Rotary tool for boat of semiconductor manufacturing apparatus
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Description
Claims
The ornamental design for a rotary tool for boat of semiconductor manufacturing apparatus, as shown and described.
Referenced Cited
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Patent History
Patent number: D871466
Type: Grant
Filed: Jan 17, 2018
Date of Patent: Dec 31, 2019
Assignee: KOKUSAI ELECTRIC CORPORATION (Tokyo)
Inventors: Hiromi Okada (Toyama), Yoshikazu Takashima (Toyama)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/633,932
Type: Grant
Filed: Jan 17, 2018
Date of Patent: Dec 31, 2019
Assignee: KOKUSAI ELECTRIC CORPORATION (Tokyo)
Inventors: Hiromi Okada (Toyama), Yoshikazu Takashima (Toyama)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/633,932
Classifications