Rotary tool for boat of semiconductor manufacturing apparatus
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Description
Claims
I claim the ornamental design for a rotary tool for boat of semiconductor manufacturing apparatus, as shown and described.
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Patent History
Patent number: D884757
Type: Grant
Filed: Jan 17, 2018
Date of Patent: May 19, 2020
Assignee: KOKUSAI ELECTRIC CORPORATION (Tokyo)
Inventor: Satoshi Fujii (Toyama)
Primary Examiner: Nathaniel D. Buckner
Application Number: 29/633,904
Type: Grant
Filed: Jan 17, 2018
Date of Patent: May 19, 2020
Assignee: KOKUSAI ELECTRIC CORPORATION (Tokyo)
Inventor: Satoshi Fujii (Toyama)
Primary Examiner: Nathaniel D. Buckner
Application Number: 29/633,904
Classifications