Abstract: Disclosed are methods for forming active metal battery alloy electrodes having protective layers (“encapsulated electrodes”). Charged and uncharged encapsulated alloy electrodes and methods for their fabrication are provided.

Abstract: To generate hydrogen-rich gas which is supplied to a fuel cell stack (2) of a fuel cell power plant, a reformer (1) generates reformate gas comprising hydrogen from methanol, and a carbon monoxide oxidizer (3) oxidizes carbon monoxide from the reformate gas by an action of a catalyst incorporated therein. A valve (10) which supplies hot gas, and a valve (18) which supplies air are provided. When the catalyst temperature is lower than a predetermined temperature, hot gas is supplied from the valve (10) to the oxidizer (3). Due to the heat of oxidation of carbon monoxide by the air supplied by the valve (18) and the high temperature of the hot gas, the temperature of the catalyst rises rapidly after start-up of the power plant.

Abstract: An intake system for the combustion air of a motor of a hand held implement is provided. The system includes an air filter and a centrifugal separator. The air filter has a dirt chamber and a clean chamber that is separated therefrom by a filter medium. The clean chamber is fluidically connected with a carburetor of the motor to convey combustion air to the motor. The centrifugal separator splits the air stream into a core flow having low particle density and a peripheral flow having high particle density. The centrifugal separator includes at least two cyclones, wherein the discharged flows from the cyclones are respectively combined in pairs and open out into a common suction tube.

Abstract: A filter wrap for a cylindrical filter has a sheet with an interior side facing the filter when the sheet is wrapped on the filter, and an exterior side. It also has an edge defining a main opening to the interior for receiving the filter. At least one strap is provided for the wrap with one end attached to the sheet. The strap has another accessible distal end. Pulling on the strap(s) everts the sheet as it is pulled off of the filter. This results in trapping debris residing on the exterior of the sheet within the sheet once it is everted during removal of the wrap from the filter. Installation and removal can be performed while the protected equipment remains in operation.

Abstract: A bagless vacuum cleaner includes a separating unit for separating dirt and dust from a dirt-laden airflow which is drawn in by the cleaner. The separating unit has a chamber with a collection area for collecting dirt and dust which is separated from the airflow. A base of the separating unit is movable between a closed position and an open position. The base may be released by a trigger and a linking mechanism. The releasing mechanism is operable to apply an opening force to the base to push the base open, thereby allowing a tightly fining seal to be fitted to the base.

Abstract: An attaching and detaching device for a contaminant collecting receptacle of a cyclone separator in a vacuum cleaner includes a sealing member having a through hole for providing fluid communication and air flow, a lever member surrounding the sealing member, and a guide member to guide upward and downward displacement of the lever member depending on the direction of displacement of the guide member.

Abstract: A filter for removing soot from the exhaust gases from a diesel engine. The filter incorporates two elements. The first element is a flow-through filter element incorporating a porous metal substrate formed by electrodepositing a metal such as nickel in the interstitial spaces of a packed array of electrically nonconductive particles of a material and then removing the material of the particles to produce the porous metal substrate. The second element is a hollow body having an inlet port and an outlet port, the filter element being positioned in and sealed to the hollow body so that diesel exhaust gases directed into the inlet port of the hollow body flow through the porous metal substrate from the inlet side of the porous metal substrate to the outlet side of the porous metal substrate and then out the outlet port of the hollow body. The bulk density of the porous metal substrate is less than 40% of the density of the metal of the substrate.

Abstract: A silver recovery and monitoring system including a sensor for transmitting a silver concentration signal in response to the concentration of silver in a fluid, means for determining whether the silver concentration signal indicates the concentration of silver in the fluid to be above a predetermined silver level and for initiating a silver alert signal in response to a determination that the silver concentration signal indicates the concentration of silver in the fluid to be above the predetermined silver level, and means for transmitting a notification signal to a silver monitoring station in response to the silver alert signal.

Abstract: An apparatus for producing a thixotropic metallic melt by simultaneously controlledly cooling and stirring the melt to form solid particles of a first phase suspended in a residual liquid second phase. Vigorous stirring of the metallic melt results in the formation of degenerate dendritic particles having substantially spheroidal shapes. The metallic melt is stirred to rapidly and efficiently circulate the forming semi-solid slurry. Circulation of the forming semi-solid slurry results in a substantially uniform temperature throughout. Through precision stirring and cooling, a semi-solid slurry is formed having a first solid phase of about 70-80 wt. % suspended in a second liquid phase.

Abstract: A fluid storage and dispensing apparatus including a fluid storage and dispensing vessel having a rectangular parallelepiped shape, and an integrated gas cabinet assembly including such fluid storage and dispensing apparatus and/or a point-of-use ventilation gas scrubber in the vented gas cabinet. By the use of physical adsorbent and chemical sorbent media, the gas cabinet can be enhanced in safety of operation, e.g., where the process gas supplied from the gas cabinet is of a toxic or otherwise hazardous character.

Abstract: A filter element comprising a pleated metal fiber fleece is pleated according to pleating lines, providing an edge with pleat openings to be closed to make gas flowing through the metal fiber fleece. The filter element comprising at least two flanks, each of these flanks comprises a thermally and electrically insulating fabric and a stiff material layer. The thermally and electrically insulating fabric is present at one side of the stiff material layer, providing a thermally and electrically insulated side to the flank. The metal fiber fleece is mounted between the thermally and electrically insulated sides of both flanks, which exercise a clamping force on the edges of the metal fiber fleece in a direction essentially parallel to the pleating lines, while the flanks closing said pleat openings.

Abstract: A filter element comprises a pleated metal fiber fleece being pleated according to pleating lines providing an edge with pleat openings to be closed in order to make gas flowing through the metal fiber fleece. The filter element further comprises at least two flanks, each of these flanks comprising a stiff material layer. The stiff material layer and the metal fiber fleece are connected using a layer of ceramic adhesive, which prevents direct contact of the metal fiber fleece over the length of the edge of the metal fiber fleece with the flank. Meanwhile the flanks, being essentially perpendicular to the pleating lines, closing the pleat openings in order to prevent bypasses.

Abstract: An air quality monitoring arrangement is associated with an enclosed cab of an agricultural tractor used for towing or carrying spraying implements for treating crop with substances which might be toxic or otherwise harmful to people. A signal from a contaminant sensor is sent to a control arrangement which compares the actual sensed contamination of the air within the cab over time with a value from a performance map representing the performance expected from normal performance of the air circulating system of the cab. When the sensed contamination is higher than that of the performance map the operator is warned of a malfunction. The blower of the air circulating system may have its speed increased so as to pressurize the cab so as to exclude the entry of contaminated air through seals and other small openings of the cab.

Abstract: An object of the present invention is to provide an electroless displacement gold plating solution, an additive for use in preparing the plating solution, and a metal composite material obtained by treatment with the plating solution. The electroless displacement gold plating solution contains a water-soluble gold compound, a complexing agent, and a water-soluble silver compound, and optionally a water-soluble thallium compound, a water-soluble lead compound, a water-soluble copper compound or a water-soluble nickel compound, or any combination thereof. The plating solution has good stability and, even not only immediately after the preparation but also after a lapse of a certain time period from the preparation, can be used for production of a metal composite material exhibiting an even plated appearance and also having a thick gold coating film.

Abstract: The present invention is drawn to dye sets for formulating ink-jet ink sets, and to specific ink sets. The dye set can comprise cyan colorant including a phthalocyanine dye; magenta colorant including a copper- or nickel-containing azo dye; and yellow colorant including at least one of Yellow 1189 dye and Yellow 104 dye yellow colorant having the structure Formula 1: wherein R1 is H, SO3M, COOM, or SO2NH2; and wherein R2 is H, SO3M, COOM, or SO2NH2; and wherein R3 is H or CH3; and wherein n and m are 2, 3, 4, 5 or 6; and wherein M is H, Na, Li, K, ammonium, ammonium substituted with alkyl or combinations thereof. Optionally, a cyan triarylmethine dye such as Acid Blue 9, or another similar cyan dye, can be blended with the phthalocyanine dye; a rhodamine dye can be blended with the copper- or nickel-containing azo dye; and/or Acid Yellow 17 or Acid Yellow 23 can be blended with Formula 1.

Abstract: Titanium dioxide-calcium carbonate composite particles capable of realizing characteristic properties inherent in titanium dioxide such as a high opacity, a process for producing the same, and a complex composition or complex incorporated with the same are provided. The composite particles were prepared by adding titanium dioxide particles having an average particle diameter of 0.1 to 0.5 ?m in a carbonation step, typically a step of introducing a gaseous mixture of carbon dioxide and air into a calcium hydroxide slurry with stirring, to conduct a carbonation, and continuing the reaction till pH of the slurry becomes 7 by continuous introduction of the gaseous mixture. Moreover, by incorporating the formed composite particles, complexes such as coatings and paints for paper making or composite materials such as paper, plastic molded materials, and rubber molded materials are produced.

Abstract: A process for the preparation of crystalline microporous titanium silicates using ethylsilicate-40 and titanium peroxide as silicon and titanium sources respectively is described. The process permits a significant decrease in the production cost of titanium silicate containing higher amount of titanium (Si/Ti=20) because of cheaper raw materials as well as reduction in the quantity of tetarpropylammonium hydroxide (TPAOH) template (SiO2:TPAOH=1:0.06–0.1) required for preparation. The material obtained by the present invention is useful as an active catalyst in the reactions such as oxidation of hydrocarbons, alcohols, sulphides, and thioethers.

Abstract: An apparatus for applying a primary coating and a secondary coating to an optical fiber is disclosed. The apparatus includes at least one pressurized source of primary coating, a first primary reservoir for applying a first layer of the primary coating to the optical fiber, a first primary die including a first primary land configured to size the first layer of the primary coating, a second primary reservoir for applying a second layer of the primary coating to the optical fiber, a second primary die including a second primary land, a pressurized source of the secondary coating, a secondary reservoir for applying a layer of the secondary coating to the optical fiber, and a secondary die including a secondary land configured to size the layer of the secondary coating.

Abstract: A liquid droplet ejecting apparatus of the present invention includes a cleaning unit, a regular flushing unit, capping unit, and an ejection-amount measuring unit as droplet ejecting head maintenance units used for function maintenance, function recovery, adjustment, or inspection of a liquid ejecting head. The droplet ejecting head maintenance units are arranged in a group in a movable platen as a maintenance-unit installing section. The movable platen is supported by an accessory stand physically separated from a main body.

Abstract: An apparatus and methods for applying a coating to an implantable device. The implantable device can include depots formed in the outer surface thereof to receive the coating. The coating can include a polymer and a solvent applicable to the surface of the implantable device including the depots. The application of the composition is performed under a pressure, which can reduce the surface tension and/or molecular adhesion force of the composition. The reduced surface tension and/or adhesion force allows gas bubbles within the depots to be removed while the composition is being driven into the depots.

Abstract: An adhesive applicator for a core-making machine is provided with an applicator plate for applying adhesive to a web. The applicator plate has upstream and downstream faces and a bottom surface which extends from the upstream face beyond the downstream face. The bottom surface is adapted to spread adhesive on a moving web below the bottom surface. The bottom surface forms a narrow wedge-shaped portion with an upper surface which extends away from the downstream face.

Abstract: An apparatus and method for simultaneously coating and measuring a part. The apparatus includes a part support, a sprayer and a part measurer positioned adjacent to the part support and a display device positioned adjacent to the part support. The sprayer applies a coating to a section of the part while the part measurer continuously measures a dimension of the section of the part being coated. In one embodiment, an initial amount of coating and a final amount of coating are applied to the section of the part based on the dimension measurements and desired dimension of the part. In another embodiment, the amount of coating applied to the part is based on the desired coating thickness. As a result, the apparatus and method of the present invention significantly reduces the margin of error related to the application of coatings to parts.

Abstract: A heater plate, which has a wafer W mounted thereon and which includes a heater in its interior, is placed on a cooling block including a coolant chamber in its interior. The cooling block includes a gas introduction pipe passing therethrough. The gas introduction pipe is connected to a space between the heater plate and the cooling block to make it possible to supply He gas as thermal conduction gas to the space. A gas suction pipe 34 is connected to the space to make it possible to suck He gas.

Abstract: The invention relates to a method of low temperature cleaning and applying an antimicrobial treatment to food and beverage plant equipment. In addition, the method includes carbon dioxide compatible chemistry. The method may be achieved through a multi-step method.

Abstract: To provide a method for producing a magnetostrictive material of excellent magnetostrictive characteristics. The method for producing a magnetostrictive material, wherein a mixture composed of Starting Materials A, B and C is sintered, where A is represented by Formula 1 (TbxDy1-x)Ty (T is at least one metallic element selected from the group consisting of Fe, Ni and Co, 0.35<x?0.50 and 1.70?y?2.00), B is represented by Formula 2 DytT1-t (0.37?t?1.00), and C contains T, to produce a magnetostrictive material represented by Formula 3 (TbvDy1-v)Tw (0.27?v<0.50, and 1.70?w?2.00), wherein oxygen content is set at 500 to 3,000 ppm for Starting Material A and at 2,000 to 7,000 ppm for Starting Material B.

Abstract: Vacuum carburizing of ferrous workpieces is performed at low pressure in a vacuum furnace using a napthene hydrocarbon as the carburizing medium. The furnace is constructed to be generally transparent to the napthene so that cracking tends to occur at the workpiece which functions as a catalyst to minimize carbon deposits. The napthene is supplied in liquid form to fuel injectors which inject the liquid napthene as a vapor at duty cycles and firing orders to produce a uniform dispersion of the hydrocarbon gas about the work resulting in uniform carburizing of the workpieces. An in-situ methane infrared sensor controls the process. Hydrogen is added to the napthene to either assure full carbon potential and produce methane or to perform variable carburizing.

Abstract: A method for forming a zinc oxalate coating on the surface of a strip or sheet of metal covered with a zinc or zinc alloy coating other than zinc/iron coatings, with the aid of an aqueous solution consisting of oxalic acid having a concentration of between 5.10?3 and 0.1 mole/l, and at least one compound and/or ion of an oxidant zinc metal having a concentration of between 10?6 and 10?2 mole/l, and possibly a wetting agent. The inventive method enables sheet metal to be treated at very high speeds without using large amounts of oxidant. It facilitates management of treatment baths. The invention can be used in the lubrication of sheet metal, especially for die stamping.

Abstract: An aluminum based alloy having a composition within the following ranges, all of the ranges being in weight percent: lithium 2.0 to 2.8, magnesium 0.4 to 1.0, copper 2.0 to 3.0, manganese 0.7 to 1.2, zirconium up to 0.2 and the balance aluminum, save for incidental impurities and up to 2.0 in total of one or more grain controlling elements to provide microstructural optimization and control.

Abstract: An improved camouflaged product and method of making such a product is disclosed. A multi-layered camouflage construction may comprise a first textile substrate and a second textile substrate secured to each other along parallel lines of stitching. The second textile substrate may be cut to form lobes oriented transversely to the lines of stitching to simulate the appearance of natural objects in the terrain, such as leaves or foliage. Thread which is capable of shrinking is used to attach textile substrates to each other, and then the thread is heated to shrink the thread into the stitch, forming a hardened seam with gathering and bunching of one or more substrates along the seam. Gathering of substrate along a seam contributes to the three-dimensional visual effect of the camouflage construction.

Abstract: A process for manufacturing shoe insoles with antibacterial and foot odor activity mixes Angelica,Ligussticum sp., Menthae Herba, Mugwort, charcoal, and Osterium koreanum in a predetermined weight ratio with a subsidiary component into a composition. Outer, first and second fabric sheets are cut into predetermined suitable sizes and laminated. An inlet is formed at a toe region of the laminate into a pocket that is filled with the herbal composition. A finish sheet is sewn on the laminate, the finish sheet being hemp or wool fabric. Holes are formed at predetermined intervals on the inside face and snap type buttons are fixed at the holes by pressing.

Abstract: A method of manufacturing a belt having a region comprising a non-woven material on a pulley engaging surface. The non-woven region has a random coverage of the non-woven material to reduce natural frequency harmonics, control frictional characteristics, permeation and thermal resistance. The non-woven may comprise a combination of softwood and hardwood pulp, as well as synthetic fibers applied in a random matrix to a body having a fiber loading.

Abstract: An apparatus secures ventilation cloth to a screen frame. A screen frame is oriented in an approximately vertical position. The screen frame has a plurality of segments. Each segment has a mounting surface on a face thereof. At least one of said segments has adhesive on the mounting surface thereof. A ventilation cloth is hung across the mounting surface of said one segment. The adhesive in said one of the segments is melted. The ventilation cloth is inserted in the adhesive across a length of said one of the segments.

Abstract: A method of making a tailgate for a pickup truck or the like includes selecting a pair of polymer sheets and selecting a flexible fiberglass woven mat and sandwiching the selected fiberglass woven mat between the selected pair of polymer sheets. The sandwiched mat polymer sheets are placed on a tailgate forming mold for molding the inner tailgate panel from the sandwiched matted polymer sheets. The inner tailgate panel has a plurality of spacing reinforcing ribs thereon. The outer tailgate panel is formed and the ribs on the inner tailgate panel have a cold setting adhesive applied thereto for binding the outer tailgate panel thereover to form a tailgate having inner and outer fiberglass reinforced polymer panels spaced and reinforced by a plurality of intersecting ribs. Once the inner and outer panels have been positioned, they are placed in a fixture to hold them while the adhesive cures.

Abstract: Polymeric multilayer optical films, and laminate bodies that include such films, are cut or subdivided into one or more discrete pieces by removably applying a first and second liner to opposed major surfaces of the multilayer optical film. Laser radiation is then directed at the multilayer optical film through the first liner in such a way as to produce cut lines that define a plurality of pieces of the first liner and of the multilayer optical film. Thereafter, the plurality of pieces of the first liner are removed from the plurality of pieces of the multilayer optical film while the pieces of multilayer optical film are supported by the second liner. Application of the first liner to the multilayer optical film can be accomplished with electrostatics.

Abstract: A method of forming a disposable, refastenable absorbent article is disclosed. The method includes directing a first material parallel to and spaced apart from a second material. A pair of lines of perforations is formed across the width of the first material. A pair of attachment members is then secured to the first material such that each bridges across one of the pair of lines of perforations. An absorbent assembly is secured across the first and second materials to form a subassembly. The subassembly is then folded and the first and second materials are bonded together by first and second seam lines. The first and second materials are then separated at locations outward from each of the first and second seam lines to form a disposable, refastenable absorbent article.

Abstract: A method for covering a flower pot with a sheet of material or a pot cover. At least a portion of a sheet of material, or the inner surface of the pot cover and/or the outer surface of the flower pot is provided with a bonding material such that upon wrapping the sheet of material about the outer surface of the flower pot or placing the flower pot in an interior space of the pot cover, the flower pot is secured to the sheet of material wrapped thereabout or the pot cover via the bonding material.

Abstract: A method of making beams, clamps and other structures by curing a polymer containing a magnetostrictive material. A magnetostrictive material like TERFENOL-D™ is placed in a polymer. This mixture is put onto a slide in a film. The mixture is cured by UV light (or other means) so that it cross-links. A second layer of polymer with no magnetostrictive material can be cured on top of the first layer. This leads to a beam structure which exhibits a bending moment in an applied magnetic field. By aligning the magnetostrictive particles before curing with a magnetic field, a beam or other structure can be produced with aligned particles. A mask can be used to selectively cure regions where the magnetostrictive particles have different alignments on the same layer. It is possible to build up multiple layer structures with layers of magnetostrictive particles aligned in different directions.

Abstract: A bonding machine for fabricating an liquid crystal display (LCD) panel to which a liquid crystal dropping method been performed includes a bonding chamber of a one pieced body for carrying out bonding of substrates, at least two or more than two air extraction tubes in communication with an interior space of the bonding chamber, and at least two vacuum means respectively connected to the air extraction tubes each for generating an air suction power to evacuate the bonding chamber. A method for fabricating an LCD panel by using the bonding machine includes loading a first substrate onto which liquid crystal has been dropped and a second substrate having sealant coated thereon into a bonding chamber, evacuating the bonding chamber, bonding the first and second substrates, applying varying bonding pressure, and unloading the bonded first and second substrates.

Abstract: A method is provided for attaching an elongated webbing member to an edge of a pool cover, comprising positioning the edge of the pool cover so that a portion of the pool cover edge is in contact with a portion of the webbing, and heat sealing the webbing portion to the pool cover edge portion. An assembly is provided for coupling a pool cover to a connector mechanism attached to a pool, comprising a pool cover comprising at least one pool cover edge, and a webbing coupled to at least a portion of the pool cover edge by a heat seal between a portion of the webbing and a portion of the pool cover edge. An apparatus is also provided for forming a webbing attached to the edge of a pool cover.

Abstract: A plasma treatment method comprising exhausting a process chamber so as to decompress the process chamber, mounting a wafer on a suscepter, supplying a process gas to the wafer through a shower electrode, applying high frequency power, which has a first frequency f1 lower than an inherent lower ion transit frequencies of the process gas, to the suscepter, and applying high frequency power, which has a second frequency f2 higher than an inherent upper ion transit frequencies of the process gas, whereby a plasma is generated in the process chamber and activated species influence the wafer.

Abstract: An electrospinning apparatus including a spinning dope main tank, a metering pump, a nozzle block, a collector positioned at the lower end of the nozzle block for collecting spun fibers, a voltage generator, a plurality of units for transmitting a voltage generated by the voltage generator to the nozzle block and the collector, said electrospinning apparatus containing a spinning dope drop device positioned between the metering pump and the nozzle block, the spinning dope drove device having (i) a sealed cylindrical shape, (ii) a spinning dope inducing tube and a gas inletting tube for receiving gas through its lower end and having its gas inletting part connected to a filter aligned side-by-side at the upper portion of the spinning dope drop device, (iii) a spinning dope discharge tube extending from the lower portion of the spinning dope drop device and (iv) a hollow unit for dropping the spinning dope from the spinning dope inducing tube formed at the middle portion of the spinning dope drop device.

Abstract: A bonding method is provided in which an electronic component is connected via bumps to a substrate and the electronic component is packaged on the substrate. A surface of the substrate that packages the electronic component, a surface of the electronic component that is connected to the substrate, and a surface of the bumps undergo plasma processing. Subsequently, the bumps are heated to a temperature lower than a melting point of the bumps, and the substrate and the electronic component are compression bonded via the bumps.

Abstract: A centrifugal evaporator is described having internally of a chamber a source of IR radiation which directs energy towards a sample support platform on which a microtitre plate is mounted in use, for rotation within the chamber. The wells of the microtitre plate will normally contain liquid samples which are to be evaporated whilst subjected to heat from the IR source and centrifugal force from the rotation of the platform. The swing characteristic of the latter allows the plate to be mounted and demounted with the plate generally horizontal, but as the support platform is rotated, it swings up through approximately 90° so that the wells are now substantially horizontal and the plate is now substantially vertical, so that centrifugal force pins the liquid at the bottom of the wells.

Abstract: The invention relates to a process for stabilizing the pH of a pulp suspension with buffering agents and to a process for producing paper from a stabilized pulp suspension. The alkalinity of the pulp suspension is increased by a combination of an alkali metal hydroxide feed and a carbon dioxide feed. Said feeds provide a significant buffering effect which stablilizes the pH of said pulp suspension for the paper making process.

Abstract: An improved paper and the process of making an improved paper web is disclosed. The improved paper is characterized as having two regions; one is a network (or open grid) region and the other is a plurality of domes. At least a portion of either region of the paper web contains a bonding material that penetrates at least partially through the paper's thickness.

Abstract: A method for manufacturing a creped fiber web is provided and includes providing a rotating cylindrical dryer surface, applying an ionene adhesive to the rotating cylindrical dryer surface to form an adhesive dryer surface, conveying a fiber web to the adhesive dryer surface, drying the fiber web on the adhesive dryer surface to form a dried fiber web, and creping the dried fiber web from the adhesive dryer surface. The ionene polymer can be a crosslinked polymer of an alkylamine, a haloepoxyalkane, and an amine that differs from the alkylamine, such as a terpolymer of dimethylamine, epichlorohydrin, and ethylenediamine. The ionene adhesive may further include monoammonium phosphate. The ionene polymer may be water-soluble and cationic.

Abstract: A continuous vacuum pan includes a cylindrical housing having a vertical axis, at least one liquid heating pan within the housing, and a vertical tube, floating calandria within the liquid heating pan. The vertical tube floating calandria has a downcomer between its periphery and the periphery of the liquid heating pan, and a gap is provided between the bottom of the calandria and the bottom of the liquid heating pan. Radially extending baffles in the liquid heating pan define a plurality of compartments located in series with one another, the compartments ranging from a first upstream compartment to a downstream output compartment. Ports are provided in all of the baffles except in the baffle between the output compartment and the first compartment. The ports are spaced from the bottom of the liquid heating pan, permitting communication between the compartments.

Abstract: A multi-step sputtering process in plasma sputter reactor having target and magnetron operable in two modes, for example, in a substrate sputter etch and a substrate sputter deposition. The target has an annular vault facing the wafer to be sputter coated. Various types of magnetic means positioned around the vault create a magnetic field supporting a plasma extending over a large volume of the vault. An integrated copper via filling process with the inventive reactor or other reactor includes a first step of highly ionized sputter deposition of copper, which can optionally be used to remove the barrier layer at the bottom of the via, a second step of more neutral, lower-energy sputter deposition of copper to complete the seed layer, and a third step of electroplating copper into the hole to complete the metallization. The first two steps can be also used with barrier metals.

Abstract: A method and apparatus for manually and automatically processing microelectronic workpieces. The apparatus can include a tool having a plurality of processing stations, all of which are manually accessible to a user, and an input/output station configured to support at least one microelectronic workpiece for automatic transfer to and from the processing stations. A transfer device is positioned proximate to the input/output station and the processing stations and is configured to automatically transfer microelectronic workpieces between the input/output station and the processing stations. The apparatus can be used for both manual and automatic processing of microelectronic workpieces, either sequentially or simultaneously.

Abstract: A cup type plating apparatus in which plating is carried out by supplying plating solution to a wafer placed on an opening at a top of a plating tank while an anode and the wafer connected to a cathode provided in the plating tank are electrically connected, and the anode and the cathode are separated by diaphragm provided in the plating tank, provided with a division wall between the anode and the wafer formed in a shape capable of separating the anode and the wafer from each other and having a plurality of openings covered with diaphragm. The concentration of the plating solution supplied to the plating tank separated by the division wall is made to be appropriately controllable. Further, a unit for stirring is provided capable of forcibly altering the flow of plating solution at the target surface of plating.