Roller for semiconductor wafer cleaning
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Description
Claims
The ornamental design for a roller for semiconductor wafer cleaning, as shown and described.
Referenced Cited
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Patent History
Patent number: D707408
Type: Grant
Filed: Oct 20, 2011
Date of Patent: Jun 17, 2014
Assignee: Ebara Corporation (Tokyo)
Inventor: Tomoatsu Ishibashi (Tokyo)
Primary Examiner: T. Chase Nelson
Assistant Examiner: Kathleen M Sims
Application Number: 29/404,442
Type: Grant
Filed: Oct 20, 2011
Date of Patent: Jun 17, 2014
Assignee: Ebara Corporation (Tokyo)
Inventor: Tomoatsu Ishibashi (Tokyo)
Primary Examiner: T. Chase Nelson
Assistant Examiner: Kathleen M Sims
Application Number: 29/404,442
Classifications
Current U.S. Class:
Element Or Attachment (D32/25)