Wafer holding member

- Tokyo Electron Limited
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Description

FIG. 1 is front perspective view of a wafer holding member illustrating my new design;

FIG. 2 is a top plan view thereof;

FIG. 3 is a bottom view thereof;

FIG. 4 is a front view thereof, the rear view being a mirror image;

FIG. 5 is a left side view thereof;

FIG. 6 is a right side view thereof;

FIG. 7 is a sectional view taken along line 7-7 of FIG. 2; and,

FIG. 8 is an enlarged view of portion 8 encircled in FIG. 7.

Claims

The ornamental design for wafer holding member, as shown and described.

Patent History
Patent number: D674366
Type: Grant
Filed: Jun 24, 2011
Date of Patent: Jan 15, 2013
Assignee: Tokyo Electron Limited (Minato-Ku)
Inventor: Hideki Kajiwara (Koshi)
Primary Examiner: Selina Sikder
Application Number: 29/396,050