Roller shaft for substrate cleaning
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The internal material revealed by the cross-sectional slice, illustrated in
The particular cross-hatching patterns in
The broken lines in the drawings illustrate portions of the roller shaft for substrate cleaning which form no part of the claimed design.
Claims
The ornamental design for a roller shaft for substrate cleaning, as shown and described.
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Type: Grant
Filed: Jul 18, 2013
Date of Patent: Jul 28, 2015
Assignee: EBARA CORPORATION (Tokyo)
Inventors: Tomoatsu Ishibashi (Tokyo), Hiroshi Kojima (Tokyo)
Primary Examiner: George D Kirschbaum
Assistant Examiner: Natasha Vujcic
Application Number: 29/461,044