Abstract: This invention relates to a method of enhancing the stability of electroactive polymers, redox active materials, or a composite comprising an electroactive polymer and a redox active material, which comprises depositing on the electroactive polymers, the redox active materials, or the composite, a fluoropolymer by radio frequency sputtering. The invention also relates to electroactive polymers, redox active materials, or a composite comprising an electroactive polymer and a redox active material, that bears a radio frequency sputtered fluoropolymer coating.

Abstract: The particulate water absorbent has a cross-linking structure therein, and contains (i) a particulate water absorbent resin having a cross-linking structure on a surface therof and (ii) not less than 0.001 mass % and less than 10 mass % of anorganic acid multivalent metal salt whose molecule contains not less than seven carbon atoms. Futher, the particulate water absorbent contains 90 mass % of particles, whose particle diameter is not less than 106 ?m and 850 ?m, with respect to the particulate water absorbent.

Abstract: A method of coloring a cellulosic material which includes a) dispersing pulped cellulosic material into water; and b) coloring the pulped cellulosic material by adding a cationic dispersion to the water, where the dispersion includes: (i) at least one pigment; (ii) water; and (iii) at least one acid salt of a styrene maleimide resin in an amount effective to disperse the pigment. The cationic dispersion may be prepared by (i) mixing, at 500 to 10,000 rpm, at least one pigment; water; and either (a) at least one acid salt of a styrene maleimide imide resin or (b) at least one styrene maleimide imide resin in combination with at least one weak acid, thereby forming a dispersion premix; (ii) milling the dispersion premix in a mixer filled with ceramic, metal or glass beads for a period of time sufficient to reduce pigment agglomerates to primary particles, thereby forming a nonstandarized dispersion; and (iii) standardizing the dispersion against a color standard by adding water.

Abstract: A composition and method which exhibits enhanced moisture sealing properties, suitable for use with flooring materials, such as concrete, and flooring installations, such as carpeting, wood, tiles, etc. are provided. The composition is preferably non-water-based and can form a non-aqueous barrier coating on the flooring substrate, and most preferably provides a desirable pH and blocks migration of alkaline salts through the substrate.

Abstract: A composite material having a high thermal conductivity and a small thermal expansion coefficient, which is obtained by impregnating a porous graphitized extrudate with a metal; the composite material having such anisotropy that the thermal conductivity and the thermal expansion coefficient are 250 W/mK or more and less than 4×10?6/K, respectively, in an extrusion direction; and that the thermal conductivity and the thermal expansion coefficient are 150 W/mK or more and 10×10?6/K or less, respectively, in a direction perpendicular to the extrusion direction.

Abstract: A corrosion resistant, alkali resistant coating composition is disclosed. The composition comprises a binder comprising a reaction product of an epoxy-containing material and a phosphorus-containing material together with a curing agent. Aminoplasts, especially melamine-based aminoplasts, are particularly suitable curing agents. A source of silicon can optionally be included. The compositions also provide excellent adhesion and can be used with or without a weldable primer. The compositions are applied to and cured on a metal substrate.

Abstract: Multilayers comprising at least one laminate formed in sequence by the following layers: A) one thermoprocessable fluoropolymer layer comprising units deriving from vinylidenfluoride (VDF); B) one polyamide layer blended with 0.01%-5% by weight of a diamine or one polyamide layer having at least 20 ?eq/g of —NH2 groups, or one thermoprocessable polymer layer containing (—COO—) units and/or —CN groups; and C) one layer based on chlorinated polyvinylchloride (CPVC) containing from 58% to 75% by weight of chlorine.

Abstract: A composite structure is formed so as to contain aluminum and silicon or silicon/germanium. The composite structure comprises pillar-shaped members containing aluminum and a region containing silicon or silicon/germanium and surrounding the pillar-shaped members. The structure contains silicon or silicon/germanium at a content not less than 20 atomic % and not more than 70 atomic % relative to the total amount aluminum and silicon or silicon/germanium.

Abstract: Pharmaceutical containers containing at least one shaped component serving as a sealing barrier such as closure, stopper or plunger, for the contents of the container are disclosed. Such sealing barriers are made from elastomeric compositions containing a silylated copolymer of isobutylene/isoprene (butyl rubber) and para-methylstyrene which are curable by contact with moisture.

Abstract: A curable organopolysiloxane composition includes: (A) a straight-chain organopolysiloxane having per molecule at least two silicon-bonded alkenyl groups and at least one silicon-bonded aryl group; (B) a branched-chain organopolysiloxane with siloxane units represented by the following general formula: RSiO3/2, where R is a substituted or unsubstituted monovalent hydrocarbon group, and having per molecule at least one silicon-bonded alkenyl group and at least one silicon-bonded aryl group; (C) an organopolysiloxane having in one molecule at least two silicon-bonded hydrogen atoms; and (D) a hydrosilylation catalyst; and a semiconductor device with a semiconductor element coated with a cured body of the aforementioned composition.

Abstract: A durable protective coating may be formed by applying a thin layer of metastable alumina to a bond coating on a substrate. A thermal barrier coating may then be applied to the metastable alumina and the resulting part may be heat treated to transform the metastable alumina to a mixed alpha alumina having particles of the thermal barrier coating, such as zirconia in the case of an yttria stabilized zirconia thermal barrier coating, dispersed therein. The resulting thermal barrier coating may inhibit microbuckling of the thermally grown oxide scale that grows over time at the thermal barrier coating-bond coating interface.

Abstract: Polymerizable compositions comprising nanopartilces particularly useful for brightness enhancing films.

Abstract: A method of improving grease and/or water resistance of a material is disclosed that comprises treating the material with wax and poly(vinyl alcohol) and optionally with a polyamine. Compositions for practicing the method and materials that have been treated by the method are also disclosed.

Abstract: The present invention is an integral composite structural (ICS) material comprising an open metal structure having at least one external side and internal surfaces defining a plurality of open shapes with a ceramic matrix composite bonded to at least one external side and the surfaces of at least a substantial portion of the plurality of open shapes and occupying at least a substantial portion of the plurality of open shapes. The open metal structure, independent of the ceramic matrix composite, has a total metal volume percent in the range of about 10% to about 90%, with no dimension of any open shape being greater than about ¾ inch. The ceramic matrix layer covers a substantial portion of at least one external side of the open metal structure.

Abstract: The invention provides compositions, organic electronic devices, and methods for preparing organic electronic devices. The compositions include a small molecule that is combined with at least one other material selected from a charge transporting material, a charge blocking material, a light emitting material, a color conversion material, or a combination thereof. The first compound has an aromatic core and two to four identical end capping groups attached to the aromatic core. The second compound has at least some structural similarities to the first compound of the composition.

Abstract: An organic electroluminescent device, which has: at least one organic layer between a pair of electrodes, with at least one layer of the at least one organic layer being a light-emitting layer, and at least one compound that has a structure represented by formula (2), as the compound itself or as its partial structure, in at least one layer of the at least one organic layer: ?wherein, in formula (2), each of A1, A2, A3, A4, A5, A6, A7, A8, A9, A10, A11, A12, A13, A14, A15, and A16 represents a nitrogen atom or a carbon atom that may optionally have a substituent, and at least one of A1, A2, A3, A4, A5, A6, A7, A8, A9, A10, A11, A12, A13, A14, A15 and A16 is a nitrogen atom.

Abstract: A magnetic recording medium including at least one Cu-containing magnetic recording layer (CuML) comprised of a Cu-containing magnetic alloy material selected from the group consisting of: (a) a CoCrPtBCu alloy having a composition represented by the formula Co100-x-y-z-?CrxPtyBzCu?, wherein 0<x?20, 0<y?30, 0<z?24, and 0<??10; (b) a CoCrPtBCu alloy having a composition represented by the formula Co100-x-y-z-?CrxPtyBzCu?, wherein 0<x?30, 0<y?30, 7<z?24, and 0<??10; and (c) a CoCrTaCu alloy having a composition represented by the formula Co100-x-y-?CrxTayCu?, containing less than 30 at. % Cr, up to 8 at. % Ta, and up to 10 at. % Cu.

Abstract: A magnetic recording medium having a magnetic layer with an L10 structure and an easy magnetization axis lying about 35° out-of-plane of the magnetic layer is disclosed. This medium has very high coercivity (Hc) and anisotropy field (Hk), giving rise to improved thermal stability. Combined with improved writability of the canted magnetic easy axis, this media enables improved recording signal-to-noise ratio (SNR).

Abstract: A magnetic recording medium is provided that includes a non-magnetic support and, in order, above the non-magnetic support, a radiation-cured material layer cured by exposing a layer that includes a radiation curable compound to radiation, and a magnetic layer that includes a fine ferromagnetic powder and a binder, a compound having one or more ether groups and three or more radiation curable functional groups per molecule being employed as the radiation curable compound, and the number of magnetic layer surface micro projections having a height measured by atomic force microscopy (AFM) of 10 to 20 nm being 5 to 1,000 per 100 (?m)2. There is also provided the magnetic recording medium wherein it further includes a non-magnetic layer that includes a non-magnetic powder and a binder.

Abstract: The invention relates to a method for producing a melt carbonate fuel cell comprising a cathode layer made from porous nickel oxide, an anode layer made from porous nickel and a melt arranged between the cathode layer and the anode layer, received in the form of a finely porous electrolyte matrix melt consisting of one or more alkali metal carbonates as electrolytes. In order to produce the cathode layer, a sintered, coated electrode path, coated with catalytically activating particles, made of porous nickel in the fuel cell operation mode is reacted to form nickel oxide. According to the invention, the electrode path is coated with catalytic activating particles made from one or more non-oxidic inorganic metal compounds, which are reacted to form the corresponding metal oxides under gas development. The invention relates to another similar fuel cell with increased activation of the cathode reaction.

Abstract: A leak in the membrane of a fuel cell leads to an uncontrolled and heat-generating reaction which can destroy the fuel cell. A method for recognition of a leak in a fuel cell is disclosed which leads to an automatic closing down of the fuel cell without a safety device. The anode gas chamber of the fuel cell is treated with a first test gas and the cathode gas chamber of the fuel cell is treated with a second test gas. The cell voltage of the fuel cell measured and the change with time in the cell voltage is monitored. A gas with a hydrogen content of 0.1 to 20 vol. % is used as first test gas and a gas with an oxygen content of 0.1 to 30 vol. % is used as second test gas.

Abstract: A passive direct organic fuel cell includes an organic fuel solution and is operative to produce at least 15 mW/cm2 when operating at room temperature. In additional aspects of the invention, fuel cells can include a gas remover configured to promote circulation of an organic fuel solution when gas passes through the solution, a modified carbon cloth, one or more sealants, and a replaceable fuel cartridge.

Abstract: A method of and fuel cell system for limiting an amount of a fuel crossing over a membrane in a fuel cell, the method including determining an appropriate molecular ratio of the fuel and water for a fuel-water mixture 503; and controlling an amount of the fuel-water mixture that is available to an anode side of the membrane 507 in the fuel cell according to an amount of the fuel that will be electro-oxidized by the fuel cell. The fuel cell system includes a fuel cell membrane 103 having an anode layer 107, a cathode layer 109, and an electrolyte layer 111 where the cathode layer is exposed to an oxygen source, and a fuel delivery system 105 including a fuel chamber 119 disposed around and proximate to the anode layer at a side opposite to the electrolyte layer, the fuel delivery system implementing the method above.

Abstract: The invention describes a method and the relevant devices for permitting an operation stable with time of a stack of membrane fuel cells fed with air and a gas containing hydrogen and at least 100 ppm of carbon monoxide, characterised in that it provides for an oxidising condition at the anodes of said cells in a self-adjusting continuous way or sequentially discontinuous way. Different embodiments of the invention are illustrated wherein the oxidising condition is obtained by adding to the gas containing hydrogen and carbon monoxide, oxygen produced in an electrolysis cell integrated to the fuel cell stack, or by flowing air through porous areas obtained in the bipolar plates or by resorting to high gas diffusion rate membranes, wherein the air flow rate is regulated in both cases by adjusting the pressure differential existing between air and the gas containing hydrogen and carbon monoxide.

Abstract: A cell stack assembly (102) coolant system comprises a coolant exhaust conduit (110) in fluid communication with a coolant exhaust manifold (108) and a coolant pump (112). A coolant inlet conduit (120) enables transportation of the coolant to the coolant inlet manifold. The coolant system further includes a bypass conduit (132) in fluid communication with the coolant exhaust manifold and the coolant inlet manifold, while a bleed valve (130) is in fluid communication with the coolant exhaust conduit and a source of gas. Operation of the bleed valve enables venting of the coolant from the coolant channels, and through a shut down conduit (124). An increased pressure differential between the coolant and reactant gases forces water out of the pores in the electrode substrates (107,109). An ejector (250) prevents air form inhibiting the pump. Pulsed air is blown (238,239,243,245) through the coolant channels to remove more water.

Abstract: A start-up method for a fuel cell system that includes a fuel cell that carries out power generation by the electrochemical reaction between a fuel gas and the oxygen gas in the air; a fuel gas discharge path and a fuel gas supply path that are connected to the fuel cell; a fuel gas circulation path in which the fuel gas discharge path merges with the fuel gas supply path; and a purge valve provided on the fuel gas circulation path in order to discharge the circulating fuel gas from the fuel gas circulation path. The method includes the steps of opening the purge valve at the same time that the fuel gas is supplied to the fuel cell and replacing the nitrogen gas that originates in the air and is present in the fuel gas circulation path by fuel gas; and closing the purge valve after the nitrogen gas in the fuel gas circulation path has been replaced by the fuel gas.

Abstract: The air blower (18) of a fuel cell power plant (9) is used to force water out of the coolant flow fields (27) of a fuel cell stack (10), a coolant pump (35) and a heat exchanger (40) through a valve (46) which is closed during normal operation. The water removal occurs as part of a shutdown procedure in which the fuel cell stack continues to operate so that it provides the power for the air pump and to assist in water removal (such as retaining low vapor pressure). The water flow to an accumulator (33) is blocked by a valve (29) during the shutdown procedure.

Abstract: A fuel cell system is provided with a fuel cell body, a hydrogen supply system supplying hydrogen containing gas to the fuel cell body, an oxygen supply system supplying oxygen containing gas to the fuel cell body, a cooling system adjusting the temperature of the fuel cell body, a water circulation system supplying water to humidify the fuel cell body and collecting water discharged from the fuel cell body, a generated heat amount calculating section calculating a generated heat amount of the fuel cell body, a cooling performance calculating section calculating a cooling performance of the cooling system, a temperature calculating section calculating a fuel cell temperature of the fuel cell body on the basis of the generated heat amount and the cooling performance, a collected water amount calculating section calculating an amount of water collected from the water circulation system on the basis of the fuel cell temperature, and a collected water amount controlling section controlling the amount of collected

Abstract: A planar, rectangular and water-cooled fuel cell includes a cooling element with a cooling chamber through which cooling water flows during the operation of the fuel cell. Cooling water does not flow through the cooling chamber in a homogeneous manner, normally resulting in local heating of the fuel cell in regions through which the cooling water flows through less frequently. A fuel cell is provided with a cooling element which includes an essentially rectangular cooling chamber with four corner regions, whereby the opening of the coolant flow is arranged in the first corner, the opening of a first coolant flow is arranged in a second corner and a second coolant flow is disposed in a third corner. The first coolant flow has a cross section Q1 on the narrowest point thereof and the second coolant flow has a cross section Q2 on the narrowest point thereof, the ratio of Q1/Q2 being 7-25.

Abstract: A power plant (10) includes at least one fuel cell (12), a coolant loop (18) including a freeze tolerant accumulator (22) for storing and separating a water immiscible fluid and water coolant, a direct contact heat exchanger (56) for mixing the water immiscible fluid and the water coolant within a mixing region (72) of the heat exchanger (56), a coolant pump (21) for circulating the coolant through the coolant loop (18), a radiator loop (84) for circulating the water immiscible fluid through the heat exchanger (56), a radiator (86) for removing heat from the coolant, and a direct contact heat exchanger by-pass system (200). The plant (10) utilizes the water immiscible fluid during steady-state operation to cool the fuel cell and during shut down of the plant to displace water from the fuel cell (12) to the freeze tolerant accumulator (22).

Abstract: Disclosed are methods for forming a water-free electrolyte membrane useful in fuel cells. Also provided is a water-free electrolyte membrane comprising a quaternized amine salt including poly-4-vinylpyridinebisulfate, a poly-4-vinylpyridinebisulfate silica composite, and a combination thereof and a fuel cell comprising the membrane.

Abstract: An exemplary fuel cell device assembly is a fuel cell stack assembly comprising: (i) a plurality of fuel cell packets, each of the packets comprising (a) a frame and (b) two planar electrolyte-supported fuel cell arrays, the fuel cell arrays arranged such that anode side of one fuel cell array faces the anode side of another fuel cell array, and the frame in combination with the fuel cell arrays defines a fuel chamber; (ii) a main enclosure enclosing the plurality of fuel cell packets, such that the plurality of packets form a plurality of oxidant channels; (iii) a restrictor plate forming, in conjunction with the fuel cell pockets, a plurality of oxidant channels; (iv) an inlet oxidant plenum manifold connected to one side of the oxidant channels; (v) an outlet oxidant plenum manifold connected to the other side of the oxidant channels; (vi) an inlet fuel manifold connected to one side of each of the fuel chambers; and (vii) an outlet fuel manifold connected to the other side of each of the fuel chambers.

Abstract: Passive water management techniques are provided in an air-breathing direct oxidation fuel cell system. A highly hydrophobic component with sub-micrometer wide pores is laminated to the catalyzed membrane electrolyte on the cathode side. This component blocks liquid water from traveling out of the cathode and instead causes the water to be driven through the polymer membrane electrolyte to the cell anode. The air-breathing direct oxidation fuel cell also includes a layer of cathode backing and additional cathode filter components on an exterior aspect of the cell cathode which lessen the water vapor escape rate from the cell cathode. The combination of the well laminated hydrophobic microporous layer, the thicker backing and the added filter layer, together defines a cathode structure of unique water management capacity, that enables to operate a DMFC with direct, controlled rate supply of neat (100%) methanol, without the need for any external supply or pumping of water.

Abstract: A dual mode electrochemical system comprises a first electrode capable of storing hydrogen, a second electrode, a substantially electrically insulating and substantially ionically conducting membrane interposed therebetween and an electrolyte. In a first mode, upon introduction of water and electricity the dual mode electrochemical system electrolyzes the water in the presence of the electrolyte and produces hydrogen and oxygen across the membrane. The hydrogen is stored in the first electrode. In a second mode, upon introduction of an oxidant to the second electrode the dual mode electrochemical system produces water and electricity by reacting the stored hydrogen and the oxidant across the membrane.

Abstract: Active metal and active metal intercalation electrode structures and battery cells having ionically conductive protective architecture including an active metal (e.g., lithium) conductive impervious layer separated from the electrode (anode) by a porous separator impregnated with a non-aqueous electrolyte (anolyte). This protective architecture prevents the active metal from deleterious reaction with the environment on the other (cathode) side of the impervious layer, which may include aqueous or non-aqueous liquid electrolytes (catholytes) and/or a variety electrochemically active materials, including liquid, solid and gaseous oxidizers. Safety additives and designs that facilitate manufacture are also provided.

Abstract: Disclosed are ionically conductive composites for protection of active metal anodes and methods for their fabrication. The composites may be incorporated in active metal negative electrode (anode) structures and battery cells. In accordance with the invention, the properties of different ionic conductors are combined in a composite material that has the desired properties of high overall ionic conductivity and chemical stability towards the anode, the cathode and ambient conditions encountered in battery manufacturing. The composite is capable of protecting an active metal anode from deleterious reaction with other battery components or ambient conditions while providing a high level of ionic conductivity to facilitate manufacture and/or enhance performance of a battery cell in which the composite is incorporated.

Abstract: A laminate cell comprises a power generating element formed by sequentially stacking positive electrode plates and negative electrode plates while interposing separators therebetween; a cell package formed of a metal composite film, the cell package hermetically sealing the power generating element and an electrolyte; a positive tab connected to the positive electrode plates; and a negative tab connected to the negative electrode plates. According to the laminate cell, the power generating element and the cell package have approximately rectangular plane shapes, and the positive tab and the negative tab are drawn outward from end edges of long sides of the cell package.

Abstract: An electrochemical device for providing an electric energy by converting an electron transfer involved in an oxidation-reduction reaction into an electric energy comprising a positive electrode, a negative electrode and an electrolyte, wherein at least one of the positive and negative electrodes comprises a compound having a structure represented by the general formula (1):

Abstract: A solid electrolyte battery includes a cathode having a cathode active material and a solid electrolyte and an anode. The solid electrolyte includes a first polymer having a binding force and a second polymer composed of alkali metal ion conducting polymers. Thus, the solid electrolyte battery has a high capacity and is excellent in its battery characteristics.

Abstract: The present invention relates to a lithium secondary battery comprising an overdischarge-preventing agent. Particularly, the present invention provides a lithium secondary battery comprising an overdischarge-preventing agent having superior effects for an overdischarge test and showing 90% or more capacity recovery after the test, by introducing lithium nickel oxide into a cathode for a lithium secondary battery comprising a lithium transition metal oxide capable of occluding and releasing lithium ions as an overdischarge-preventing agent to supply lithium ions such that irreversible capacity of an anode can be compensated or better, thereby lowering voltage of a cathode first to prevent voltage increase of an anode during the overdischarge test.

Abstract: A composite material includes a first phase which comprises LixMy(PO4)z wherein M is at least one metal, y and z are independently 0, and x is less than or equal to 1. The material includes a second phase which has an electronic and/or lithium ion conductivity greater than that of the first phase. The material is prepared by heating a starting mixture which includes lithium, iron, a phosphate ion, and a catalyst in a reducing atmosphere. Also disclosed are electrodes which incorporate the material and batteries which utilize those electrodes as cathodes.

Abstract: Disclosed are ionically conductive composites for protection of active metal anodes and methods for their fabrication. The composites may be incorporated in active metal negative electrode (anode) structures and battery cells. In accordance with the invention, the properties of different ionic conductors are combined in a composite material that has the desired properties of high overall ionic conductivity and chemical stability towards the anode, the cathode and ambient conditions encountered in battery manufacturing. The composite is capable of protecting an active metal anode from deleterious reaction with other battery components or ambient conditions while providing a high level of ionic conductivity to facilitate manufacture and/or enhance performance of a battery cell in which the composite is incorporated.

Abstract: A non-aqueous secondary battery is provided, which has excellent overcharging safety, less generation of gas during storage at a high temperature, and can ensure storage reliability. A non-aqueous secondary battery includes a positive electrode, a negative electrode, and a non-aqueous electrolyte solution, wherein the non-aqueous electrolyte solution contains a compound A in which a halogen group is bonded to a benzene ring and an aromatic or/and heterocyclic compound B oxidized at a potential lower than that of the compound A, a content of the compound A with respect to the total non-aqueous electrolyte solution is 1% by mass to 15% by mass, and a content of the compound B with respect to the total non-aqueous electrolyte solution is 0.005% by mass to 3% by mass.

Abstract: A non-aqueous electrolyte battery of the present invention includes a non-aqueous electrolyte containing a lithium salt, a cyclic sultone derivative, and an acid anhydride, wherein the non-aqueous electrolyte contains the cyclic sultone derivative in an amount of 0.3 to 3% by mass and the non-aqueous electrolyte contains the acid anhydride in an amount of 0.3 to 3% by mass. Furthermore, the non-aqueous electrolyte battery includes at least one selected from a cyclic sultone derivative and an acid anhydride, and an electrolyte salt. The electrolyte salt contains lithium salt A and lithium salt B. The lithium salt A is at least one selected from LiBF4, LiPF6, LiAsF6, and LiSbF6, and the lithium salt B is a lithium salt other than the lithium salt A. The electrolyte contains the lithium salt A in an amount of 2 mol % or more.

Abstract: A reflective mask blank has a substrate (1) and a reflective multilayer film (3) formed on the substrate to reflect exposure light. The substrate has a base pattern (2) formed by a predetermined irregularity. On a surface of the reflective multilayer film formed on the base pattern, a step portion corresponding to the base pattern is formed as a programmed defect.

Abstract: A phase shift mask may include boundaries between phase shift regions with continuous sloped phase edges. The continuous sloped phase edges may be produced by introducing a predetermined degree of defocus into a beam used during production of the mask to image the pattern on the mask. Such a phase shift mask may be “trimless”, i.e., not require a corresponding binary “trim” mask for a second exposure to remove phase conflicts after exposure with the phase shift mask.

Abstract: An EUV mask (10, 309) includes an opening (26) that helps to attenuate and phase shift extreme ultraviolet radiation using a subtractive rather than additive method. A first embedded layer (20) and a second embedded layer (21) may be provided between a lower multilayer reflective stack (14) and an upper multilayer reflective stack (22) to ensure an appropriate and accurate depth of the opening (26), while allowing for defect inspection of the EUV mask (10, 309) and optional defect repair. An optional ARC layer (400) may be deposited in region (28) to reduce the amount of reflection within dark region (28). Alternately, a single embedded layer of hafnium oxide, zirconium oxide, tantalum silicon oxide, tantalum oxide, or the like, may be used in place of embedded layers (20, 21). Optimal thicknesses and locations of the various layers are described.

Abstract: In the formation of a halftone type phase shift mask, a reactive gas introduction inlet and an inert gas introduction inlet are provided so as to introduce the respective gases separately and by using a reactive low throw sputtering method a molybdenum silicide based phase shifter film is formed. Thereby, it becomes possible to provide a halftone type phase shift mask, which is applicable to an ArF laser or to a KrF laser, by using molybdenum silicide based materials.

Abstract: A photomask includes a semi-light-shielding portion having a light-shielding property, a light-transmitting portion surrounded by the semi-light-shielding portion and a peripheral portion positioned in a periphery of the light-transmitting portion on a transparent substrate. The semi-light-shielding portion and the light-transmitting portion transmit the exposure light in the same phase each other, whereas the peripheral portion transmits the exposure light in a phase opposite to that of the light-transmitting portion. A phase shift film that transmits the exposure light in a phase opposite to that of the peripheral portion is formed on the transparent substrate-in the semi-light-shielding portion formation region.

Abstract: A radiographic image conversion panel containing a substrate having thereon a phosphor layer formed by a vapor-accumulating method, wherein the phosphor layer has a thickness distribution of not more than ±20%, the thickness distribution being defined by the formula: ((Dmax?Dmin)/(Dmax+Dmin))×100, provided that Dmax is a maximum thickness of the phosphor layer; and Dmin is a minimum thickness of the phosphor layer.