Abstract: In a method for manufacturing a semiconductor device having a first insulation film, a second insulation film formed over the first insulation film, an inlaid interconnection formed in the second insulation film, and an organic film provided on the inlaid interconnection layer and the second insulation film, the organic film having a dielectric constant lower than the second insulation film, the organic film is grown inside a vacuum chamber.

Abstract: A method is provided for processing a substrate including removing amorphous carbon material disposed on a low k dielectric material with minimal or reduced defect formation and minimal dielectric constant change of the low k dielectric material. In one aspect, the invention provides a method for processing a substrate including depositing at least one dielectric layer on a substrate surface, wherein the dielectric layer comprises silicon, oxygen, and carbon and has a dielectric constant of about 3 or less, forming amorphous carbon material on the at least one dielectric layer, and removing the one or more amorphous carbon layers by exposing the one or more amorphous carbon layers to a plasma of a hydrogen-containing gas.

Abstract: A method for fabricating a thermally stable ultralow dielectric constant film comprising Si, C, O and H atoms in a parallel plate chemical vapor deposition process utilizing plasma enhanced chemical vapor deposition (“PECVD”) process is disclosed. Electronic devices containing insulating layers of thermally stable ultralow dielectric constant materials that are prepared by the method are further disclosed. To enable the fabrication of thermally stable ultralow dielectric constant film, specific precursor materials are used, such as, cyclic siloxanes and organic molecules containing ring structures, for instance, tetramethylcyclotetrasiloxane and cyclopentene oxide.

Abstract: A new method is provided of measuring actual temperatures across the surface of a semiconductor wafer. The thickness of a layer of Sub-Atmospheric TEOS Undoped Silicon Glass (SAUSG) is used to monitor the temperature distribution across the surface of a silicon substrate.

Abstract: An improved process for depositing a robust fluorosilicate glass film on a substrate in a chamber includes maintaining a total pressure in the chamber of less than about 1.7 torr, introducing vapor phase chemicals such as N2, SiF4, SiH4, and N2O into the chamber, and reacting the vapor-phase chemicals with sufficiently supplied energy to deposit a thin film layer of the fluorosilicate glass on the substrate. Advantageously, the deposited fluorosilicate glass films are chemically, mechanically, and thermally stable without additional processing. Also advantageously, the films are deposited uniformly at rates greater than about 5000 Angstroms per minute with dielectric constants of about 3.4 to about 3.9.

Abstract: A method of decreasing the growth rate of silicon dioxide films on a silicon nitride pad on a silicon wafer wherein the decrease in growth rate of the silicon dioxide results in a self-planarized film on the wafer is provided. Also provided is a method of pretreating said silicon wafer wherein said wafer is contacted with a chemical, such as hydrogen peroxide, isopropyl alcohol or acetone and air-dried prior to silicon dioxide deposition. Additionally, selective oxidation sub-atmospheric chemical vapor deposition (SELOX SACVD) uses an ozone-activated tetraethylorthosilicate process to deposit said silicon dioxide on said wafer.

Abstract: An improved fabric for use in applications such as furniture upholstery is provided which possesses desirable flexibility, cleanability, and fluid resistant properties. The fabric includes a textile substrate treated with a fluorochemical stain resist agent. The treated textile substrate is covered substantially on the back with a layer of extrusion coated thermoplastic polymer which is pressed at least partially into the fabric substrate. A process for forming the fluid shield fabric according to the present invention is also provided. Preferably, the fabric is comprised of solution dyed nylon and the polymeric material is ethylene methyl acrylate polymer.

Abstract: A bicomponent elastic fiber that includes a core formed of an elastic fiber and having a sheath formed of a non-elastic material surrounding the core. The sheath has at least one cut therein extending at an angle to the length of the fiber to expose and release the elasticity of the core elastic fiber. This provides elasticity to the bicomponent elastic fiber.

Abstract: A synthetic quartz glass member having (i) a change of transmittance at 193 nm of up to 0.002 cm−1 as expressed in extinction coefficient when 4×104 shots of ArF excimer laser light are irradiated at 2 mJ/cm2/pulse, (ii) an initial transmittance of at least 99.6% at 193 nm, (iii) a hydrogen molecule content of at least 5×1017 molecules/cm3, (iv) a refractive index amplitude of up to 1×10−6, and (v) a birefringence of up to 1 nm/cm finds use in an excimer laser because it experiences a minimized change of light transmittance.

Abstract: A silicon nitride sintered material includes a polycrystal material having silicon nitride crystal grains and a grain boundary phase. The sintered material contains a Yb element in an amount of 2 to 30% by weight in terms of its oxide and an Al element in an amount of 1 to 20% by weight in terms of its oxide and has a thermal conductivity of 40 W/mK or less at room temperature, a resistivity of 1×105 to 1×1012 &OHgr;·cm at room temperature, and a porosity of 0.5% or less.

Abstract: A ceramic comprising predominately a cordierite-type phase approximating the stoichiometry Mg2Al4Si5O18 and having a coefficient of thermal expansion (25-800° C.) of greater than 4×10−7/° C. and less than 13×10−7/° C. and a permeability and a pore size distribution which satisfy the relation 2.108 (permeability)+18.511 (total pore volume)+0.1863 (percentage of total pore volume comprised of pores between 4 and 40 micrometers)>24.6. The ceramic is suitable in the fabrication of cellular, wall-flow, diesel particulate filters having a pressure drop in kPa that at an artificial carbon soot loading of 5 grams/liter and a flow rate of 26 scfm is less than 8.9−0.035 (number of cells per square inch)+300 (cell wall thickness in inches), a bulk filter density of at least 0.60 g/cm3 and a volumetric heat capacity of at least 0.67 J cm−3 K−1 as measured at 500° C.

Abstract: A zeolite catalyst suitable for use in shape-selective hydrocarbon conversion processes. The catalyst is modified by incorporation therein of a hydrogenation-dehydrogenation functional metal, followed by gradient selectivation with an organosilicon compound under conversion conditions, wherein the gradient selectivation conditions are characterized by a progressive temperature gradient. The use of a progressive temperature gradient during the in situ selectivation procedure unexpectedly yields a catalyst in which the hydrogenation-dehydrogenation function is stabilized, thereby enabling long duration hydrocarbon conversion processes with low by-product make.

Abstract: An economical and environment-friendly processes for the synthesis of anionic clays and the products made therefrom. It involves reacting a slurry comprising non-peptized boehmite with a magnesium source. There is no necessity to wash or filter the product. It can be spray dried directly to form microspheres or can be extruded to form shaped bodies. The product can be combined with other ingredients in the manufacture of catalysts, absorbents, pharmaceuticals, cosmetics, detergents, and other commodity products that contain anionic clays.

Abstract: This description addresses ionic compositions of matter comprising positively charged cations [Ct]+ and negatively charged anions [A]−, said anion comprising a central core Group 13 element to which are bound fluoroaryl ligands, at least one of said fluoroaryl ligands being substituted with a siloxy group represented by the symbols—SiOR3, wherein R is a C1-C30 hydrocarbyl or hydrocarbylsilyl substituent. [Ct]+ may be. selected from any capable of use with olefin polymerization catalysts and typically will be from the group consisting of anilinium and ammonium cations, trityl carbenium cations, Group 11 metal cations, silylium cations, the cations of the hydrated salts of Group 1 or 2 metals, and derivatives of the foregoing anilinium, ammonium, trityl carbenium, and silylium cations containing C1-C20 hydrocarbyl, hydrocarbylsilyl, or hydrocarbylamine substituents for one or more hydrogen atoms of said cations.

Abstract: The invention relates to novel titanium/zirconium catalysts, and to a process for the preparation of these titanium/zirconium catalysts. The process comprises reacting orthoesters or condensed orthoesters of titanium and/or zirconium, with one or more polyalcohols. Suitable polyalcohols comprise those compounds having at least two hydroxyl groups and a number average molecular weight of at least 180 g/mol. The invention also relates to a process for preparing (poly)esters from these novel catalysts, which exhibit little discoloration and are suitable to be used as a reaction component in the preparation of polyurethane (PUR) foams.

Abstract: A polymerization catalyst system and process, which utilizes a Group 14 and Group 16 containing oil or amorphous solid to solubilize polymerization catalyst components including metallocenes and Group 15 containing polymerization catalysts, is disclosed.

Abstract: The present invention provides a process for preparing polyolefins having a multimodal or at least bimodal molecular weight distribution by contacting in a reaction mixture under polymeriation conditions at least one olefin and a catalyst system comprising a supported catalyst-component comprising an alumoxane and at least two metallocenes containing the same transition metal and selected from the group consisting of mono, di, and tri-cyclopentadienyls and substituted cyclopentadienyls of a transition metal and wherein at least one of the metallocenes is bridged and at least one of the metallocenes is unbridged.

Abstract: A process for preparing an 1,3-alkanediol through carbonylation of an epoxide derivative includes the steps of (a) reacting an epoxide derivative with alcohol and carbon monoxide in a solvent at a temperature from about 30 to about 150° C. and at a pressure from about 50 to about 3000 psig in the presence of a catalyst system including an effective amount of a cobalt catalyst and an effective amount of a promoter to afford a reaction mixture including a 3-hydroxyester or derivative thereof in an amount of from 2 to about 95% by weight, (b) separating the reaction product and solvent from the catalyst and promoter, (c) reacting said reaction product and solvent with hydrogen at a temperature from about 30 to about 350° C. and at a pressure from about 50 to about 5000 psig in the presence of a catalyst system for hydrogenation to prepare a hydrogenation product mixture including a 1,3-alkanediol, and (d) recovering the 1,3-alkanediol from the hydrogenation product mixture.

Abstract: Disclosed is a molecular sieve catalyst which contains molecular sieve-containing attrition particles and virgin molecular sieve, the attrition particles having been recycled from a catalyst manufacture process or from a reaction system. The catalyst can be used in a variety of catalytic reaction processes. A desired process is making olefins from an oxygenate feedstock. The recovery and use of the attrition particles in the catalyst is beneficial in minimizing waste, thereby reducing problems relating to both environmental and economic constraints.

Abstract: A silica-group composite oxide fiber formed of a composite oxide phase of an oxide phase (first phase) mainly made of a silica component and a metal oxide phase (second phase) excluding silica, in which the existent ratio of at least one metal element of a metal oxide constituting the second phase upward slopingly increases toward the surface layer of the fiber and a process for the production thereof.

Abstract: The invention provides a catalyst including a support, at least one noble metal from group VIII of the periodic table, silicon as a dopant, optionally boron, optionally at least one group VIB element, optionally phosphorous and optionally at least one halogen. The invention also provides a particular preparation of the catalyst. The invention also concerns the use of this catalyst in the hydrotreatment of hydrocarbon-containing feeds, more particularly its use for hydrogenating aromatic compounds in a gas oil cut.

Abstract: A new catalyst system is disclosed for the production of olefins through oxidative dehydrogenation of hydrocarbons. The catalyst system having the atomic ratios described by the empirical formula BiaNi Ob/Al2O3.

Abstract: A sulfur sorber for the reduction of gaseous sulfur compounds, e.g., H2S, in a gas stream The sulfur sorber, e.g., zinc oxide, is present in the form of one or more layers on the surface of a monolith carrier, e.g., cordierite. The layers have a total thickness of at least 3 g/in3 of the carrier. Preferably, the sorber is present in the form of at least three layers on the surface of the monolith carrier.

Abstract: A heat transfer sheet comprising a light-heat conversion layer having an infrared absorption colorant and an image forming layer sequentially disposed on a support, wherein an optical density in a 600 nm to 1000 nm range of the light-heat conversion layer is within a range of 0.3 to 2.0.

Abstract: This invention relates to a buffered phosphorus containing solution comprising at least one phosphorus compound selected from the group consisting of phosphorous acid, hypophosphorous acid, polyphosphorous acid polyhypophosphorous acid, and salts thereof. The solution also contains a buffer including an organic base in the form of a nitrogen containing compound and its conjugate acid. The solution may be used as a fertilizer or as a fungicide. The invention also relates to a method of preparing such a solution.

Abstract: A method of selectively controlling undesirable vegetation in crops by using a postemergent application of an herbicidally effective amount of a metal chelate of a 2-(substituted benzoyl)-1,3-cyclohexanedione compound to the locus of such undesirable vegetation.

Abstract: The invention relates to pyrazolyl derivatives of benzo-condensated, unsaturated 5-membered nitrogen heterocycles of the general formula (I), wherein X represents N or a group C—R3; Y is O, S, SO, SO2 or NR4 or X—Y is S═N, and wherein X means sulfur, and the variables R1, R2 and Pz have the meanings indicated in claim 1. The invention, further relates to a method of producing said compounds, to agents that contain them and to their use as herbicidal agents.

Abstract: The invention pertains to a method for manufacture and use of a herbicidal formulation containing the free acid form of glyphosate and an acid. Specifically, phosphoric, citric, acetic, propionic, and phosphorous acid and their corresponding salts have been useful in this application. The acid based formulations offer lower glyphosate use rates than standard formulations.

Abstract: Solid formulation of a crop protection product can be obtained by melt extrusion and shaping of a mixture consisting of: 0.1-80% by wt. of an active ingredient which can be used in crop protection, or of a combination of such active ingredients, 10-80% by wt. of at least one mineral filler, 0-20% by wt. of inorganic or organic additives, and to 100% by wt.

Abstract: The present invention relates to a method to produce suspension concentrates of pesticides, pharmaceuticals, biocides, and similar materials, using a melt emulsification process. The method is particularly applicable to pesticides which have a low water solubility. The particle size can be controlled to give particles from less than 5 microns (&mgr;) to less than 1&mgr;.

Abstract: The present invention relates to a lubricant for service-free cardan shafts comprising a base selected from the group consisting of a naphthenic solvent and a paraffinic solvent; a thickener selected from the group consisting of lithium salt, lithium soap, and amides of aromatic dicarboxylic acids; at least one flux oil; and an additive selected from the group consisting of molybdenum dithiocarbamate, zinc dithiocarbamate, bismuth dithiocarbamate, molybdenum dithiophosphate, zinc dithiophosphate, and bismuth dithiophosphate, in combination with thiadiazole.

Abstract: The invention concerns alkoxylated sulfur alcohol orthophosphate compositions. It also concerns a method for preparing said compositions by sulphurizing alcohol orthophosphate composition. It further concerns the use of said alkoxylated sulphur alcohol orthophosphate compositions as multifunctional additives in lubricating or detergent aqueous formulations.

Abstract: A lubricating oil composition is provided comprising a major amount of an oil of lubricating viscosity and a minor amount of, as an additive, at least one compound comprising a polynuclear molybdenum core and bonded thereto one or more anionic ligands capable of rendering the compound oil-soluble or oil-dispersible, wherein the ratio of the number of molybdenum atoms in the core to the number of said ligands is 1:1, such as 3:2 or greater.

Abstract: Fluorinated dialkyl dithiophosphoric acids according to formula (I) and metallic salts thereof: the compounds are useful, for example, as additives for lubricant compositions.

Abstract: The present invention provides a lubricant for magnetic recording medium which comprises, as an effective component, a phosphazene compound of formula [N═P[O(C6H4)—(A)z—R]a[OCH2—(B)xH]b]y  (1) wherein A is —C6H4— or —OC6H4—, B is fluorine-containing alkylene group, R is hydrogen atom, fluorine atom, C1-4 alkyl, C1-4 alkoxy or C1-4 haloalkyl, a and b are a real number of 0 to 2, satisfying a+b=2, x is 1, 2, 3 or 4, y is 3 or 4, and z is 0 or 1.

Abstract: A cleansing material comprising a sheet material impregnated with an emulsion having a viscosity of 200 to 4000 mPa·s at 25° C. and a viscosity of 100 to 2000 mPa·s at 50° C.

Abstract: Shaped soap product comprising talc, one or more fatty acids having 12-22 carbon atoms in the form of their alkali soaps and one or more nonionic surfactants with the simultaneous absence of alkyl (oligo)glycosides.

Abstract: A composition and method are provided for cleaning contaminants from the surface of a semiconductor wafer after the wafer has been chemically-mechanically polished. The cleaning composition comprises a carboxylic acid, an amine-containing compound, a phosphonic acid, and water. The cleaning composition is useful in removing abrasive remnants as well as metal contaminants from the surface of a semiconductor wafer following chemical-mechanical polishing.

Abstract: Engine cleaner compositions are reported comprising a single phase solution comprising a polar solvent having a Hildebrand solubility parameter of about 10 cal½ cm−3/2 or greater; a non-polar solvent, immiscible with the polar solvent, having a Hildebrand solubility parameter of about 10 cal½ cm−3/2 or less; and a fugitive cosolvent having a higher evaporation rate than the polar solvent and the non-polar solvent. The engine cleaner compositions are suitable for cleaning internal combustion engines.

Abstract: A color stable liquid dish cleaning composition with desirable cleansing and de-staining properties comprising a C8-18 ethoxylated alkyl ether sulfate, two anionic surfactant, a betaine surfactant, hydrogen peroxide, a colorant, a hydroxy containing organic acid, polyethylene glycol, peracetic acid and water.

Abstract: Speckled detergent compositions with colored glassy phosphates and conventional detergent ingredients.

Abstract: The present invention relates to a modified enzyme which comprises a catalytically active amino acid sequence of a cellulolytic enzyme linked to an amino acid sequence comprising a Cellulose Binding Domain (CBD) having a relative binding constant (Kr-a) for binding to amorphous cellulose higher than 2.4 l/gcellulose, preferably higher than 3.5 l/gcellulose, more preferably higher than 4 l/gcellulose, for selective binding and hydrolysis of amorphous cellulose of cotton containing fabrics in a laundry and/or fabric care application. The present invention further relates to laundry detergent and/or fabric care compositions comprising this modified enzyme.

Abstract: A water soluble container having disposed therein a powdered cleaning composition containing at least one nonionic surfactant, a perfume and an anionic surfactant.

Abstract: A detergent in agglomerate form is described, characterized by the fact that it contains at least one swellable layer silicate and at least one optical brightener in intimate contact with each other.

Abstract: The invention provides a single-dose soap for use only once, as a disposable soap unit, the soap unit having a high solubility in order to be quickly dissolved during a washing operation, the soap unit comprising lauryl sodium sulfate, a first hydrophilic disintegrating agent, an agglutinating agent, and a second hydrophilic disintegrating agent for causing a sudden disintegration and dissolution of the soap when contacting with a liquid for the washing operation. The invention also provides a method for manufacturing the soap unit.

Abstract: The present invention relates to a clear and stable, highly alkaline composition with controlled foaming, containing a high amount of surface active nonionic alkylene oxide adduct and a hexyl glycoside as a hydrotrope. This composition has a very good wetting and cleaning ability and can be used for cleaning of hard surfaces, in a mercerization process and for a cleaning, desizing or scouring process of fibres and fabrics.

Abstract: A multifunctional detergent material, useful in laundry and cleaning product compositions, containing functional ingredients including a condensed phosphate material and a silicate material, and optionally other inorganic materials, such as carbonate and sulfate. The condensed phosphate material forms an amorphous phase containing polyphosphates, while the silicate material is present as crystalline particulate. The composition can be used to provide multiple functions for laundry and cleaning products in a single ingredient, including the functions of a builder, a filler, and an alkaline source.

Abstract: The present invention provides a softener composition which contains a softening base having an excellent softening effect and satisfactory biodegradability. That is, the present invention provides the softener composition that has (A) a nonionic compound which has at least one C5-C36 alkyl or alkenyl group and an amide bond but contains no dissociative group of amino or carboxyl group; and (B) at least one member selected among (B-&agr;) cationic or ampholytic surfactants having one C5-C36 alkyl or alkenyl group or one optionally substituted aryl group and (B-&bgr;) amino compounds, having at least one C5-C36 alkyl or alkenyl group and salts of the compunds.

Abstract: The use of tricyclic aldehydes as odorous materials, which can be produced through partial or total hydroformylation of tricyclo[5.2.1.02,6]-dec(adi)enes, except saturated monoaldehydes, is described. The fragrance enhancing capacity of the compounds is described in methods for their use both as perfumes and perfume enhancers or boosters.

Abstract: The use of monocyclic aldehydes as odorous materials, which can be produced through partial or total hydroformylation of (di)methyl-substituted cyclooct(adi)enes, is described. The fragrance enhancing capacity of the compounds is described in methods for their use both as perfumes and perfume enhancers or boosters.