Roller for semiconductor wafer cleaning

- Ebara Corporation
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Description

FIG. 1 is a front elevation view of a roller for semiconductor wafer cleaning showing my new design;

FIG. 2 is a rear elevation view thereof;

FIG. 3 is a top plan view thereof; the bottom view being an identical,

FIG. 4 is a right side view thereof; the left side view being an identical; and,

FIG. 5 is a cross section view taken along the line of 5-5 of FIG. 4 thereof.

Claims

The ornamental design for a roller for semiconductor wafer cleaning, as shown and described.

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Patent History
Patent number: D707408
Type: Grant
Filed: Oct 20, 2011
Date of Patent: Jun 17, 2014
Assignee: Ebara Corporation (Tokyo)
Inventor: Tomoatsu Ishibashi (Tokyo)
Primary Examiner: T. Chase Nelson
Assistant Examiner: Kathleen M Sims
Application Number: 29/404,442
Classifications
Current U.S. Class: Element Or Attachment (D32/25)