Rotary tool for boat of semiconductor manufacturing apparatus

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Description

FIG. 1 is a perspective view of a rotary tool for boat of semiconductor manufacturing apparatus showing my new design;

FIG. 2 is a front elevational view thereof;

FIG. 3 is a rear elevational view thereof;

FIG. 4 is a left side elevational view thereof;

FIG. 5 is a right side elevational view thereof;

FIG. 6 is a top plan view thereof;

FIG. 7 is a bottom plan view thereof; and,

FIG. 8 is a cross-sectional view taken along line 8-8 in FIG. 6 thereof.

Claims

We claim the ornamental design for a rotary tool for boat of semiconductor manufacturing apparatus, as shown (and described).

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Patent History
Patent number: D803908
Type: Grant
Filed: Jul 28, 2016
Date of Patent: Nov 28, 2017
Assignee: HITACHI KOKUSAI ELECTRIC INC. (Tokyo)
Inventors: Takatomo Yamaguchi (Toyama), Takashi Nogami (Toyama)
Primary Examiner: Melanie H Tung
Assistant Examiner: Fritzgerald Butac
Application Number: 29/572,546
Classifications