patent: Apr 15, 2003
Assignee: Hitachi, Ltd. (Tokyo)
Inventors: Shigekazu Kato (Kudamatsu), Kouji Nishihata (Tokuyama), Tsunehiko Tsubone (Hikari), Atsushi Itou (Kudamatsu)
Primary Examiner: Ruth McInroy
Attorney, Agent or Law Firm: Antonelli, Terry, Stout & Kraus, LLP
Application Number: 29/099,071
Classifications
Current U.S. Class:
Washing, Cleaning, Or Drying Machine (D32/1)
International Classification: 1505;
International Classification: 1505;