Abstract: A lithographic apparatus having a radiation beam inspection device comprising a barrier to the beam of radiation, the barrier having an aperture through which a portion of the beam of radiation passes; and a radiation sensor that determines the intensity of the radiation passing through the aperture and the position, relative to the aperture, of the point at which the radiation is incident on the radiation sensor.

Abstract: The exposure device includes a polarizing plate and an illumination diaphragm. The polarizing plate is located in an optical path between a light source and a photomask, serving as a polarizing unit that polarizes an illuminating light from the light source in the first and the second direction orthogonal to the optical axis. The illumination diaphragm is a so-called quadruple illumination diaphragm, which includes four openings. The first opening and the second opening are located on a straight line running parallel to a third direction perpendicular to the optical axis and passing the center point of the illumination diaphragm, across the center point from each other. Likewise, the third opening and the fourth opening are located on a straight line running parallel to a fourth direction perpendicular to the optical axis and passing the center point, across the center point from each other.

Abstract: A lithographic apparatus includes a substrate table constructed to hold a first substrate of a first type, the first substrate having a polished surface; and a projection system configured to project a patterned radiation beam onto a target portion of a substrate. The polished surface supports a second substrate of a second type and the projection system is configured to project the patterned radiation beam onto the second substrate.

Abstract: A measurement system with a minimum of 2 sensors that identifies precise locations of remote objects. The sensors measure the elevation and azimuth angles to the target using the electromagnetic radiation that is either intentionally or incidentally reflected off of the object. Given the known distance between the sensors, the system are able to calculate the exact X-Y-Z coordinates of the object using a modified type of triangulation. In the case of moving targets, this data is used to determine target origin and destination. In the case of stationary targets, the data is used to determine exact location of target and for navigation to or around the stationary target.

Abstract: A radar sensor for motor vehicles, having an optical system which subdivides a radar beam generated by a single antenna element into a plurality of beam components that are radiated in different directions, wherein the optical system has a diffraction grating.

Abstract: A method for improving the accuracy of estimating concentration path length of a target molecule using a differential absorption LIDAR (DIAL) system. In particular, this method allows improved detection of plumes containing the target molecule against inhomogeneous background, such as uncovered ground or ground with various types of cover. In an embodiment of the present invention, spectral surface reflectivity variations are systematically corrected based on interpolation of surface reflectivity measurements of multiple offline beams of different wavelengths, which are relatively close to the online wavelength. In another embodiment, the signal to noise ratio of the received online pulse energy is improved by using multiple laser beams having the online wavelength and the signal to noise ratio of the received pulse energies at an offline wavelength is improved by using multiple laser beams having that offline wavelength.

Abstract: A method of determining a distance to an object is presented. A first photon and a second photon are simultaneously generated. The first photon is reflected off an object. The second photon is directed to an optical cavity. An arrival of the first photon is correlated with an arrival of the second photon, and the distance to the object is at least partially determined using the correlation.

Abstract: In-situ monitoring of a crystallization state is used for laser anneal processing for applying an energy line irradiation for at least one of crystallization of a thin film and promotion of the crystallization. A method is characterized by simultaneously irradiating at least a plurality of monitoring places in a region having a predetermined area of at least one of the surface and the underside of the thin film by a monitor light for monitoring a crystallization state of the thin film at least during or after of before, during and after the energy line irradiation directly or through a substrate, and measuring a temporal change of the intensity of at least one of a reflected light and a transmitted light, from the surface or the underside of the thin film, of the monitor light as a light intensity distribution related to the positions of the monitoring places. Apparatus according to the invention perform such methods.

Abstract: This analyzer comprises a photoirradiation portion simultaneously photoirradiating a plurality of storage vessels storing a plurality of measurement samples respectively and a plurality of photodetection portions detecting a plurality of light components resulting from simultaneous photoirradiation on the plurality of storage vessels storing the plurality of measurement samples respectively. The photoirradiation portion includes a light source, a first light guide portion branching light emitted from the light source into a plurality of light components and guiding the plurality of light components to the plurality of measurement samples respectively and a second light guide portion branching light emitted from the light source into a plurality of light components and guiding the plurality of light components to the plurality of measurement samples respectively.

Abstract: A method for screening fiber polarization mode dispersion using a polarization optical time domain reflectometer. A pulse radiation is emitted into the fiber under test, and the backscattered radiation is measured by the POTDR and used to obtain a POTDR trace. A composite trace of more than one POTDR trace is obtained. The composite trace is then analyzed to compare the variation of signals along the length of the fiber, the variation in signals relating to the level of PMD along the length of the fiber. Because high levels of PMD correspond to localized levels of low variability, by setting the variability of signal threshold sufficiently low, fibers having unacceptably high localized PMD can be identified and removed.

Abstract: A method of optimizing a process for use with a plurality of lithography systems.

Abstract: Methods to at least partially compensate for photoresist-induced spherical aberration that occurs during mask imaging used for photolithographic processing of semiconductor devices, LCD elements, thin-film magnetic heads, reticles and other substrates including photo-defined structures thereon. A photoresist or other photosensitive material may be irradiated with a mask pattern image including a selected nonzero spherical aberration value to compensate for photoresist-induced spherical aberration.

Abstract: The invention relates to a process and an apparatus for the identification of the tin and firing sides of float glass, in particular during an automated production process, whereby a property of the float glass, in particular an optical property, differentiating the tin side and the firing side is determined by measuring techniques from the direction of one of the two sides or on one of the two sides, and a measured value resulting thereform is compared with a predetermined reference value, whereby the tin side and the firing side of the float glass are determined from the result of the comparison.

Abstract: Software, methods, and systems for calibrating photometric devices are provided. These involve using a non-uniform test illumination field to approximate a photon transfer curve by calculating stable pixel values and statistical dispersions on a pixel-by-pixel basis.

Abstract: A screw portion inspection apparatus for inspecting, by image processing, a screw portion provided in an object. The apparatus includes an imaging section for picking up an image of a region, including a screw portion, in an object along a direction inclined with respect to a center axis of the screw portion, and obtaining a two-dimensional image of the object; an image processing section for subjecting image data of the screw portion in the two-dimensional image obtained by the imaging section to a filtering process; and a thread judging section for judging whether a thread exists in the screw portion, based on output image data, of the screw portion, resulting from the filtering process. The filtering process performed by the image processing section includes an edge detection process, and the output image data of the screw portion includes edge data in the screw portion.

Abstract: A wafer aligner may comprise a chuck which supports a wafer thereon. The wafer aligner may also comprise a particle detector which irradiates a light onto a back surface of the wafer loaded on the chuck and receives a light reflected from the back surface of the wafer to output a detection signal. The wafer aligner may also comprise a controller which checks whether a particle exists on the back surface of the wafer based on the detection signal from the particle detector, and causes the wafer aligner to enter an interlock state when the particle exists on the back surface of the wafer.

Abstract: In a method of inspecting an object, a first light is irradiated onto a bare object and a first reflection signal is reflected from the bare object. A second light is irradiated onto a processed object and a second reflection signal is reflected from the processed object. The first and second reflection signals are differentiated, to thereby generate respective first and second differential signals. A defect on the processed object is detected by a comparison between the first and second differential signals. The first and second differential signals overlap with each other and at least one signal-deviation portion is detected. The first and second differential signals are spaced apart out of an allowable error range in the signal-deviation portion. The defect is detected from a portion of the processed object corresponding to the signal-deviation portion.

Abstract: A method and apparatus for inspecting pattern defects emitting a laser beam, adjusting a light-amount of the laser beam, converting the light-amount adjusted laser beam into a slit-like laser light flux, lowering coherency of the slit-like laser light flux, and irradiating a sample with the coherence reduced slit-like laser light flux. An image of reflection light from the sample is obtained, and a detector is provided which includes the image sensor for receiving the image of the reflection light and for converting it into a detected image signal. An image processor is provided for detecting defects on patterns formed on the sample in accordance with the detected image signal.

Abstract: A Raman probe assembly for analyzing a specimen, comprising: a light source for generating laser excitation light; a camera for capturing an image; a light analyzer for analyzing a Raman signature; and a light path for (i) delivering the laser excitation light from the light source to the specimen so as to produce the Raman signature for the specimen, (ii) capturing an image of the specimen and directing that image to the camera, and (iii) directing the Raman signature of the specimen to the light analyzer.

Abstract: The invention is directed to accurate calculation of a birefringence of a polymer stretched and oriented. Disclosed is a method for calculating a birefringence of a polymer in an information processing apparatus, having an amorphous state generating step including accepting input of a parameter, generating a model of the polymer on the basis of the parameter, and bringing the mode into an amorphous state; a stretching step including stretching the model brought into the amorphous state; a birefringence calculating step including calculating a birefringence of the stretched model; and an outputting step including outputting the birefringence thus calculated.

Abstract: The present invention relates to a method for determining a polarization dependent characteristic of an optical or opto-electronic device. Using the Mueller matrix data, a matrix M corresponding to a difference between a first and a second transmission spectrum is determined. The first and the second transmission spectrum correspond to a first Stokes vector and a second Stokes vector, respectively, with the second Stokes vector being opposite to the first Stokes vector. Eigenvalues of the matrix M are then determined and the first Stokes vector is determined by selecting the largest eigenvalue of the matrix M and determining a corresponding eigenvector. The second Stokes vector is then determined as a vector opposite to the first Stokes vector. Finally, the data indicative of the polarization dependent characteristic of the device are determined using the first and the second Stokes vector and the Mueller matrix data.

Abstract: Embodiments of the invention provide methods and apparatuses for detecting defects and contaminants on reticles. For one embodiment of the invention, either one or both of an aerial image database and a resist image database are created and compared to an actual scanned mask die image. For one embodiment of the invention, the comparison is used to identify defects of contaminants on the reticle. For one embodiment of the invention, a decision as to whether the reticle should be discarded or cleaned and repaired is made based upon the determined defects or contaminants.

Abstract: A mark position detection apparatus has an illumination optical system for illuminating a measurement mark with illumination light and an imaging optical system for converging light reflected from the measurement mark to form an image of the measurement mark on an image pickup apparatus. The mark position detection apparatus measures a positional displacement of the measurement mark by processing an image signal obtained by the image pickup apparatus. The mark position detection apparatus has an optical element provided in the illumination optical system for compensating a difference in asymmetry of the image signal that depends on the wavelength of the illumination light.

Abstract: A method for adjusting a color measurement of a secondary color measurement instrument. The method includes generating a profile for the secondary color measurement instrument based on color measurements of a master color measurement instrument, and applying the profile to adjust the color measurement of the secondary color measurement instrument.

Abstract: There is disposed, on a substrate 41 holding a sample to be detected, a dielectric multilayer 42 which reflects excitation light e1 supplied from above the substrate 41 and transmits fluorescence f1 emitted from the sample, and the excitation light e1 is reflected at the dielectric multilayer 42 while the transmitted fluorescence f1 is detected by a light receiving unit 44, thereby providing a fluorescence measurement apparatus which can resolve a problem of reduction in detection sensitivity due to autofluorescence from the substrate or leakage of the excitation light from a light receiving filter, and which can detect the sample with high sensitivity.

Abstract: A paper sorting system allows the high speed determination of color, glossiness and the presence of printed matter for individual sheets of paper in a stream of waste paper. Sorting criteria may be selected from a plurality of predefined options to sort the paper stream.

Abstract: The present invention is an alternative Fourier domain optical coherence system (FD-OCT) and its associated method. The system comprises a swept multi-wavelength laser, an optical interferometer and a multi-channel receiver. By employing a multi-wavelength laser, the sweeping range for each lasing wavelength is substantially reduced as compared to a pure swept single wavelength laser that needs to cover the same overall spectral range. The overall spectral interferogram is divided over the individual channels of the multi-channel receiver and can be re-constructed through processing of the data from each channel detector. In addition to a substantial increase in the speed of each axial scan, the cost of invented FD-OCT system can also be substantially less than that of a pure swept source OCT or a pure spectral domain OCT system.

Abstract: A system for probing a DUT is provided, the system comprising a tunable or CW laser source, a modulator for modulating the output of the laser source, a beam optics designed to point a probing beam at a designated location on the DUT, optical detector for detecting the reflected beam, and collection and signal processing electronics. The system deciphers perturbations in the reflected beam by detecting beat frequency between operation frequency of the DUT and frequency of the modulation. In an alternative embodiment, the laser is CW and the modulation is applied to the optical detector.

Abstract: An apparatus and method for laser probing of a DUT at very high temporal resolution is disclosed. The system includes a CW laser source, a beam optics designed to point two orthogonally polarized beams at the same location on the DUT, optical detectors for detecting the reflected beams, collection electronics, and an oscilloscope. The beam optics defines a common-path polarization differential probing (PDP) optics. The common-path PDP optics divides the laser beam into two beams of orthogonal polarization. Due to the intrinsic asymmetry of a CMOS transistor, the interaction of the beams with the DUT result in different phase modulation in each beam. This difference can be investigated to study the response of the DUT to the stimulus signal.

Abstract: In general, in one aspect, the invention features interferometry systems that include an interferometer configured to direct a first beam and a second beam derived from common light source along different paths and to combine the two beams to form an output beam including information related to an optical path difference between the different paths, wherein the path of the first beam contacts a measurement object. The interferometry systems also include an afocal system positioned in the path of the first beam and configured to increase a dimension of the first beam as it propagates from the interferometer towards the measurement object and reduces the dimension of the first beam as it returns from the measurement object propagating towards the interferometer.

Abstract: This invention relates to an apparatus and method for measuring the thickness of mold components and/or lenses during a manufacturing process. In particular, the present invention uses fiber optic interferometry to measure the center thickness of ophthalmic lenses created by a double-sided molding process.

Abstract: A method and apparatus for characterizing an object with a wavefront from the object is disclosed. In one embodiment, the apparatus includes: a reticle positioned in a path of the wavefront, the reticle comprising two superimposed linear grating patterns; at least one light detector positioned relative to the reticle to receive a self-image diffraction pattern of the reticle produced by the wavefront; and at least one processor receiving signals from the light detector representative of the self-image diffraction pattern and deriving derivatives associated therewith, the processor using the derivatives to characterize said object.

Abstract: A moving-object measuring interferometric apparatus comprises: a light beam output section outputting a measuring beam; an interference optical system obtaining interference light by projecting the measuring beam onto an object and by allowing light reflected from the object or transmitted light having passed through the object to interfere with reference light; an image pickup section obtaining image information by receiving the interference light on an image pickup surface; and an image pickup timing control section setting a momentary image pickup period during which the object is regarded as being stationary to be contained in a light reception acceptable period of the image pickup surface and controlling the interference light to enter the image pickup surface only during the momentary image pickup period; wherein the interference light received on the image pickup surface during the momentary image pickup period enables the image pickup section to obtain interference-fringe image information having phas

Abstract: A system and method of measuring the curvature of a surface of a object operate by illuminating the object surface with a light pattern having a known size to produce a virtual reflected image from the object surface; measuring a size of the virtual reflected image produced by the object surface from the light pattern; and calculating a curvature of the object surface from the known size of the light pattern and the size of the virtual reflected image.

Abstract: A laser index device is connected to a main shaft of machine and includes a lens unit for generating a laser beam which is refracted via a prism to produce a laser mark on the product so as to guide the user to move an inspection device to inspect the produce. An image processing device is located above the lens unit and display the image on a display device. A machining display unit displays movement of tool to machine the product.

Abstract: A metrology apparatus for measuring a parameter of a microscopic structure on a substrate, the apparatus comprising a supercontinuum light source arranged to generate a measurement beam, an optical system arranged to direct the measurement beam onto the substrate and a sensor for detecting radiation reflected and/or diffracted by the structure.

Abstract: The profile of a structure having a region with a spatially varying property is modeled using an optical metrology model. A set of profile parameters is defined for the optical metrology model to characterize the profile of the structure. A set of layers is defined for a portion the optical metrology model that corresponds to the region of the structure with the spatially varying property, each layer having a defined height and width. For each layer, a mathematic function that varies across at least a portion of the width of the layer is defined to characterize the spatially varying property within a corresponding layer in the region of the structure.

Abstract: A method for managing print data and an apparatus for performing the same are provided. The method for managing print data includes the steps of checking whether printable condition data corresponding to print data is provided, and, if printable condition data is not provided, generating printable condition data by obtaining printable condition data corresponding to a keyword input by a user.

Abstract: An image processing apparatus includes an image inputting unit configured to input image data of an original image, an area specifying unit configured to specify a predetermined area in the input original image as a specified area, and a miniature image creating unit configured to create a miniature image of the original image such that a first image section of the specified area and a second image section of an area other than the specified area specified by the image inputting unit are reduced by different modes from each other. According to the present invention, a thumbnail appropriately indicating the content and the feature of an original image are readily and quickly created even if the original image includes a complex image section.

Abstract: In a printhead having an element substrate on which a digital circuit including a printing element and a drive circuit for driving the printing element in accordance with input print data, and an analog circuit including a detection circuit for obtaining information, a voltage generation circuit for generating the voltage for driving the analog circuit when the value of the voltage for driving the digital circuit is different from that of the analog circuit is arranged on the element substrate, and when the voltage for driving the digital circuit is actually different from that of the analog circuit, only the voltage for driving the digital circuit is externally supplied except a power supply voltage for the printing element, thereby simplifying the overall arrangement.

Abstract: An image forming device comprises a printer having a color mode and a monochromatic mode and a display unit which displays an operation screen. The image forming device holds identification information of a division to which a user belongs, the identification information being input by the user, in a management mode to manage the number of pages printed in a color mode by the printer for each division to which each user belongs. In a case where the operation mode of the printer is changed to the color mode, the image forming device displays the operation screen to accept a printing request in the color mode, when the identification information is held, and displays an input guidance to urge that the identification information of the division to which the user belongs be input, when the identification information is not held.

Abstract: Systems and methods of evaluating colors may include a print job source that includes at least one print job, the print job including information of at least one named color. The systems and methods may also include a specified desired state determining device configured to determine a desired state in which the named color in the print job may be reproduced. The systems and methods may also include a desired named color appearance determining device configured to determine a desired named color appearance of the named color in the print job that may be reproduced in the desired state. The systems and methods may also include a specified output device to output the print job. The systems and methods may also include an actual named color appearance determining device configured to determine an actual named color appearance of the named color in the print job that may be reproduced by the output device.

Abstract: Systems and methods are provided for printing a spot ink. The spot ink may be prepared before the time of printing. The spot ink may be adjusted by half-toning or supplemental CMYK colors at the time of printing.

Abstract: A calibration or characterization system is provided wherein the number of repeated patches or the size of a patch of a given color is printed to be approximately proportional to the square of the expected noise level. In that way, when multiple measurements for a given patch are averaged, all patch averages have approximately the same reliability.

Abstract: Systems, devices, and methods performed by program instructions, are provided for color map selection. One method includes instructions which execute to generate a first color map from a set of colors. The instructions execute to generate a second color map from the set of colors and an additional color and to select a color value from between the first color map and the second color map dependent on a presence of the additional color.

Abstract: To adjust a color tone such as hue and chroma of a single color image of optional two colors (for each color component), and to provide a favorite 2-color copy image close to the user's demand, there is provided as an embodiment an image processing apparatus having a color conversion unit which converts input image data to a predetermined color space, and a color adjustment unit which adjusts an output color based on the result of determination by a color judgment unit to determine a position in the coordinates of a converting color space to be assigned to a noticed pixel converted by the color conversion unit, and an image processing method.

Abstract: A system and method for automatically upgrading the firmware of a display without user interaction, wherein a new version of firmware is downloaded and stored at a host computer. The host computer monitors all communications between the host computer and an external source to determine when new or updated firmware has been uploaded. If the host computer includes a graphic card, the display is checked to determine whether it is active. If the display is active, communication over a communication cable located between the host computer and display is established, and the new version of firmware is uploaded to memory located in the display. The host computer forwards the firmware over the communication cable as at least one signal component, such as data and clock signals, which is transmitted from a graphic card located in the host computer to a graphic processor located in the display.

Abstract: Method and apparatus for producing images by printing a print data are provided. The print data is a data produced, for example, by a printer driver of a computer and is described in a PDL. The image producing apparatus analyzes commands described in the print data to determine the type of an object depicted by the print data, and to determine attributes other than the type of the object as determined. An image processing pattern consisting of a group of one or more image processing parameters is set depending on the type of the object as determined and the results of the determinations on the attributes. The print data is provided with image processing based on the image processing parameters determined by the image processing pattern.

Abstract: One or more adjustable printer driver settings are displayed, and one or more pages of a print job corresponding to the document are displayed in accordance with the adjustable printer driver settings. The user is permitted to adjust the adjustable printer driver settings, such that the pages of the print job are redisplayed based on adjustments made to the adjustable printer driver settings.

Abstract: A printing system includes a printer and at least one workstation operatively connected to the printer. The work station comprises at least one input/output device connecting the workstation to the printer, a controller connected to the at least one input/output device, and a memory connected to the controller. The workstation further includes an operating system, a first application, a second application, and a print driver, all residing on the memory. A first item of the first application and a second item of the second application are both receivable by the print driver. The print driver is selectively able to concatenate the first and second items into a compound print set, able to receive a selected number of copies to be printed of the compound print set entered through the at least one input/output device and able to submit the compound print set and the selected number of copies as a single print job to the printer.