Abstract: Substrate that is vapor-deposited with dopant-added ZnO thin film is loaded into a heat-treating chamber, and heat-treated quickly under gas atmosphere to activate the dopant. A thin film phosphor having new luminescence peak can be fabricated by quick-heat-treatment of zinc compound semiconductor under hydrogen atmosphere. This thin film phosphor can replace the conventional blue luminescence using alloy-type ZnO and furthermore can be utilized as blue light emitting material for flat plate display elements such as FED and PDP.

Abstract: The present invention provides a method of depositing a film on a surface of a coil that includes depositing a metal from a target onto a surface of a coil to form a first film on the surface and forming a second film over the first film at a low pressure and at a first power at the target that is substantially higher than a first power at the component's surface. The conditioned deposition tool is well suited for manufacturing integrated circuits.

Abstract: A reactor for plating a metal onto a surface of a workpiece is set forth. The reactor comprises a reactor bowl including an electroplating solution disposed therein and an anode disposed in the reactor bowl in contact with the electroplating solution. A contact assembly is spaced from the anode within the reactor bowl. The contact assembly includes a plurality of contacts disposed to contact a peripheral edge of the surface of the workpiece to provide electroplating power to the surface of the workpiece. The contacts execute a wiping action against the surface of the workpiece as the workpiece is brought into engagement therewith The contact assembly also including a barrier disposed interior of the plurality of contacts. The barrier includes a member disposed to engage the surface of the workpiece to assist in isolating the plurality of contacts from the electroplating solution.

Abstract: An apparatus and method for cathodic magnetron sputtering of a coating onto a temperature-sensitive substrate is disclosed. The apparatus consists of a vacuum chamber having a work-supporting station and a magnetron sputtering target opposite the work-supporting station. The apparatus produces a magnetic field to contain, in an oval pattern, a gas plasma cloud which ejects target material toward the work-supporting station. The temperature of the substrate being coated is controlled by positioning the cooling anode within the sputtering chamber. The position of the cooling anode is adjusted relative to the cathode target to capture primary electrons that would otherwise impinge the substrate. It is in a position with respect to the cathode that does not interfere with the magnetic field.

Abstract: One embodiment relates to an apparatus for sputtering material onto a workpiece, the apparatus including a vacuum chamber and a target disposed in the vacuum chamber, the target comprising a material to be deposited onto said workpiece. The apparatus also includes a holder for the workpiece and at least one recyclable process kit component positioned to accumulate material sputtered from the target. The process kit component includes a base metal layer including titanium and an outer layer of titanium nitride. The titanium nitride layer acts as an etch stop during recycling of the process kit component. The process kit component may include a part selected from the group of a shield, pedestal, shutter, coil, collimator, deposition ring, cover ring, and clamp ring.

Abstract: A measured gas side electrode is provided on one surface of a solid electrolytic substrate so as to be exposed to a measured gas. A reference gas side electrode is provided on an opposite surface of the solid electrolytic substrate so as to be exposed to a reference gas stored in a reference gas chamber. A water-vapor absorbing member is provided in the reference gas chamber.

Abstract: In a method for controlling sample introduction in microcolumn separation techniques, more particularly in capillary electrophoresis (CE), where a sample is injected as a sample plug into a sampling device which comprises at least a channel for the electrolyte buffer and a supply and drain channel for the sample. The supply and drain channels discharge into the electolyte channel at respective supply and drain ports. The distance between the supply port and the drain port geometrically defines a sample volume. The injection of the sample plug into the electrolyte channel is accomplished electrokinetically by applying an electric field across the supply and drain channels for a time at least long enough that the sample component having the lowest electrophoretic mobility is contained within the geometrically defined volume. The supply and drain channels each are inclined to the electrolyte channel. Means are provided for electrokinetically injecting the sample into the sample volume.

Abstract: In a method for controlling sample introduction in microcolumn separation techniques, more particularly in capillary electrophoresis (CE), where a sample is injected as a sample plug into a sampling device which comprises at least a channel for the electrolyte buffer and a supply and drain channel for the sample. The supply and drain channels discharge into the electrolyte channel at respective supply and drain ports. The distance between the supply port and the drain port geometrically defines a sample volume. The injection of the sample plug into the electrolyte channel is accomplished electrokinetically by applying an electric field across the supply and drain channels for a time at least long enough that the sample component having the lowest electrophoretic mobility is contained within the geometrically defined volume. The supply and drain channels each are inclined to the electrolyte channel. Means are provided for electrokinetically injecting the sample into the sample volume.

Abstract: An improved plating method in combination with a low-temperature thermal treatment is disclosed. The method for reducing the stress in the nickel-based alloy plating comprises the steps of: (a) adding ceramic particles into a plating bath containing soluble nickel salts; and (b) placing a substrate in the plating bath and thereafter carrying out a pulse-current electroplating in the plating bath. The method of this invention can prevent substrate softening or deformation problems. The use of a post low-temperature thermal treatment can slightly increase the hardness of the coating products. The use of the low-temperature thermal treatment can reduce the stress of the coatings since the hydrogen embrittlement resulting from exist of hydrogen in the coatings is eliminated.

Abstract: Embodiments of the invention generally provide a substrate processing system and method. The substrate processing system generally includes two primary components. The first component is an interface section having at least one first substrate transfer robot positioned therein, and the second component is at least one processing module in communication with the interface section, the at least one processing module having a pretreatment and post treatment cell, a processing cell, at a second substrate transfer robot positioned therein. The substrate processing method generally includes transporting a dry substrate to a processing module via a dry interface. Once the substrate is positioned in the processing module, a robot transfers the substrate between a treatment cell and a processing cell contained within the processing module to complete a predetermined sequence of processing steps.

Abstract: It is a compact water purification/sterilization method and its device with a high electrolytic efficiency in which even though it is used continuously for a long period of time in order to purify and sterilize water with low electrical conductivity such as the water from a swimming pool, bathtub, pond, 24-hour bath, farming tank or AC, there is no deterioration or breakage of the electrodes or deformation of the plastic case for the electrolyzing device due to heat, and even if the electrical flow per electrode surface area is increased, it provides superior long-term endurance performance. Barrel-shaped (cylindrical-shaped) anodes and cathodes are arranged alternately in a concentric manner in layers at given inter-electrode intervals. The anode is a ferrite rod with a long hole along the center axis direction or a ferrite pipe, and in the hole, heating so that it has fluidity, or mercury, which is liquid at ordinary temperature, is filled, in advance, fills a low-melting point metal.

Abstract: A biosensor enabling accurate measurement of the concentration of a substrate contained in a trace amount of a sample solution is disclosed. The electrochemical analysis element in accordance with the present invention which should be included in the biosensor comprises a sensor body having a hollow space which space is open at its both ends, an electrode system having a working electrode and a counter electrode, a reagent segment containing an enzyme, wherein the electrode system and the reagent segment are disposed on an inner wall of the hollow space.

Abstract: A thick-film measurement sensor includes two measurement cells and is used to measure the NOx concentration in the exhaust gas from an internal combustion engine. The 1/&lgr; value of the exhaust gas is determined from an oxygen ion pump current flowing in the first measurement cell, for example, by a characteristic diagram, and, a measurement error, which can be used to correct the measured NOx concentration, is determined from this 1/&lgr; value, for example, by a characteristic curve that has previously been determined in a calibration measurement. The invention is based on the discovery that the measurement error is dependent on the air ratio in the exhaust gas. If this is expressed by the 1/&lgr; value, there is no need for a complex division calculation during the correction.

Abstract: Microanalytical systems based on a microfluidics/electrochemical detection scheme are described. Individual modules, such as microfabricated piezoelectrically actuated pumps and a microelectrochemical cell were integrated onto portable platforms. This allowed rapid change-out and repair of individual components by incorporating “plug and play” concepts now standard in PC's. Different integration schemes were used for construction of the microanalytical systems based on microfluidics/electrochemical detection. In one scheme, all individual modules were integrated in the surface of the standard microfluidic platform based on a plug-and-play design. Microelectrochemical flow cell which integrated three electrodes based on a wall-jet design was fabricated on polymer substrate. The microelectrochemical flow cell was then plugged directly into the microfluidic platform.

Abstract: The present invention discloses a process for producing a low haze heavy base oil including the steps of: (a) providing a heavy waxy feed stream having an initial boiling point greater than 900° F. and having a paraffin content of at least 80%; (b) separating the heavy feed stream into a heavy fraction and a light fraction by a deep cut distillation; and (c) hydroisomerizing the light fraction to produce a low haze heavy base oil.

Abstract: This invention provides an adsorbent having a high ability to adsorb endotoxin selectively and a method of adsorbing endotoxin. The adsorbent comprises a basic substance bonded to a base material by means of a crosslinking agent.

Abstract: A waste water filter comprises a shield comprising a vertical peripheral wall defining a shield interior. The shield further includes an inlet for the entry of unfiltered wastewater into the shield interior. A shield filter element is disposed within the shield interior. An outlet in fluid communication with the second interior location for discharging filtered waste water is also included into the waste water filter. The shield filter element includes at least one filter surface having filter surface openings for the passage of relatively clear water while restricting the passage of solids larger than the openings. The shield filter element, when disposed within the shield, separates the shield interior into first and second interior locations. Unfiltered or partially filtered waste water in the first interior location is separated from filtered waste water in the second location by the shield filter element. The shield filter element is removable from the shield.

Abstract: A filter for filtering blood includes a coiled core with a hollow center. The core has only two layers that are coiled atop one another, the two layers being a blood filter layer and a spacer layer where blood flows more easily through the spacer layer than through the filter layer. An outer side of one of the spacer layer, and the filter layer defines an outer circumference of the core. The filter and spacer layers are coiled so that both sides of the filter layer directly contact respective sides of the spacer layer. A casing for the core has a blood inlet in fluid communication with the outer circumference of the core and a blood outlet in fluid communication with the hollow center. Blood entering the inlet travels to the outlet within the spacer layer and transversely across the filter and spacer layers.

Abstract: A method for removing contaminants from water involves filtering the water through a filtering apparatus which includes a porous media container having an inner chamber which is suitably configured so that water can pass through the chamber and processed straw retained within and suitably within the chamber such that when water passes through the chamber, it also passes through the straw. A method is provided for enhancing the composting (470) of organic matter, e.g., sludge, including the steps of adding processed straw to a compost mixture and digesting said mixture.

Abstract: A method of remediation of petroleum hydrocarbons on water which includes contacting the petroleum hydrocarbons with a source of natural beeswax which over a predetermined time period results in the remediation of the hydrocarbons through the action of indigenous microorganisms contained in the water. A floating porous device which contains the beeswax may be employed, with the beeswax being in the form of hollow shells.

Abstract: Systems and methods for reducing biofilms are described. The systems and methods are particularly suitable for use with conventional aqueous crossflow filtration systems, such as reverse osmosis systems. The addition of the enzyme/surfactant compound has been found to enhance the effectiveness of conventional crossflow filtration processes by decreasing or inhibiting the growth of biofilms and other contaminants.

Abstract: A new method for fabricating a silicon chromatographic column comprising through-substrate fluid ports has been developed. This new method enables the fabrication of multi-layer interconnected stacks of silicon chromatographic columns.

Abstract: This application discloses a method for enhanced removal of chloramines from a fluid media by contacting said media with a catalytic activated carbon. The catalytic activated carbons used in the present invention may be prepared from carbon materials that have been contacted or otherwise exposed to nitrogen-containing compounds at temperatures above 700° C.

Abstract: A micromachined fluid handling device having improved properties. The valve is made of reinforced parylene. A heater heats a fluid to expand the fluid. The heater is formed on unsupported silicon nitride to reduce the power. The device can be used to form a valve or a pump. Another embodiment forms a composite silicone/parylene membrane. Another feature uses a valve seat that has concentric grooves for better sealing operation.

Abstract: A method of forming a conductive device includes forming a conductive layer on a substrate; etching the conductive layer to form a plurality of conductive traces; etching the conductive layer to form at least one mask feature; and removing substrate material that is not covered by the at least one mask feature so as to form at least one mechanical alignment feature.

Abstract: A method for forming conductive features in dielectric materials is disclosed which includes providing a dielectric layer and forming a release layer over the dielectric layer. Then a feature is defined into the each of the release layer and the dielectric layer and a conductive material is filled over the release layer and into the feature. The release layer is then removed where the removing serves to remove the conductive material from over the dielectric layer previously covered by the release layer.

Abstract: A method of producing transfer stickers with metal powder has the steps of: coating a substrate with a first isolating layer; coating the first isolating layer with a resin layer; coating the resin layer with a metal powder layer by an electroplating process; printing a first protecting resin layer pattern on the metal powder layer; etching the metal powder layer for shape and to cause the patterns to protrude; washing away the etching reagents; printing a second protecting resin layer on the first protecting resin layer to protect the patterns in shape; printing an adhesive layer on the second protecting resin layer; and then attaching a second isolating layer to the adhesive layer. The transfer sticker made in accordance with this method has exquisite patterns that can be transferred completely without other residual parts of the sticker.

Abstract: A process for gas-phase etching of actinide oxides from a substrate by using plasma power comprising the steps of: a) preheating actinide oxides on the substrate within a process chamber filled with fluorine-containing gas and exposing it to plasma power, and subsequently b) etching actinide oxides from the substrate using a plasma gas-phase reactant system.

Abstract: A process for etching a substrate 25 in an etching chamber 30, and simultaneously cleaning a thin, non-homogeneous, etch residue deposited on the surfaces of the walls 45 and components of the etching chamber 30. In the etching step, process gas comprising etchant gas is used to etch a substrate 25 in the etching chamber 30 thereby depositing etch residue inside the chamber 30. Cleaning gas is added to the process gas for a sufficient time and in a volumetric flow ratio that is sufficiently high, to react with and remove substantially all the etch residue deposited by the process gas. The present method advantageously cleans the etch residue in the chamber 30, during the etching process, and without use of separate cleaning, conditioning, and seasoning process steps.

Abstract: In a process using a hot phosphoric acid etchant (12) to etch silicon nitride on a semiconductor wafer (15) submerged in a tank (11) of the etchant (12), a recirculating path is established for the etchant (12). A porous filter (35) is coated with silicon nitride and installed in the recirculating path. As the etchant (12) in the recirculating path flows through the porous filter (35), the silicon nitride on the porous filter (35) dissolves into the etchant (12). In the tank (11), the silicon nitride dissolved in the etchant (12) significantly suppresses the etch of silicon dioxide on the semiconductor wafer (15), thereby enhancing the etch selectivity of the process. Monitoring and maintaining the concentration of the silicon nitride in the etchant (12) stabilizes the etch selectivity of the process.

Abstract: A method for producing a Si—SiC member for heat treatment of semiconductor, which is suitable for heat treatment of a semiconductor wafer with a large diameter and capable of reducing the contamination of the semiconductor wafer as much as possible is provided. Further, a method for producing a Si—SiC member for heat treatment of semiconductor capable of reducing the contamination of the semiconductor wafer as much as possible and causing no slip is provided. This method comprises the first step of kneading a SiC powder having a total metal impurity quantity of 0.2 ppm or less with a molding assistant; the second step of forming a compact from the kneaded raw material; the third step of calcining the compact; the fourth step of purifying the calcined body; and the fifth step of impregnating the purified body with silicon within a sealed vessel provided in a heating furnace body.

Abstract: A chemical mechanical polishing (CMP) slurry composition for removing noble metal material from a substrate having the noble metal material deposited thereon, for example, a semiconductor device structure including thereon a layer of the noble metal material, e.g., iridium, patterned for use as an electrode. Such polishing slurry composition contains abrasive polishing particles, a bromide compound, a bromate compound for providing free bromine as an oxidizing agent in the composition, and an organic acid for mediating decomposition of the bromate compound in the composition. The CMP slurry composition of the invention is particularly effective for planarization and/or removal of noble metal(s) from the substrate, in applications such as the fabrication of ferroelectric or high permittivity capacitor devices.

Abstract: The present invention provides supported peroxides, and a method of forming supported peroxides. Supported peroxides according to the invention are solid particles that include an organic peroxide and a metallic soap. In accordance with the method of the invention, supported peroxides are preferably formed by dispersing a mixture that includes at least one peroxide and at least one C4 to C30 carboxylic acid into an aqueous solution that includes a compound that is capable of reacting with the C4 to C30 carboxylic acid to form a water soluble soap. Dispersing the mixture into the aqueous solution results in the formation of an emulsion. A polyvalent metal compound that is capable of reacting with the water soluble soap to form a water insoluble metallic soap is then added to the emulsion, which converts the water soluble soap into a water insoluble metallic soap that precipitates from the solution. The organic peroxide is entrained within the precipitate.

Abstract: A massive body, e.g., a tablet, for producing a solution of chlorine dioxide when the massive body is added to liquid water. The massive body comprises a metal chlorite such as sodium chlorite, an acid source such as sodium bisulfate and a source of free halogen such as the sodium salt of dichloroisocyanuric acid or a hydrate thereof. The concentration of free halogen in the solution will be: (a) less than the concentration of chlorine dioxide in said solution on a weight basis and the ratio of the concentration of chlorine dioxide to the sum of the concentrations of chlorine dioxide and chlorite anion in said solution is at least 0.25:1 by weight; or (b) equal to or greater than the concentration of chlorine dioxide in said solution on a weight basis and the ratio of the concentration of chlorine dioxide to the sum of the concentrations of chlorine dioxide and chlorite anion in said solution is at least 0.50:1 by weight.

Abstract: Disclosed are polymerizable liquid-crystalline compounds of the general formula (I) where A1 and A2 are identical or different and are each a crosslinkable group; the radicals X are identical or different and are each a single bond, —O—, —S—, —C═N—, —O—CO—, —CO—O—, —O—CO—O—, —CO—NR—, —NR—CO—, —NR—, —O—CO—NR, —NR—CO—O—, —CH2—O— or —NR—CO—NR, in which R is H or C1-C4-alkyl; and M is a mesogenic group, a process for their preparation and their use for preparing cholesteric phases.

Abstract: A rare earth element doped composition having a dopant concentration of up to about 60 mole percent of one or more rare earth elements selected from Tb, Dy, Ho, Er, Tm, Yb and Lu, wherein the composition is optically transparent to wavelengths at which excitation, fluorescence or luminescence of the rare earth elements occur. Method for making the compositions, composite materials having dispersed therein the compositions and luminescent devices containing optical or acoustical elements formed from the composite materials are also disclosed.

Abstract: A new photopolymerizable material allows single-step, fast recording of volume holograms with properties that can be electrically controlled. Polymer-dispersed liquid crystals (PDLCs) in accordance with the invention preferably comprise a homogeneous mixture of a nematic liquid crystal and a multifunctional pentaacrylate monomer, in combination with photoinitiator, coinitiator and cross-linking agent. Optionally, a surfactant such as octanoic acid may also be added. The PDLC material is exposed to coherent light to produce an interference pattern inside the material. Photopolymerization of the new PDLC material produces a hologram of clearly separated liquid crystal domains and cured polymer domains. Volume transmission gratings made with the new PDLC material can be electrically switched between early 100% diffraction efficiency and nearly 0% diffraction efficiency. By increasing the frequency of the switching voltage, switching voltages in the range of 50 Vrms can be achieved.

Abstract: Method of making a high quality identifiable fluoride crystalline optical microlithography lens element blank for formation into an lens element of a microlithography system. The highly qualified fluoride crystalline characteristics of the fluoride optical lithography lens blank ensure its beneficial performance in the demanding microlithography manufacturing regime which utilizes high energy short wavelength ultraviolet laser sources. The fluoride crystalline optical lithography lens element blanks are comprised of multiple adjoining abutting crystalline subgrains with low boundary angles.

Abstract: The present invention discloses A method for producing a dot-printless light guide plate for a liquid crystal display device using an addition polymerized norbornene copolymer represented by the following general formula (1): wherein R1, R2, R3 and R4 are respectively a hydrogen atom, a C1˜C10 linear, branched or cyclic alkyl group, or —COOR7 in which R7 is a C1˜C10 linear, branched or cyclic alkyl group; R5 and R6 are respectively a hydrogen atom or a C1˜C10 linear, branched or cyclic alkyl group; and x is an integer of 0 to 4.

Abstract: In order to impregnate a porous workpiece with a liquid impregnating agent, the pre-manufactured workpiece is arranged in an injection mould or diecasting mould and the liquid impregnating agent is introduced into the mould with the aid of a commercially available injection moulding or diecast moulding apparatus. To limit the need for post impregnation cleaning and/or shaping, the mould cavity is configured to closely fit the shape of the pre-manufactured workpiece. The impregnating agent may be a natural or synthetic lubricant, a plastic or, more commonly, a molten metal or metal alloy.

Abstract: It is an object of the present invention to provide a method for simply producing a high purity silicon carbide sintered body having no remaining metal silicon and excellent heat resistance. A method for producing a silicon carbide sintered body of the present invention comprises the steps of: preparing a slurry by dispersing silicon carbide powder in a solvent; forming a molded body by pouring the slurry into a mold and effecting calcination for the slurry in a vacuum atmosphere or in an inert gas atmosphere; and sealing pores within the calcined molded body by impregnating the pores with high purity metal silicon molten by heating, and allowing the high purity metal silicon and carbon contained in the molded body to react on each other in the pores so as to produce silicon carbide.

Abstract: A process for forming a silicon carbide structure includes molding by compression a mixture of a silicon precursor powder and a cross-linking thermoset resin to form a rigid structure, carbonizing the rigid structure, and forming a silicon carbide structure by heating the carbonized rigid structure at a temperature sufficient to allow carbon and silicon in the structure to react to form silicon carbide.

Abstract: A part-forming machine having an in-mold integrated vision system and method therefor for verifying the presence, absence and quality of molded parts therein. The image of the mold and/or part is acquired at a substantially parallel angle relative to the image-capturing source thereby allowing the imaging of the mold while the mold is opening thus increasing the resolution, speed and accuracy of part-forming machine imaging systems.

Abstract: Described is wet-spun plural-end elastane yarn having a yarn linear density of up to 2500 dtex, high surface luster and a ribbony cross section and formed from bonded-together individual filaments having an oval to circularly round cross section, the width of the elastane yarn in cross section being at least four times the thickness of the elastane yarn.

Abstract: A process for the production of a manufactured article for coatings, for components of sanitary ware, kitchen fittings, etc., in polymerized transparent resin in which marble and other stones are embedded. The surface of the product is worked by brushing with abrasives, so as to obtain depressions corresponding to the resin, and slight projections with substantially uniform distribution corresponding to the inserts; advantageously, the inserts are “decapitated” to give smoothed surfaces.

Abstract: A method for processing an impact modifier material having a core and shell molecular structure comprises working the impact modifier material in a mild extruder to a state such that at least a portion of the shells of the impact modifier material fuse together to form an impact modifier material output, and pelletizing the impact modifier output. The output is preferably pellitized, and produces pellets having a narrow size distribution.

Abstract: The invention relates to a method for coating a composite cylinder. On top of said composite cylinder (1) is drawn or extruded a metal casing (2), whose metal surface is modified a metal treatment process and/or plated with a coating layer.

Abstract: A method for producing a biaxially stretched film is provided, in which the method comprises, stretching a film made mainly of an ethylene-vinyl alcohol copolymer having an ethylene content of 15 to 70 mol % and a saponification degree of 80 mol % or more under heating; cooling the film; and subjecting the cooled film to a heat treatment; wherein a heating temperature during the stretching is 60 to 160° C., a cooling temperature is a temperature 30 to 100° C. lower than the heating temperature during the stretching, and a temperature for the heat treatment is 150 to 190° C. The thus obtained biaxially stretched film of the present invention has a small bowing coefficient.

Abstract: A molding process that uses a textured interfacial layer to isolate the surface of a mold from the surface of a composite article produced with the mold. A solution is deposited on the mold surface to form the interfacial layer, whose surface opposite the mold is textured. The texture of the interfacial layer is then transferred to the surface of the composite article produced with the mold. After demolding, the interfacial layer adheres to the article as a protective coating, but can be readily removed from the article to expose an underlying textured surface of the article.

Abstract: A connector (1) with rear holders, which connector comprises a housing (2) having a plurality of terminal housing chambers (3), and the rear holders (20a) and (20b) which are laid across the housing (2) and temporarily and regularly retained in the housing. One of the rear holders (20a) and (20b) includes a retaining hole (22) and a retaining pawl (23). On each side of the housing exist a temporarily retaining projection (4) having a tapered surface (5) over the whole of its surface, and a tapered retaining step (6). A stooping contact face (7) is also provided on the surface of the rear end portion of the housing (2).