Deposition chamber liner

- Applied Materials, Inc.
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Description

FIG. 1 is a top perspective view of a deposition chamber liner.

FIG. 2 is a bottom perspective view of the deposition chamber liner of FIG. 1.

FIG. 3 is a top plan view of the deposition chamber liner of FIG. 1.

FIG. 4 is a bottom plan view of the deposition chamber liner of FIG. 1.

FIG. 5 is a side elevation view of the deposition chamber liner of FIG. 1, the other sides being identical.

FIG. 6 is a side cross-sectional view of the deposition chamber liner of FIG. 1, taken along section line 6-6 of FIG. 5.

FIG. 7 is an enlarged partial cross-sectional view of FIG. 6; and,

FIG. 8 is an enlarged partial cross-sectional view of FIG. 6.

The jagged lines on the sides of FIGS. 7 and 8 are utilized to show where the enlarged view is broken away from the remainder of the deposition chamber liner of FIG. 6. The jagged lines on FIGS. 7 and 8 form no part of the claimed design.

Claims

The ornamental design for a deposition chamber liner, as shown and described.

Referenced Cited
U.S. Patent Documents
D387074 December 2, 1997 Farley et al.
D446298 August 7, 2001 Thurman
D451457 December 4, 2001 Hale, Jr.
D466652 December 3, 2002 Thurman
6719886 April 13, 2004 Drewery et al.
D491963 June 22, 2004 Doba
6780294 August 24, 2004 Hixson et al.
6824658 November 30, 2004 Gopalraja et al.
6837974 January 4, 2005 Lawson et al.
D504503 April 26, 2005 Thurman
D508005 August 2, 2005 Ikeda et al.
D589126 March 24, 2009 Concannon
D646373 October 4, 2011 Liebson et al.
Patent History
Patent number: D665071
Type: Grant
Filed: Jan 25, 2012
Date of Patent: Aug 7, 2012
Assignee: Applied Materials, Inc. (Santa Clara, CA)
Inventors: Ashish Goel (Bangalore), Anantha K. Subramani (San Jose, CA)
Primary Examiner: David Muller
Attorney: Patterson & Sheridan, LLP
Application Number: 29/411,698