Abstract: A railway bogie is provided with two cross-members for supporting a linear induction motor, mounted on the axle boxes via of resilient mounting apparatus allowing pivoting movement of each cross-member about a transversal axis of rotation. A system of five links is used to connect the linear induction motor to the cross-members. The links are located in such a way that the resultant of the vertical forces transmitted by the linear induction motor to each cross-member is located at a first centre position on the first transversal axis equidistant from the axle boxes. The mounting apparatus are further provided with height adjusters that allow adjustment of the height and cross level position of the linear induction motor.

Abstract: A system for closing rail car doors that enables the simultaneous closing of multiple car doors is disclosed. After hopper car contents such as aggregate or coal are unloaded, the doors are closed in pairs by semi-automated door closing arms operated by hydraulic cylinders, pneumatic cylinders, or electric motors. The closing arms may be added in pairs depending on the number of doors. Hydraulic cylinders with a differential bell crank can be used to activate the closer arm assemblies. Closer arms can be mounted side by side on the inside or outside of the track or separately inside and outside of the track. Automatic slack adjustment assemblies may be integrated into the closer arm connections to allow for off set door spacing. Individual hydraulic cylinders may be used with each closer arm in an alternate embodiment.

Abstract: The present invention provides wood preservative compositions comprising micronized particles. In one embodiment, the composition comprises dispersions of micronized metal or metal compounds. In another embodiment, the wood preservative composition comprises an inorganic biocide comprising a metal or metal compound and organic biocide. When the composition comprises an inorganic biocide and an organic biocide, the inorganic biocide or the organic biocide or both are present as micronized particles. When compositions of the present invention are used for preservation of wood, there is minimal leaching of the metal and biocide from the wood.

Abstract: An air-droppable wildfire retardant composition including Lassenite N pozzolan is a natural siliceous (amorphous) mineral, consisting of the layers of diatoms and volcanic tuffs of Northern California's Cascade Range. The Lassenite pozzolan is mixed with a thickener such as Bentonite clay, a measured volume of water forming a slurry-type mixture capable of suspending the particles of pozzolan in a mixture having a viscosity sufficient to avoid solids separation. The inventive fire retardant contains substantially three innocuous ingredients which have no harmful effects to the atmosphere, plant, or animal life.

Abstract: A supporting paste containing a component (A) which loses water in a temperature range between 110° C. and 1100° C., a component (B) which is geometrically stable at temperatures between 110° C. and 1100° C., solvent and auxiliary agents. Also, the preparation of such a supporting paste and to its use in particular in the field of dental technology.

Abstract: A system and method for beneficiation of fly ash particles which at least partially reduces sulfur emissions includes at least one mixing reactor with a chamber and at least one exhaust, at least one fly ash source connected to provide fly ash particles to the chamber, at least one sorbent source, and at least one fluid supply system. The sorbent source provides at least one type of sorbent particles to be mixed with the fly ash particles to reduce sulfur emissions. A mass of the fly ash particles in the chamber is greater than a mass of the sorbent particles in the chamber. The fluid supply system provides at least one fluid to the chamber during a beneficiation of at least a portion of the fly ash particles in the chamber.

Abstract: A hydraulic composition including: a ground burned product A having a hydraulic modulus (H.M.) of 1.8 to 2.3, a silica modulus (S.M.) of 1.3 to 2.3 and an iron modulus (I.M.) of 1.3 to 2.8; and a gypsum. The hydraulic composition is capable of reducing heat of hydration and producing a mortar or a concrete excellent in flowability and strength development.

Abstract: The present invention relates to the use of polymeric microparticles having non-polar shells in hydraulically setting building material mixtures for the purpose of enhancing their frost resistance and cyclical freeze/thaw durability.

Abstract: An assembly (10) is disclosed having a pallet or mobile platform (20), restraining blocks (90), a pallet tray (70) and a cover (60) for supporting, transporting, and displaying goods. The goods, preferably in displays or stacking trays (70) are supported on the pallet's base (21). The pallet (20) includes removable wheels or casters (36) and two parallel rails or guides (33) projecting from the bottom surface (26) and a perimeter wall (22,23) projecting from the upper surface (25). To the extent a forklift is used, the guides (33) provide a side-exposed space or opening between the wheels (36) permitting insertion of the forklift tines. The cover (60) and pallet tray (70) include side openings (63,73) to align with the space or openings below the pallet (20) base (21) and between the guides (33) so that forklifts and their tines may be used with the covered assembly (10).

Abstract: An object is to provide a showcase in which shelves can stably be installed and in which improvements of display performance and appearance can be realized, and a showcase provided with shelf devices in a chamber having a plurality of open surfaces comprises a pair of shelf support members which extend in a depth direction of the chamber and which support the shelves in a position where the adjacent shelves are butted with each other, respectively; a support member side superimposed portion which protrudes from a lower portion of one shelf support member to the other shelf support member; a support member side superimposed portion which protrudes from a lower portion of the other shelf support member to the one shelf support member and which is superimposed on the support member side superimposed portion; a shelf side superimposed portion which has a bottom side superimposed on the support member side superimposed portion; a shelf side superimposed portion which is formed under the adjacent shelf and which ha

Abstract: An adjustable mounting system for wall-mounted shelf units is provided. The mounting system of the shelf unit comprises at least one horizontal support, situated preferably in proximity to the wall surface near the upper section of the shelf unit. The horizontal support is attached to, and slides laterally in clamping brackets that have been mounted to a wall. One part of the brackets are designed to be fastened to wall vertical support columns or studs, and incorporate a second portion that provides a clamping mechanism that attaches to the horizontal. The horizontal support is preferably fastened at each end to the shelf unit. One or more vertical columns are located between the shelves of the shelf unit and are located proximal, and optionally anterior to the horizontal support. A clamping element, which is preferably a plate with holes drilled into it, is placed proximate to the vertical support columns.

Abstract: The seed planter includes a rotary drum (28) having a series of equally spaced seed cups (51) mounted on the inner surface of the cylindrical peripheral wall (32), and a seed meter (69) mounted over the arcuate path of the seed cups, in close spaced relationship over the large upper openings (54) of the seed cups to receive the seeds.

Abstract: A system and method for electronically pulsing chemical with seed. The system and method incorporate a seed dispensing tube configured to dispense seeds, a granule tube configured to dispense chemical, an electrical valve configured to open so that chemical granules may be dispensed from the chemical granule tube, and a proximity sensor operably coupled to the electrical valve, the sensor being configured to sense a seed dispensed from the seed dispensing tube. The system may also include a metering mechanism for metering the quantity of chemical that is dispensed with the seed. The metering mechanism may be controlled by a radar unit on a tractor associated with the system, and the metering mechanism may be programmed to dispense a predetermined quantity of chemical with the seed.

Abstract: A sewing machine having a reciprocatory needle and a reciprocatory thread-take-up device to deliver thread to the needle employs a thread control device located between the thread take-up device and the needle to engage and apply light tension to the thread. The thread control device can have an opposed plate and spring wire between which the thread runs and which cooperate to apply spring pressure to the thread. Downstream thereof a thread brush can be employed through which the thread runs. The thread can be further lightly tensioned and laterally positioned by the thread brush. The guide plate or other device can include catcher structure to catch thread escaping the take-up device. The thread control device can help control premature descent of the thread and improperly tensioned stitches.

Abstract: A button-hole earn is mounted on a pattern selection cam shaft for mounting a pattern selection cam, the pattern selection cam shaft provided independently of a pattern cam shaft provided with a needle swing cam group. The rotation of a sewing machine main shaft causes rotation of a drive gear which in turn rotates a first follower gear in engagement with the drive gear and a second follower gear engaged with the first follower gear. Thus, the rotation of the first follower gear causes rotation of the needle swing cam group whereas the rotation of the second follower gear causes rotation of the button-hole cam. Thus, a pattern selected among a plurality of patterns by a pattern selection dial is generated to form button-hole stitches selected by the pattern selection dial.

Abstract: To provide a manufacturing system and a method for manufacturing sheet-like structures. The manufacturing system of sheet-like structures comprises a loosened portion forming apparatus which forms plural loosened portions, which are substantially U-shaped on a cord member, an arranging apparatus which inserts each of the plural loosened portions into each of the plural openings formed on a belt-like member and form plural linear portions in substantial linear form which connect each of the plural loosened portions respectively, a sewing apparatus which sews a belt-like member and each of the plural linear portions together with a thread member, and a belt-like member cutting apparatus which cuts a belt-like member in prescribed forms.

Abstract: A novel tufting needle (4) is distinguished by a hollow flute (15) which is preferably symmetrical to a central plane (29) and which is bilaterally provided with chamfers (33, 34). The chamfers (33, 34) are, in an inward-located, that is, in a region lying close to the central plane (29), inclined at a small acute angle (?) to a reference plane (28), while in a region bordering an externally located rim (edges (46, 47)), the chamfers (33, 34) are inclined at a larger acute angle (?) to the reference plane (28). This feature improves the rigidity, the tufting properties and the mechanical strength, as well as the wear resistance of the novel tufting needle (4).

Abstract: Continuous sequin strip having a multiplicity of continuously-connected sequins is let out from a reel and then placed on the upper surface of a supporting plate. Sequin feeder apparatus feeds the sequin strip at a predetermined pitch corresponding to a size of a sequin of the continuous sequin strip through advancing and retracting movement of a feed lever interlocked to sewing operation of a needle bar of a sewing machine. The feed lever includes two engaging portions for engaging a predetermined sequin of the strip to feed the strip. With the two engaging portions engaging at least two points of the sequin, the sequin can be fed out reliably irrespective of the position of the sewing hole formed in the sequin. Thus, even sequins, each having the sewing hole eccentrically offset in a direction perpendicular to a sequin-strip feeding direction, can be fed out at the predetermined pitch with an increased reliability.

Abstract: A system for supporting a quilt to lay quilting lines is provided. A frame is configured to support a sewing machine. First and second are rollers mounted on said frame, and configured to hold quilting layers on a substantially horizontal path between said first and second rollers. A platform is mounted on said frame, the platform having tracks, a top of the platform being below said substantially horizontal path. A moveable support table is mounted on the tracks. A top of the moveable support table is less than approximately one inch below said substantially horizontal path. The moveable support table supports a quilt during the application of quilting lines thereto.

Abstract: Method for manufacturing a multi-layered mat formed by means of fibers, strands, yarns or twists, a multi-layered mat manufactured according to the method and/or a molded article manufactured therefrom, as well as an apparatus for carrying out the method.

Abstract: The invention relates to a method of manufacturing a fibre mat adapted for use in the manufacture of a fibre-reinforced device, said fibre mat comprising at least two essentially longitudinally extending and parallel batches of fibres. Novel aspects of the method according to the invention involves that the method comprises that the batches are joined by holder means that span above or below each batch, whereby the holder means impart an influence to each batch which is essentially symmetrical about an axis situated longitudinally between the batches. A symmetrical influence about an axis longitudinally between the batches accomplishes that influence from one side is matched by influence from an opposite side. Hereby it is prevented that the batch will undulate. Simultaneously the batches are clearly separated, whereby resin is more easily conducted longitudinally of the batches.

Abstract: The invention relates to a folding tiller for boats. The inventive tiller comprises a central fixed part and two essentially-symetrical, opposing lateral segments which are articulated to the central part by means of respective hinges which are provided on two diametrically-opposed spokes of the tiller. According to the invention, the two lateral segments are folded down and stacked on top of the fixed part, in order to pass from an open extended position to a folded or retracted position. Moreover, respective longitudinally-opposing spoke segments are held in position by means of locking elements, at least while the tiller is to be maintained in the deployed configuration.

Abstract: A fender harness assembly includes a lanyard having a first lanyard end and a second lanyard end and a lanyard mid section extending from the first lanyard end to the second lanyard end. A bridle, having first bridle end and second bridle end and a bridle midsection extending from the first to second ends, is connected to a fender at the bridle midsection. A ferrule web element includes a lanyard channel configured to engage the lanyard at the lanyard midsection. The ferrule web element also includes a first bridle channel configured to engage the first bridle end; and a second bridle channel configured to engage the second bridle end.

Abstract: An assembly of mouldings that can be joined together and used as boats or other floating structures. The mouldings are advantageously of rotational moulded plastics material and can be of identical shape. Each of the mouldings has an outer face incorporating at least two zones that are advantageously flat and disposed at an angle one to the other so that one moulding can be joined to another face-to-face in different configurations. In one of such configurations, the first zone of one of the mouldings is in face-to-face relationship with one of the zones of another of the mouldings. In another embodiment the second zone of the one moulding is in face-to-face relationship with one of the zones of the other moulding. The mouldings have outer profiles that are substantially similar. The profiles are advantageously hexagonal. Some mouldings may be joined together end-to-end at end faces that are in face-to-face relationship.

Abstract: A large recreational powerboat has a forward passenger area, a helm, and a rearward passenger area. A top deck covers the forward passenger area and extends upwardly over the helm. The rearward passenger area is exposed. A large skylight window is formed streamlined with the boat and is imposed into the top deck. The window extends upwardly and forward to the helm, thereby having portions functioning as a windshield for the boat. The windshield and the skylight window transmit abundant natural light to an atrium room that is located between the helm and the forward passenger area cabin rooms. Individuals in the atrium room are shielded from the elements but at the same time can view the outside environment and communicate with people outside of the forward passenger area.

Abstract: An installation vessel has upper and lower decks (40, 50) that are vertically spaced about 3 meters apart, with most of the lower deck covered by the upper one, but with a rear portion (60) of the lower deck being uncovered. The upper deck is used primarily for storage, while the lower deck is the one used for installation of anchor chains, wires, ropes, etc. that pass from a winch (81) to a stern roller (84) at the rear of the lower deck, so dangerous conditions of chains, wires, ropes, etc. moving along a deck during installation are confined to the lower deck. A main crane (72) that lies on one side of the vessel, lies forward of the rear end of the upper deck at a location wherein the crane can reach all portions of the uncovered lower deck portion and most of the upper deck.

Abstract: A bicycle shift control device includes a shifter housing, a shift control mechanism and a bicycle light structure. The shift control mechanism is coupled to the shifter housing. The shift control mechanism is configured and arranged to control a bicycle transmission component. The bicycle light structure is coupled to the shifter housing. The bicycle light structure includes a bicycle location light that is arranged and configured to project light outwardly from the shifter housing at a location remote from a gear position indicator. Preferably, the bicycle light structure is also configured and arranged to illuminate the gear position indicator at a location remote from the light projecting outwardly from the shifter housing.

Abstract: Apparatus and methods for repelling geese include a solar-powered, photocell controlled flasher for disposition on a body of water or on land where geese inhabit. The method includes the steps of intermittently flashing a light into an area where geese sleep, and disturbing the geese from rest.

Abstract: To find out a crystalline material for a high speed scintillator in place of BaF2 and the like, and a method for producing the material at a low cost. A single crystal of (Zn1?xMx)O1+x (M: Al, Ga, In, Y, Sc, La, Gd, Lu) (x=0 to 0.0500), (Zn1?xM?x)O1+2x(M?: Si, Ge, Sn, Pb)(x=0 to 0.0250) or (Zn1?xCdx)O (x=0 to 0.0500) is used as a scintillator. Defects of a ZnO single crystal can be reduced by using a platinum inner cylinder in order for a solution not to directly contact with an autoclave, for reducing impurities in the ZnO single crystal and precluding impurities interfering with scintillation, and by using LiOH and KOH as a mineralizer. ZnO can be doped with Al2O3, Ga2O3, In2O3, Si, Cd or the like by adding those materials to a starting material for the hydrothermal synthesis. The doping amounts can be controlled by changing charging amounts thereof.

Abstract: A method for manufacturing a single crystal semiconductor, in which, in a process of pulling up the single crystal semiconductor from melt for growing it, an impurity is incorporated more uniformly into the single crystal semiconductor so that a variation in impurity concentration across the semiconductor wafer surface can be reduced, and thus, the planarity of the wafer can be improved. In the process of pulling-up the single crystal semiconductor (6), fluctuation in a pulling-up speed is controlled, whereby the variation in concentration of the impurity in the single crystal semiconductor (6) is reduced. Especially, a width of speed fluctuation (?V) in 10 seconds is adjusted to less than 0.025 mm/min. Furthermore, in carrying out the control for adjusting the pulling-up speed such that a diameter of the single crystal semiconductor (6) becomes a desired diameter, a magnetic field having strength of 1,500 gauss or more is applied to the melt (5).

Abstract: In this silicon single crystal wafer for IGBT, COP defects and dislocation clusters are eliminated from the entire region in the radial direction of the crystal, the interstitial oxygen concentration is 8.5×1017 atoms/cm3 or less, and variation in resistivity within the wafer surface is 5% or less. This method for manufacturing a silicon single crystal wafer for IGBT includes introducing a hydrogen atom-containing substance into an atmospheric gas at a hydrogen gas equivalent partial pressure of 40 to 400 Pa, and growing a single crystal having an interstitial oxygen concentration of 8.5×1017 atoms/cm3 or less at a silicon single crystal pulling speed enabling pulling of a silicon single crystal free of grown-in defects. The pulled silicon single crystal is irradiated with neutrons so as to dope with phosphorous; or an n-type dopant is added to the silicon melt; or phosphorous is added to the silicon melt so that the phosphorous concentration in the silicon single crystal is 2.9×1013 to 2.

Abstract: A method of producing fine particle-like materials formed by a crystallization method, which producing method is capable of producing the fine particles with a narrow particle size distribution and also capable of inhibiting aggregation of the fine particles without using any dispersant; and the fine particle-like materials, are provided. The present method of producing the fine particles by crystallization comprises preparing a solution containing the material to be finely divided, and bringing this solution into contact with a substrate having the microprojections provided on its surface at a density of not less than 100 projections/cm2 to cause precipitation of the fine particles. The fine particles produced by the above method are those of physiological active materials containing no dispersant.

Abstract: The invention relates to a method of fabricating at least one polycrystalline silicon plate (68, 70) with one (64, 66) of its two faces presenting predetermined relief, in which method a layer of polycrystalline silicon (60, 62) is deposited on at least one (56, 58) of the two faces of a support (50). The method comprises the steps of embossing said face (52, 54) of the support (50) to impart thereto a shape that is complementary to said relief; depositing said polycrystalline silicon layer (60, 62) on said embossed face (56, 58) of the support (50), the surface (64 or 66) of said polycrystalline silicon layer situated in contact with said embossed face (56 or 58) then taking on the shape of said relief; and eliminating said support in order to obtain said polycrystalline silicon plate (68 or 70). The invention is applicable to fabricating solar cells.

Abstract: The invention relates to a magnetic garnet single crystal and an optical element using the same, for the purpose of providing a magnetic garnet single crystal at a reduced Pb content, and an optical element using the same, where the magnetic garnet single crystal is represented by the chemical formula Bi?M13-?Fe5-?-?M2?M3?O12 (M1 is at least one element selected from Y, La, Ce, Pr, Nd, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb and Lu; and M2 is Si; and M3 is at least one element selected from Zn, Ni, Cu and Mg, provided that 0.5<??2.0, 0<?, and 0<y).

Abstract: An apparatus for producing diamond in a deposition chamber including a heat-sinking holder for holding a diamond and for making thermal contact with a side surface of the diamond adjacent to an edge of a growth surface of the diamond, a noncontact temperature measurement device positioned to measure temperature of the diamond across the growth surface of the diamond and a main process controller for receiving a temperature measurement from the noncontact temperature measurement device and controlling temperature of the growth surface such that all temperature gradients across the growth surface are less than 20° C.

Abstract: The invention relates to a method of producing an optical element using a garnet single crystal for the purpose of providing an optical element with a reduced Pb content or from which Pb can preliminarily be removed completely. By growing a garnet single crystal by using a solution containing Na, Bi and B by the LPE process and thermally treating the garnet single crystal in reducing atmosphere prepared by using nitrogen gas and/or hydrogen gas, the resulting thermally treated garnet single crystal is used to prepare an optical element.

Abstract: A radiation detector made from a compound, or alloy, comprising CdxZn1-xTe (0?x?1), an element from column III or column VII of the periodic table in a concentration about 10 to 10,000 atomic parts per billion and an element selected from C the group consisting of La, Ce, Pr, Nd, Pm, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb and Lu in a concentration about 10 to 10,000 atomic parts per billion exhibits full electrical compensation, high-resistivity, full depletion under an applied electrical bias and excellent charge transport.

Abstract: A liquid coating apparatus, including; a head which has plural nozzles which eject liquid in which plural particles are dispersed, plural pressuring chambers each communicates to each nozzle, a piezo element which is provided on the pressuring chamber to change a volume of the pressuring chamber, and a common liquid chamber which communicates to each of the plural pressuring chambers; a sub-tank which stores the liquid and has an acceleration device to accelerate the plural particles to disperse in the liquid; a first flow channel which connects the common liquid chamber with the sub-tank; a second flow channel which connects the common liquid chamber with the sub-tank; and a circulation device which circulates the liquid through a circulation flow channel which includes the common liquid chamber, the first flow channel, the sub-tank and the second flow channel.

Abstract: A system and method for use in applying a coating of a desired material onto one or more medical implant components. The system may include a thermal sprayer and a rotatable holding fixture having a plurality of mounting stations each operable to hold at least one medical implant component. The fixture may be operable to rotate about a central axis and each mounting station may be operable to rotate about a respective mounting station axis. The fixture may be arranged adjacent to the thermal sprayer so that during operation the desired material may be sprayed by the thermal sprayer upon an outer surface of each of the medical implant components while the fixture rotates about the central axis and while simultaneously therewith each of mounting stations having a respective medical implant component rotates about the respective mounting station axis.

Abstract: An electroless plating apparatus can suppress a change in quality of a plating solution and form a plated film without loss of its properties and reliability. The electroless plating apparatus includes a plating solution circulation system having a plating solution supply pipe for supplying a plating solution in a plating solution reservoir tank to a plating tank and a plating solution recovery pipe for returning the plating solution in the plating tank to the plating solution reservoir tank, and a heat retention section for preventing lowering of the temperature of the plating solution in the entire plating solution circulation system.

Abstract: Bookbinding apparatus adhesive applicator accurately, briefly controls adhesive temperature to a set value by selecting, in accordance with adhesive initial temperature, one of a plurality of temperature-controller heating modes defining different supply powers and supply durations for supplying power to an adhesive-container heater to control its heating temperature. A sensor detects the temperature of the adhesive in the container at applicator start-up, or on restarting a post-standby applicator. In accordance with the detected temperature, one of the heating modes is selected to heat the adhesive. The applicator warm-up time is thus set in response to the state of the adhesive: If solidified, the adhesive is heated and melted in a maximum supply-power, supply-duration mode; if low-temperature liquefied at, it is heated and melted in a second-magnitude supply-power, supply-duration mode; and if the adhesive temperature is high, it is heated and melted in a minimal supply-power, supply-duration mode.

Abstract: One or more high-frequency antennas is allocated to and disposed in one cubic space C having a side of 0.4 [m] in a plasma generating chamber 1 or in each of plural cubic spaces C, each having a side of 0.4 [m], adjacent ones of the plural cubic spaces being continuous to each other without forming a gap therebetween. The total length L [m] of the high-frequency antennas in each of the cubic spaces C is set in a range which satisfies relationships of (0.2/P)<L<(0.8/P) with respect to an inductively coupled plasma generation pressure P [Pa] which is set in the plasma generating chamber 1.

Abstract: A plasma generating method and apparatus which use plural high-frequency antennas 2 to generate inductively coupled plasma, and a plasma processing apparatus using the apparatus. The antennas 2 are identical to one another. Application of a high-frequency electric power to the antennas 2 is performed from a high-frequency power source 4 which is disposed commonly to the antennas 2, through one matching circuit 5 and one busbar 3. The busbar 3 is partitioned into sections the number of which is equal to that of the antennas, while setting a portion which is connected to the matching circuit 5, as a reference. One-end portions of the antennas are connected to corresponding sections 31, 32, 33 through power supplying lines 311, 321, 331. The other end portions of the antennas are grounded. The impedances of the sections of the busbar, and those of the power supplying lines are adjusted so that same currents flow through the antennas, and a same voltage is applied to the antennas.

Abstract: An apparatus for measuring plasma electron density precisely measures electron density in plasma even under a low electron density condition or high pressure condition. This plasma electron density measuring apparatus includes a vector network analyzer in a measuring unit, which measures a complex reflection coefficient and determines a frequency characteristic of an imaginary part of the coefficient. A resonance frequency at a point where the imaginary part of the complex reflection coefficient is zero-crossed is read and the electron density is calculated based on the resonance frequency by a measurement control unit.

Abstract: Provided is an apparatus for generating remote plasma. The apparatus includes an RF antenna disposed in regard to a chamber, a plasma generating unit formed in an uppermost portion of the chamber, wherein a plurality of plasma generation gas introduction pipes are communicated with the plasma generating unit, a first shower head disposed below the plasma generating unit, and having a plurality of first plasma guide holes, a second shower head disposed below the first shower head, and having a plurality of source/purge gas guide holes and a plurality of second plasma guide holes directly connected to the respective first plasma guide holes, and a source/purge gas introduction unit disposed between the first and second shower heads, wherein a plurality of source/purge gas introduction pipes are uniformly communicated with the source/purge gas introduction unit.

Abstract: A plasma generation apparatus is provided which includes: an apparatus main body which has a microwave generation section which generates a microwave and a plasma generation nozzle which generates and emits a plasma gas based on the energy of the microwave; a microwave detection unit which detects a microwave leaking from the apparatus main body; and a control section which stops the microwave generation section from generating a microwave if the detection unit detects a microwave.

Abstract: A plasma generation apparatus is provided which includes: a microwave generation portion which generates a microwave; a gas supply portion which supplies a gas to be turned into plasma; a plasma generation nozzle which includes a reception member receiving the microwave, and turns the gas into plasma based on the energy of the received microwave and emits the plasma gas; and a photo-detection unit which detects light emitted by the plasma gas and generates electrical information.

Abstract: A plasma generator for forming a thin film comprises a cathode (4) for supplying constituent particles of an arc plasma and a trigger-and-anode (6) for starting and sustaining the arc plasma. The cathode surface (4a) of the cathode (4) is flat or finely irregular, and the anode surface (6c) of the trigger-and-anode (6) brought into contact with the cathode surface (4a) is flat. The anode surface (6c) is so arranged as to be brought into contact with the whole cathode surface (4a) when plasma is started. The contact point between a fine projection end (4b) of the cathode surface (4a) and the anode surface (6c) is made a plasma emission point. When the projection is consumed by plasma emission, another projection end which can be brought into contact with the anode surface (6c) is used as another plasma emission point, thus enabling intermittent operation of persistently repeating the sequence operation.

Abstract: The invention relates to an effusing source for film deposition made of a reservoir comprising one hole characterized by the fact that the hole diameter is less than one order of magnitude than the mean free path of the molecules determined by the pressure and its thickness is at least one order of magnitude smaller than the diameter. Preferably the source has several holes.

Abstract: A lift pin calibrator and a method of using the same set the height and orientation of a lift pin relative to a substrate support plate having a bore in which the lift pin is raised and lowered. The lift pin calibrator has a contact body, a pressure member and a tubular alignment member that are disposed coaxially. A pressure transmitting portion of the pressure member extends into an upper portion of the alignment member and the contact component extends through the pressure member so that an end of the contact component is left exposed by the pressure member. An outer diameter of the pressure transmitting portion of the pressure member is greater than an inner diameter of the alignment member. An extension of the alignment member is inserted into a bore of the substrate support plate. The pressure transmitting portion of the pressure member is forced into the alignment member to expand the alignment member and hold it in place.