Cover for a heater stage of a plasma processing apparatus
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Description
Claims
The ornamental design for a cover for a heater stage of a plasma processing apparatus, as shown.
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Patent History
Patent number: D582949
Type: Grant
Filed: Jun 14, 2007
Date of Patent: Dec 16, 2008
Assignee: Tokyo Electron Limited (Tokyo)
Inventor: Jun Yamashita (Amagasaki)
Primary Examiner: Sandra Snapp
Assistant Examiner: Patricia Palasik
Attorney: Oblon, Spivak, McClelland, Maier & Neustadt, P.C.
Application Number: 29/281,069
Type: Grant
Filed: Jun 14, 2007
Date of Patent: Dec 16, 2008
Assignee: Tokyo Electron Limited (Tokyo)
Inventor: Jun Yamashita (Amagasaki)
Primary Examiner: Sandra Snapp
Assistant Examiner: Patricia Palasik
Attorney: Oblon, Spivak, McClelland, Maier & Neustadt, P.C.
Application Number: 29/281,069
Classifications