Heater for manufacturing semiconductor

- Tokyo Electron Limited
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Description

FIG. 1 is a front elevational view of a heater for manufacturing semiconductor, showing my new design;

FIG. 2 is a rear elevational view thereof; and,

FIG. 3 is a sectional view taken along line 3—3 in FIG. 1.

The broken line showing in the figures is for illustrative purposes only and forms no part of the claimed design.

Claims

The ornamental design for a heater for manufacturing semiconductor, as shown and described.

Referenced Cited
U.S. Patent Documents
5540782 July 30, 1996 Miyagi et al.
5911896 June 15, 1999 Holden et al.
6037574 March 14, 2000 Lanham et al.
D427570 July 4, 2000 Ishii
D428858 August 1, 2000 Ishii
6529686 March 4, 2003 Ramanan et al.
6616767 September 9, 2003 Zhao et al.
20020190051 December 19, 2002 Wang et al.
20040149716 August 5, 2004 Inagawa et al.
20050217583 October 6, 2005 Cole et al.
20070166146 July 19, 2007 Sekiya
Patent History
Patent number: D589471
Type: Grant
Filed: Mar 28, 2007
Date of Patent: Mar 31, 2009
Assignee: Tokyo Electron Limited (Tokyo)
Inventor: Tomohito Komatsu (Nirasaki)
Primary Examiner: Selina Sikder
Attorney: Oblon, Spivak, McClelland, Maier & Neustadt, P.C.
Application Number: 29/278,401