Heater block for use in a semiconductor processing tool
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Description
Claims
I claim the ornamental design for a heater block for use in a semiconductor processing tool, as shown and described.
Referenced Cited
U.S. Patent Documents
Other references
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- U.S. Appl. No. 12/051,769, filed Mar. 19, 2008, Heater Block for Use in a Semiconductor Processing Tool, Satoshi Takahashi.
Patent History
Patent number: D643055
Type: Grant
Filed: Sep 11, 2008
Date of Patent: Aug 9, 2011
Assignee: ASM Japan K.K. (Tokyo)
Inventor: Satoshi Takahashi (Hachioji)
Primary Examiner: Patricia Palasik
Attorney: Knobbe, Martens, Olson & Bear, LLP
Application Number: 29/324,405
Type: Grant
Filed: Sep 11, 2008
Date of Patent: Aug 9, 2011
Assignee: ASM Japan K.K. (Tokyo)
Inventor: Satoshi Takahashi (Hachioji)
Primary Examiner: Patricia Palasik
Attorney: Knobbe, Martens, Olson & Bear, LLP
Application Number: 29/324,405
Classifications
Current U.S. Class:
Miscellaneous (D15/199)