Shaft portion of an apparatus for holding and heating semiconductor wafers or the like
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The broken lines showing on the drawing disclosure are for illustrative purposes only and form no part of the claimed design. The lines consisting of long lines end dots indicate conceptual border lines between the claimed portions and the disclaimed portions.
Claims
The ornamental design for a shaft portion of an apparatus for holding and heating semiconductor wafers or the like, as shown and described.
D71201 | October 1926 | Neuwirth et al. |
2336592 | December 1943 | Brown |
D193891 | October 1962 | Liptay |
4300190 | November 10, 1981 | Mershon |
4432451 | February 21, 1984 | Hooser |
D288651 | March 10, 1987 | Rimmeir |
D292631 | November 3, 1987 | Tash |
4768237 | September 6, 1988 | Torti |
5168908 | December 8, 1992 | Boyum |
5384918 | January 31, 1995 | Leighton et al. |
D356893 | April 4, 1995 | Conmy |
D364251 | November 14, 1995 | Novak |
D376667 | December 17, 1996 | Lucluze |
D406930 | March 16, 1999 | Epps |
6160244 | December 12, 2000 | Ohashi |
D465888 | November 19, 2002 | Wang |
6662381 | December 16, 2003 | Powell et al. |
D495841 | September 7, 2004 | Smith et al. |
D514760 | February 7, 2006 | Schoolcraft et al. |
7089605 | August 15, 2006 | Jiang |
D535073 | January 9, 2007 | Leaphart et al. |
D535422 | January 16, 2007 | Mier-Langner et al. |
D547894 | July 31, 2007 | Hu |
D547896 | July 31, 2007 | Yifei |
D570531 | June 3, 2008 | Rashidi |
D574116 | July 29, 2008 | Yang et al. |
20050028258 | February 10, 2005 | Nasco |
20050132481 | June 23, 2005 | Walsh |
20070192950 | August 23, 2007 | Anderson |
20080250588 | October 16, 2008 | Robinson et al. |
20100000010 | January 7, 2010 | Martinisko |
20100024110 | February 4, 2010 | St. John |
20100077541 | April 1, 2010 | Stein |
11-343571 | December 1999 | JP |
D1345656 | October 2008 | JP |
M298774 | October 2006 | TW |
D118408 | August 2007 | TW |
Type: Grant
Filed: Aug 27, 2008
Date of Patent: Jul 5, 2011
Assignee: NGK Insulators, Ltd. (Nagoya)
Inventor: Taichi Nakamura (Nagoya)
Primary Examiner: Patricia Palasik
Attorney: Burr & Brown
Application Number: 29/323,533