Abstract: An etching stopper film is formed on an interlayer insulating film. A conductive layer is formed on the etching stopper film. An etching stopper film is formed to cover the conductive layer. An interlayer insulating film is formed on the etching stopper film. In a structure above, initially, a hole vertically penetrating the interlayer insulating film for exposing a surface of the etching stopper film is formed under a first etching condition. Thereafter, the etching stopper film serving as a bottom surface of the hole is removed under a second etching condition, thereby forming the hole reaching the conductive layer. An interconnection is embedded in the hole. A semiconductor device in which a hole reaching the conductive layer is prevented from extending as far as the lower interlayer insulating film as a result of misalignment, as well as a manufacturing method thereof are thus obtained.

Abstract: The contact opening through an insulating layer is formed having a straight sidewall portion and a bowl shaped sidewall portion. The bowl shaped sidewall portion is near the top of the insulation layer to provide an enlarged diameter of the contact opening at the top relative to the bottom. A conductive material is then formed in the contact opening in electrical contact with a lower conductive layer. The conductive material forms a plug having an enlarged head, such as a nail head or a flat heat screw shape. The enlarged head protects the silicon and a barrier layer, if present, within the contact from being etched by any subsequent anisotropic etches. Thus, when an electrical interconnection layer such as aluminum is formed overlying the contact plug, the plug acts as an etch stop to prevent etching of a barrier layer of the barrier layer within the contact opening.

Abstract: A wiring structure with improved resistance to void formation and a method of making the same are described. The wiring structure has a first conducting layer that includes a large area portion which is connected to an end of a protrusion with a plurality of “n” overlapping segments and at least one bending portion. The other end of the protrusion is connected to the bottom of a via which has an overlying second conducting layer. A bend is formed by overlapping the ends of two adjacent segments at an angle between 45° and 135°. The protrusion may also include at least one extension at a segment end beyond a bend. A bending portion and extension are used as bottlenecks to delay the diffusion of a vacancy from the large area portion to the vicinity of the via and is especially effective for copper interconnects or in a via test structure.

Abstract: A semiconductor device is disclosed, which includes at least two layers superposed on each other in a stacking direction above a substrate, each of the layers including an insulating film a conductive layer films, a conductive plug electrically connected to the conductive layer, and at least one dummy via chain provided in the insulating films and stacked in the at least two layers, wherein the dummy via chain includes at least two reinforcing metal layers and at least one reinforcing plug.

Abstract: The semiconductor device has insulating films 40, 42 formed over a substrate 10; an interconnection 58 buried in at least a surface side of the insulating films 40, 42; insulating films 60, 62 formed on the insulating film 42 and including a hole-shaped via-hole 60 and a groove-shaped via-hole 66a having a pattern bent at a right angle; and buried conductors 70, 72a buried in the hole-shaped via-hole 60 and the groove-shaped via-hole 66a . A groove-shaped via-hole 66a is formed to have a width which is smaller than a width of the hole-shaped via-hole 66. Defective filling of the buried conductor and the cracking of the inter-layer insulating film can be prevented. Steps on the conductor plug can be reduced. Accordingly, defective contact with the upper interconnection layer and the problems taking place in forming films can be prevented.

Abstract: Some embodiments of the invention provide a programmable system in package (“PSiP”). The PSiP includes a single IC housing, a substrate and several IC's that are arranged within the single IC housing. At least one of the IC's is a configurable IC. In some embodiments, the configurable IC is a reconfigurable IC that can reconfigure more than once during run time. In some of these embodiments, the reconfigurable IC can be reconfigured at a first clock rate that is faster (i.e., larger) than the clock rates of one or more of the other IC's in the PSiP. The first clock rate is faster than the clock rate of all of the other IC's in the PSiP in some embodiments.

Abstract: The present invention relates to a high-reliable semiconductor device in which electrodes formed on substrates are prevented from deteriorating by sealing the electrodes with a frame member rather than a sealing material. The frame member in the present invention surrounds electrodes formed on the substrates. The inside of the frame member is vacuous or filled with a gas which does not react with the electrodes such as an inert gas and, thereby, the electrodes are prevented from deteriorating by attacks of oxygen or moisture.

Abstract: A semiconductor device should have a structure that allows locating electronic components in a region under a bonding pad. The semiconductor device includes a bonding pad constituting the external connection terminal; a region under the bonding pad including at least two copper layers and a connection via plug, under said bonding pad, disposed so as to connect copper layers that form a pair out of the at least two copper layers; a seal ring constituted of an annular conductor, disposed so as to surround the region under the bonding pad, and to connect a lower one of the copper layers that form said pair to copper layer to form a pair with the lower copper layer; and an interconnect connected to the bonding pad outside the seal ring.

Abstract: A control system for a vehicle power supply for supplying power to a predetermined power receiving portion includes a first power generating power supply portion, second power generating power supply portion, and controller. The controller is arranged to set the voltage to be output to the power receiving portion from one of the power generating power supply portions in accordance with the output voltage of the other of the power generating power supply portions. With this arrangement, the power receiving portion is prevented from being supplied with an excessive amount of power, and when power regeneration is being performed by the second power generating power supply portion, the regenerated power is effectively used. Thus, the fuel economy of the vehicle can be increased.

Abstract: A switch for switching off at least one airbag having two identical sensors for detecting a switching state of the switch is provided, the two identical sensors being connected up in such a way that the electrical characteristic-quantity ranges to be evaluated for detecting the switching state differ from each other. This is achieved with the aid of different resistor networks between the two sensors and a signal evaluation unit.

Abstract: A power supply device incorporated in a vehicle driven by an internal combustion engine including: a first power supply system for driving a vehicle load that converts an output of a generation coil provided in a generator driven by an internal combustion engine into a DC output to supply the DC output to an electrical load or electrical loads in the vehicle; and a second power supply system for driving an external load that converts an output of another generation coil provided in the generator into a DC output, then converts the DC output into an AC output at a commercial frequency with an inverter, and supplies the AC output to an external load, wherein the inverter is operated as a DC-DC converter to supply assisting power from the inverter through a switch to the first power supply system, when the output of the first power supply system is insufficient.

Abstract: A control method for a voltage boosting circuit adapted to be used in an uninterruptible power supply is proposed. The uninterruptible power supply includes a battery module and a voltage boosting circuit comprising a plurality of switch elements, in which the uninterruptible power supply is operating under a battery supply mode. The control method includes the following steps: detecting an output voltage of the battery module and a regulated predetermined output voltage of the voltage boosting circuit; and when the output voltage of the battery module is higher than the regulated predetermined output voltage of the voltage boosting circuit, sending a switching signal to regulate the switching operation of the switch elements of the voltage boosting circuit, so that the output voltage of the voltage boosting circuit is substantially equal to the output voltage of the battery module.

Abstract: An uninterruptible power supply (UPS) is provided that can alleviate difficulties in shipping electronic devices containing batteries, such as UPS devices by providing a battery connect/disconnect assembly that can connect and disconnect an internal battery from outside the chassis of the UPS. The UPS comprises an input, output, DC voltage source, electrical circuit, chassis, and connect/disconnect assembly. The input receives input power from an input power source, and the output provides output power to a load. The DC voltage source provides DC power and has first and second terminals. The electrical circuit is operably coupled to the DC voltage source and is capable of receiving the input power and providing the output power. The chassis houses at least the DC voltage source and the electrical circuit. The connect/disconnect assembly is operably coupled to the DC voltage source and is constructed and arranged to be operable from outside the chassis.

Abstract: Systems and methods for generating a high voltage pulse. A series of voltage cells are connected such that charging capacitors can be charged in parallel and discharged in series. Each cell includes a main switch and a return switch. When the main switches are turned on, the capacitors in the cells are in series and discharge. When the main switches are turned off and the return switches are turned on, the capacitors charge in parallel. One or more of the cells can be inactive without preventing a pulse from being generated. The amplitude, duration, rise time, and fall time can be controlled with the voltage cells. Each voltage cell also includes a balance network to match the stray capacitance seen by each voltage cell.

Abstract: The invention concerns an actuator. In a common housing are a motor contained in a metallic casing and an electronic card adapted to control the motor. The casing is electrically connected to a ground. This connection is made by a deformable element, whose deformation provides, by contact, the electrical connection between the casing and the ground.

Abstract: A magnetic bearing (1, 2, 3) has two bearing members (5, 7) each of which carries a set of bearing elements (4, 6) and the bearing elements (4) of a said set carried by one member (5) interleaved with the bearing elements (6) of a said set carried by the other member (7) to define three or more substantially parallel interleaf gaps (11) between successive elements (4, 6, 4, . . . ) so that bearing forces can be developed as a result of magnetic shear stresses acting across those gaps (11). The magnetic bearing achieves its bearing forces as the sum of force contributions from a number of parallel (or nearly-parallel) airgaps (11) and each of these individual airgap force contributions comes about as the integration of magnetic shear stress over the airgap area brought about by causing lines of magnetic flux to cross the airgap at an angle to the normal.

Abstract: A vehicle fan motor for an electric fan assembly includes a motor housing, a motor assembly enclosed in the motor housing, and a universal mounting arrangement radially and outwardly extended from the motor housing for securely mounting the motor housing to the electric fan assembly. The universal mounting arrangement contains first through sixth alignment holes radially and spacedly provided on a circumferential side of the motor housing. Therefore, the motor housing is adapted for securely mounting to the electric fan assembly having three mounting holes when the first, third and fifth alignment holes of the universal mounting arrangement are coaxially aligned with the three mounting holes respectively, and the motor housing is adapted for securely mounting to the electric fan assembly having four mounting holes when the first, second, fourth and sixth alignment holes of the universal mounting arrangement are coaxially aligned with the four mounting holes respectively.

Abstract: An electrical energy generator with improved efficiency has a base on which is mounted an elastically deformable micromechanical element that has a section that is free to be displaced toward the base. An absorber of radioactively emitted particles is formed on the base or the displaceable section of the deformable element and a source is formed on the other of the displaceable section or the base facing the absorber across a small gap. The radioactive source emits charged particles such as electrons, resulting in a buildup of charge on the absorber, drawing the absorber and source together and storing mechanical energy as the deformable element is bent. When the force between the absorber and the source is sufficient to bring the absorber into effective electrical contact with the source, discharge of the charge between the source and absorber allows the deformable element to spring back, releasing the mechanical energy stored in the element.

Abstract: In a surface acoustic wave element 10, in which IDT electrodes 31 and 32, a grounding electrode 37, etc. are formed one main surface of a piezoelectric substrate 20, resistors 40 made of a semiconductor are provided to connection electrodes 38 that interconnect the respective electrodes. By forcing the charges generated in the IDT electrodes to move via the resistors 40, it is possible to provide a compact, highly reliable surface acoustic wave apparatus capable of preventing an electrostatic discharge damage in the IDT electrodes.

Abstract: A piezoelectric actuator, for instance a piezoelement for driving an injection valve of an internal combustion engine, is discharged from a charge state, in which a first control potential is present on a first piezo-terminal and a second control potential is present on a second piezo-terminal. The discharging operation is accelerated by not only changing the potential prevailing on the first piezo-terminal toward the second control potential by way of a first discharge path, but a second discharge path is also formed between the second piezo-terminal and a potential lying between the two control potentials. By appropriate selection of the time sequence in connecting these two discharge paths and of their electrical properties, discontinuities in the discharge process can be almost completely avoided. The discharge process then proceeds very rapidly and evenly.

Abstract: The present invention provides a shear motion driven motion actuator. The motion actuator provides a plurality of driving modes to drive a main body, including the inertial drive mode, the friction drive mode and the scanning mode. The motion actuator comprises a base having a V-shape concave groove and a main body having a V-shape convex. A plurality of piezoelectric elements is provided on the base to drive the main body using the shearing deformation force of the piezoelectric elements. The present invention also provides motion control using a variety of driving modes to achieve stable, high resolution and linear driving of the main body along the base.

Abstract: Aspects of the invention provide piezoelectric resonator element having a plurality of grooves for suppressing propagation of the thickness shear vibration from the center portion to the outer peripheral portion of the main surface being placed in enclosure-like shapes surrounding the center portion of at least one of the main surfaces.

Abstract: A vibration type driving apparatus capable of inhibiting wear in an elastic member and a contact member is provided. The vibration type driving apparatus is a vibration type driving apparatus relatively driving an elastic member given vibrations by an electric-mechanical energy conversion element and a contact member contacting the elastic member, wherein at least one of the elastic member and the contact member is formed by aluminum oxide ceramics containing 5 wt % to 40 wt % of zirconium oxide.

Abstract: A bulk acoustic wave device includes: a bulk acoustic wave element including a piezoelectric layer formed on a substrate, a lower electrode contacting a lower surface of the piezoelectric layer, and an upper electrode contacting an upper surface of the piezoelectric layer and partially overlapping the lower electrode, a lower hollow section being formed between the substrate and the lower surface of the piezoelectric layer, a first through-hole reaching the lower hollow section being formed through the bulk acoustic wave element in a direction perpendicular to a surface of the piezoelectric layer; an upper hollow section forming layer forming an upper hollow section with the upper surface of the piezoelectric layer, a second through-hole reaching the upper hollow section being formed therethrough in a direction perpendicular to a surface thereof; and a sealing layer covering the upper hollow section forming layer and filling up the second through-hole.

Abstract: A dielectric element having a dielectric layer provided between an upper electrode layer and a lower electrode layer, wherein the dielectric layer has a first dielectric layer and a second dielectric layer mutually different in composition, and composition of at least one component of the first dielectric layer changes as to a thickness direction of the first dielectric layer in proximity to a boundary between the first dielectric layer and the second dielectric layer.

Abstract: A method and an apparatus for cooling an arc lamp have been disclosed. In one embodiment, the arc lamp assembly includes an arc lamp, a first heat sink coupled to an anode of the arc lamp, and a thermally conductive ring surrounding a first part of the outer surface of a reflector body of the arc lamp to thermally couple the reflector body to the first heat sink. Other embodiments have been described and claimed.

Abstract: A multiple electron beam source comprises a photon source to generate a photon beam, a lens to focus the photon beam, a photocathode having a photon receiving surface and an electron emitting surface, and an array of electron transmission gates spaced apart from the electron emitting surface of the photocathode by a distance dg. In one version, the multiple electron beam source comprises a photocathode stage assembly to move the photocathode relative to the array of electron transmission gates. In one version, the multiple electron beam source also comprises a plasmon-generating photon transmission plate comprising an array of photon transmission apertures and exterior surfaces capable of supporting plasmons.

Abstract: Frusto-conical needle-shaped light guide paths are implanted on the surface of a display panel such that output light from display elements propagate through the needle-shaped light guide paths through total reflection, while external light repeats reflections multiple times on wedge-shaped surfaces of the light guide paths, and attenuates. A light absorbing film is coated on the surfaces of the needle-shaped light guide paths to increase a contrast ratio. Thus, a higher contrast can be accomplished in a bright room, and cross-talk between adjacent pixels is reduced. A reduction in contrast due to display light is also alleviated by employing longer implanted needle-shaped light guide paths, and bringing light incident surfaces of the needle-shaped light guide paths into close contact with the surface of the display panel.

Abstract: Exemplary embodiments of the present invention include a light source unit in which only a small number of components are required, the shapes of the corresponding components are not complicated, a lens is fixed and hence good workability is achieved, and lowering of an illumination intensity of the light source unit while avoiding occurrence of displacement between an optical axis of an elliptic reflector integrated in the light source unit and an optical axis of a collimator lens is reduced or prevented.

Abstract: A lighting device includes a cathode (11), a cover (12), an insulation layer (13), an emitter base (18), a molybdenum tip (19), a phosphor layer (15), an anode (16), and a silicon oxide layer (17). The cover is formed on the cathode. The insulation layer is formed on the cover. The base is formed on the insulation layer. The molybdenum tip is formed on the base. The phosphor layer is spaced apart from the molybdenum tip. The anode is formed on the phosphor layer. The silicon oxide layer is formed on the anode.

Abstract: In a shadow mask 1 of pressing type, a large number of slots are made in a mask body in the horizontal direction and in the vertical direction. Each slot has a roughly rectangular backside opening, a roughly rectangular front-side opening, and a through-hole that connects these two openings. Between each slot of the multiple slots made in the mask body that is situated at least on either of the two diagonal axes of the mask body but in such a position that the angle at which electron beams enter the slot is 20 degrees or more and another slot that is arranged adjacently to the above slot in the vertical direction, a connecting part connecting the peripheral-side vertical outer edges of the front-side openings of these slots is provided so that it runs through a horizontal bridge part formed between the front-side openings of the slots.

Abstract: A field emission display includes a first substrate, at least one gate electrode formed on the first substrate, cathode electrodes formed on the first substrate, an insulation layer formed between the at least one gate electrode and the cathode electrodes, emitters electrically contacting the cathode electrodes, and formed in pixel regions of the first substrate, counter electrodes electrically connected to the at least one gate electrode and provided such that the counter electrodes and emitters have a first predetermined gap therebetween, a second substrate provided opposing the first substrate with a second predetermined gap therebetween, wherein emitter-receiving sections are provided in the cathode electrodes, dividers are formed between the emitter-receiving sections, the emitters are electrically contacted with an edge of the cathode electrodes corresponding to a shape of the emitter-receiving sections, and at least a part of each of the counter electrodes is provided within the corresponding emitter-r

Abstract: Provided is an image display apparatus, including: a vacuum container which includes an electron source and an anode electrode opposed to the electron source; and an ion pump arranged so as to communicate through the vacuum container, in which: an ion pump container is composed of a non-electroconductive material; and an electroconductive film is formed on an external surface of the vacuum container on a side on which the ion pump container is mounted or on an internal surface of the ion pump container. The image display apparatus achieves: a reduction in weight of the ion pump; an improvement in compatibility to the vacuum container; and the prevention of an adverse effect of discharge inside the ion pump on image display.

Abstract: An FED device includes an anode electrode formed on a substrate; a phosphor layer formed on the anode electrode; and field emission devices for emitting at least two electron beams onto the phosphor layer. An area where a fluorescent material is excited can be enlarged and luminance and efficiency of the FED can be enhanced.

Abstract: Light-emitting devices, and related components, systems and methods are disclosed. In some embodiments, the devices (e.g., light-emitting diodes) comprise a multi-layer stack of materials including a light generating region and a first layer supported by the light generating region. The surface of the first layer may have a dielectric function that varies spatially according to a pattern. The pattern may be configured so that light that emerges from the device via the surface of the first layer is more collimated than a Lambertian distribution of light.

Abstract: A lighting device and a method for manufacturing the same are described. First, a semiconductor layer of a first electrical property, an active layer and a semiconductor layer of a second electrical property are sequentially formed, and part of them are removed to form a mesa. A transparent contact layer is formed thereon, and thus forms a stack. Afterwards, a passivation layer is deposited on the stack and a first part of the semiconductor layer of the first electrical property adjacent to the stack. Part of the passivation layer is removed to expose part of the transparent contact layer. Then, an electrode of the second electrical property is formed on the exposed transparent contact layer. Afterwards, the electrode of the second electrical property is extended to the passivation layer on the first part of the semiconductor layer of the first electrical property to form a guard ring.

Abstract: The present invention provides a multicolor OLED pixel structure having a plurality of light emitting color elements, each color element emitting light of a particular color. Optical centers of the color elements coincide substantially at an optical center for the pixel structure and any portion of a color element of the pixel structure has an equally luminous portion of the same color element located diametrically opposite thereto with respect to the optical center of the pixel structure. Light from all the color elements adds to be able to form emitted white light. A plurality of pixel structures may be formed into an array for an active or passive display.

Abstract: An active matrix type organic light emitting diode display serving as a bottom emission type device coupling out emission of an organic electroluminescence layer from a substrate where thin film transistors are formed or as a top emission type device coupling out the emission on the opposite side to the substrate. In a suitable layer (102, 106, 107) in each device, an insulating film containing SiO is formed. The insulating film is porous with nano pores in the film. The porous insulating film is controlled as to film density, film refractive index, nano pore diameter in film, average nano pore diameter in film and maximum nano pore diameter in film so that the refractive index is lower than that of a transparent electrode or a transparent substrate of the display holding the organic electroluminescence layer therebetween, and nano pores are present in the film.

Abstract: An organic electroluminescence (EL) display unit includes a plurality of pixels formed on a glass substrate and each including a TFT area and a luminescence area. An edge cover film covers the TFT area and exposes the luminescence area through a window formed in the edge cover film. The edge of the edge cover film adjacent to the window has a taper angle equal to or smaller than 30 degrees. This taper angle is obtained by a post-baking treatment in addition to a step alleviating film formed in the luminescence area to underlie the organic EL element.

Abstract: A light emitting apparatus with high homogeneity in image quality is provided, which includes anodes 102 on an insulator 101, cathodes 107 orthogonal to the anodes 102, and EL layers 106 interposed between the anodes 102 and the cathodes 107, and auxiliary wirings 103 are electrically connected to the anodes 102. The auxiliary wirings 103 are made of a material lower in resistance than that of the anodes 102, thereby being capable of reducing the wiring resistance of the anodes 102.

Abstract: The invention achieves a reduction in a thickness while suppressing a thermal effect. An apparatus includes a light-emitting element and a sealing layer to hermetically seal the light-emitting element. The sealing layer includes a heat radiation layer having thermal conductivity.

Abstract: An organic EL element includes a plurality of light-emitting units which exhibit organic EL luminescence and at least two different luminous colors and are connected in series; and a light-emitting surface formed by overlapping partly or wholly light-emitting surfaces of the light-emitting units. The plurality of light-emitting units includes light-emitting units which exhibit one color and are formed in multiple stages. A desired mixed color is obtained from the light-emitting surface by combining the different luminous colors.

Abstract: A light-emitting apparatus of the present invention includes: a first electrode formed on an insulating surface; a first insulating layer covering an end portion of the first electrode and having a tapered edge; a second insulating layer formed on the first electrode and the first insulating layer and formed of one kind or a plurality of kinds selected from the group consisting of silicon oxide, silicon nitride, and silicon oxynitride; an organic compound layer formed on the second insulating layer; and a second electrode formed on the organic compound layer.

Abstract: A method of fabricating an organic light emitting display device, the method comprising: providing a substrate; forming an organic light emitting unit on the substrate; and forming a passivation structure layer including organic and inorganic contents over the organic light emitting unit and the substrate, wherein the passivation layer is formed by supplying one or more source compound of respective ratio varying in time.

Abstract: A clamp structure of an external electrode lamp includes a first fixing device, a second fixing device, and a metal strip. The first fixing device has a first indentation and the second fixing device has a second indentation for clamping an electrode of the external electrode lamp. In addition, the metal strip is located between the first and second fixing devices to contact the electrode of the external electrode lamp for providing power. The electrode can be further equipped with a cushion for fixing the electrode onto the first and second fixing devices.

Abstract: An object of the invention is to reduce the adverse effects due to a difference of thermal expansion between a conductive sealing member and a light-emitting vessel and to provide a reliable high pressure mercury lamp, even when the lamp is operated at a high pressure. The lamp has a light-emitting vessel 16 of quartz and having end portions, an electrode member 10 contained in the vessel 16, and a conductive sealing member 7A. The sealing member 7A is fixed in the end portion and connected to the electrode member 10. The conductive member is composed of a sintered body made from silica granules each having a coating of a metal or a metal compound. The sintered body has a conductive network structure made of the metal and having a content of the metal of not higher than 20 volume percent.

Abstract: An arc discharge lamp (60) contains an arc tube (62) containing an arc generating and sustaining medium. The arc tube (62) has at least one press seal (64). Means (66) for coupling electrical energy to the interior of the arc tube includes an electrical current-carrying frame member (68) and in-leads (68a) and (68b) sealed into the lamp stem (90) and connected to a base (not shown). A starting source (70) comprises a sealed cavity (72) formed in the press seal (64). A second fill material is contained within the sealed cavity (72). The starting source (70) emits ultraviolet radiation when the lamp (60) is energized, which assists in initiation of the arc discharge within the interior of the arc tube (62). An electrical energy coupler (74) is provided for coupling electrical energy to the sealed cavity (72).

Abstract: When an H signal of H/L binary signals is input into a control signal input terminal, a PWM signal is output from a multivibrator. When this PWM signal is input into a power supply circuit via a voltage converter circuit, such a control is repeated that a rated current flows through an LED at an ON time of the PWM signal and a supply of current to the LED is stopped at an OFF time of the PWM signal. An average current flowing through the LED is lowered and thus an emission of light is weakened, nevertheless an emitted light of the LED can be kept white because the rated current is supplied to the LED while the LED emits the light.

Abstract: A method for controlling a discharge lamp by a power controlling device on an automobile vehicle includes a starting step and a switching step. The device supplies electricity to the lamp. In the starting step, the discharge lamp starts to emit a light such that the device supplies a first electricity. In the switching step, the device switches from the first electricity to a second electricity so that the lamp maintains to emit the light with the second electricity, which is smaller than the first electricity. In the switching step, a temperature of the lamp is decreased with a temperature gradient, which is equal to or smaller than a predetermined gradient.

Abstract: In a method of detecting arc discharge in a glow-discharge apparatus GD that has a high-frequency power source PS, a cutting pulse is output for time T1 to the high-frequency power source PS to stop a supply of power to the glow-discharge apparatus GD, when dVr/dt?dVf/dt increases over a first level, where Vf and Vr are a traveling-wave voltage and a reflected-wave voltage applied to the glow-discharge apparatus GD, respectively. Arc discharge is determined to have developed in the glow-discharge apparatus, when Vr/Vf increases to a second level or a higher level within a preset time To after the supply of power to the glow-discharge apparatus is stopped.