Heater block for use in a semiconductor processing tool

- ASM Japan K.K.
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Description

FIG. 1 is a top perspective view of a heater block for use in a semiconductor processing tool;

FIG. 2 is a top view thereof;

FIG. 3 is a side view thereof; and,

FIG. 4 is a cross-sectional view thereof, taken along the line 4-4 of FIG. 2.

Claims

I claim the ornamental design for a heater block for use in a semiconductor processing tool, as shown and described.

Referenced Cited
U.S. Patent Documents
5306664 April 26, 1994 Sakura
6394797 May 28, 2002 Sugaya et al.
6634882 October 21, 2003 Goodman
6709267 March 23, 2004 Hawkins et al.
D529057 September 26, 2006 Willson et al.
20050242079 November 3, 2005 Kuibira et al.
20050274708 December 15, 2005 Chan et al.
20060011298 January 19, 2006 Lim et al.
20060108138 May 25, 2006 Lee et al.
20080084808 April 10, 2008 Kumagai
20090239385 September 24, 2009 Takahashi
Other references
  • U.S. Appl. No. 12/051,769, filed Mar. 19, 2008, Heater Block for Use in a Semiconductor Processing Tool, Satoshi Takahashi.
Patent History
Patent number: D643055
Type: Grant
Filed: Sep 11, 2008
Date of Patent: Aug 9, 2011
Assignee: ASM Japan K.K. (Tokyo)
Inventor: Satoshi Takahashi (Hachioji)
Primary Examiner: Patricia Palasik
Attorney: Knobbe, Martens, Olson & Bear, LLP
Application Number: 29/324,405
Classifications
Current U.S. Class: Miscellaneous (D15/199)