Semiconductor manufacturing apparatus
Latest Hitachi High-Technologies Corporation Patents:
Description
Claims
The ornamental design for a semiconductor manufacturing apparatus, as shown.
Referenced Cited
U.S. Patent Documents
D365584 | December 26, 1995 | Nakagome et al. |
6050891 | April 18, 2000 | Nering |
6454472 | September 24, 2002 | Kim et al. |
6942738 | September 13, 2005 | Nelson et al. |
20020150449 | October 17, 2002 | Nelson et al. |
20030002961 | January 2, 2003 | Davis et al. |
20030136513 | July 24, 2003 | Lee et al. |
20040197169 | October 7, 2004 | Soraoka et al. |
Patent History
Patent number: D546354
Type: Grant
Filed: Aug 26, 2005
Date of Patent: Jul 10, 2007
Assignee: Hitachi High-Technologies Corporation (Tokyo)
Inventors: Hideki Kihara (Kudamatsu), Minoru Soraoka (Shunan), Yuzo Ohirabaru (Kudamatsu), Nobuo Nagayasu (Kudamatsu)
Primary Examiner: Antoine D. Davis
Assistant Examiner: Patricia Palasik
Attorney: Antonelli, Terry, Stout & Kraus, LLP.
Application Number: 29/237,008
Type: Grant
Filed: Aug 26, 2005
Date of Patent: Jul 10, 2007
Assignee: Hitachi High-Technologies Corporation (Tokyo)
Inventors: Hideki Kihara (Kudamatsu), Minoru Soraoka (Shunan), Yuzo Ohirabaru (Kudamatsu), Nobuo Nagayasu (Kudamatsu)
Primary Examiner: Antoine D. Davis
Assistant Examiner: Patricia Palasik
Attorney: Antonelli, Terry, Stout & Kraus, LLP.
Application Number: 29/237,008
Classifications
Current U.S. Class:
Miscellaneous (D15/199)