Roller shaft for substrate cleaning

- EBARA CORPORATION
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Description

FIG. 1 is a left side view of a roller shaft for substrate cleaning showing our new design attached to a roller;

FIG. 2 is a right side view thereof;

FIG. 3 is a top view thereof, including a detail view of a portion thereof;

FIG. 4 is a front view thereof, including a detail view of portion thereof;

FIG. 5 is a cross-section view thereof, taken along the line 5-5 of FIG. 1;

FIG. 6 is an enlarged top perspective view; and,

FIG. 7 is an enlarged left side view thereof.

The portions of the roller shaft and the roller shown in broken lines are provided for illustrative purposes only and form no part of the claimed design.

The cross-section views are provided illustrative purposes only and the internal details of the roller shaft form no part of the claimed design. The hatching pattern used in these views does not represent any particular material.

Claims

The ornamental design for a roller shaft for substrate cleaning, as shown and described.

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Patent History
Patent number: D735430
Type: Grant
Filed: Mar 21, 2014
Date of Patent: Jul 28, 2015
Assignee: EBARA CORPORATION (Tokyo)
Inventors: Mitsuru Miyazaki (Tokyo), Takuya Inoue (Tokyo)
Primary Examiner: Sandra Morris
Application Number: 29/485,711
Classifications
Current U.S. Class: Element Or Attachment (D32/25)