Abstract: A hopper car is provided having a plurality of discharge gates on the bottom side of the car to allow material to be discharged from within the car. The hopper car has a pair of trucks attached to its bottom side and with each truck positioned adjacent one of the opposing end walls. One of the discharge gates is provided on the bottom of the car between the trucks for dispensing material between the trucks. Another of the discharge gates is provided between at least one of the end walls and its adjacent truck for dispensing material between the truck and the sidewall.

Abstract: In a railway car body formed of hollow shape members 40, a hollow shape member 51 having a shock absorbing function is provided to the ends of a hollow shape member 40 constituting an underframe 30, where impact load is most likely to be received. The hollow shape member 40 is positioned so that the longitudinal direction thereof is arranged along the longitudinal direction of the car body. When impact load is received, the hollow shape member 51 formed at the ends of the member 40 deforms and collapses, thereby relieving the impact force. The present invention simply provides treatment to some areas of the hollow shape members that form the car body without changing the conventional railway car structure greatly, thus minimizing the impact load provided to the passengers upon collision, and improves the safety of the railway car.

Abstract: A roof assembly mounted on a composite box structure with an air plenum assembly attached to and extending from an interior surface of the roof assembly. The composite box structure includes a pair of end wall assemblies, a pair of side wall assemblies, a floor assembly and the roof assembly. An opening may be formed in one end of the end wall assemblies to allow installing a temperature control system. An airflow management system may be incorporated into the composite box structure. The composite box structure may be assembled on a railway car underframe to form a temperature controlled railway car or an insulated box car.

Abstract: An ink jet printing method, comprising the steps of:

Abstract: An ink jet ink composition comprising water, a humectant, a polyvalent transition metal complex of an 8-heterocyclylazo-5-hydroxy-quinoline and an anti-kogation material comprising an alkali metal salt of a monobasic organic or inorganic acid. Examples of anti-kogation materials useful in the invention include sodium hexanoate, sodium sulfate, sodium propionate, sodium benzoate, sodium p-toluenesulfonate, sodium acetate, sodium bromide, sodium nitrate, potassium nitrate, lithium nitrate, lithium acetate, tetramethylammonium acetate and tetrabutylammonium bromide.

Abstract: An ink for ink-jet comprising: a water-soluble dye; a compound represented by the following formula (1): 1

Abstract: An ink composition is provided which can realize good images on plain paper, and, especially when used in an ink jet recording method, can have excellent ejection stability, storage stability, color development, and fixation and is much less likely to cause color bleeding and uneven printing and thus can realize good image quality.

Abstract: Micaceous glass-ceramics are useful in the fabrication of single and multi-unit dental restorations including but not limited to orthodontic appliances, bridges, space maintainers, tooth replacement appliances, splints, crowns, partial crowns, dentures, posts, teeth, jackets, inlays, onlays, facing, veneers, facets, implants, abutments, cylinders, and connectors by machining the glass-ceramic using CAM/CAM devices. The micaceous glass-ceramics are provided in a plurality of shades and colors to adequately match the colors and shades of teeth found in 95% or more of the human population.

Abstract: A mold releasing agent suitable for easily casting a cylindrical cast member which is superior in adhesion on cast parts at low cost, is provided. A mold releasing agent for a centrifugal casting mold comprises a binder, a heat insulating agent, and a foaming component having a foaming property, is dissolved in a solvent so as to form a slurry having a specific viscosity, and a mold releasing agent layer having crater shaped concave portions is formed by coating on the inside of an integral centrifugal casting mold.

Abstract: The preparation of concentrated solutions of oxime metal extractants, such as aldoximes and ketoximes, or mixtures of aldoxime and ketoxime, and the use thereof in formulating or preparing extraction reagent compositions for use in an extractant organic phase in a process of extracting metals from aqueous solutions containing metal values; and in particular, to concentrates which are solutions of individual ketoxime or aldoxime or mixtures of water-insoluble hydroxy aldoximes and ketoximes, in varying ratios by weight of 1:100 aldoxime to ketoxime, or conversely, 100:1 ketoxime to aldoxime, in water-immiscible hydrocarbon solvents or equilibrium modifiers. The invention also provides for maintaining stability of concentrates determined by accelerating rate calorimetry to define the ranges of oxime concentration and volume whereby the concentrate will be a stable, flowable, pourable and pumpable concentrate which can be safely stored long term.

Abstract: Dry mixes for hydraulic cement coatings for masonry, plastic insulating and dry wall substrates includes selective mineral aggregates, water reducer, and fine ceramic fibers, in various proportions for the different substrates. The ceramic fibers expand in the water of the applied coating and are trapped within the small recesses in the substrates. The ceramic fibers include different micron sizes in the range of 20 to 40 for masonry about 120 microns for plastic insulating substrates particularly foam plastic substrates. The fibers expand in the wet coating applied to substrates and remain in that state to bond to the substrates.

Abstract: The present invention relates to a pigment preparation comprising BiOCl pigments, one or more luster pigments and spherical particles, and to the use thereof in printing inks, security printing inks, surface coatings, paints, plastics and in cosmetic formulations.

Abstract: Natural fiber-containing cement compositions for cementing wellbores in high stress and high temperature environments. The cement compositions may contain natural mineral fiber materials such as wollastonite in an amount of greater than about 10% and in an amount selected to be effective to achieve ratios of flexural strength to compressive strength of cured cement that are greater than about 0.35 at downhole temperatures of greater than about 180° F.

Abstract: A settable composition suitable for coating surfaces eg walls of a mine comprises (i) a cementitious composition comprising the following components:(a) at least 25% preferably at least 40% of a reactive cement having a C to A or (A+X) ratio of greater than 1:1 preferably greater than 1.2:1 where X is S* or S or F (b) from 0 to 10% of lime and (c) from 5 to 70% preferably 10 to 40% of calcium sulphate, and where the sum of (b) and (c) is at least 15% the % being by weight based on the combined weight of (a), (b) and (c) and where the proportions of the components are such that the composition on hydration is capable of absorbing at least its own weight of water and (ii) an aqueous emulsion of an organic polymer, the amount of (ii) in relation to (i) being such as to provide a weight ratio of polymer solids to combined weight of (a), (b)) and (c) of from 0.5:1 to 10:1, preferably 0.

Abstract: A decorative aggregate-containing cementitious slurry having decorative aggregate and cementitious matrix composition forms a monolithic structure when effectively applied to a freshly poured cementitious base and simultaneously cured therewith. The slurry and the base are cured for a time sufficient for producing the monolithic structure with a decorative aggregate-containing cementitious surface. The slurry produces a decorative aggregate-containing cementitious layer having a cured thickness effective for permanently securing the decorative aggregate therein with a portion of the decorative aggregate exposed. Various decorative surfaces are produced without requiring expensive hand broadcasting of the decorative aggregate, and without expensive surface grinding. Dry components of the slurry are decorative aggregate and decorative cementitious matrix blend.

Abstract: On object of the present invention is an agent for the reduction of the degree of shrinkage in hydraulic binders, whereby said comprises an alkanolamine of formula R—NH—(AOH) wherein R is hydrogen or a linear or branched aliphatic or cyclic C1-C6-alkyl group, and A is a C2H4-group or C3H6-group, alone or in combination with hydroxy compounds and/or ethers. Furthermore a method for the reduction of the dry shrinkage of binders such as cement, admixed cement, puzzolanas and thereof produced mortars and concretes by means of such a shrinkage reducing agent is described.

Abstract: The invention relates to a turntable (1) for a disc-shaped information carrier (2), such as a DVD, having a central round opening (21). The turntable comprises a centering element (3, 4), which is rotatable about an axis of rotation (7) by means of a driving element. The centering element (3, 4) comprises a fixed centering member (3) having a supporting surface (8) for the information carrier, and a further centering member (4) for final centering of the information carrier, said further centering member being movable in axial direction along the axis of rotation between an upper position, in which the centering member is unloaded, and a lower position, in which the centering member is loaded. An end-centering portion (32) of the movable centering member has the shape of a first truncated cone, which is directed upwards and which has a first apex angle.

Abstract: The present invention discloses a shelf adapter for attachment to a conventional towel rack for use in a bathroom, shower stall, or the like. The present invention comprises a pair of parallel generally horizontal members having a female and male telescoping attachment means mounted onto a pair of leg-like mounts which are fastened around the towel rack so as to be removably, fixedly attached to the towel rack. The purpose of the telescoping members is to allow the shelf to be removably, fixedly attached to towels racks of various sizes wherein the telescoping members can be adjusted to fit towel racks of varying lengths. Furthermore, the parallel members have indentions or cutouts disposed therein which form semi-circular cutouts for receiving bottles or bottle necks of various bottled bath condiments which the user might use. The bottles are mounted upside down into the semi-circular cutouts in order to always have the liquid contained in the bottle disposed near the outlet end of the bottle.

Abstract: In a process for making a table panel, a looped peripheral frame confining a through-hole is formed in a first mold. The peripheral frame is placed in a second mold, and a bottom plate is formed in the through-hole such that a lateral end of the bottom plate extends along and is connected intimately to an inner wall of the peripheral frame. The peripheral frame and the bottom plate are placed in a third mold, and a transparent top plate is formed on the bottom plate in the through-hole. The top plate has a lateral end connected intimately to the inner wall of the peripheral frame.

Abstract: The invention provides a furnace having a frozen lining inbetween a furnace lining and a furnace charge, the furnace having means to control the operation of the furnace, including means to measure the temperature in a wall of the furnace adjacent the frozen lining, and to estimate the thickness of the frozen lining as a function of the temperature in the wall, and means to control the rate of heat production in the furnace to urge a thickness of the frozen lining towards a predetermined value. Variables including side wall thermocouple measurements, gas plant instrument measurements, cooling system measurements and electrical, in-feed and chemical composition recordings are monitored, analysed and manipulated. There is also provided means to estimate a future furnace charge composition, perform chemistry control, estimate a material balance of the furnace, and perform inventory control over the furnace.

Abstract: With the present invention, sand storm disasters will no longer occur in Beijin and the Hubui province in China and the water of the Yellow River will be clear; soil erosion due to flood in the United States and Europe will decrease. The invention utilizes the sand, soil and gravel of the earth to cure its illness. Such normally useless natural materials are filled in plastic bags to form flexible soft sand bricks, and they are laid on the ground to stabilize sand for growing vegetation or to prevent soil depletion due to water erosion. With the present method, sand and soil are stabilized to the condition similar to that grass has already grown on them for five years and trees have already grown in them for ten years. It can thus be used surely for carrying out forestation all over the world; forestation may even be carried out in barren area in the United States so as to have rich forests throughout the country; and the area around the Wufoo water dam will recover to its past beauty.

Abstract: An apparatus for inserting through a mattress tufting straps having a frame for locking said mattress, a device for inserting the tufting straps through the mattress, supported by the frame, and actuators for actuating the device to move above the mattress. The inserting device includes a magazine for tufting straps, a needle with a tip receptacle for receiving and transferring a clip through the mattress, a transfer element, with a seat for receiving the clip, and a pusher, movable transversely to the needle for engaging the clip and inserting the clip in the tip receptacle.

Abstract: A two-needle overlock sewing machine comprises a throat plate and a middle tongue. The throat plate has an opening needle hole and an outer tongue. The middle tongue is disposed parallel to the outer tongue, a thread chain is formed so as to envelop both tongues. The presser foot is disposed so as to press the cloth to the throat plate by a spring. A push-up lever lifts up the presser foot by handling. The push-up lever and the middle tongue are coupled together by a transmission mechanism. By raising the presser foot by manipulation of the push-up lever at the finish of sewing operation, the middle tongue draws back simultaneously and retreats from the needle hole. As a result, the manipulation for drawing back the middle tongue during the process of thread chain handling is not needed, and the operation is simplified.

Abstract: A device to introduce the upper thread into the eye of the needle (7) of a sewing machine which includes two guide clips (49, 51) having two inlet sections (53, 55) ending in a narrow point. The two guide clips (49, 51) are generally identical and can spread evenly when encountering the needle. The grasping hook (57) that lies in a plane in the center of the two guide clips (49, 51) is always guided exactly centered into the eye (25) of the needle (7). In addition, the two guide clips (49, 51) are mounted for tilting movement about a horizontal axis (B).

Abstract: An improved structure high speed zigzag stitch industrial-use sewing machine in which a vertically extending columnar elevated material feed needle plate platform (Post Bed) structure is disposed below the needle holder of the sewing machine. The drive mechanism of the revolving shuttle and the material feed dog plate are situated in the interior section of the elevated material feed needle plate platform, with changes in the type of stitches sewn by the sewing machine governed by a pattern cam. As such, the elevated material feed needle plate platform (Post Bed) structure provides for wider applications than conventional level platform-type material feed needle plates which are incapable of easily sewing across concave, convex, and other irregular contours of objects being processed.

Abstract: A method of stitching one work piece to another or for stitching a decorative stitch line along a work piece. In one embodiment the method includes providing a first work piece having a first edge along which a stitch is to be made and providing a template having an edge that corresponds generally to at least a portion the first edge of the first work piece. The template is made from a material having a color selected to contrast with a color of the first work piece. The first work piece is then placed against the template so that the work piece's first edge abuts at least a portion of the edge of the template. Next, a computer-controlled sewing machine that has a machine-vision capability is used to stitch along a path that corresponds generally to a boundary between the first edge of the first work piece and the edge of the template. If necessary or appropriate, the computer-controlled sewing machine can adjust its stitching path in response to detecting the template.

Abstract: A torpedo comprises an outer cylindrical casing, an inner narrowing casing forming a passage and having an inlet and an outlet coinciding with the outer casing, a rocket engine having an annular exhaust nozzle directed into the rear portion of the passage, perforations in the inner and the outer casings and canals communicating the nozzle with the spaces adjoining perforations.

Abstract: A personal watercraft (PWC) is provided with a hull having an inner surface. An engine and jet propulsion unit are mounted to the hull and constructed and arranged to propel the PWC. A starboard support post extends generally upwardly from a starboard side of the inner surface of the hull and provides a starboard deck supporting surface. A port support post extends generally upwardly from a port side of the inner surface of the hull and provides a port deck supporting surface. A deck, which is constructed and arranged to support a rider in an operative riding position thereon, is mounted atop the hull with port and starboard supported portions of the deck engaging the port and starboard deck supporting surfaces, respectively, such that at least a portion of a weight of the rider is transferred to and borne by the deck supporting posts.

Abstract: V-shaped bottom (94) for fast motorboats (90) that presents a number of longitudinal means substantially parallel and symmetrical to the keel having walls that react to the lateral thrust from the water-air mixture, formed either of grooves (15, 18, 91, 92) or of ribs, their sides being widely curved at the junction respectively with the base of the grooves (15, 18, 91, 92) and with the surface of the bottom (94) of the boat.

Abstract: There is disclosed an improved sub-aqua device suitable for towing a person through the water. Specifically there is disclosed a sub-aqua device including: a support member; a pair of manoeuvring planes for manoeuvring the device, each defining an elevation plane; and a means for controlling each manoeuvring plane including a handle, each handle extending in a plane coincident with the respective elevation plane.

Abstract: A low centroid canoe seat support is provided which is mountable to a canoe and that receives a boat seat having standard three-quarter inch post pin. As the support is compatible with standard post boat seats, the apparatus allows the rider to customize the canoe to meet his or her individual comfort and mobility needs without increasing the likelihood of a capsizing event. The low centroid canoe seat support comprises a support, a standard post receiver, a stiffener plate, and a mounting means.

Abstract: A device for monitoring gear lever position consists of one internal tube, one external tube, one adjust handle, one transpicuous cover and one flexible piece. The said internal tube comprises of one ring-shape outer rim, one slot formed on the said outer rim of suitable position and one hollow and axial sheath, further, a suitable position of the said slot is installed a window. A convex fish-shaped lens is designed on an imagine line which from rider's eyes to position ring, the imagine line is not perpendicular to the axial sheath. Via the design of the convex fish-shaped lens, the position symbols are enlarged. The window only shows single position symbol in use for not confusing with other symbols. Thus, rider easily monitors and knows the actual gear level position.

Abstract: A portable barricade for use in separating aircraft and ground vehicles comprises a sign panel hanging from a horizontally extending frame member, the frame member and sign panel being supported by first and second pairs of expandable legs. The first and second pairs of legs are supported by two cross braces, the first having a tubular configuration and the second having a planar configuration. The barricade is positioned having its tubular cross brace adjacent the aircraft traffic and the planar cross brace adjacent the ground vehicle traffic. Air flow or exhaust generated by aircraft exert a greater force on the planar cross brace than on the tubular cross brace, tending to maintain the barricade with its legs in an expanded, operational position.

Abstract: One embodiment of a process that forms low resistivity III-V nitride (e.g., GaN) p-type layers removes all sources of hydrogen (typically NH3) in the epitaxial growth chamber during the post growth cool-down process. By eliminating sources of hydrogen during the cool-down process, any additional passivation of the acceptor impurities (e.g., Mg) by hydrogen atoms during cool-down is avoided. After the cool-down process, the wafer is annealed at a relatively low temperature (e.g., below 625° C.) to remove nearly all of the hydrogen from the Mg-doped layers. The anneal can take place at a low temperature since the diffusivity of H in the p-type GaN layers is much higher than in i-type GaN layers. If the p-type layers are used in an LED, since the low temperature anneal does not degrade the GaN layers' crystallinity, the intensity of the LED's emitted light is not decreased by the anneal process.

Abstract: There is provided a novel manufacturing process for an epitaxial wafer having an IG ability, wherein heat treatment is applied at a temperature in a range of from 450° C. to 750° C. to an epitaxial wafer in which oxygen precipitation nuclei are reduced in an epitaxial growth step so as to form new oxygen precipitation nuclei therein, and oxygen precipitation proceeds in a device fabrication process subsequent to the heat treatment, especially oxide precipitates being effectively increased even when a wafer with a comparatively low oxygen concentration is used as a silicon substrate. A heat treatment at a temperature in a range of from 450° C. to 750° C. is applied to a silicon epitaxial wafer obtained by forming an epitaxial layer on a silicon substrate with an interstitial oxygen concentration in a range of from 4×1017/cm3 to 10×1017/cm3 at a temperature of 1000° C. or higher.

Abstract: The present invention provides a silicon wafer sliced from a silicon single crystal ingot grown by the Czochralski method under such conditions that V-rich region should become dominant, wherein count number of particles having a size of 0.1 &mgr;m or more is 1 count/cm2 or less when particles are counted by using a particle counter and a method for producing a silicon single crystal. Thus, there is provided a production technique that can improve productivity and reduce cost for high quality silicon wafers of excellent device characteristics by further reducing density and size of defects such as COP.

Abstract: In the method and apparatus for measuring the position of the phase interface during growth of a crystal from a melt in a crystal growth container according to the VGF method an incident optical signal is propagated to the phase interface between the melt and the crystal through a window (16) in the container (10) and a received optical signal reflected from the phase interface (14) is measured to determine the position of the phase interface. The position of the phase interface is established from the reflected signal by triangulation with a confocal optic system, by interferometric balancing or by transit time of the optical signal. The window (16) is preferably mounted in a preferably tilted orientation at the end of a tube (15), which is immersed in the melt (12).

Abstract: In a method manufacturing a silicon single crystal 8 according to an MCZ method, a flow rate of an inert gas flowing in a growth furnace 1 during growth of the silicon single crystal 8 and/or a pressure in the growth furnace 1 is altered according to a pulling amount of the silicon single crystal 8 to adjust an interstitial oxygen concentration therein. By altering a flow rate of an inert gas flowing in the growth furnace or a pressure therein, an amount of oxygen evaporating as an oxide from a surface of a silicon melt 10 in the vicinity of a crystal growth interface can be easily adjusted, and thereby, an oxygen amount included in the silicon melt 10 can be controlled with ease.

Abstract: A polycrystalline thin film of MgO is formed on a substrate by an ion sputtering process wherein the thin film is obtained by irradiating a target with an ion beam to dislodge particles from the target and deposit the particles on the substrate. The film is preferably formed in an atmosphere at a reduced pressure of 3.0×10−2 Pa or lower while keeping the substrate temperature at 300° C. or lower.

Abstract: The present invention provides a catch pan for melt leakage provided under a crucible at a bottom portion of a chamber in a single crystal pulling apparatus based on the CZ method, wherein the catch pan for melt leakage comprises at least a bottom portion and a barrel portion, and the bottom portion and the barrel portion are connected by screw-fitting or by using a tap bolt. There is provided a catch pan for melt leakage provided in a single crystal pulling apparatus, which can, even if a melt flows out of the crucible by a certain possible cause in a CZ method single crystal pulling apparatus, prevent the melt flowed out from reaching lower mechanisms including metal parts, piping and so forth, and thereby prevent bad influences on operators and peripheral equipments.

Abstract: An apparatus and method for applying at least one solution of a predetermined viscosity to photosensitive material. The apparatus includes at least an application roller that applies the coating solution onto the photosensitive material. The application roller partially extends into a solution tray of the coating apparatus and is partially submerged in solution in the solution tray. In an arrangement of the present invention, a cascade wall and metering blade are positioned within the solution tray so as to define a first section at which solution enters the tray, and a second section which receives solution that spills over from the first section and includes a port which leads coating solution back to a coating solution tank for recycling or leads cleaning solution to drain. The apparatus further includes a washing arrangement that washes the coating apparatus in an efficient manner.

Abstract: A powder coating material spray booth, one or more powder spray devices position to spray articles passing through the booth with powder coating material, a powder recovery module comprising a separator for separating powder coating material from air, a source of suction for drawing over sprayed powder coating material from inside the booth, an exhaust duct connected to the powder recovery module and communicating with the suction source, said suction source being operable to draw airborne over sprayed powder coating material out of the booth through the exhaust duct and into the powder recovery module, at least a portion of the exhaust duct being [contained] accessible from within the booth, said portion including a cover section which forms a part of said exhaust duct, said cover section being [removable] movable to allow over sprayed powder coating material to be removed from inside said exhaust duct during a color change operation.

Abstract: A coating system includes a source of electrically non-insulative coating material, a dispenser for dispensing the coating material toward an article to be coated thereby, and an electrostatic high potential supply for supplying charge to the coating material. The high potential supply is coupled across the dispenser and the article The coating system further includes a reservoir, a valve having a housing providing first, second, third and fourth ports, and a component movable within the housing and having a first passageway selectively to connect the first port to the second port to permit the flow of coating material between the first port and the second port The first port is coupled to the coating material source. The second port is coupled to the reservoir. The third port is coupled to the dispenser The component is movable within the housing selectively to connect the second port to the third port to permit the flow of coating material between the reservoir and the dispenser.

Abstract: In an apparatus (S) for coating bottles (F), comprising a coating station (A) which contains at least one section of a conveyor track (G) for bottle conveying bodies (T), comprising a bottle holder (H) in each conveying body (T), comprising covering elements (E) which are associated with the conveying bodies and which can be moved between passive and covering positions, and comprising a bottle detector (P) which cooperates with a covering element displacement apparatus (V), the covering elements (E) are disposed directly on the conveying bodies (T) and are aligned towards the bottle holders (H).

Abstract: There is provided a method for feeding a corrosion inhibitor, that is capable of feeding a corrosion inhibitor necessary for preventing corrosion on steam lines and/or condensate lines without wasting any part thereof and is free from causing trouble of water level control. The method consists of the step of feeding a corrosion inhibitor to a steam line 3 or a condensate line 5 in a boiler system having the condensate line 5.

Abstract: A plasma processing apparatus has a plasma processing chamber having a plasma excitation electrode, a radiofrequency generator connected to the plasma excitation electrode, and a matching circuit for matching the impedance between the plasma processing chamber and the radiofrequency generator. The loss capacitance CX1 at a later time t1 after delivery is measured between the plasma excitation electrode and ground potential positions which are grounded. The performance is evaluated by whether or not the loss capacitance CX1 is less than 26 times the plasma electrode capacitance Ce1 at the later time t1 between the plasma excitation electrode and a counter electrode which cooperate with each other.

Abstract: A vacuum arc vapor deposition apparatus includes a plurality of magnetic coils for guiding a plasma produced by a vacuum arc evaporating source to the vicinity of a substrate in a film forming chamber by use of a deflection magnetic field. The vacuum arc vapor deposition apparatus further includes a coil power source for reversing a coil current to be fed to the magnetic coils, and a control unit for controlling the coil power source to reverse the flowing direction of the coil current.

Abstract: In a method for forming a Cu thin film on a substrate including a Cu-CVD step of forming a first copper film on predetermined surface of a substrate by a CVD process and a plating step of further forming a second copper film on the first copper film by an electrolytic copper plating process using the first copper film as an electrode, a modifying step for modifying the first copper film by exposing it in an active atmosphere is interposed between the Cu-CVD step and the plating step. Thereby, fine voids can be effectively prevented from being formed in the vicinity of the interface between the first copper film and the second copper film.

Abstract: The present invention relates to improved methods and apparatus for atomic layer deposition (ALD) of thin films on substrates such as wafers and flat panel displays. The invention provides an ALD reactor comprising a first temperature regulating system to control the temperature of the substrate and a second temperature regulating system to independently control the temperature of the reaction chamber walls. The invention also provides a method for ALD of a film onto a substrate in a reaction chamber, in which the temperature of the substrate is maintained to maximize ALD on the substrate while the temperature of the reaction chamber walls is set to minimize film growth thereon, whether by ALD, condensation, physisorption or thermal decomposition. The temperature of the walls may be maintained at the same temperature as the substrate, or higher or lower than the substrate temperature, depending upon the particular reaction being used.

Abstract: The present invention discloses a vacuum evaporation apparatus comprising a vacuum pump, an evaporation chamber and a power supply. The evaporation chamber comprises a substrate, an evaporation source and an evaporation mask. The evaporation mask exhibits a coefficient of thermal expansion substantially equal to the substrate, and the evaporation mask has a pattern of metal tracks. Thus, the apparatus of the present invention also can be applied to form solder bumps on a large sized silicon wafer. Moreover, the position pattern of the mask is formed by an anisotropic etching process; the diameter of the pattern will not be influenced by the thickness of the mask. Therefore, the tendency of the solder bumps with the smaller size and the pitch are met.