Abstract: [Problem] To provide an electronic throttle valve control system which can prevent rapid rotation of a throttle valve when the control system has a failure. [Solution] There are provided a throttle valve 10 for controlling the amount of intake air to an internal combustion engine, an electric motor 20 for driving the throttle valve 10, and a control section 21 for controlling the electric motor 20. The throttle valve has an urging mechanism 31 for urging the throttle valve 10 in the closing direction. The control section 21 shifts the electric motor 20 to a regenerative mode when the control system has a failure to control the speed at which the throttle valve 10 is rotated in the closing direction by the urging force of the urging mechanism 30. The throttle valve 10 is therefore rotated slowly in the closing direction by the urging force of the urging mechanism 30 and then held in a predetermined opening position 10b.

Abstract: A method of operating an internal combustion engine includes the steps of: igniting a diesel fuel and air mixture in a combustion cylinder using spark ignition; sensing knock in the combustion cylinder; adjusting a spark timing and a fuel injection amount in the combustion cylinder dependent upon the sensed knock; and igniting the diesel fuel and air mixture in the combustion cylinder using compression ignition.

Abstract: A fuel injection apparatus and a fuel injection control method for an internal combustion engine which performs a direct injection operation for injecting fuel from an injector for cylinder injection into a cylinder and a port injection operation for injecting fuel from an injector for intake port injection into an intake port. When a request to change from fuel injection from the injector for cylinder injection to fuel injection from the injector for intake port injection is made, the fuel injection mode of a particular cylinder is changed at a point of time according to the changing request for the particular cylinder. Accordingly, transition to the optimum fuel injection mode is performed in a short time, and a required amount of air-fuel mixture can be obtained. It is therefore possible to suppress fluctuation of torque and deterioration of emission.

Abstract: A motor-driven supercharger of the invention is provided with a cooling fluid flow rate adjusting device (a flow rate adjuster (37) and a controller (40)) capable of adjusting a flow rate of a cooling fluid. On the basis of the flow rate adjuster (37) and the controller (40), a flow rate of a cooling fluid (41) is set to a first flow rate (a large flow rate) for cooling an electric motor (20) in a state where a temperature difference obtained by subtracting a temperature of the cooling fluid (41) from a temperature of the electric motor (20) is equal to or more than a predetermined temperature equal to or more than zero, and the flow rate of the cooling fluid (41) is set to a second flow rate (a small flow rate) which is smaller than the first flow rate and is for suppressing a heating effect to the electric motor (20) in a state where the temperature difference is lower than a predetermined temperature equal to or more than zero.

Abstract: A gas-mixture-ignition-time estimation apparatus for an internal combustion engine estimates the temperature of a premixed gas mixture for PCCI combustion (i.e., cylinder interior temperature Tg), while relating it to the angle CA, on the basis of a state quantity of the cylinder interior gas at the time of start of compression (CAin) (heat energy of the cylinder interior gas at the time of start of compression), the amount of a change in the state quantity of the cylinder interior gas attributable to compression in a compression stroke (minute piston work), and the heat generation quantity of a cool flame generated in PCCI combustion prior to autoignition (hot flame) (cool flame heat generation quantity Aqlto). A time when the cylinder interior temperature Tg reaches a predetermined autoignition start temperature Tig is estimated as an autoignition start time (Caig) of the premixed gas mixture related to PCCI combustion.

Abstract: A fuel-injection system for injection of fuel into an internal combustion engine includes at least one fuel injector and a first fuel-distributor line which is connected to the at least one fuel injector. A second fuel-distributor line is provided which is connected to the at least one fuel injector via an individual corresponding lance.

Abstract: A control system for controlling a device, the device having at least two functional elements, each functional element being controlled by a control signal, is disclosed in the present disclosure. The control system may include detecting means operatively connected to the device and configured to monitor the operation of the device, and to generate a signal indicative of an operating condition of the device. The control system may also include a control module operatively connected to the at least two functional elements and the detecting means, and configured to switch the two control signals applied to the respective functional elements in response to the signal generated by the detecting means.

Abstract: A bush incorporated in a common rail is formed with a smallest diameter orifice having a small inner diameter and an adjacent orifice having an inner diameter larger than that of the smallest diameter orifice on an inner peripheral face of the bush. A press-fitted portion, which is press-fitted into an inside-outside communication hole, and a non-press-fitted portion, which has a smaller outer diameter than the press-fitted portion, are formed on an outer peripheral face of the bush. The smallest diameter orifice and the press-fitted portion are deviated from each other in an axial direction of the bush to prevent an overlap in a radial direction of the bush. Thus, even if the bush is tightly press-fitted into the inside-outside communication hole, decrease of the inner diameter of the smallest diameter orifice can be averted.

Abstract: A control system for controlling a device, the device having at least two functional elements, each functional element being controlled by a control signal, is disclosed in the present disclosure. The control system may include detecting means operatively connected to the device and configured to monitor the operation of the device, and to generate a signal indicative of an operating condition of the device. The control system may also include a control module operatively connected to the at least two functional elements and the detecting means, and configured to switch the two control signals applied to the respective functional elements in response to the signal generated by the detecting means.

Abstract: A hydraulic control apparatus for an automatic transmission comprises a linear solenoid valve for outputting a control pressure, a primary regulator valve for regulating a line pressure in accordance with the control pressure, and a secondary regulator valve for regulating a secondary pressure in accordance with the control pressure, the secondary pressure being supplied to a lock-up clutch and a torque converter. A spool of the secondary regulator valve is formed to comprise a large diameter portion and a small diameter portion, thereby eliminating the need for components such as a sleeve, and the line pressure can be input into an oil chamber formed between the large diameter portion and small diameter portion.

Abstract: A fuel delivery pipe capable of reducing a pressure pulsation at the time of a fuel injection due to injection nozzles, preventing vibrations and noises at an underfloor pipe arrangement, and turning down a radiate sound from the fuel delivery pipe, wherein a flexible absorbing wall surface 10 formed on a wall surface of a fuel delivery body 1 is loosened due to internal pressure changes to render internal volume of the fuel delivery body 1 increasable, ?L/?{square root over ( )} V determined by sonic speed ?L of fuel flowing through the fuel delivery body 1 and the internal volume V of the fuel delivery body 1 is set as 20×103 (m?0.5·sec?1)??L/?{square root over ( )} V?85×103(m?0.5·sec?1) while a ratio ?L/?H of equivalent sonic speed ?H in a high frequency area to the sonic speed ?L of the fuel is set as ?L/?H?0.

Abstract: To effectively reduce operational noise generated by vibration of the fuel injection valve with a fuel injection valve installation structure of an engine. In the structure, an installation hole is formed in an engine component member that constitutes a part of an engine. The installation hole has an annular shoulder portion, which is formed in the middle portion thereof, and which faces the exterior side. The fuel injection valve is held between the annular shoulder portion and a supporting member attached to the engine component member. A first damper, with high vibration-damping properties, is set between an annular shoulder portion and a fuel injection valve. A second damper, with high vibration-damping quality, is set between a supporting member and the fuel injection valve.

Abstract: A controller for determining drive pulse structures for controlling the operation of control valves of a fuel-injected engine, the engine comprising a first injector and at least one further injector, and the controller comprising: inputs for receiving fuel value data relating to the quantity of fuel injected per injection cycle per injector for the at least one further injector; outputs for outputting a control function for controlling the injector valves of the first injector, the control function being derived from a control valve drive pulse structure; a processor for controlling the control function output from the controller wherein the processor is arranged to (i) progressively modify the control valve drive pulse structures, (ii) to detect injection events within the first injector by measuring changes in the fuel value data relating to the at least one further injector and (iii) to thereby determine the minimum width of the drive pulse structures that permit injection to take place.

Abstract: An engine control apparatus which can ensure and maintain a stability and constant exhaust emission characteristics even in such a condition that a nature of a fuel used as present is unsure, and which is robust among different fuel natures, comprising a plurality of different nature fuel quantity computing means and an operating condition detecting means for detecting an operating condition of an engine, wherein a first nature fuel quantity computing means among the plurality of different nature fuel quantity computing means is used as a fuel quantity computing means during an engine start, and the first nature fuel quantity computing means is forcibly changed over into a second nature fuel quantity computing means if an engine operating condition detected by the operating condition detecting means satisfies a predetermined term.

Abstract: A fuel tank assembly for small engines having a vapor storage canister disposed within the tank in the vapor dome with an atmospheric vent line to the canister through the tank wall and a canister vapor outlet line also through the tank wall. A liquid/vapor discriminator is disposed in the vapor dome of the tank with the discriminator outlet connected to the canister inlet. A fuel filler tube extends through the tank wall to a desired depth to prevent vapor from escaping through the filler tube when the fuel level rises to the lower end of the filler tube and alerts the operator by rapid rise of fuel in the filler tube.

Abstract: A vaporized fuel system comprising a mixing chamber, a gaseous fuel component for combining with a liquid fuel component in the mixing chamber. The gaseous fuel component mixes with the liquid fuel component to form a combustible fuel mixture which is thereafter ignited and consumed. An ample supply of additional air, e.g., oxygen, is added to the combustible fuel mixture, during combustion, to ensure substantially complete combustion and consumption of substantially of at least the liquid fuel component.

Abstract: The present invention provides methods and apparatus for premixing fuel and oxidant for combustion. The methods and apparatus may include a two stage vortex, each stage accommodating different flow rate ranges. The vortex pulverizes fuel and optimally mixes the fuel with an oxidant prior to introduction into a combustion chamber. The premixing results in more complete combustion and, consequently, fuel efficiency may be increased and pollution may be decreased. The present invention also enables introduction of fuel and oxidant to an engine without creating any shockwaves in engine cylinders, which may otherwise occur with current fuel injection systems.

Abstract: The present invention is a fuel vaporizer that will greatly increase power and economy in fuel powered engines while producing far less pollution. The present invention has a fuel chamber, air inlet, vibrator and heating element that aerate fuel by vibrating and heating the fuel from a liquid to a more combustible gaseous vapor.

Abstract: An apparatus for a vehicle comprising a compressor and manifold for connection to air inlets of an engine, wherein the manifold has an entry end chamber and the compressor device is located at least partially within the chamber.

Abstract: When conditions for regenerating purifiers are established, a control computer first causes an addition nozzle to supply a reducing agent to a first exhaust path. At this time, the control computer reduces a vane opening degree in a first supercharger and increases a vane opening degree in a second supercharger. Accordingly, the flow rate of exhaust gas discharged to the outside from the first exhaust path is reduced, and the flow rate of exhaust gas flowing to the intake path via a first exhaust gas supply path is increased. Also, the flow rate of exhaust gas discharged to the outside from a second exhaust path is increased, and the flow rate of exhaust gas flowing to the intake path via a second exhaust gas supply path is reduced. As a result, the purifiers are regenerated in a reliable manner, while suppressing variations in the flow rate of exhaust gas supplied to the intake path.

Abstract: An air swirling device comprises a pipe member connected in between an air cleaner and an internal combustion engine; a plurality of swirl-flow ducts spirally formed in the pipe member; and a central-flow duct axially formed in the pipe member and surrounded by the swirl-flow ducts; with each swirl-flow duct being formed by a swirl plate spirally secured to an inside wall of the pipe member and juxtapositionally partially linked to each adjacent swirl plate; whereby upon suction by the engine, the inlet air will be guided and swirled by the plural swirl-flow ducts to form swirling air flow, as accompanied with a central air flow through the central-flow duct, for homogeneously mixing fuel with air for enhancing a complete combustion of fuel to thereby increase the engine performance. The air whirling device may also be modified to be installed between the engine and an exhaust or tail pipe.

Abstract: A paintball gun that operates entirely under a single stage of gas pressure and uses fewer parts thereby resulting in lower manufacturing costs and higher reliability without any significant impact on its firing sequence rate. The paintball gun employs a mechanical spring to reset the ram. Resetting of the ram by a mechanical spring being returned to a less compressed condition, does not appear to have any significant effect on firing and reloading sequence rates as compared to resetting the ram with pneumatic operation. Employing a mechanical spring to reset the ram, reduces the complexity of the pneumatic valve. The less complex pneumatic valve can readily operate under higher gas pressure such as up to 300 psig thereby making it unnecessary to have a second stage of pressure.

Abstract: An electrical control unit preferably can control operation of a paintball gun having a solenoid valve with an input port that receives compressed gas from a compressed gas supply and an output port connected to a pneumatic mechanism. For instance, the electrical control unit can contain a network of electronic components configured to receive an input signal from a trigger-actuated switch and send a signal to the solenoid valve. The solenoid valve can, for instance, direct compressed gas to and/or from the pneumatic mechanism to operate a bolt or firing valve connected to the pneumatic mechanism in response to the signal from the electrical control unit.

Abstract: A barbecue stove includes a bowl for installment on the ground, a food tray for supporting food, a coal tray for supporting coal and an elevator for adjusting the elevation of the coal tray. The food tray is installed on the bowl. The coal tray is positioned in the bowl below the food tray. The elevator is provided between the coal tray and the bowl.

Abstract: A barbeque grill includes a cabinet, and a foldable device including a side frame mounted on the cabinet, and a support plate pivotally mounted on the side frame. Thus, the support plate of the foldable device is expanded outward from and perpendicular to the side frame to increase the placement space of the barbeque grill, thereby facilitating a user employing the barbeque grill. In addition, the support plate of the foldable device is fully folded into and secured in the side frame when not in use, thereby facilitating the user storing and carrying the barbeque grill.

Abstract: The present invention relates to a turning type charcoal roast board, and more particularly, to a turning type charcoal roast board, wherein if exchange of a used roast board is required during roast of meat using a charcoal fire, new roast rods are placed at an opening of a main body of the roast board in such a manner that the roast rods stored in a roast rod-supplying box are fed via a moving means through users simple operation of a control device for controlling the feeding of the roast rods installed on a main body of the charcoal roast board, and roast rods used at the opening of the main board are transferred to and received in a roast rod-receiving box by means of rotation of the moving means. According to the present invention, the roast board can be rapidly exchanged to prevent meat from being burned, and it is possible to eliminate inconvenience in use due to frequent exchange of roast boards.

Abstract: A top plate unit 3 includes a top plate 5 on which an object to be heated is placed, an underframe 4 for holding the top plate 5 placed on an upper surface thereof, the underframe 4 being adapted to be placed on an upper surface of a kitchen counter 9 in a manner in which a lower surface of the underframe 4 is held in contact with the upper surface of the kitchen counter 9, and a decorative panel 6 for covering an upper portion of an outer peripheral edge of the top plate 5. The decorative panel 6 has an inwardly bent portion 8 that has been formed by bending an outer peripheral edge portion of the decorative panel 6 inwardly toward a lower surface of the underframe 4 to hold the outer peripheral edge of the underframe 4.

Abstract: The present invention is directed to a heating unit, such as a fireplace, including an interior housing forming a combustion chamber. The housing includes a top wall, a rear wall and sidewalls defining an exterior housing about the combustion chamber. A burner assembly is positioned to provide combustion to the combustion chamber and a heat-activated shutter is provided in communication with the burner assembly for controlling flow of air into the burner assembly.

Abstract: The invention relates to an industrially useful process for the recovery of sucrose and/or non-sucrose components. The process comprises (i) providing a solution of sugar beet and/or sugar cane origin selected from molasses, sugar juices and liquors, wherein said sugar juices are non-nanofiltered during the process; (ii) subjecting said solution to electrodialysis for removing therefrom inorganic and organic anions and cations and organic acids; (iii) subjecting the electrodialyzed solution to a chromatographic separation for obtaining sucrose and non-sucrose components in separate fractions; and (iv) recovering a product selected from sucrose and non-sucrose components from at least one of said fractions. The invention also relates to the use of electrodialysis for improving the efficiency of chromatographic separation in the industrial recovery of sucrose and/or non-sucrose components.

Abstract: Some embodiments and aspects presented herein provide methods and apparatus for vaporizing and/or mixing medication with air or other gases for oral delivery to a patient. Some methods and apparatus may include breaking liquid medications down to particle sizes no larger than about 1.0 to 3.0 micrometers in diameter. Such small particle diameters can be introduced directly to a patient's bloodstream via the lungs by crossing the alveoli membranes.

Abstract: An aerosol medication delivery apparatus includes a fixed volume holding chamber which is constructed to allow for a uniformly mixed, concentrated bolus of medicated aerosol to be delivered with each breath. The device further includes a universal inlet, so that any standard small volume nebulizer, as well as any standard metered dose inhaler (MDI), may be utilized therewith. Also filtration can be added to address contaminated patient air and aerosol. A one-way valve is positioned in the patient mouthpiece, to help control the loss of aerosol, and thereby reduce waste.

Abstract: A mechanism for the draft of a high frequency atomization device, which has particular application to supporting a cantilever excitation device on the surface of a large amount of operating liquid using a floating support method, thereby enabling a vibratable plate to accurately position on the liquid surface of any height and bring into effect quantitative power. The excitation device is structured from a block piezoelectric ceramic actuator and the vibratable plate, which extends from one side of the actuator and joined thereto using a cantilever method. The excitation device floats on the liquid surface of the operating liquid using a floating support. An operating side of a free end of the vibratable plate maintains a definite directed amount of effect on the liquid surface, and is able to acquire comparable load conditions and bring into effect quantitative power.

Abstract: A pressure support system that comprises a patient circuit, a docking assembly, and a tank. The patient circuit delivers a pressurized flow of breathable gas to a patient. The docking assembly has an inlet and an outlet that is adapted to receive the pressurized flow of breathable gas, and is also adapted to be connected with the patient circuit. The tank is constructed and arranged to be removably connected with the docking assembly, and enables the pressurized flow of breathable gas to pass therethrough. The tank is also adapted to contain a liquid such that a humidity level of the pressurized flow of breathable gas is elevated as the pressurized flow of breathable gas passes therethrough.

Abstract: A headgear for securing and positioning a mask suitable for the treatment of sleep disordered breathing is constructed from a composite including polyurethane foam. It includes a back portion with upper and lower straps connected to the back portion. The straps have relatively narrow strap ends the lower straps are displaced downward with respect to the back portion. A quick release mechanism near the front of the face attaches the headgear to the mask. Additional components can be attached to the straps to alter their elasticity and stiffness.

Abstract: A method of assessing the effectiveness of pulmonary drug delivery, including the steps of: a) providing a drug into an air flow past a sensor including a radiation source and a radiation detector; b) detecting, at the radiation detector, incident radiation over a period of time as a measurement profile; c) quantifying at least one characteristic of the shape of a measurement profile; and d) producing an indication of the effectiveness of pulmonary drug delivery based upon the at least one quantified characteristic.

Abstract: An apparatus and method for resuscitating a patient suffering from cardiac arrest or another condition in which normal circulation has been interrupted. A ventilator is used for delivering a gas mixture to the patient. The ventilator is configured to adjust the partial pressure of CO2 to one or more partial pressures high enough to slow expiration of CO2 from the patient's lungs and thereby maintain a reduced pH in the patient's tissues for a period of time following return of spontaneous circulation.

Abstract: Disclosed is a manually operable volume-adjustable ventilation device. The device includes a reservoir with an inlet mechanism, an outlet mechanism, and a volume adjuster configured to move a volume adjustment limit of the reservoir and change an expressed maximum volume of the reservoir. The reservoir has a body having a plurality of movable walls defining an enclosed volume. The reservoir has an uncompressed state and a compressed state. The walls of the reservoir are movable with respect to each other, such that moving the walls expresses the volume adjustment limit of the reservoir. The walls can be operably connected by movable structures configured such that two adjacent walls are configured to rotate around substantially orthogonal axes with respect to each other when the reservoir moves from an uncompressed to a compressed state. In some embodiments, the movable structures can be hinges, such as snap-fit assembly hinges. Methods of ventilating a patient that involve the device are also disclosed.

Abstract: A system for delivering a supply of pressurized gas to a user may include a blower and a noise suppression portion. The blower may include an intake portion and an outlet portion for supplying the pressurized gas to the user. The noise suppression portion may define a conduit therethrough having an intake portion and an outlet portion in communication with the intake portion of said blower. The noise suppression portion may be moveable between a first configuration and a second configuration such that at least one exterior dimension of the device is reduced when the noise suppression portion is moved from the first configuration to the second configuration.

Abstract: Embodiments of the present invention include products and methods for reducing fractures with the aid of image guidance. In one embodiment, products and methods are directed to reduction for the placement of an intramedullary nail.

Abstract: A belt buckle is provided with a solar cigarette lighter for lighting tobacco products such as cigarettes and cigars. The belt buckle comprises a convex-shaped buckle body with a reflective surface that is configured to reflect the rays of the sun to a focal point above the reflective surface. A positioning mechanism facilitates placement of one end of the tobacco product at the focal point to receive the reflected rays so as to ignite the tobacco product. In a preferred embodiment, the positioning mechanism comprises a base attached to the buckle body and a support member pivotally attached to the base. The positioning mechanism collapses for use as a belt buckle. The base can be provided with detents or other mechanisms to hold the support member upright during use to ignite the tobacco product. The reflective surface can be on the back or front side of the belt buckle.

Abstract: A piston rod installed to a vehicle height adjusting shock absorber includes a body portion having a hollow portion with first and second ends that are open. A step portion extends inwardly into the hollow portion a predetermined length from the first end of the hollow portion, the step portion having a thread formed on an inner surface thereof. A guide member threadly engaged to the step portion to plug the open hollow portion.

Abstract: A smoking article having a tobacco rod of a smokable material and a filter system attached to the tobacco rod of smokable material. The filter system includes a first filter portion and a second filter portion, the second filter portion concentrically positioned with respect to the first filter portion and having a lower resistance to draw than the first filter portion during an initial puff on the smoking article. The second filter portion closes upon contact with the mainstream smoke of the initial puff, such that after the initial puff, the first filter portion has the lower resistance to draw.

Abstract: A catalyst-modified corrugated cigarette paper wrapper comprises a fibrous web, an optional web-filler material supported by the web, and catalyst particles supported by the web and/or the web-filler material. In cigarettes comprising the catalyst-modified corrugated cigarette paper, the corrugations define axially-extending channels that can run the length of a tobacco rod. The corrugations can increase the catalytic efficiency of catalyst particles that are incorporated within the catalyst-modified corrugated cigarette paper wrapper.

Abstract: A non-thermal hairstyling brush for wrapping hair around the brush and holding it in place with a clamp that pivots on the handle. The brush is used for clamping the hair in place on the brush while rotating the brush when drying the hair with a separate hair dryer.

Abstract: An aluminum hair curler comprises: a hollow aluminum tube having a plurality of trenches on the outside thereof; and two terminals having a plurality of dowel pins and a plurality of notches on the outer periphery thereof. The aluminum hair curler is characterized in that the terminals are inserted into the openings of the hollow aluminum tube, respectively. By using the high heat-conductivity aluminum metal, the hair can be shaped rapidly. In addition, the aluminum hair curler can be cleaned easily and used repeatedly, thereby providing easy maintenance and cleanness.

Abstract: Disclosed are apparatus and methods for efficiently and effectively manipulating spreadable materials. Such apparatus and methods may be incorporated for uses such as applying spreadable materials such as hair color to a surface such as the surface of strands of hair for the purpose of highlighting or otherwise coloring the hair. A variety of applicators including varying edges are disclosed, wherein each edge creates a different affect when used for hair highlighting. Furthermore, a hair colorist may select one or more of the disclosed applicators based upon ease of use for the particular hair colorist, personal preference, and/or the type of hair to be colored and/or highlighted. The applicators disclosed herein may be used to paint color on the hair, however, such applicators retain their rigidity during use, are faster-drying, and easier to clean than highlighting brushes known in the prior art.

Abstract: Disclosed are apparatus and methods for efficiently and effectively manipulating spreadable materials. Such apparatus and methods may be incorporated for uses such as applying spreadable materials such as hair color, relaxers, and the like to a surface such as the surface of strands of hair for the purpose of highlighting or otherwise processing hair. A variety of applicators including varying edges, surfaces, tapers, and dimensions are disclosed, wherein each applicator configuration creates a different effect when used for hair processing. Furthermore, a hair stylist may select one or more of the disclosed applicators based upon ease of use for the particular hair stylist, personal preference, and/or the type of hair to be processed. The applicators disclosed herein retain their rigidity during use, are fast-drying, create less waste, and are easy to clean. In one embodiment, a user may tailor the applicator's head design to meet his or her personal needs.

Abstract: Provided is a cleaning process which is simplified and in which a time required for the cleaning process is reduced and which has an excellent cleaning effect. The cleaning process comprises loading a wafer in a high pressure cleaner, injecting high-purity gaseous carbon dioxide (CO2) having low pressure into the high pressure cleaner, injecting CO2 having lower pressure than supercritical cleaning pressure into the high pressure cleaner, cleaning the wafer by injecting a supercritical homogeneous transparent phase mixture in which a cleaning additive and supercritical CO2 are mixed, into the high pressure cleaner under a supercritical cleaning pressure, rinsing the wafer by injecting a supercritical rinsing mixture in which a rinsing additive and supercritical CO2 are mixed, into the high pressure cleaner, and separating CO2 from a mixture discharged from the high pressure cleaner.

Abstract: An apparatus and method for processing substrates such as silicon wafers, wherein process chemicals or other fluids are used on the top or other surface of the substrate followed by a de-ionized water (“DI”) or other fluid rinse. The used process chemicals or fluids are separated from the rinsing fluid with very little or no cross contamination between the two fluids. The apparatus consists of an annular collection chamber and spin chuck. During chemical processing, the fluids flow substantially horizontally on the top or other surface of a rotating wafer and are collected by the collection chamber on the periphery. Once chemical processing is complete, the collection chamber moves down to a closed position as shown in FIG. 2. DI water or other fluid may then be dispensed to rinse the wafer without mixing with the chemical or other processing fluid collected in the chamber.

Abstract: The substrate treatment apparatus includes a substrate holder mechanism for holding a substrate to be treated, and a bifluid nozzle for supplying liquid droplets on a surface of the substrate held by the substrate holder mechanism. The bifluid nozzle has a casing, a liquid outlet port for discharging a treatment liquid, and gas outlet port for discharging a gas, and is adapted to introduce the treatment liquid and the gas into the casing, to generate droplets of the treatment liquid by mixing the treatment liquid discharged from the liquid outlet port with the gas discharged from the gas outlet port outside the casing, and to supply the liquid droplets on the substrate. The density of the liquid droplets supplied from the bifluid nozzle on the substrate surface is not less than 108 droplets/m2 per minute.