Polishing pad

- JSR Corporation
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Description

FIG. 1 is a top plan view of the polishing pad;

FIG. 2 is a bottom plan view thereof;

FIG. 3 is a front elevational view thereof, the left side elevational view, the right side elevational view, and the rear elevational view being a mirror image of the front view shown;

FIG. 4 is an enlarged, partial view thereof taken at coordinates 44 in FIG. 1;

FIG. 5 is a greatly enlarged, partial view thereof taken at coordinates 55 in FIG. 1;

FIG. 6 is a cross-sectional view thereof taken along line 66 in FIG. 5;

FIG. 7 is a further enlargement of the cross-sectional view of part 7 shown in FIG. 6;

FIG. 8 is a greatly enlarged, partial view taken at coordinates 85 in FIG. 1;

FIG. 9 is a cross-sectional view taken along line 99 in FIG. 8;

FIG. 10 is a further enlargement of the cross-sectional view of part 10 of FIG. 9;

FIG. 11 is a further enlargement of the cross-sectional view of part 11 in FIG. 10; and,

FIG. 12 is a further enlargement of the cross-sectional view of part 12 in FIG. 11.

Claims

The ornamental design for a polishing pad, as shown and described.

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Patent History
Patent number: D559063
Type: Grant
Filed: Sep 17, 2004
Date of Patent: Jan 8, 2008
Assignee: JSR Corporation (Tokyo)
Inventors: Takahiro Okamoto (Tokyo), Hiroshi Shiho (Tokyo)
Primary Examiner: T. Chase Nelson
Attorney: Oblon, Spivak, McClelland, Maier & Neustadt, P.C.
Application Number: 29/213,405
Classifications
Current U.S. Class: D8/70