Abstract: A liquid crystal display device prevents an occurrence of a remaining retardation in an electrically controlled birefringence (ECB) mode liquid crystal panel by attaching first and second polarizing plates to upper and lower sides of the liquid crystal panel, and by forming an optical viewing angle compensation film between the first and/or second polarizing plates. In one embodiment, the ECB mode liquid crystal panel includes first and second substrates, first and second orientation films respectively being at the first and second substrates and oriented opposite to each other, and a liquid crystal layer formed between the first and second substrates. A first polarizing plate is formed at an outer surface of the first substrate. A second polarizing plate is formed at an outer surface of the second substrate. A compensation film is formed between the panel and the first polarizing plate, and/or between the panel and the second polarizing plate.

Abstract: A LCD device and a manufacturing method thereof are disclosed. The LCD is characteristic of the electrode layer having no alignment layer disposed thereon. On this structure, the electrode layer of the positive and negative electrodes are adjacent to the liquid crystal molecules in the liquid crystal layer, and the electric field produced therebetween and also the structure for isolating the alignment layer in this region can avoid the disclination of the liquid crystal molecules caused by the transverse electric field produced between the electrodes so as to improve the optical efficiency of the LCD device. The manufacturing steps thereof includes providing a first substrate and a second substrate, forming a second alignment layer and a patterned second electrode layer on the second substrate simultaneously or sequentially, injecting liquid crystal to form a liquid crystal layer, and fabricating to form a liquid crystal display cell.

Abstract: A liquid crystal display panel includes an upper alignment film and a lower alignment film positioned with liquid crystals therebetween to allow the liquid crystals to be aligned in a designated direction, and at least one of the upper and lower alignment film includes a first alignment film, and a second alignment film disposed on the first alignment film with holes for partially exposing the first alignment film. Liquid crystals in an area corresponding to the holes are aligned in a first direction by the first alignment film, and remaining liquid crystals are aligned in a second direction by the second alignment film.

Abstract: A liquid crystal optical element including a pair of coupled substrates each having an electrode, and a liquid crystal layer between the substrates, the liquid crystal layer including an adjustable part and a non-adjustable part, the adjustable part containing liquid crystal having a dielectric anisotropy and being responsive to an electric field that is to be generated by applying a voltage between the electrodes so that orientations of liquid crystal molecules and a resulting refractive index distribution in the adjustable part change in accordance with the electric field, whereas orientations of liquid crystal molecules in the non-adjustable part is substantially fixed so that the non-adjustable part is substantially non-responsive to the electric field.

Abstract: An in-plane switching mode liquid crystal display device includes a first substrate and a second substrate, gate lines and data lines intersecting each other on the first substrate and defining red, green, blue sub-pixels, and viewing angle controlling sub-pixels, thin film transistors at the intersections of the gate lines and the data lines, first pixel electrodes and first common electrodes spaced apart from each other and alternately disposed at the red, green, and blue sub-pixels, second pixel electrodes at the viewing angle controlling sub-pixels, second common electrodes on the second substrate and at positions corresponding to the second pixel electrodes, and a liquid crystal layer between the first substrate and the second substrate.

Abstract: A multi-domain vertically aligned liquid crystal display includes an active element array substrate, an opposite substrate, and a liquid crystal layer disposed between the two substrates. The active element array substrate has a plurality of pixel units. Each pixel unit has a pixel electrode and the pixel electrode includes a first alignment pattern and a second alignment pattern. The opposite substrate includes a plurality of common electrodes and each common electrode includes a third alignment pattern and a fourth alignment pattern. The liquid crystal layer proximal each pixel unit is divided into a first domain set and a second domain set, wherein the first alignment pattern and the third alignment pattern correspond to the first domain set, and the second alignment pattern and the fourth alignment pattern correspond to the second domain set.

Abstract: A liquid crystal display (LCD) device using the COA process. The LCD device includes a passivation layer formed on metal wires in the wire-collecting area for preventing metal wires from exposure. Or, the LCD device includes an insulation layer formed between outer leads in the outer lead bonding (OLB) area for improving insulation among the outer leads.

Abstract: A liquid crystal display device having a high quality able to prevent deterioration etc. of a liquid crystal panel even when a liquid crystal panel used in a light valve of a projector etc. is operated under a high temperature and high humidity environment and a projection type display apparatus using the liquid crystal display device, wherein a liquid crystal layer 16 is sandwiched between a pair of substrates formed by bonding a TFT array substrate 11 and a counter substrate 12 by a sealing material 15 so that they face each other across a predetermined gap, the sealing material 15 contains a nonconductive filler having a mean particle size of less than 0.5 ?m, a liquid crystal material used in the liquid crystal layer 16 is set in its refractive index anisotropy ?n at room temperature to 0.16 or more, and a cell gap d of an interval between the TFT array substrate 11 and the counter substrate 12 is set at 3 ?m or less.

Abstract: A liquid crystal display panel includes two substrates fixed together by a seal member with their main surfaces opposed to each other, liquid crystal sealingly stored in a region surrounded by the two substrates and the seal member, and a plurality of columnar spacers arranged in a region surrounded by the two substrates and the seal member. A number density of the columnar spacers in a low-density region near the inner side of the seal member is smaller than that in a high-density region inside the low-density region. The substrate with the spacer has the substrate and the spacer formed on the substrate. The spacer has at least a first spacer portion, and a second spacer portion formed above the first spacer portion. An upper portion of the first spacer has a larger diameter than a bottom of the second spacer portion.

Abstract: An array substrate comprises a substrate, an underlayer including a plurality of switching elements formed on the substrate, a plurality of colored layers formed on the substrate and the switching elements, and a plurality of pixel electrodes provided on the colored layers and connected to the switching elements via contact holes formed in the colored layers, and a plurality of columnar spacers provided on the underlayer. The underlayer includes a plurality of same-structure portions extending perpendicular to the substrate. The columnar spacers are provided on the same-structure portions.

Abstract: A matrix-addressed type liquid crystal display apparatus having switching devices such as TFTs is provided, featuring that an increased effective voltage can be applied without causing hysteresis in V-T characteristics. Namely, by substantially increasing a value of an applicable voltage in excess of which a display defect starts to appear, a high numerical aperture and a high contrast ratio have been achieved at the same time. In the LCD apparatus of the present invention, a gap between adjacent reverse tilt domains each formed in a portion of a pixel which is arranged corresponding to an arbitrary pixel electrode becomes broader than a minimum gap between adjacent pixel electrodes corresponding thereto, or a thickness of a liquid crystal cell in the portion between adjacent reverse tilt domains is set thinner than a thickness of a liquid crystal cell in the portion of the pixel.

Abstract: A display substrate includes a transparent plate and a liquid crystal dispersion adjuster. The display substrate includes a display area and a peripheral area surrounding the display area. The liquid crystal dispersion adjuster is formed in the peripheral area to modify the movement of the liquid crystal. The dispersion adjuster includes enhancing parts and a suppression part. The enhancing parts increase the dispersion of the liquid crystal, and the suppression part reduces the dispersion of the liquid crystal, thereby reducing non-filling area of the liquid crystal and the contamination of a seal-line.

Abstract: A sealant dispensing apparatus and a method for manufacturing an LCD device using the same is disclosed, to decrease manufacturing time of an LCD device with low manufacturing cost, wherein the sealant dispensing apparatus comprises a roll; a sealant-receiving cavity formed inside the roll; a sealant outlet connected with the sealant-receiving cavity; and a sealant inlet connected with the sealant-receiving cavity.

Abstract: An eyeglass frame that includes a frame body having a lens support portion, and first and second earstem portions, which extend rearwardly from first and second lateral sides of the lens support portion, respectively. The frame body includes a first member and a second member. The first and second members are partially coextensive, and each of the first and second members define a portion of an outward-facing surface of the eyeglass frame.

Abstract: A auxiliary spectacles provided with a clamping mechanism includes a mechanism body, onto the ends of which the auxiliary spectacles lenses are mounted. The mechanism body between the two lenses of the auxiliary spectacles may be provided with an elastic pushing clamping body. The elastic pushing clamping body may include a bending foot body provided with at least one bending foot extending backward and then bending downwardly is fixed to the mechanism body, and the mechanism body may be provided with a pushing slider which may be pressed elastically, and the rear end of the pushing slider may be pushed elastically against the inner sidewall of the bending foot. The auxiliary spectacles may be used, assembled and disassembled more easily, and/or clamped more firmly; and may be compatible with other kinds of spectacles without adjustment.

Abstract: A spectacle far-sight lens has a flexible property gotten from its material, silica gel, and having a sucking surface formed on an inner surface or an outer surface. Then the far-sight lens can be temporarily attached on an outer surface or an inner surface of a lower section of a lens of a pair of conventional eye-protective spectacles or sunglasses by pressed and sucking thereon when a person needs it for seeing things near and takes it down if the person does not use it.

Abstract: Eyeglasses with lenses changeable include an elongate frame, a nose pad supporter, a lens set and two nose pads. The frame is provided with a lengthwise fitting groove for an upper lengthwise side edge of the lens set to fit therein so that the lens set may be combined removably with the frame. Then different lens sets may be assembled with or disassembled from the frame for changing lens sets if wanted. The assembling or disassembling of the lens set with the frame is effected by engagement of a protrusion formed on an engage block and an engage hole with a notch formed in the lens set. The engage block is formed integral with the nose pad supporter, which is formed integral with the frame. So the lens set is easily assembled with or disassembled from the frame.

Abstract: The invention relates to a spectacle frame with a rim (1) and with one temple (2) each left and right of it hinged to a connecting element (6) of the rim (1). The temple (2), at its mount proximal end, is provided with three leaf springs (3, 4, 5). The two outer leaf springs (3, 4) comprise hinge elements (10) with which hinge elements (9) of the connecting element (6) interact, thereby forming a swivel joint. When the temple (2) is folded in, the outer leaf springs (3, 4) of the temple (2) are displaced outward from the plane of the connecting element (6) via an abutment (11) of the connecting element (6) for the center leaf spring (5) of the temple (2).

Abstract: Disclosed therein is a spring hinge for eyeglasses, which is rotatably connected to an eyeglasses temple or an eyeglasses rim via a hinge pin (30). The eyeglasses spring hinge includes: a first member (10) having resilient means (40) protruding toward the hinge pin (30); and a second member (20) having a cam (d) which is in resilient contact with the resilient means (40). The first member (10) includes: a pin hole (31) formed on an end portion thereof for rotatably inserting the hinge pin (30) thereto; insertion spaces of a predetermined width cut-formed at the center thereof for rotatably combining the second member (20) thereto; and an insertion hole (a) formed on a side thereof between the insertion spaces, whereby an end portion of the resilient means (40) is fittingly fixed to the insertion hole (a).

Abstract: The invention relates to a pair of glasses comprising a temple (1) and a connecting element (8) pertaining to a rim (7), both on the left side and the right side of the pair of glasses. The connecting element (8) is provided with joint elements (11, 13) which co-operate with joint elements (6) provided on the rim end of the temple (1), forming a swivel joint. The temple (1) comprises at least two fingers (2, 3) which extend in a longitudinal direction on the rim end thereof, the fingers exerting a spring action in the direction of the articulated axis of the swivel joint.

Abstract: A progressive multifocal ophthalmic lens has a complex surface having a prism reference point, a fitting cross, a progression meridian having a power addition greater than or equal to 1.5 diopters. The lens has, under conditions when being worn: a reduced root mean square, normalized to the addition prescription, of less than 0.65 microns per diopter in a zone delimited by a circle centred on the prism reference point and with a diameter corresponding to a sweep of vision of 80°, a progression length of less than or equal to 25°, and a difference in normalized reduced root mean square between pairs of symmetrical points relative to a vertical axis passing through the fitting cross of less than 0.12 microns per diopter in a zone delimited by a semi-circle centred on the fitting cross and with a radius corresponding to raising viewing by 25°.

Abstract: The present invention discloses methods of obtaining ophthalmic lens capable of reducing the aberrations of the eye comprising the steps of characterizing at least one corneal surface as a mathematical model, calculating the resulting aberrations of said corneal surface(s) by employing said mathematical model, selecting the optical power of the intraocular lens. From this information, an ophthalmic lens is modeled so a wavefront arriving from an optical system comprising said lens and corneal model obtains reduced aberrations in the eye. Also disclosed are ophthalmic lenses as obtained by the methods which are capable reducing aberrations of the eye.

Abstract: Eye-tracking devices and method of operation may utilize a magnetic article associated with an eye and a sensing device to detect a magnetic field generated by the magnetic article.

Abstract: A method for diagnosing impairments of a subject's gaze stabilization system is provided. The method includes measuring the subject's static visual acuity to obtain an assessment, setting at least one test parameter based on the assessment, measuring the subject's dynamic visual acuity using the test parameters to obtain a first dynamic measurement and a second dynamic measurement, and determining an impairment of the subject's gaze stabilization system using the assessment and the first and second dynamic measurements.

Abstract: A measurement probe for measuring interocular and biomechanical properties pressure is provided. The probe includes an array sensor associated with one end of a housing for application to a corneal area such that an area smaller than the diameter of the array sensor is applanated when area calculations are made and force measurements are taken. A computer component is in communication with the array sensor such that data is received and recorded from the array sensor. A display is provided for displaying the data associated with the interocular pressure and biomechanical properties taken using the array sensor. A methodology is also provided for determining the interocular pressure and biomechanical properties associated with a corneal area.

Abstract: A goggle based light-weight VOG system includes at least one digital camera connected to and powered by a laptop computer through a firewire connection together with an integral visual light stimulus source. The digital camera may digitally center the pupil in both the X and Y directions. A calibration mechanism may be incorporated onto the goggle base. An EOG system may also be incorporated directly into the goggle. The VOG system may track and record 3-D movement of the eye, track pupil dilation, head position and goggle slippage. An animated eye display provides data in a more meaningful fashion. The VOG system is a modular design whereby the same goggle frame or base is used to build a variety of digital camera VOG systems.

Abstract: A laser indirect ophthalmoscope (LIO) apparatus for photomedical treatment and/or diagnosis is presented. The LIO apparatus allows multiple spot ophthalmic surgery to be performed in a wider range of patient positions and less intrusively than currently available methods. The LIO apparatus utilizes a separate or integral beam multiplier that generates one or more optical beams via spatial and/or temporal separation, and an optical system that conditions and directs the one or more optical beams to a target to form a pattern. The LIO apparatus includes a headset, and is therefore wearable by the user (e.g., a physician).

Abstract: A method of providing an eye diagnosis. The method includes displaying stimuli to a patient, receiving indications of locations in which the stimuli were perceived by the patient, analyzing the spatial relationship between at least some of the received indicated locations and classifying the patient with regard to a retinal related disease, at least partially based on the spatial analysis.

Abstract: The present method describes a new method for the measurement of dark adaptation. The dark adaptation status of subjects may then be used to identify those subjects who are at risk of developing and/or who are currently suffering from a variety of disease states having their clinical manifestations in impaired dark adaptation. The disease states include, but are not limited to, age related macular degeneration, vitamin A deficiency, Sorsby's Fundus Dystrophy, late autosomal dominant retinal degeneration, retinal impairment related to diabetes and diabetic retinopathy. An apparatus for administering the test method described is also provided.

Abstract: The liquid crystal lens of the invention has an optically transparent liquid crystal plate which includes a plurality of liquid crystal pixels divided two-dimensionally, and a liquid crystal drive section which selects only a part of the liquid crystal pixels simultaneously and controls voltage application to the selected liquid crystal pixels. The liquid crystal drive section performs voltage application control to the selected liquid crystal pixels so as to form, in the liquid crystal plate, a refractive index distribution of light which transmits the liquid crystal plate.

Abstract: A film guide for a movie camera having an image window which is arranged in the recording beam path of the movie camera, a gripper platform which is supported on the image window, between whose mutually facing film planes a film channel is formed through which the movie film is moved by means of a film transport mechanism, and a spacing window which is connected to the gripper platform. The spacing window is supported on the image window in such a manner that the film channel narrows to form a film gap between the mutually facing film planes of the image window and the spacing window.

Abstract: A fold mirror for a projection display system is designed to lessen a perceived variation in white color balance of light reflected across the mirror wherein the white light is comprised of sub-beams of orthogonal polarization states. The mirror comprises a metal reflective layer and a plurality of optically transparent layers, wherein thicknesses and materials of the optically transparent layers are such that wavelength-averaged reflectance for p-polarized incident green light varies by less than 1%, wavelength-averaged reflectance for s-polarized blue light varies by less than 1.5%, and wavelength-averaged reflectance for s-polarized red light varies by about 4% over a range of angles of incidence between 0 and 65 degrees.

Abstract: An electro-optical projection system includes a polarizer, a reflective light modulator, an analyzer, and a compensation element. The polarizer polarizes an illumination beam to form a polarized illumination beam. The reflective light modulator receives the polarized illumination beam along a first optical path, modulates the polarized illumination beam to form an imaging beam, and reflects the imaging beam along a second optical path. The compensation element is disposed in the polarized illumination beam and the imaging beam to compensate for polarization aberrations resulting from the birefringent property of the material of the reflective light modulator. The compensation plate has a retardation generally equal in magnitude and opposite in sign as compared to the retardation of the liquid crystal material of the reflective light modulator.

Abstract: The invention relates to an arrangement for 3D image presentation, comprising a visual display device and an optical assembly (5) provided with a great number of optical elements, preferably filter elements, wherein, due to the positions of the optical elements, bits of partial information of a first selection of views of a scene/an object are visible to one eye, and bits of partial information of a second selection of these views are visible to the other eye of an observer. The problem of the invention is solved by detachably connecting the visual display device and the optical assembly (5) by means of a fastening device. Fastening the optical assembly (5) to the visual display device converts the image display from monoscopic into autostereoscopic, and vice versa.

Abstract: Exemplary embodiments provide a projection-type display apparatus, which can address or realize a reduction in weight and size, a reduction in power consumption, and a reduction in noise, and address or realize a reduction in price, and a control method for the projection-type display apparatus, as well as a control program for the projection-type display apparatus. The projection-type display apparatus includes a solid-state light source that emits light, a mirror device that controls an emitting direction of the incident light to thereby subject the incident light to temporal modulation, and a projecting device that projects the modulated light.

Abstract: A light-valve system adapted to recycle light reflected from the light-valve in order to improve the brightness of the image. Illustratively, this reflected light is the dark-state light of an image. The system includes a light-valve, which is optically coupled to a polarization discriminator; and a light recycling device, which selectively alters the polarization state of light reflected by the polarization discriminator back into the system, wherein the reflected light is transmitted to an imaging surface increasing the brightness of an image.

Abstract: An optical device includes: a plurality of light modulating devices for forming optical images by modulating a plurality of color lights into image information for each color light and a color combining optical device having a plurality of light flux incoming end surfaces opposing the respective light modulating devices for combining optical images formed by the respective light modulating devices, wherein the optical device includes a first fixed member and a second fixed member for mounting the light modulating devices so as to face the light flux incoming end surfaces of the color combining optical device, wherein the first fixed member includes a plate-shaped first base portion mounted to oppose the light flux incoming end surface and having an opening for transmitting the light flux and a pair of first upright strips extending upright from an outer peripheral edge of the first base portion toward the light flux incoming side and oppose to each other, wherein the second fixed member includes a plate-shape

Abstract: An adjusting device for positioning an integration rod within an optical engine module is provided. The optical engine module includes a casing having four sidewalls defining an optical path. The integration rod is disposed in the optical path. Each sidewall has a screw hole. The adjusting device includes two adjusting screws extending through the screw holes in two adjacent sidewalls of the casing in order to abut against the integration rod, thereby adjusting the position of the integration rod in the optical path and two positioning screws extending through the screw holes in remaining two adjacent sidewalls of the casing to abut against the integration rod for immobilizing the integration rod within the casing.

Abstract: A projection lighting device includes a light source unit having at least two frames each with a light emitting diode and a reflection member is connected to the light source unit. The reflection member includes at least two polyellipsoid surfaces so as to reflect the light beams from the light emitting diodes. The reflection member has two first flat surfaces in two ends thereof. A lens is connected to the light source unit and has two second flat surfaces in two ends thereof. The light source units can be arranged to be close to each other, the reflection member and the lens each have two flat surfaces such that the lighting device is compact in size.

Abstract: A projection type display apparatus includes a housing having a first side on which an air intake opening is arranged and a second side on which an air exhaust opening is arranged, a light source for supplying light, and a light valve device which modulates the light output from the light source. A first fan is provided which draws air from the air intake opening into the housing, and a first ventilation path is coupled with the air intake opening so as to lead air flow from the air intake opening toward a lower portion of the light valve. A second ventilation path is formed from the lower portion of the light valve to an upper portion of the light valve, and a second fan is provided which draws out air flowing from the second ventilation path through the air exhaust opening to outside of the housing.

Abstract: A projector includes: a light source device; a light modulation device that modulates a luminous flux output from the light source device; a projection optical device that magnifies and projects the luminous flux modulated in the light modulation device; and an exterior casing that accommodates the light source device, the light modulation device, and the projection optical device arranged within, the projector is arranged so as to be installed in a desktop mount position in which the projector is mounted on a predetermined location and a ceiling suspension position in which the projector is provided opposite in the vertical direction relative to the desktop mount position, the light source device includes a light source device main body having a light source lamp in which discharge emission is performed between a pair of electrodes and an elliptic reflector having a nearly ellipsoidal reflection surface and converging and outputting a luminous flux radiated from the light source lamp in a certain direction,

Abstract: A projector includes a housing, a first light source installed inside the housing for generating light beams, a second light source installed inside the housing for generating light beams, a first refractive element installed inside the housing for refracting the light beams generated by the first light source, a second refractive element installed inside the housing for refracting the light beams generated by the second light source to a direction parallel to a direction of the light beams refracted by the first refractive element substantially, a light pipe installed inside the housing for uniformizing light beams from the first refractive element and the second refractive element, and an image device installed inside the housing for processing the uniformized light from the light pipe and for projecting the processed light to form an image.

Abstract: A method and system for combining light emitted by dispersed light sources for use in a projection display or similar system. A plurality of elongated and tapered light integrators are placed side by side forming an array, each having at their small input end a light source, such as an LED. Light collimated by each light integrator is further collimated by a convex lens disposed immediately at the output end of the light integrator. From the convex lenses, the light falls upon an array integrator, preferably a fly-eye type integrator, and passes through it to a second array integrator. Light emerging from the second array integrator is then passed through one or more relay lenses and falls upon a light modulator, such as a digital mircomirror device (DMD). The modulated light beam then passes through a projection lens and onto a visual image display screen. The display screen may, for example, be the screen of a high definition television (HDTV).

Abstract: An illumination apparatus illuminating an objective illumination region comprises a plurality of illuminants having light-emitting surfaces radiating diffused light, an illuminant substrate in which the illuminants are disposed so as to be set in array on the circumference, at least one optical member configured to guide the diffused light to the objective illumination region, a movable section configured to drive the optical member so as to be rotatable around the center of the circumference serving as a rotation center, and a lighting control section configured to control a light-emitting timing of the plurality of illuminants. The movable section and the lighting control section operate together such that the quantity of light per unit time of the diffused light guided to the objective illumination region is within a predetermined range.

Abstract: An image projection module within a housing accessory is operative for causing selected pixels in a raster pattern to be illuminated to produce an image at different image planes of VGA quality. A personal media player is connected to the housing accessory and the image projection module to supply image signals for the image to be projected.

Abstract: A portable screen assembly includes a first side support connected to a fabric, a second side support connected to the fabric, and a center support assembly. An expandable support brace is also included in the portable screen assembly. The expandable support brace is connected to the center support assembly, the first side support, and the second side support. A portable screen assembly capable of reproducing sound includes a first side support, a second side support, and a center support assembly. A speaker capable of reproducing sound is incorporated within at least one of the first side support, the second side support, and the center support assembly.

Abstract: An exposure system includes an exposure part for irradiating a resist film formed on a substrate with exposing light through a mask with a liquid provided on the resist film. The system also includes a liquid supply part for supplying the liquid to the exposure part. The liquid supply part includes a plurality of liquid units respectively containing a plurality of liquids, and a selection unit for selecting one liquid unit from the plurality of liquid units and supplying a liquid to the exposure part.

Abstract: A method of configuring a transfer of an image of a pattern onto a substrate with a lithographic apparatus is presented. The method includes selecting a plurality of parameters including a pupil filter parameter; calculating an image of the pattern for the selected parameters; calculating a metric that represents a variation of an attribute of the calculated image over a process range; and adjusting the plurality of parameters based on a result of the metric.

Abstract: Methods and apparatus for using a flow of a relatively cool gas to establish a temperature gradient between a reticle and a reticle shield to reduce particle contamination on the reticle are disclosed. According to one aspect of the present invention, an apparatus that reduces particle contamination on a surface of an object includes a plate and a gas supply. The plate is positioned in proximity to the object such that the plate, which has a second temperature, and the object, which has a first temperature, are substantially separated by a space. The gas supply supplies a gas flow into the space. The gas has a third temperature that is lower than both the first temperature and the second temperature. The gas cooperates with the plate and the object to create a temperature gradient and, hence, a thermophoretic force that conveys particles in the space away from the object.

Abstract: An exposure apparatus includes a vacuum chamber, a load-lock chamber disposed between the vacuum chamber and outside the exposure apparatus, a reticle cassette configured to hold a reticle, a conveying unit configured to convey the reticle cassette between the vacuum chamber and the load-lock chamber, and an opening and closing unit configured to open and close the reticle cassette. The opening and closing unit is disposed within the vacuum chamber.