Abstract: A method and apparatus for providing welding power is disclosed. It includes a transformer with a primary winding and an output secondary winding. The ac side of a rectifier circuit is connected to the output secondary. A battery or other energy storage device, such as a capacitor, is connected in series with the dc side of the rectifier. The series combination is disposed to be connected to the load. Preferably, an input circuit receives a 115 volt ac input. The transformer has a primary to secondary turns ratio of at least about 9:1.

Abstract: An igniter for use in industrial and domestic gas burning appliances is disclosed. One embodiment of the igniter includes an igniter element disposed on the longitudinal axis of a tubular shield. The shield includes at least one open slot formed therethrough for providing a passageway through which gas and air can flow, thereby forming one or more open spiral patterns in the tubular shield. Another embodiment of the igniter includes an igniter element disposed on the longitudinal axis of a spiral coil. Still another embodiment of the igniter includes an igniter element disposed on the longitudinal axis of a ceramic, cylindrical sleeve. The sleeve includes at least one hole formed therethrough for optimally exposing the igniter element to a gas flow. The tubular shield, the spiral coil, and the ceramic sleeve protect the igniter element from accidental damage or breakage, and allow an optimal flow of gas and air to the igniter element, thereby facilitating subsequent ignition of the gas.

Abstract: A cooking appliance employing rapid cook technology includes a controller which calculates rapid cook times from conventional cooking times input by a user. That is, for relatively long convection cooking cycles, such as a convection roasting mode, after a user enters a standard radiant cooking time into a control panel, an electronic controller subtracts a certain percentage, preferably 25%, off of the standard time to establish a rapid cook time. In one preferred embodiment, the rapid cook time is presented in a display and used as the actual cook time for the cooking operation. In another preferred embodiment, the standard cooking time is established for the cooking operation, but the user is signaled to check the food when the rapid cook time expires.

Abstract: The oven includes a lower electrical heating element which is located below a support member. Two laterally spaced apart upper electrical heating elements are supported above the support member and the food to be cooked. An electrical system is provided for supplying electrical power to the lower electrical heating element and to the two upper electrical heating elements. A controller is provided for controlling electrical power applied to the lower heating element and to the two upper electrical heating elements. By way of a thermocouple, the controller senses the temperature in the oven and controls the lower heating element to maintain a set point temperature, i.e. 550° F., in the oven. When any of the upper heating elements is activated, and is in a broiling sequence the controller disables these upper heating elements if the temperature in the oven rises above an upper temperature level of i.e. 585° F.

Abstract: An igniter controller for controlling an igniter, such as a silicon nitride hot surface igniter, provides high frequency switching of full wave rectified alternating current across the igniter using a switching transistor in combination with a filter and a full wave rectifier bridge. The igniter controller may be tuned based upon the particular igniter in connection with which control is provided to allow for precise control of switching of power to the igniter. The full wave rectifier bridge is provided in connection with the switching transistor to provide high frequency switching of AC power across the igniter.

Abstract: An apparatus and method are disclosed for penetrating convenience store food markets with a customer-engaging food merchandising module. The customer-engaging food merchandising module comprises three units: a food storage and display unit attached to a food preparation and display unit, and a shell unit attached to at least one of the other two units. One embodiment of the apparatus comprises: a glass-door freezer for storing and displaying at least one type of frozen food, a microwave oven attached to the freezer, and a shell attached to the freezer. The shell is used to support advertising and instructional graphics and also to give the apparatus a unitary appearance. The microwave oven has pre-programmed buttons corresponding to each of the types of food displayed in the freezer, each button activating the microwave oven to correctly heat a corresponding type of frozen food. The shell may extend above the freezer/microwave combination.

Abstract: The invention relates to a device and method for ensuring more uniform heating of food by microwaves. The method includes providing food in a portion having a predetermined size and shape; and providing a container adapted for receiving and reheating the portion of food in a microwave oven. The container forms a supporting cavity having peripheral sides and a bottom side, with the portion of food placed within the supporting cavity. The peripheral sides of the container are circumferentially shielded by a microwave reflective material that forms a circumference having axial and transverse distances that are determined so as to change the wavelength of resonant modes inside the food thereby resulting in a more uniform heating food pattern.

Abstract: The near-field spectrometer 10 comprises a Z-axis scanner 18, 20 for bringing a sample 24 and the tip of a probe 12 close to each other at a predetermined distance within a near-field 26 region when obtaining near-field spectral information and separating them from each other at a predetermined distance outside a near-field 26 region when obtaining back ground spectral information, and a data processor 22 for obtaining the true near-field spectral information free from the background by subtracting the background spectral information from the near-field spectral information, characterized in that a background information collector, during the separation of the sample 24 and the tip of the probe 12 at a predetermined distance outside the near-field 26 region, obtains the background spectral information for the corresponding portion to be measured.

Abstract: A focusing controller executes an appropriate focus jump even in a multilayer disk having layers of characteristics greatly different from each other. The focusing controller has an optical pickup including an objective lens for converging the light beam and a detector for receiving reflected light from the multilayer recording medium; an error signal generator for generating a focus error signal of the irradiated light beam from a detecting signal of the detector; an actuator for operating the objective lens; and a controller for controlling a focusing position of the light beam by operating the actuator based on the focus error signal. The controller calculates intensities of the reflected lights of two layers based on the detecting signal of the detector, and thus controls the timings of acceleration and deceleration signals of a focus jump between these two layers.

Abstract: A system is provided for controlling an optical imaging system, such as a telescope, capable of providing an image of a target. The system includes a closed-loop optical tracking system comprising a reflector, an imaging device and a tracker controller. The reflector is capable of reflecting the image provided by the optical imaging system. In turn, the imaging device can record the image reflected by the reflector. And the tracker controller can generate a reflector position drive signal from a position of the target determined based upon the image recorded by the imaging device. The system also includes feed-forward augmentation assembly capable of measuring a displacement of a position of the target and thereafter generating a feed-forward augmentation signal. The feed-forward augmentation assembly can then combine the feed-forward augmentation signal and the reflector position drive signal to thereby drive the reflector to a position.

Abstract: The presented invention concerns an apparatus for detecting the phase and amplitude of electromagnetic waves, comprising at least two modulations photogates which are sensitive to the electromagnetic waves, and accumulating gates which are associated with the modulation photogates and which are not photosensitive, and electrical connections for the modulation photogates and the accumulation gates so that the latter can be connected to a reading-out device and the former can be connected to a modulating device which increases and reduces the potential of the modulation photogates relative to each other and relative to the preferably constant potential of the accumulation gates corresponding to a desired modulation function. It is proposed in accordance with the invention that a plurality of modulation photogates and accumulation gates are provided in the form of long narrow parallel strips which group-wise form a PMD-pixel.

Abstract: A CMOS image sensor array has rows and columns of active pixels. In addition, there are one or more column lines each cooperating with the active pixels in the respective columns. Each active pixel has an output connected to a column line. Each active pixel includes a photodiode that produces a signal proportional to incident light intensity. The proportional signal is applied to the active pixel output if the column select and row select are appropriately set. In addition, each active pixel has a reset transistor for resetting the active pixel. Each reset transistor has a gate and first and second terminals. A reset voltage is applied to the gate of each reset transistor to cause a reset. The CMOS image sensor array also has one or more amplifiers. Each amplifier has a first input connected to a different column line. Each amplifier provides a negative feedback output to the first node of each reset transistor of the active pixels for the respective cooperating column line.

Abstract: An image sensor includes (a) a plurality of pixels each having (i) a plurality of photosensitive areas having a first sensitivity to light for forming a first sensitivity area; (ii) a plurality of charge-coupled devices respectively adjacent the photosensitive areas having a second sensitivity to light for forming a second sensitivity area; wherein the second sensitivity area is less sensitive to light than the first sensitivity area so that the second sensitivity area saturates after the first sensitivity area saturates; (iii) a first transfer mechanism for permitting electrons to be passed from the first sensitivity area to the second sensitivity area; and (b) a second transfer mechanism for moving electrons through the plurality of charge-coupled devices.

Abstract: An extended dynamic range pixel cell providing blooming protection is disclosed herein. By applying a timed varying signal to a shunt transistor in order to shunt excess charge generated by a photosensor in response to high intensity illumination, blooming protection can be provided. In particular configurations, blooming protection is provided not only during an integration period but also during a readout period when the pixel cell is generally most susceptible to blooming problems. The time varying voltage is also used to extend the dynamic range of the pixel cell thereby increasing the pixel cells usefulness in high contrast conditions, such as bright sunlight casting deep shadows, nighttime automotive applications, and the like.

Abstract: Under an embodiment, an apparatus includes an analog photocell; a sample and hold amplifier, with a first input to the sample and hold amplifier being a charge from the analog photocell and a second input to the sample and hold amplifier being a reference voltage; and an analog to digital converter, the analog to digital converter converting the output of the sample and hold amplifier to a digital value.

Abstract: Under an embodiment, a system includes an array of digital photocells; a plurality of digital holding registers, an output of each digital photocell being coupled to a corresponding digital holding register; and a plurality of subtraction units, a first input of each subtraction unit being coupled to a digital photocell and a second input of each subtraction unit being coupled to the corresponding digital holding register for the digital photocell that is coupled to the first input.

Abstract: An apparatus for converting an input optical signal to an electrical signal. The input optical signal is characterized by a modulation frequency and a modulation wavelength. The apparatus includes a photoconductive switch that is coupled to a photodetector by a common electrode. The photoconductive switch samples the output of the photodetector and is actuated by a switch light signal. The photoconductive switch and the photodetector are arranged such that the switch light signal does not interfere with the optical signal at locations proximate to the electrode and the electrode has a length that is less 0.5 mm.

Abstract: A position sensor includes a light-source-and-light-emitting structure that emits light from each of an emitter plurality of light emitters. Light from the light emitters is received by light collectors in the lateral surfaces of two light collecting optical fibers or other light-collector structures, each in a parallel but spaced-apart relation to the light-source-and-light-emitting structure and axially spaced apart from each other. The light emitting structure and the light collectors are preferably optical fibers. An opaque light shield lies between and moves parallel relative to the light-source-and-light-emitting structure and the light collectors. A sensor readout receives the light outputs from each of the light collectors, and provides a responsive sensor output indicative of the position of the light shield.

Abstract: Disclosed is a scanning optical system that includes a laser source for emitting a laser beam, a scanning deflector that deflects the laser beam, an imaging optical system that converges the scanning laser beam onto an object surface, first and second mirrors that bend the optical path of the scanning laser beam. The first and second mirrors are movable to adjust the optical path length between the deflector and the object surface for changing a width of the scanning range on the object surface. Since the optical path length is adjusted by moving the first and second mirror, which changes the width of the scanning range, correcting the size error of the printed image. When the size error of the printed image is detected, an operator moves the first and second mirrors to correct it.

Abstract: A method and apparatus are provided for adhesive bonding of a backing plate for a sensor assembly to a vehicle window, especially a windscreen of a passenger car or truck. The backing plate has an adhesive layer and is heated at least in the area of the adhesive layer by a heating device until the adhesive layer is softened sufficiently to carry out adhesive bonding. The backing plate is transferred into a contact pressure device and the contact pressure device presses the backing plate with the adhesive layer on to the vehicle window for a predetermined length of time. In order to improve the usability of such a method in the context of mass production, it is provided that the heating device emits infrared radiation, heating of the adhesive layer being carried out until it has softened sufficiently by positioning the backing plate with the adhesive layer facing the heating device at a close spacing for a predetermined length of time.

Abstract: A method of analysing scale at a location in a hydrocarbon well flow system comprises the steps of: using an in situ gamma-ray detector to obtain a gamma-ray spectrum from said scale, and spectroscopically analysing said spectrum to determine the abundances of radioactive isotopes in said scale.

Abstract: An improved mass analyzer capable of parallel processing one or more analytes is set forth. The mass analyzer comprises a mass filter unit having a plurality of ion selection chambers disposed in parallel with one another. Each of the plurality of ion selection chambers respectively includes an ion inlet lying in an inlet plane and an ion outlet lying in an outlet plane. The mass analyzer further includes a plurality of electrodes disposed in the ion selection chambers and at least one RF signal generator connected to the plurality of electrodes to produce a non-rotating, oscillating electric field in each ion selection chambers. A plurality of ion injectors are each coupled to inject an ion beam into the ion inlet of a respective ion selection chambers. The ions meeting predetermined m/Q requirements pass through the ion selection chambers to contact corresponding detection surfaces of an ion detector array.

Abstract: A mass spectrometer includes an ion source, an extraction device, a TOF mass analyzer, an ion trap mass analyzer, and an ion guiding optical element which guides at least one of extracted ions from the ion source and extracted ion fragments into the TOF mass analyzer in a normal mode of operation and into the IT mass analyzer in a tandem mode of operation. The apparatus operates by producing ions from a sample, extracting the ions from the ion source, selecting between the TOF mass analyzer and the IT mass analyzer, directing extracted ions to the selected mass analyzer, mass-separating the directed ions and fragments of the directed ions according to a mass-to-charge ratio, detecting mass-separated ions with the selected mass analyzer, and producing at least one of a normal mass spectrum and a tandem mass spectrum.

Abstract: The present invention provides a multiple part capillary for use in mass analysis instruments. Specifically, a multiple part capillary comprising at least two capillary sections joined with airtight seal by a union for use in mass spectrometry (particularly with ionization sources) to transport ions between pressure regions of a mass spectrometer for analysis is described herein. Preferably, the capillary is useful to transport ions from an elevated pressure ionization source to a first vacuum region of a mass analysis system.

Abstract: A mass spectrometer that includes an ion source, an ion trap, and a light detection module. The ion trap has two end-cap electrodes and a ring electrode. The ring electrode is positioned relative to the end-cap electrodes to confine a charged particle from the ion source within a confinement region when an audio frequency voltage having a first amplitude is applied between the ring electrode and the two end-cap electrodes. The charged particle is ejected from the ion trap when the audio frequency voltage increases to a second amplitude. The light detection module includes a light source that illuminates the ejected particle and a light detector that detects light scattered from the ejected particle.

Abstract: We disclose a method for analyzing the composition of a microscopic particle resting on a first sample surface. The method comprises positioning a micro-manipulator probe near the particle; attaching the particle to the probe; moving the probe and the attached particle away from the first sample surface; positioning the particle on a second sample surface; and, analyzing the composition of the particle on the second sample surface by energy-dispersive X-ray analysis or detection of Auger electrons. The second surface has a reduced or non-interfering background signal during analysis relative to the background signal of the first surface. We also disclose methods for adjusting the electrostatic forces and DC potentials between the probe, the particle, and the sample surfaces to effect removal of the particle, and its transfer and relocation to the second sample surface.

Abstract: An electron beam column incorporating an asymmetrical detector optics assembly provides improved secondary electron collection. The electron beam column comprises an electron gun, an accelerating region, scanning deflectors, focusing lenses, secondary electron detectors and an asymmetrical detector optics assembly. The detector optics assembly comprises a field-free tube, asymmetrical with respect to the electron optical axis; the asymmetry can be introduced by offsetting the field-free tube from the electron optical axis or by chamfering the end of the tube. In other embodiments the detector optics assembly comprises a field-free tube and a voltage contrast plate, either or both of which are asymmetrical with respect to the electron optical axis.

Abstract: Disclosed are apparatus and methods for characterizing a potential defect of a semiconductor structure. A charged particle beam is scanned over a structure which has a potential defect. X-rays are detected from the scanned structure. The X-rays are in response to the charged particle beam being scanned over the structure. The potential defect of the scanned structure is characterized based on the detected X-rays. For example, it may be determined whether a potentially defective via has a SiO2 plug defect by comparing an X-ray count ratio of oxygen over silicon of the defective via with an X-ray count ratio of a known defect-free reference via. If the defective via has a relatively high ratio (more oxygen than silicon) as compared to the reference via, then it may be determined that a SiO2 plug defect is present within the defective via. Otherwise, the via may be defmed as having a different type of defect (e.g., not a SiO2 plug defect) or defined resulting in a “false” defect.

Abstract: A pattern inspection system for inspecting a substrate surface on which a predetermined pattern is formed with radiation of an electron beam and an optical beam. the pattern inspection system includes a radiation and which radiates an electron beam to the substrate, a detection unit which detects a secondarily generated signal attributable to the radiation of the electron beam, a retrieval unit which retrieves an image from the signal detected by the detection unit, and an image processing unit which classifies the retrieved image depending on a type of the image.

Abstract: The present invention is a sample-stage for a scanning electron microscope. The sample-stage has a base and a horizontal support member, where there is an aperture in the horizontal support member. A vertical support member abuts the base on one end and the horizontal support member on the other end so that the vertical support member is under, and at an angle to, the aperture in the horizontal support member. A collimator, having an aperture in alignment with the aperture in the horizontal support member, abuts the top of the horizontal support member. A first reflector abuts the surface of the vertical support member under the aperture in the horizontal support. A second reflector abuts a portion of the top surface of the base that is not covered by the vertical support member.

Abstract: Automatically corrected is a movement of a field of view caused upon changing a magnification. A field of view is searched for with a first magnification. A sample stage coordinate of a designated subject of recording is computed, for storage, on a transmission electron beam image of a sample displayed on an image display section. A subject-of-recording image is cut out of the transmission electron beam image of the sample in the first magnification and stored as a first image. The magnification of the transmission electron microscope is set to a magnification twice a magnification in the recording mode, to move the sample stage to the stored sample stage coordinate of the subject of recording. The transmission electron beam image in the second magnification is captured with the same number of pixels as the first image to compute a movement amount of between the two images from a correlation intensity of the first and second images.

Abstract: A large-area high-output infrared detecting device S is realized in which a heat-separation-structure diaphragm 2 made of a thermal insulating material is formed through a cavity 7 from a silicon substrate 1, a thermocouple 4 serving as an infrared detection section is formed on the diaphragm 2, a heat absorption area 5 is formed on the thermocouple 4 through insulation layers 3a and 3b so as to have an etching aperture 9 for forming a cavity in the heat absorption area 5 and the cavity 7 is formed in a short time without being influenced by the size of the heat absorption area 5 to secure a structural strength.

Abstract: An infrared detector (10) includes a substrate (16) having thereon an array of detector elements (21, 139). Each detector element has a membrane (41, 81, 91, 111, 141), which includes an amorphous silicon layer (51, 142) in contact with at least two electrodes (53, 56-57, 92, 112-113, 143-145) that are made of a titanium/aluminum alloy which absorbs infrared radiation. In order to obtain a desired temperature coefficient of resistance (TCR), the amorphous silicon layer may optionally be doped. The effective resistance between the electrodes is set to a desired value by appropriate configuration of the electrodes and the amorphous silicon layer. The membrane includes two outer layers (61-62, 146-147) made of an insulating material. Openings (149) may optionally be provided through the membrane.

Abstract: An infrared detector includes a semiconductor substrate having a hollow, a single crystal silicon thin film opposite the hollow at a distance from the semiconductor substrate, thermoelectric converters embedded in the single crystal silicon thin film and converting heat energy generated by infrared light irradiating the single crystal silicon thin film into an electric signal, a first connecting layer embedded in the single crystal silicon thin film and electrically connecting the thermoelectric converters to each other and a second connecting layer for transmitting the electric signal output by the thermoelectric converters to a wire in the semiconductor substrate. In the infrared detector, at least one of the first and second connecting layers is a silicon compound.

Abstract: An optical detector 1 wherein detection elements 11, 12, 13 and 14 are provided in a sealed case 4 whose opening portion 3 is blocked with a window material 2 for transmitting light such as an infrared and an ultraviolet ray therethrough, the detection elements being formed opposite to the window material; and optical filters 21, 22, 23 and 34 are disposed between the window material 2 and the detection elements 11, 12, 13 and 14 and used for selecting and causing only light composed of a predetermined band of wavelengths to be transmitted by thin optical films in connection with the detection elements 11, 12, 13 and 14.

Abstract: In one aspect, the present invention provides an apparatus 10 for imaging. At least one source 12 (or 12/14) of composite radiation illuminates a field of view 16. The radiation includes a set of multiple phase-independent partials that are independently controllable and exhibit distinct physical features. A quasi-optical element 21 is disposed between the field of view 16 and a multi-element receiver 18. The multi-element receiver 18 is disposed to receive image radiation 28 from the quasi-optical element 21. Particular ones of the receiver elements transform the image radiation 28 into a set of electrical signals that include information relating to features of the partials.

Abstract: A radiation detector includes a top-gate thin film transistor (TFT) including a source electrode, a drain electrode, and a gate electrode, and a diode electrically coupled to the source electrode.

Abstract: An indirectly heated cathode ion source includes an extraction current sensor for sensing ion current extracted from the arc chamber and an ion source controller for controlling the filament power supply, the bias power supply and/or the arc power supply. The ion source controller may compare the sensed extraction current with a reference extraction current and determine an error value based on the difference between the sensed extraction current and the reference extraction current. The power supplies of the indirectly heated cathode ion source are controlled to minimize the error value, thus maintaining a substantially constant extraction current. The ion source controller utilizes a control algorithm, for example a closed feedback loop, to control the power supplies in response to the error value. In a first control algorithm, the bias current IB supplied by the bias power supply is varied so as to control the extraction current IE.

Abstract: A substrate positioning system is provided to facilitate the performing of certain processing on the substrate, such as ion implantation. The system comprises a linkage rotatably mounted to a base and an end effector member rotatably mounted to the linkage and configured for receiving a substrate. Through the synchronized rotation of the linkage about the base and the end effector member about the linkage, the system acts as a robotic unit to move the substrate to the desired location for performing processing thereon. In another aspect, the base is movable along an axis such that the system maintains a constant distance of travel for an ion beam incident on the substrate as the linkage and end effector member travel in a curved path.

Abstract: A mechanical scanning stage for high speed image acquisition in a focused beam system. The mechanical scanning stage preferably is a combination of four stages. A first stage provides linear motion. A second stage, above the first stage, provides rotational positioning. A third stage above the rotational stage is moveable in a first linear direction, and the fourth stage above the third stage is positionable in a second linear direction orthogonal to the first direction. The four stages are responsive to input from a controller programmed with a polar coordinate pixel addressing method, for positioning a specimen mounted on the mechanical stage to allow an applied static focus beam to irradiate selected areas of interest, thereby imaged by collecting signals from the specimen using a polar coordinate pixel addressing method.

Abstract: An article irradiation system is arranged into an upper level and a lower level. The upper level houses a radiation source used to generate beams of radiation for irradiating articles. The radiation source can emit multiple beams of radiation, for irradiating articles on the upper and the lower levels. The upper level has an upper level shield, arranged as an inner shield and an outer shield, for attenuating radiation generated by the radiation source. The lower level can be disposed below ground level, and a portion of the lower level is covered by the upper level shield, which reduces the shielding requirements for a ceiling of the lower level.

Abstract: Comprising a first step of supporting a substrate formed with a scintillator on at least three protrusions of a target-support element disposed on a vapor deposition table so as to keep a distance from said vapor deposition table; a second step of introducing said vapor deposition table having said substrate supported by said target-support element into a vapor deposition chamber of a CVD apparatus; and a third step of depositing an organic film by CVD method onto all surfaces of said substrate, provided with said scintillator, introduced into said vapor deposition chamber.

Abstract: An x-ray cassette having increased durability. The x-ray cassette comprises a shell and a storage phosphor assembly. The shell comprises an upper and lower panel, a first and second side member, and a front end member. The first and second side members and front end member join the upper and lower panels to define a cavity having an open end. The storage phosphor assembly comprises a back end member, an insert plate, and an edge insert. The storage phosphor assembly is adapted to be removably contained within the shell such that the back end member closes off the open end of the shell. A first side of the edge insert is affixed to the insert plate. A first end of the edge insert is disposed adjacent the back end member, and a second end of the edge insert comprises at least one recess on the first side.

Abstract: The present invention is related to an apparatus and method for irradiating product packages (1). One measures the effective dimension of a product package (1), one processes a product package (1) having everywhere an effective thickness below a predefined threshold with an e-beam source (17), and other packages with either a gas sterilisant device or an X-ray or gamma source. Packages for treating with the X-ray or gamma source are grouped in layers and stacked, in order to optimise the throughput of the apparatus.

Abstract: A lithographic method using an ultra-fine probe needle in which a base end of a nanotube is fastened to a holder with the tip end of the nanotube protruded from the holder. The tip end of the thus obtained nanotube probe needle is brought to contact a sample surface, a voltage is applied across the probe needle and sample, and the probe needle is moved while the sample substance in the area of contact of the probe needle is removed by the application of the voltage, thus forming a groove-form pattern on the sample surface.

Abstract: An electron beam exposure system for exposing a pattern on a wafer using a plurality of electron beams, comprising a section for generating a plurality of electron beams, an electron lens section having a plurality of apertures for passing a plurality of electron beams and focusing the plurality of electron beams independently, and a magnetic field formation section provided at least one of the plurality of apertures and forming a magnetic field in a direction substantially perpendicular to the irradiating direction of an electron beam passing through the aperture.

Abstract: Methods and apparatus are provided for ion implantation of a workpiece. The apparatus includes an ion beam generator for generating an ion beam, a deflection device for deflecting the ion beam to produce a deflected ion beam, and a drive device for rotating the deflection device about an axis of rotation to thereby cause the deflected ion beam to rotate about the axis of rotation and to produce a rotating ion beam. The apparatus may include a controller for controlling the deflection and/or the rotation of the ion beam to produce a desired distribution of the ion beam over the surface of the workpiece. The apparatus may further include an angle compensation device for causing the rotating ion beam to have a substantially constant angle of incidence on the workpiece.

Abstract: An accelerating structure and related method for accelerating/decelerating ions of an ion beam are disclosed. The structure and related method are suitable for use in selectively implanting ions into a workpiece or wafer during semiconductor fabrication to selectively dope areas of the wafer. In addition to accelerating and/or decelerating ions, aspects of the present invention serve to focus as well as to deflect ions of an ion beam. This is accomplished by routing the ion beam through electrodes having potentials developed thereacross. The ion beam is also decontaminated as electrically neutral contaminants within the beam are not affected by the potentials and continue on generally traveling along an original path of the ion beam. The electrodes are also arranged in such a fashion so as to minimize the distance the beam has to travel, thereby mitigating the opportunity for beam blow up.

Abstract: An exposure apparatus for drawing a pattern on a wafer using an electron beam includes a plurality of driving elements for drawing the pattern on the wafer while scanning the wafer with a charged-particle beam, a plurality of driving data memories for storing a plurality of time-series driving data strings for driving the plurality of driving elements, each driving data memory sequentially supplying data forming the time-series driving data string from the first data to a corresponding driving element in accordance with an operation command, and a clock pattern memory for storing a plurality of operation command data strings obtained by aligning operation commands and non-operation commands in time-series, the operation commands and the non-operation commands constituting each operation command data string being sequentially supplied from the first operation command data to a corresponding driving data memory in accordance with a drawing sync clock supplied to the clock pattern memory.

Abstract: In order to provide an electron beam exposure apparatus and an exposing method using an electron beam that realizes highly precise pattern exposure, an axis difference generated by the variable shaping operation, transcription distortion or location difference in the dimensional change of said beam is prevented by measuring an axis difference to high accuracy and by adjusting a shaping lens when an adjusting parameter or a shaping aperture of a lens is changed and beam dimension is changed. Thereby, a beam adjusting method which is capable of achieving high resolution of the electron beam exposure apparatus of a variable shaping type can be offered.