Patents Issued in January 30, 2007
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Patent number: 7170543Abstract: An image formation device changes the rotational rate of a polygon motor, i.e. the main-scanning rate, and selects one of pulse width conversion tables when an image formation is performed multiple times on a single sheet of transfer paper. The changing of the main-scanning rate is for preventing inconsistent sizes between a first recorded image and a second recorded image caused by shrinkage of transfer paper. The pulse width conversion tables allow the pulse widths to be modulated.Type: GrantFiled: December 3, 2004Date of Patent: January 30, 2007Assignee: Canon Kabushiki KaishaInventors: Naoto Yamada, Hajime Kaji, Yoshitaka Yamazaki, Junichi Noguchi, Takayuki Kawakami, Hajime Motoyama, Satoshi Ogawara, Yushi Oka, Akihito Mori
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Patent number: 7170544Abstract: A frequency modulation device for use in an image forming apparatus. The image formation apparatus includes an image carrier and a laser device for scanning the image carrier along a plurality of scan lines. Each scan line is divided into segments having segment boundaries in which the same segment boundary in adjacent scan lines are offset. The frequency modulation device generates frequency data for use in modulating the input image data, which is utilized by the laser device to scan the image carrier, which permits output of an electrophotograph of high image quality by suppressing segment boundaries caused by moiré fringes or color shifting to below a level at which such boundaries are not visually detectable.Type: GrantFiled: April 29, 2004Date of Patent: January 30, 2007Assignee: Canon Kabushiki KaishaInventor: Izuru Horiuchi
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Patent number: 7170545Abstract: A method and apparatus to insert variable audio delay during video conferencing to achieve conflicting goals of lip-sync and interactive conversation. The amount of audio delay is variable according to the condition of the videoconferencing: long audio delay is inserted to achieve lip-sync between audio and video playback during monologue speech, but minimum or no audio delay is inserted during interactive discussion or argument. Variable audio playback speeds may be used instead of inserting quantum delay to achieve the same result. Various methods and apparatuses to detect the non-interactive mode or interactive modes are also disclosed.Type: GrantFiled: April 27, 2004Date of Patent: January 30, 2007Assignee: Polycom, Inc.Inventor: Jeffrey C. Rodman
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Patent number: 7170546Abstract: A system for providing, in a television system, the combination, transmission, and reception of multiple video presentations over a single channel of a television distribution system. Presentations may be concurrently broadcast for viewing by many users, as well as interactively requested for display by many (potentially one thousand or more) individual users. A presentation consists of a sequence of images which reproduce a full motion, reduced motion, or a still image video presentation for the user when displayed. The signal is transmitted in a standard television format, and consists of a sequence of video images from the various presentations being transmitted. A user terminal receiving the transmitted signal is selectably operable to display one of the multiple transmitted presentations with accompanying audio. The terminal identifies the video images on an associated television receiver. The number of concurrent presentations, and the degree of motion in the presentations are dynamically variable.Type: GrantFiled: September 13, 1999Date of Patent: January 30, 2007Inventor: Michael Henry Pocock
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Patent number: 7170547Abstract: A stereoscopic image-taking lens apparatus according to the present invention is attachable to an image-taking apparatus provided with an image-pickup element; wherein a shutter is changed over so that lights from the right and left optical paths are guided alternately to the image-pickup element at every predetermined time, so that parallax images are formed in time sequence on the image-pickup element. Furthermore, the stereoscopic image-taking lens apparatus sends a signal for inhibiting an image-taking operation in which the charge-storage time of the image-pickup element is longer than the predetermined time for changing over the shutter to the image-taking apparatus. Furthermore, the lens device sends a signal for changing the set allowance of a white balance to the image-taking apparatus.Type: GrantFiled: August 7, 2006Date of Patent: January 30, 2007Assignee: Canon Kabushiki KaishaInventors: Minoru Uchiyama, Toru Ohara, Tomoaki Yamanaka
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Patent number: 7170548Abstract: Luminous values of pixels of coordinates previously set as an obstacle presence line are inputted to a memory as a one-dimensional signal converted from a two-dimensional image signal taken by a camera. A portion of the line has a luminous value other than a luminous value predicted as a luminous value of a normal road. The portion of the line is then extracted as a vehicle candidate range. Further, based on characteristic of the vehicle such as a vehicle width or a relative speed, presence or absence of the vehicle is determined by removing noise from the extracted vehicle candidate range.Type: GrantFiled: November 25, 2002Date of Patent: January 30, 2007Assignee: Denso CorporationInventor: Takahiro Ishikawa
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Patent number: 7170549Abstract: An Auto Focus and Zoom Controller for controlling multiple cameras and their lens tracking a vehicle in flight at a test range. The Auto Focus and Zoom Controller controls camera lens functions including focus, focal length, and exposure settings, based upon information stored in a track file, in order to obtain optimal recordings of launch events at the test range.Type: GrantFiled: May 13, 2003Date of Patent: January 30, 2007Assignee: The United States of America as represented by the Secretary of the NavyInventor: Christian L. Houlberg
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Patent number: 7170550Abstract: Information about various adjustments made to TVs during assembly is entered into a database after each adjustment, to facilitate monitoring and reporting of the assembly process, so that corrective action when appropriate can be taken more quickly.Type: GrantFiled: June 9, 2004Date of Patent: January 30, 2007Assignees: Sony Corporation, Sony Electronics Inc.Inventor: Toru Yamakawa
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Patent number: 7170551Abstract: Image information is transferred between an imaging device and a host system. The host system detects that an imaging device is connected to the host system. In response to detecting the imaging device, one or more images are transferred between the imaging device and the host system.Type: GrantFiled: April 30, 2001Date of Patent: January 30, 2007Assignee: Intel CorporationInventor: Mark R. Fichtner
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Patent number: 7170552Abstract: An electronic still imaging system employs an image sensor comprised of discrete light sensitive picture elements overlaid with a color filter array (CFA) pattern to produce color image data corresponding to the CFA pattern, an A/D converter for producing digital CFA image data from the color image data, and a memory for storing the digital CFA image data from the picture elements. A processor enables the processing of the digital CFA image data to produce finished image data, and the digital CFA image data and the finished image data are both stored together in an image file. This enables image processing from raw camera data to final output data to be completed in a single, integrated process to provide improved image quality when printing.Type: GrantFiled: March 21, 2003Date of Patent: January 30, 2007Assignee: Eastman Kodak CompanyInventors: Kenneth A. Parulski, J. Scott Houchin
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Patent number: 7170553Abstract: An apparatus for processing an image includes a memory for storing the image data of each pixel in the plurality of unit blocks, a direct memory access controller for reading the image data from the memory by accessing the memory on a block-by-block basis by generating the addresses of the pixels in each unit block, and a plurality of image processing modules for receiving the image data of each unit block read based on the addresses generated by the direct memory access controller and sequentially transferred via a data bus, processing the image data of the unit block, and outputting the processed image data of the unit block.Type: GrantFiled: April 26, 2002Date of Patent: January 30, 2007Assignee: Sharp Kabushiki KaishaInventors: Hiroyuki Matsuki, Kensuke Takai
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Patent number: 7170554Abstract: A method for processing at least a part of a color picture comprises at least one pixel defined by a plurality of color values. Each color value is variable between black and a color clip value. The method comprises, determining for each color value the quantity of the color value above the common clip value, computing a linear combination of the quantities, and for at least one of the color values, outputting a processed color value based on the linear combination.Type: GrantFiled: May 27, 2003Date of Patent: January 30, 2007Assignee: Thomson LicensingInventor: Jan Van Rooy
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Patent number: 7170555Abstract: An electronic imaging device includes a photosensor having a plurality of photodetectors in an array structure, and a processor in signal communication with the photodetectors. The processor is operable to cross-talk adjust a signal from a photodetector based upon the value of the signal from that photodetector and signals from photodetectors adjoining that photodetector.Type: GrantFiled: April 15, 2003Date of Patent: January 30, 2007Assignee: ESS Technology, Inc.Inventor: Brent McCleary
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Patent number: 7170556Abstract: An image sensor for capturing image, has: a plurality of pixels arranged in a matrix each including a photoelectric conversion element for generating current according to received light intensity and a reset transistor for resetting a node of the photoelectric conversion element to a reset potential; and a sample hold circuit for sample holding a pixel potential according to the potential of the node of the pixel. And the sample hold circuit outputs the differential potential, between a first pixel potential at an end of the integration period after a first reset operation of the pixel and a second pixel potential at an end of a reset noise read period after a second reset operation after the integration period, as a pixel signal. Also in the sample hold circuit, when the second pixel potential during the reset noise read period exceeds a predetermined threshold level, the second pixel potential is set to a predetermined reference potential.Type: GrantFiled: July 15, 2003Date of Patent: January 30, 2007Assignee: Fujitsu LimitedInventors: Masatoshi Kokubun, Toshitaka Mizuguchi, Jun Funakoshi, Hiroshi Kobayashi, Katsuyosi Yamamoto
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Patent number: 7170557Abstract: A modular digital imaging system adapted to transfer digital images. In one embodiment, the system includes a plurality of modules which are stackable to form a customizable unit. A first one of the plurality of modules provides a first function and has a first electrical connector and at least one attachment member. A second one of the plurality of modules provides a second function different than the first function and has a second electrical connector matable with the first electrical connector. The second module further comprises at least one attachment feature complementing the attachment member whereby the at least one attachment member mates with the at least one attachment feature to securely attach the first and second modules when the first and second modules are stacked. The electrical connector is employed to transfer the digital images between modules when securely attached.Type: GrantFiled: March 21, 2003Date of Patent: January 30, 2007Assignee: Eastman Kodak CompanyInventors: Joseph A. Manico, John R. Fredlund
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Patent number: 7170558Abstract: A digital camera which allows to make thickness, height and width of its camera body small. The camera has a first optical member for generally perpendicularly bending a first optical axis of light coming from an object through a lens opening part, a second optical member for bending a second optical axis of light coming from the first optical member, and an image taking element having a light receiving surface for receiving a third optical axis of light coming from the second optical member in which the light receiving surface crosses the third optical axis of light. The third optical axis of light is included in a plane which is different from a plane including both of the first optical axis of light and the second optical axis thereof.Type: GrantFiled: March 25, 2003Date of Patent: January 30, 2007Assignee: Minolta Co., Ltd.Inventors: Satoshi Yokota, Akira Kosaka, Toshiyuki Tanaka, Yoshihiro Hara, Kazuaki Matsui, Sadanobu Ueda, Yoshito Iwasawa
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Patent number: 7170559Abstract: The present invention relates to a compact and low-cost image pickup apparatus that is capable of photographing a high-quality image comparable to silver halide photographs even when the image is enlarged to 8×10? size or larger and that enables the depth of field to be controlled with an aperture number exceeding F4. In the image pickup apparatus, an image of an object produced by an optical system (10) is formed on an electronic image pickup device (20), thereby obtaining image information concerning the object. The optical system (10) has a structure capable of obtaining an aperture number equal to or larger than F4 by reducing the beam diameter. Performance required for the optical system (10) is such that the size of the diameter of 90% encircled energy of the point spread function by amplitude is allowed to be up to about 8 times larger than the pixel pitch corresponding to the resolvable pixel unit. The pixel pitch of the image pickup device (20) is not larger than about 5 micrometers.Type: GrantFiled: February 5, 2003Date of Patent: January 30, 2007Assignee: Olympus CorporationInventor: Katsuhiro Takada
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Patent number: 7170560Abstract: A surveillance camera device is provided which has an impact absorbing structure. The camera device includes a rotary base supporting a camera unit, a rotary bracket supporting the rotary base, and coil springs. The coil springs work to elastically urge the rotary base away from the rotary bracket to as to permit the rotary base to move straight against the mechanical pressure of the springs when subjected to a damaging impact on the device, thereby absorbing the impact to avoid damage to the camera unit.Type: GrantFiled: December 4, 2002Date of Patent: January 30, 2007Assignee: Matsushita Electric Industrial Co., Ltd.Inventors: Toshikazu Tatewaki, Masaomi Iiizumi, Jyoji Wada
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Patent number: 7170561Abstract: A method and apparatus for deinterlacing a picture is disclosed. The method generally includes the steps of (A) calculating a plurality of differences among a plurality of current samples from a current field of the picture, the differences being calculated along a plurality of line segments at a plurality of angles proximate a particular position between two field lines from the current filed, (B) generating a first sample at the particular position by vertical filtering the current field in response to the differences indicating that the particular position is a non-edge position in the picture and (C) generating a second sample at the particular position by directional filtering the current field in response to the differences indicating that the particular position is an edge position in the picture.Type: GrantFiled: December 4, 2003Date of Patent: January 30, 2007Assignee: LSI Logic CorporationInventors: Lowell L. Winger, Yunwei Jia
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Patent number: 7170562Abstract: There is provided an image signal deinterlacing apparatus for converting an interlaced scanning image into a progressive scanning image.Type: GrantFiled: February 17, 2004Date of Patent: January 30, 2007Assignee: Macro Image Technology, Inc.Inventors: Dae-Woon Yoo, Du-Sik Yang
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Patent number: 7170563Abstract: The present invention provides a television receiver which receives television signals to display images on a CRT display, and includes a JPEG decode unit (21) for decoding JPEG (Joint Photographic Experts Group) compressed image data. The JPEG decode unit (21) detects image size of image data after decode processing stored in JPEG compressed image data from a memory card (6). In case the image size is larger than image display area of a CRT display (3) and activity ratio of a memory unit (22) is larger than a limit value, the JPEG decode unit (21) sends the image size to a CPU (25), and concurrently decodes the JPEG compressed image data in the memory unit (22) to generate the image data, and clips away half of the image data along the vertical direction and the horizontal direction.Type: GrantFiled: September 26, 2002Date of Patent: January 30, 2007Assignee: Sony CorporationInventors: Hiroyuki Kojima, Takashi Hoshi
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Patent number: 7170564Abstract: This invention provides an on-screen display device that can display an increased number of types of characters without enlarging the video RAM area. This on-screen display device includes a character generator ROM that has n (n is an integer that is equal to or larger than 3) areas, a flag holding unit that outputs an area designation flag for designating a desired number of desired areas among the n areas in the character generator ROM, a display character setting unit that writes a desired character code at a predetermined position in a video RAM, and a display control unit that reads the character code from the video RAM, reads font data corresponding to the read character code from an area in the character generator ROM, which is indicated by the area designation flag outputted from the flag holding unit, and outputs an on-screen output signal using the font data.Type: GrantFiled: January 8, 2004Date of Patent: January 30, 2007Assignee: Matsushita Electric Industrial Co., Ltd.Inventors: Toshihiko Maruoka, Keisuke Tanaka
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Patent number: 7170565Abstract: Provided is an automatic brightness stabilization (ABS) apparatus that prevents brightness stabilization from being affected by dynamic focus device and velocity modulation device. ABS apparatus includes an image signal processing portion which inserts a predetermined pulse signal into a vertical flyback period of an image signal and applies the resulting signal to the electron gun, an ABS signal detecting portion which detects the pulse signal affected by the electron gun, a velocity modulating portion which generates a velocity modulation signal for emphasizing luminance components of the image signal and applies the velocity modulation signal to a velocity modulation coil of the CRT, and a retrace cancelling portion which cancels the velocity modulation signal generated by the velocity modulating portion, during a vertical flyback period.Type: GrantFiled: February 2, 2004Date of Patent: January 30, 2007Assignee: Samsung Electronics Co., Ltd.Inventor: Jae-cheol Kim
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Patent number: 7170566Abstract: Techniques are disclosed for detecting commercials or other particular types of video content in a video signal. In an illustrative embodiment, color histograms are extracted from frames of the video signal. For each of at least a subset of the extracted color histograms, the extracted color histogram is compared to a family histogram. If the extracted color histogram falls within a specified range of the family histogram, the family histogram is updated to include the extracted color histogram as a new member. If the extracted color histogram does not fall within the specified range of the family histogram, the family histogram is considered complete and the extracted color histogram is utilized to generate a new family histogram for use in processing subsequent extracted color histograms. The resulting family histograms are utilized to detect commercials or other particular type of video content in the video signal.Type: GrantFiled: December 21, 2001Date of Patent: January 30, 2007Assignee: Koninklijke Philips Electronics N.V.Inventors: Thomas McGee, Lalitha Agnihotri, Nevenka Dimitrova, Radu Serban Jasinschi
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Patent number: 7170567Abstract: A projection type image display apparatus includes a light source to emit light; a polarizing beam splitter to polarize the light received from the light source; a first lens array including a plurality of first lens cells having rectangular shapes to receive the light from the polarizing beam splitter, each first lens cell having a first side and a second side, the first side being longer than the second side, the first lens array having a rectangular shape, the first lens array having a third side and a fourth side, the third side being longer than the fourth side, the first sides of the first lens cells and the third side of the first lens array extending along a first direction; a second lens array including a plurality of second lens cells and being configured to receive the light from the first lens array, the second lens array having a rectangular shape and having a fifth side and a sixth side, the fifth and sixth sides of the second lens array having substantially the same dimensions as the third andType: GrantFiled: March 3, 2003Date of Patent: January 30, 2007Assignee: Hitachi, Ltd.Inventors: Satoshi Ouchi, Tomohiro Miyoshi, Taro Imahase, Masahiko Yatsu, Koji Hirata
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Patent number: 7170568Abstract: A liquid crystal shutter device is provided with a liquid crystal cell including a first substrate (1), a second substrate (21), and liquid crystal sandwiched therebetween, pixel electrodes (11, 12) which are signal electrodes and lead-out electrodes (15) provided on the first substrate (1), counter electrodes which are common electrodes facing the pixel electrodes, provided on the second substrate (21), and a plurality of pixel rows (200, 300, 400) which are composed of pixels (2, 3, 4, etc.) formed by overlapped portions of the pixel electrodes and the counter electrodes, and the liquid crystal shutter device controls light applied to a photosensitive member continuously and relatively moving in a direction orthogonal to the pixel rows, in which the counter electrodes are provided separately for the respective pixel rows. Further, an RGB coupling electrode (46) for electrically connecting the counter electrodes of the respective pixel rows is preferably provided.Type: GrantFiled: September 25, 2002Date of Patent: January 30, 2007Assignee: Citizen Watch Co., Ltd.Inventors: Kanetaka Sekiguchi, Sadao Masubuchi
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Patent number: 7170569Abstract: The present invention relates to a liquid crystal shutter (5). The liquid crystal shutter (5) includes a first and a second transparent substrates (50), (51) arranged to face each other; a light shielding film (52) formed on a surface (511) of the second transparent substrate (51), which faces the first transparent substrate (50), for restricting incidence of light travelling from the first transparent substrate (50) to the second transparent substrate (51); and transparent electrodes (54b) laminated over the light shielding film (52). The transparent electrodes (54b) are laminated over the light shielding film (52) via a single insulating layer (53b). Each of the transparent electrodes (54b), the light shielding film (52) and the insulating layer (53b) is made of an inorganic substance.Type: GrantFiled: February 24, 2004Date of Patent: January 30, 2007Assignee: Rohm Co., Ltd.Inventor: Toshihiko Takakura
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Patent number: 7170570Abstract: A liquid crystal display includes an insulating substrate, gate and data lines formed on the substrate to define pixel areas, or collectively a display area. Gate signal interconnection wires are formed at a corner portion of the substrate outside the display area to transmit gate electrical signals, and provided with gate signal interconnection lines and first and second gate signal interconnection pads connected to both ends of the gate signal interconnection lines. A gate insulating layer, and a protective layer are further formed on the substrate, and provided with first and second contact holes exposing the first and second gate signal interconnection pads. Gate and data signal transmission films are attached to the substrate, and provided with first and second gate signal leads and first and second gate signal wires. The first and second gate signal leads are connected to the first and second gate signal interconnection pads through the first and second contact holes.Type: GrantFiled: May 24, 2004Date of Patent: January 30, 2007Assignee: Samsung Electronics Co., Ltd.Inventors: Dong-Gyu Kim, Sang-Soo Kim, Sang-Wook Lee
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Patent number: 7170571Abstract: A liquid crystal display device including a substrate; a gate electrode over the substrate; a first semiconductor layer over the substrate, and a source electrode and a drain electrode over the first semiconductor layer. The source and drain electrodes having a first metal layer and a second metal layer formed in a same pattern and a defining a separation between the source electrode and drain electrode.Type: GrantFiled: December 28, 2001Date of Patent: January 30, 2007Assignee: LG.Philips LCD Co., Ltd.Inventor: Gee Sung Chae
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Patent number: 7170572Abstract: The invention provides a manufacturing process of transflective TFT-LCD panel (transflective TFT-LCD panel) comprising the following steps: first, form a first conductive layer on the substrate; next, define the first conductive layer to form a gate; after that, form a dielectric layer on the gate; following that, form a channel over the gate; then, form a photo-resist block; form a second conductive layer; next, define the second conductive to form a source and a drain over the gate, and to form a photo-reflective layer on the photo-resist block; after that, form a protection layer thereon; following that, define the protection layer to form a first opening on the photo-reflective layer allowing part of the drain to be exposed, and to form a second opening on the photo-reflective layer allowing part of the photo-reflective layer to be exposed; last, form a transparent electrode being electrically connected to the drain and the photo-reflective layer via the first and the second opening respectively.Type: GrantFiled: December 31, 2003Date of Patent: January 30, 2007Assignee: Chi Mei Optoelectronics Corp.Inventors: Wen-Jyh Sah, Chung-Kuang Wei, Cheng-Jen Chu
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Patent number: 7170573Abstract: Disclosed are an array substrate for a transflective liquid crystal display device and a method for manufacturing the array substrate, capable of neutralizing electric charges having a pole alignment pattern (+ ? + ? + ?) and aligned in left and right directions of an alignment layer, and capable of neutralizing electric charges having a pole alignment pattern (± ± ± ± ± ±) aligned in upper and lower directions of the alignment layer and formed by a vertical electric field created by an upper common electrode, by removing a difference of an electric potential between the electric charges through using an electrode making contact with the alignment layer of a lower substrate as a common electrode. A thin film transistor has a light-shielding layer, source and drain metal layers, an ohmic contact layer, an amorphous silicon layer, an insulation layer, and a gate metal layer.Type: GrantFiled: September 10, 2004Date of Patent: January 30, 2007Assignee: Boe Hydis Technology Co., Ltd.Inventors: Eui Seok Oh, Yoon Sik Im, Seok Bae
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Patent number: 7170574Abstract: The present invention relates to trim retarders used to compensate for residual birefringence created by liquid crystal display panels. In particular the present invention relates to a trim retarder with negative out-of-plane birefringence provided by a form birefringent multi-layer dielectric stack for compensating for retardances resulting from liquid crystal on silicon display panels.Type: GrantFiled: December 10, 2004Date of Patent: January 30, 2007Assignee: JDS Uniphase CorporationInventors: Kim Leong Tan, Karen Denise Hendrix, Markus Duelli, Charles Andy Hulse
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Patent number: 7170575Abstract: Homeotropically oriented layers and films of liquid crystals especially on polymeric substrates. The layers and films, which also can be multi-layered films comprising a homeotropically aligned anisotropic film, are preparable by application of an orientation layer to the substrate. The orientation layer can be either an organic surfactant which is fixed in a matrix of a polymeric material or an inorganic thin layer such as aluminum or Al2O3.Type: GrantFiled: August 25, 2004Date of Patent: January 30, 2007Assignee: Merck Patent GmbHInventors: David Coates, Owain Llyr Parri, Jeremy Lewis Ward, David Joicey, Keith Wilbourn, Colum Dickson, John Scott
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Patent number: 7170576Abstract: A thin film transistor array substrate having spacers formed without sacrificing an aperture ratio and a method for fabricating the same. The thin film transistor array substrate according to the present invention includes a gate line on a substrate; a gate insulating film on the gate line; a data line on the gate insulating film, the data line crossing the gate line to define a pixel region and the gate insulating film between the gate line and the data line, wherein at least one of the gate line and the data line includes a protrusion; a thin film transistor at a crossing the gate line and the data line; a pixel electrode at the pixel region, the pixel electrode connected to the thin film transistor; and a spacer within the protrusion dispensed by an ink-jet system.Type: GrantFiled: June 16, 2004Date of Patent: January 30, 2007Assignee: LG.Philips LCD Co., Ltd.Inventors: Jae Hong Jun, Yun Bok Lee
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Patent number: 7170577Abstract: A movie anti-piracy system with sensing and reporting is provided. A movie projector projects a light image to reflect off of a screen, while an infrared energy projection source generates an infrared energy pattern which is reflected off the screen (or otherwise projected) in the same field of view as the light images reflecting from the screen. Infrared energy sensors are positioned in the seating area of the theater. The infrared sensors provide sensed signals respectively to a sensor response controller. The controller is responsive to the sensor signals to provide an infrared status (and other data) signal output to a control center. The control center responds to the infrared status and other data signals, from one or a plurality of theaters, and provides for reporting of information (such as security compliance, attendance, etc.) to one or multiple reporting sites (such as movie distribution studios, etc.).Type: GrantFiled: September 30, 2002Date of Patent: January 30, 2007Inventors: David H. Sitrick, James A. Fancher
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Patent number: 7170578Abstract: A pattern control system for cooling a wafer prior to a photolithography exposure step. The pattern control system includes a wafer transfer pathway for transferring the wafer in a photolithography process and at least one cooling module provided along the wafer transfer pathway for cooling the wafer. Cooling of the wafers prevents thermal distortion of circuit pattern images formed in a photoresist layer on the wafer during a subsequent photolithography exposure process.Type: GrantFiled: November 30, 2004Date of Patent: January 30, 2007Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventor: Yang-Kuao Kuo
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Patent number: 7170579Abstract: A light source unit including a condensing mirror for collecting EUV light emitted from a light emission point, a debris reducing member for reducing debris, produced from the light emission point or from a portion around the light emission point, and to be deposited on the condensing mirror, and a base member arranged so that the condensing mirror and the debris reducing member are mounted thereon.Type: GrantFiled: December 21, 2004Date of Patent: January 30, 2007Assignee: Canon Kabushiki KaishaInventors: Takeshi Miyachi, Kazuki Fujimoto
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Patent number: 7170580Abstract: A projection system includes at least one projection device configured to receive a beam of radiation coming from a first object and project the beam to a second object. The projection system further includes a sensor configured to measure a spatial orientation of the at least one projection device and a processing unit configured to communicate with the at least one sensor. The processing unit is configured to communicate with a positioning device configured to adjust the position of at least one of the first object and the second object based on the measured spatial orientation of the at least one projection device.Type: GrantFiled: April 14, 2004Date of Patent: January 30, 2007Assignee: ASML Netherlands B.V.Inventors: Martinus Hendrikus Antonius Leenders, Henrikus Herman Marie Cox, Leon Martin Levasier
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Patent number: 7170581Abstract: A motion control system is presented. In an embodiment of the invention, the motion control system compares a motion profile setpoint generator configured to generate a set of profile setpoint signals including a position profile setpoint signal and additional profile setpoint signals. The feedforward controller generates a feedforward signal by summing the additional profile setpoint signals, the additional profile setpoint signals being multiplied by a respective coefficient. The motion control system is configured to (a) select an initial setting of the respective coefficients, (b) cause the motion profile setpoint generator to generate a set of profile setpoint signals so as to execute a motion profile, (c) measure an error between the position profile and an output position signal, and (d) update the respective coefficients by adding a product of the error and a respective learning gain thereto. In an implementation, standard motion controllers can be used.Type: GrantFiled: October 27, 2004Date of Patent: January 30, 2007Assignee: ASML Netherlands B.V.Inventor: Rob Tousain
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Patent number: 7170582Abstract: To correctly transfer a pattern to a substrate, or transfer any other pattern having small features, a transfer of vibrations from an external support structure, e.g. a floor, is minimized by using a vibration isolation support device, e.g. an airmount. To improve the vibration isolation characteristics of the airmount, the (positive) stiffness of the airmount is lowered by providing a pressure reducer that is configured to reduce a gas pressure change in a gas chamber of the airmount, which pressure change is a result of a volume change of the gas chamber. Due to vibrations the volume of said gas chamber changes. Due to the stiffness reduction device, the corresponding pressure change, and thus a force exerted on the supported object, is reduced, thereby reducing the stiffness of the airmount.Type: GrantFiled: December 13, 2004Date of Patent: January 30, 2007Assignee: ASML Netherlands B.V.Inventors: Hans Butler, Frank Auer, Martinus Van Duijnhoven, Pieter Johannes Gertrudis Meijers, Jan-Gerard Cornelis Van Der Toorn, Joost De Pee
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Patent number: 7170583Abstract: A lithographic apparatus includes a substrate table to hold a substrate; a substrate table position measurement system to measure a position quantity of the substrate table, a projection system to project a patterned radiation beam onto a target portion of the substrate, a fluid supply system to supply an immersion fluid in a space between a downstream lens of the projection system and the substrate, and a fluid supply system position measurement system to measure a position quantity of the fluid supply system. To prevent a collision between the fluid supply system and the substrate table, a damage control system of the lithographic apparatus may include a calculator to calculate a dimensional quantity of a gap between the fluid supply system and the substrate table from the positioned quantity of the substrate table and the position quantity of the fluid supply system. The damage control system may generate a warning signal when the dimensional quantity goes beyond a predetermined safety level.Type: GrantFiled: June 29, 2005Date of Patent: January 30, 2007Assignee: ASML Netherlands B.V.Inventors: Frits Van Der Meulen, Henrikus Herman Marie Cox, Martijn Houkes, Robertus Johannes Van Vliet, Stoyan Nihtianov, Petrus Wilhelmus Josephus Maria Kemper, Roland Petrus Hendrikus Hanegraaf
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Patent number: 7170584Abstract: In a maskless lithography apparatus light deflected by a patterning array out of a path towards a substrate is directed onto a detector that detects malfunctions of the patterning array. If the patterning array is of a type which selectively diverts radiation in order to pattern the beam, the detector can use the radiation that is diverted out of the beam. Alternatively, a second beam of radiation, additional to the exposure radiation, can be provided.Type: GrantFiled: November 17, 2004Date of Patent: January 30, 2007Assignee: ASML Netherlands B.V.Inventor: Antonius Theodorus Anna Maria Derksen
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Patent number: 7170585Abstract: A projection exposure apparatus for microlithography has a light source, an illumination system, a mask-positioning system and a projection lens. The latter has a system aperture plane and an image plane and contains at least one lens that is made of a material which has a birefringence dependent on the transmission angle. The exposure apparatus further has an optical element, which has a position-dependent polarization-rotating effect or a position-dependent birefringence. This element, which is provided close to a pupil plane of the projection exposure apparatus, compensates at least partially for the birefringent effects produced in the image plane by the at least one lens.Type: GrantFiled: April 7, 2005Date of Patent: January 30, 2007Assignee: Carl Zeiss SMT AGInventors: Martin Brunotte, Jürgen Hartmaier, Hubert Holderer, Winfried Kaiser, Alexander Kohl, Jens Kugler, Manfred Maul, Christian Wagner
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Patent number: 7170586Abstract: A lithographic apparatus includes an illumination system configured to provide a beam of radiation, a support configured to support a patterning device, a substrate table and a projection system. Furthermore, the lithographic apparatus includes a plurality of EUV sources for providing EUV radiation to the illumination system and a distributor which is arranged to convert the EUV radiation from each of the EUV sources into an intermediate beam of radiation. The intermediate beam of radiation is directed from the distributor in a first direction by a mirror surface. The distributor may include a rotationally driven mirror arrangement, the axis of rotation being non-parallel to the mirror surface.Type: GrantFiled: January 20, 2006Date of Patent: January 30, 2007Assignee: ASML Netherlands B.V.Inventors: Vadim Yevgenyevich Banine, Levinus Pieter Bakker, Jeroen Jonkers, Erik Roelof Loopstra
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Patent number: 7170587Abstract: A lithographic apparatus includes a device having a plurality blades, each blade selectively insertable into the beam. The device is in a first plane intermediate a second plane conjugate to a plane of the substrate and a third plane conjugate to a pupil plane of the projection system. The blades include a plurality of partially opaque and solid blades or have a predetermined transmissibility pattern. The transmissibility may vary in a second direction perpendicular to the first direction in which the substrate and the patterning device are movable. In an illumination system including a field faceted mirror and a pupil faceted mirror, a plurality of reflecting blades are selectively insertable into the beam to reflect a portion of the beam to a beam dump that may be cooled to reduce a heat load. The reflecting elements may have a coating that scatters the portion of radiation or changes the phase.Type: GrantFiled: February 24, 2004Date of Patent: January 30, 2007Assignee: ASML Netherlands B.V.Inventors: Marcel Mathijs Theodore Marie Dierichs, Hans Van Der Laan, Hendrikus Robertus Marie Van Greevenbroek
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Patent number: 7170588Abstract: Reduction Talbot interference imaging is carried out using a glass or fused silica prism, where at least two surfaces within the prism allow for an increase in the propagating ray angles at the image plane compared to the object (the photomask) plane. Furthermore, by adding a second orthogonal pair of surfaces, X and Y order recombination is made possible thus allowing for the imaging in an orthogonal direction with a two-order interference scheme as well as repeating checkerboard (island and hole) patterns with a four-order interference scheme. A benefit of the invention is the reduced requirements of the photo mask, allowing for diffraction limited imaging with UV wavelengths in a media with index of unity (air) or larger (an immersion fluid). The prism interferometer is known as a Smith-Talbot prism lens.Type: GrantFiled: July 23, 2004Date of Patent: January 30, 2007Inventor: Bruce W. Smith
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Patent number: 7170589Abstract: The present invention is directed toward a system to vary dimensions of a substrate, such as a template having a patterned mold. To that end, the system includes a substrate chuck adapted to position the substrate in a region; a pliant member; and an actuator sub-assembly elastically coupled to the substrate chuck through the pliant member. The actuator assembly includes a plurality of lever sub-assemblies, one of which includes a body lying in the region and spaced-apart from an opposing body associated with one of the remaining lever sub-assemblies of the plurality of lever sub-assemblies. One of the plurality of lever assemblies is adapted to vary a distance between the body and the opposing body. In this manner, compressive forces may be applied to the template to remove unwanted magnification or other distortions in the pattern on the mold. The pliant member is configured to attenuate a magnitude of resulting forces sensed by the substrate chuck generated in response to the compressive forces.Type: GrantFiled: June 1, 2005Date of Patent: January 30, 2007Assignee: Molecular Imprints, Inc.Inventors: Anshuman Cherala, Byung-Jin Choi, Pawan K Nimmakayala, Mario J. Meissl, Sidlgata V. Sreenivasan
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Patent number: 7170590Abstract: A distribution optical fiber sensor system measures distortion and temperature of a structure with a high spatial resolution. The system has an optical fiber on an object to be measured. A light source emits a first pulse light having a pulse width longer than a transient response of an acoustic phonon and a second pulse light after a time interval during which vibration of the acoustic phonon is maintained thereby supplying the pulse lights to the optical fiber. A detector detects scattering gain spectra of a Brillouin-scattered light created in the optical fiber by the second pulse light at intervals corresponding to twice the time obtained by equally dividing the pulse width of the second pulse light. A controlling/calculating unit calculates distortion and/or temperature based on the scattering gain spectra for sections of the optical fiber corresponding to the scattering gain spectra at the respective time intervals.Type: GrantFiled: November 1, 2002Date of Patent: January 30, 2007Inventor: Kinzo Kishida
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Patent number: 7170591Abstract: The present invention provides a blood treatment device and methods of blood treatment to provide an individual patient with the most suitable blood treatment and reduced treatment duration. Specifically, the invention provides a blood treatment device comprising a treating means 11 that treats blood collected from a patient; a measuring means 12 that measures parameters of the patient's blood and indicates blood condition; a controlling means 13 that controls the treatment procedures based upon the blood parameters; a storing means 15 that records an ideal patient-specific blood parameter curve for the treatment duration; and a directing means 14 that directs the control by the controlling means 13 so that the measured blood parameters approximate to the ideal blood parameter curve by comparing the measured blood parameters with the ideal blood parameter curve recorded by the storing means 15.Type: GrantFiled: July 18, 2003Date of Patent: January 30, 2007Assignee: Nikkiso Co. Ltd.Inventors: Takayuki Ohishi, Yoshihiro Mori
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Patent number: 7170592Abstract: The present invention is directed to a method of inspecting a curved object comprising the steps of acquiring inspection image data of a curved object using a detector, generating adjusted image data by adjusting the inspection image data, and comparing the adjusted image data with digitally generated image data of a predetermined image. In one embodiment, golf balls are inspected using a line scan camera and a line of coplanar and parallel, diffuse light that uniformly illuminates the camera's scan line. A method of digitally filtering brightness in a digital image is also disclosed.Type: GrantFiled: March 10, 2004Date of Patent: January 30, 2007Assignee: Acushnet CompanyInventors: Thomas L Mydlack, Paul A Furze