Composite seal member for semiconductor production apparatus
Latest Valqua, Ltd. Patents:
1. Composite seal member for semiconductor production apparatus
The present article is a composite seal member for semiconductor production apparatuses, such as chemical vapor deposition apparatuses and dry etching apparatuses; as illustrated in the reproduction
The broken lines shown in Reproduction
Claims
The ornamental design for a composite seal member for semiconductor production apparatus, as shown and described.
2622905 | December 1952 | Heinrich |
3990711 | November 9, 1976 | Hill |
4421330 | December 20, 1983 | Burke |
4466624 | August 21, 1984 | Panigati |
4582366 | April 15, 1986 | Burfield |
D289078 | March 31, 1987 | Vassallo |
5261677 | November 16, 1993 | Gotoh |
D379493 | May 27, 1997 | Woods |
D498826 | November 23, 2004 | Takahiro |
D646764 | October 11, 2011 | Rusconi |
D696751 | December 31, 2013 | Beagen, Jr. |
D728182 | April 28, 2015 | Cook |
D728757 | May 5, 2015 | Graham |
D796012 | August 29, 2017 | Hagano |
D818089 | May 15, 2018 | Kim |
D821552 | June 26, 2018 | Nakagawa |
D822181 | July 3, 2018 | Nakagawa |
D846095 | April 16, 2019 | Copeland |
D846096 | April 16, 2019 | Copeland |
D846097 | April 16, 2019 | Copeland |
D846098 | April 16, 2019 | Copeland |
D852335 | June 25, 2019 | Copeland |
D852935 | July 2, 2019 | Copeland |
D857859 | August 27, 2019 | Copeland |
20150362075 | December 17, 2015 | Kubota |
D1612684 | September 2017 | JP |
D1589474 | October 2017 | JP |
D150427 | November 2012 | TW |
D163769 | October 2014 | TW |
D183446 | June 2017 | TW |
Type: Grant
Filed: Aug 3, 2018
Date of Patent: Sep 1, 2020
Assignee: Valqua, Ltd. (Tokyo)
Inventors: Michi Kuroda (Gojo), Sangho Kim (Gojo)
Primary Examiner: Michael A. Pratt
Application Number: 35/506,451