Dressing pellet for dresser disk
Latest EBARA CORPORATION Patents:
- Substrate transporter and substrate processing apparatus including substrate transporter
- Substrate holding apparatus, substrate suction determination method, substrate polishing apparatus, substrate polishing method, method of removing liquid from upper surface of wafer to be polished, elastic film for pressing wafer against polishing pad, substrate release method, and constant amount gas supply apparatus
- Buffer chamber and AM system including a buffer chamber
- Plating apparatus
- Substrate cleaning system and substrate cleaning method
Description
The broken lines depict environmental subject matter only and form no part of the claimed design.
Claims
The ornamental design for a dressing pellet for a dresser disk, as shown and described.
Referenced Cited
U.S. Patent Documents
Foreign Patent Documents
D55989 | August 1920 | Lipsz |
2225193 | December 1940 | Benner et al. |
2442129 | May 1948 | Hollstrom |
3121982 | February 1964 | Miller |
4768667 | September 6, 1988 | Magnusson |
D305871 | February 6, 1990 | Geiger |
D305987 | February 13, 1990 | Magnusson |
5782682 | July 21, 1998 | Han et al. |
D444483 | July 3, 2001 | Sunagawa |
6267645 | July 31, 2001 | Burga et al. |
6602119 | August 5, 2003 | Togawa et al. |
7175514 | February 13, 2007 | Boyer et al. |
D555680 | November 20, 2007 | Popov |
D585466 | January 27, 2009 | Park |
D626976 | November 9, 2010 | Park |
D677427 | March 5, 2013 | Ross |
D682695 | May 21, 2013 | Lampman |
20140041687 | February 13, 2014 | Shinozaki |
2012/122186 | September 2012 | WO |
Patent History
Patent number: D730960
Type: Grant
Filed: Mar 26, 2013
Date of Patent: Jun 2, 2015
Assignee: EBARA CORPORATION (Tokyo)
Inventor: Hiroyuki Shinozaki (Tokyo)
Primary Examiner: Patricia Palasik
Application Number: 29/450,945
Type: Grant
Filed: Mar 26, 2013
Date of Patent: Jun 2, 2015
Assignee: EBARA CORPORATION (Tokyo)
Inventor: Hiroyuki Shinozaki (Tokyo)
Primary Examiner: Patricia Palasik
Application Number: 29/450,945
Classifications
Current U.S. Class:
Element Or Attachment (D15/126)