Shaft portion of an apparatus for holding and heating semiconductor wafers or the like
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The broken lines showing on the drawing disclosure are for illustrative purposes only and form no part of the claimed design. The lines consisting of long lines and dots indicate conceptual border lines between the claimed portions and the disclaimed portions.
Claims
The ornamental design for a shaft portion of an apparatus for holding and heating semiconductor wafers or the like, as shown and described.
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Type: Grant
Filed: Aug 27, 2008
Date of Patent: Sep 27, 2011
Assignee: NGK Insulators, Ltd. (Nagoya)
Inventor: Taichi Nakamura (Nagoya)
Primary Examiner: Patricia Palasik
Attorney: Burr & Brown
Application Number: 29/323,536