Film-forming apparatus
Latest ULVAC, Inc. Patents:
Description
Claims
The ornamental design for film-forming apparatus, as shown and described.
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Patent History
Patent number: D697541
Type: Grant
Filed: Jun 4, 2013
Date of Patent: Jan 14, 2014
Assignee: ULVAC, Inc.
Inventors: Shinya Fujimoto (Chigasaki), Nobuhiro Hayashi (Chigasaki), Takayoshi Hirono (Chigasaki), Isao Tada (Chigasaki), Shuji Saito (Chigasaki)
Primary Examiner: Patricia Palasik
Application Number: 29/442,988
Type: Grant
Filed: Jun 4, 2013
Date of Patent: Jan 14, 2014
Assignee: ULVAC, Inc.
Inventors: Shinya Fujimoto (Chigasaki), Nobuhiro Hayashi (Chigasaki), Takayoshi Hirono (Chigasaki), Isao Tada (Chigasaki), Shuji Saito (Chigasaki)
Primary Examiner: Patricia Palasik
Application Number: 29/442,988
Classifications
Current U.S. Class:
Miscellaneous (D15/199)