Abstract: A liquid crystal display is formed of a first insulating substrate; a conductor formed on the first insulating substrate and including a gate line and a data line; and a pixel electrode electrically connected to the gate line and the data line and including a first pixel electrode and a second pixel electrode that are adjacent each other in an extending direction of the data line and a third pixel electrode partly facing both of the first pixel electrode and the second pixel electrode. Thus, the present invention provides an LCD having an improved aperture ratio and improved light transmittance.

Abstract: An electro-optical device includes a pair of an opposing substrate and an element substrate, pixel electrodes, a sealing member, an opposing electrode, a vertical-conduction electrode, and a vertical-conduction member. The opposing substrate and element substrate are bonded with the sealing member so as to oppose each other. The pixel electrodes are arrayed on the element substrate in a pixel region. The sealing member is provided in a sealing region located around the pixel region. The opposing electrode is provided on the opposing substrate so as to oppose the pixel electrodes. The vertical-conduction electrode is formed in the sealing region extending along at least one edge of the element substrate. The vertical-conduction member is provided in the sealing region and electrically connected to the vertical-conduction electrode and the opposing electrode.

Abstract: An image display device includes a display panel, and a barrier including a plurality of transmissive portions and a plurality of blocking portions on the display panel, wherein the plurality of transmissive portions and the plurality of blocking portions are arranged in a matrix, wherein 3Nth rows and (3N-1)th rows include the plurality of transmissive portions and the plurality of blocking portions, N being a positive integer, (3N-2)th rows include the plurality of transmissive portions excluding the plurality of blocking portions, , and the transmissive and blocking portions are alternately arranged.

Abstract: An array substrate for an in-plane switching mode liquid crystal display device and its fabrication method are discussed. According to an embodiment, the array substrate includes a gate line and a data line crossing the gate line on a base substrate, so as to define a pixel region; a thin film transistor connected to the gate line and the data line; a plurality of pixel electrodes disposed in the pixel region and connected to the thin film transistor; a common line extending substantially parallel to the gate line; and a plurality of common electrodes alternately arranged with the plurality of pixel electrodes in the pixel region, wherein the plurality of common electrodes include at least one first common electrode adjacent to the data line and connected to the common line, and at least one second common electrode extending substantially parallel to the date line and not directly connected to the common line.

Abstract: An FFS (Fringe Field Switching) mode liquid crystal display comprises a lower substrate and an upper substrate and a gate line formed on the lower substrate. A data line crosses perpendicular to the gate line. A first ITO electrode is formed in a region defined by the gate line and the data line. A second ITO electrode of a comb-teeth pattern is formed on the lower substrate while being overlapped on the first ITO electrode. A black matrix formed on the upper substrate, wherein, a wedge portion of the second ITO electrode is formed at a position spaced by a predetermined interval to the inside from an edge section of the black matrix.

Abstract: A liquid crystal display device includes a liquid crystal display panel, a plurality of lamps for irradiating light onto the liquid crystal display panel, a cover bottom that houses the plurality of lamps, an inverter printed circuit board having a first surface and a second surface opposite to the first surface with an insulation base layer between the first and second surfaces, wherein the second surface is adjacent to the cover bottom, a transformer on the first surface of the inverter printed circuit board, and a metal shielding pattern on the second surface of the inverter printed circuit board directly between the transformer and the cover bottom.

Abstract: This invention relates to a liquid crystal display device that bias-aging is possible even after spreading silicon over an on/off pad. A liquid crystal display device according to an embodiment of the present invention includes a liquid crystal display panel where liquid crystal cells are arranged in an active matrix pattern between an upper substrate and a lower substrate, and where a plurality of gate lines and a plurality of data lines are formed; an on/off pad formed on the lower substrate for supplying bias aging signals to the gate line and the data line and checking whether or not the liquid crystal cells are turned on; a drive IC formed on the lower substrate for supplying drive signals to the gate line and the data line; and a printed circuit board which is connected to the lower substrate and which has a signal pad for supplying the drive signal to the drive IC and a bias aging pad for supplying the bias aging signal to the on/off pad.

Abstract: A pillar-shaped spacer is disposed at the position between the boundary line of adjacent liquid crystal cells and an OLB terminal so as to face the end portion of the OLB terminal and so as to be interposed between a first large-size substrate and a second large-size substrate. Even when the respective liquid crystal cells are separated from one another along the boundary lines of the adjacent liquid crystal cells, exfoliation of the OLB terminals is prevented by the pillar-shaped spacers, so that extra cutting margins between the adjacent liquid crystal cells can be reduced and the manufacturing performance and the built-in number of the liquid crystal cells can be enhanced.

Abstract: A method for adjusting an amount of liquid crystal in a liquid crystal display (LCD) device includes injecting a liquid crystal into a liquid crystal receiving space. The liquid crystal receiving space is disposed between a first substrate, a second substrate that faces the first substrate, and a sealing member interposed between the first and second substrates. The method for adjusting an amount of liquid crystal in an LCD device further includes irradiating a light to a portion of the sealing member while varying an irradiating angle of the light so as to form a repair region at the sealing member that has a thickness smaller than that of the sealing member. The method for adjusting an amount of liquid crystal in an LCD device also comprises pressurizing the liquid crystal to form an opening in the repair region of the sealing member and discharge some of the liquid crystal from the liquid crystal receiving space through the opening formed in the repair region, and sealing the opening of the repair region.

Abstract: A method for adjusting an amount of liquid crystal in a liquid crystal display (LCD) device includes injecting a liquid crystal into a liquid crystal receiving space. The liquid crystal receiving space is disposed between a first substrate, a second substrate that faces the first substrate, and a sealing member interposed between the first and second substrates. The method for adjusting an amount of liquid crystal in a liquid crystal display (LCD) device further includes reducing a thickness of the sealing member at a predetermined portion of the sealing member to form a repair region, and pressurizing the liquid crystal to break the sealing member at the repair region to discharge some of the liquid crystal from the liquid crystal receiving space, so as to adjust the amount of the liquid crystal in the liquid crystal receiving space. The method for adjusting an amount of liquid crystal in a liquid crystal display (LCD) device also includes resealing the broken repair region of the sealing member.

Abstract: A liquid crystal display device includes: a liquid crystal layer interposed between a first substrate and a second substrate; a columnar spacer holding the liquid crystal layer; and a plurality of pixels arranged in matrix which constitutes a display unit, wherein: each of the pixels has a first display region and a second display region; the first display region has the liquid crystal layer thinner than the second display region; a protrusion portion is formed in the first display region of the first substrate; and the columnar spacer is formed only in the second display region in which the protrusion portion is not formed.

Abstract: A display device includes a prism layer including a plurality of prisms on a surface thereof, a support layer facing with the prisms on the prism layer: a medium layer placed between the prism layer and the support layer, and including a first medium having a first refractive index and a second medium having a second refractive index, the first and second media being freely movable in the medium layer, and electrodes supplying a potential difference between the prism layer and the support layer.

Abstract: A fabricating method of display panel is provided. A first substrate having display area and non-display area is provided. A pixel array is formed in the display area of the first substrate, and at the same time, a spacer layer is formed in the non-display area. The spacer layer surrounds the display area. Next, a sealant is formed in the non-display area, and the spacer layer is disposed between the sealant and the pixel array. A second substrate is arranged above the first substrate, and the first substrate and the second substrate are fixed by using the sealant. The spacer layer can prevent the overflow sealant from contaminating the devices in the panel. The spacer layer is formed during the fabricating process of the pixel array, so that no extra fabrication cost is needed.

Abstract: A liquid crystal lens includes: a first substrate; a second substrate disposed facing the first substrate and separated from the first substrate by a predetermined distance; a first electrode on an inner surface of the first substrate; a second electrode on an inner surface of the second substrate, the second electrode including a first opening that has a first width; a third electrode on the second electrode, the third electrode including a second opening that has a second width; and a liquid crystal layer disposed between the first and third electrodes.

Abstract: An adjustable polarized goggle provides for simple adjustment of the intensity of transmitted light with a mittened or gloved hand in a simple design having only three polarized elements. A continuous rounded common polarized element comprises the outer lens of the goggle and two coupled, rotatable, polarized elements inside the lens are disposed at an angle from one another to provide a compact shape conforming to the shape of a head. A foam liner traps an air volume between the polarized elements to reduce condensation.

Abstract: A lens for spectacles is described which is delimited by a first and a second lens surface which are spaced apart from and located opposite each other, the first surface being arranged to face towards the inner side of the spectacles, near the face of the user when the spectacles are worn, the second opposite surface facing towards the opposite outer side of the spectacles, first cross-sectional curves being defined on the lens by the intersection of the first and second lens surfaces with a plane which is transverse to the lens and intersects a straight line joining the eyes of the user, in which the first cross-sectional curves have negative curvature with the concavity directed towards the outer side of the spectacles.

Abstract: Silicone hydrogel contact lenses having ophthalmically acceptable surface wettabilities are obtained from pre-extracted polymerized silicone hydrogel contact lens products having relatively large amounts of removable or extractable materials. The silicone hydrogel contact lenses can be obtained from non-polar resin based contact lens molds and without surface treatments or an interpenetrating polymeric network of a polymeric wetting agent. Related lens products, polymerizable compositions, and methods are also described.

Abstract: The invention is directed to a contact lens design and methods of manufacturing, fitting and using such lenses. The contact lens may be designed for use in a corneal refractive therapy (CRT) program. The lens provides a design which allows proper fitting of a patient, whether for corrective contact lenses or for a CRT program. Due to the rational design of the lenses according to the present invention, a minimal number of lens parameter increments can be identified to cover the range of common corneas. It is therefore possible to provide pre-formed lens buttons or blanks which are easily formed into a final design, thereby simplifying and speeding up the treatment process. Further, any adjustment of the lens design which may be required based upon trial fitting or the like, is easily envisioned and implemented by the fitter.

Abstract: A contact lens (10) for use in controlling or retarding the progression of myopia in an eye has a central optical zone (20) approximating the normal diameter of the pupil of the eye (22) that gives clear central vision at distance for the wearer. An annular peripheral optical zone 24 that is substantially outside the diameter of the pupil is formed around the central optical zone (20) with greater refractive power than that of the central zone (22) so that oblique rays entering the eye through the peripheral optical zone (24) will be brought to focus at a focal plane that is substantially on or anterior to the peripheral region of the retina. Preferably, the rear surface (16) of the lens is shaped to conform to the cornea of the eye and the front surface (18) of the lens (10) is shaped to provide—in conjunction with the rear surface (16)—the desired optical properties of the central and peripheral optical zones.

Abstract: The invention provides tinted contact lenses having a pattern that has an appearance of added depth when compared to conventional patterns and a more natural appearance to the pattern when the lens is worn on-eye.

Abstract: An adapter for a spectacle frame is disclosed which is configured for enabling the spectacle frame to operate and control electro-active lenses housed therein. In particular, the spectacle frame may allow electro-active lenses housed therein to focus and be controlled both automatically and manually with heretofore unrealized results.

Abstract: An opthalmologic apparatus is disclosed. In one aspect, the apparatus includes an ocular fundus photographing systems for forming an ocular fundus image of the examined eye, based on a reflective beam from the ocular fundus of the examined eye, and an ocular fundus tracking controller for detecting a gaze direction of the examined eye by receiving the reflective beam reflected at a reflective region of an illumination region illuminated on the ocular fundus and for tracking the ocular fundus based on the detection results of the gaze direction. The ocular fundus tracking controller may include scanning mirrors for scanning an area to detect a reflective beam from the ocular fundus, tracking mirrors for controlling tracking to the ocular fundus, an objective lens disposed opposite to the examined, and an offset mirror M19 for adjusting a detection axis in a gaze direction.

Abstract: A rear projection display method and system, for displaying an image. The system comprises projection means (18L, 18R) to project first and second stereoscopic image components; a first light-redirecting panel (20R) and a second downstream light-redirecting panel (20L) to receive light representative of the first and second image components, respectively, from the projection means and to redirect that light substantially in a downstream direction, the first and second panels arranged to spatially multiplex the first and second image components; and a parallax optic element (22) located downstream of the second panel to provide at a downstream viewing zone (24) the first and second image components for autostereoscopic viewing of the image. The projection means may be switchable between 2D and 3D viewing modes. A 3D image may be produced by simultaneously or sequentially projecting a series of 2D image sections, using diffuser elements (45). A method of displaying a 3D image is also disclosed.

Abstract: A display apparatus includes a cube wire-grid polarizing beam splitter with a plate wire-grid polarizer disposed between a pair of prisms secured together to form a cube. A reflective spatial light modulator produces an image bearing color light beam. The cube wire-grid polarizing beam splitter is disposable in the image bearing color light beam to separate the image information and to produce a polarized image bearing color light beam. A pair of continuous film layers is disposed between the plate wire-grid polarizer and a forward prism with a forward layer adjacent the forward prism having a refractive index greater than both i) a refractive index of a rear layer adjacent the plate wire grid polarizer, and ii) a refractive index of the forward prism. A layer of ribs is disposed between the wires and a rear prism, and the ribs being aligned with and supporting the wires.

Abstract: A projection apparatus for generating a moving star field and a cloud-like effect comprises a means for generating a cloud-like effect using at least one non-coherent light source, a means for generating a moving star field using at least one coherent light source and a means for regulating and supplying electric power. The means for generating cloud-like effect using at least one non-coherent light source comprises at least one pair of condenser lenses and an interferential filter wheel rotated by a motor, disposed between at least one pair of condenser lenses. The means for generating the moving star field using a coherent light source comprises a grating wheel rotated by a motor and a diffractive optical element disposed between the at least one coherent light source and the grating wheel.

Abstract: A projection apparatus for generating a moving star field and a cloud-like effect comprises a means for generating a cloud-like effect using at least one non-coherent light source, a means for generating a moving star field using at least one coherent light source and a means for regulating and supplying electric power. The means for generating cloud-like effect using at least one non-coherent light source comprises at least one pair of condenser lenses and an interferential filter wheel rotated by a motor, disposed between at least one pair of condenser lenses. The means for generating the moving star field using a coherent light source comprises a grating wheel rotated by a motor and a diffractive optical element disposed between the at least one coherent light source and the grating wheel.

Abstract: Additional control flexibilities to generate more gray scales for an image display system is achieved by controlling the intensity distribution of the light projection from a light source to a deflecting mirror to further coordinate with the control of the intermediate states of the deflecting mirror. The control light source intensity distribution can provide incident light with wide varieties of intensity distributions including non-uniform, symmetrical and non-symmetrical, different distributions of polarizations, various cross sectional shapes of the incident lights and other combinations of all of the above variations. More stable and better control of gray scale control is also achieved by optimizing the intensity distributions of the incident light to produce the best visual effects of the image display.

Abstract: An illumination system including a light source module, a first integral lens array, a cylindrical lens array, a polarization beam splitter converter, a cylindrical lens, a condenser lens, and a collimator lens is provided. The light source module is suitable for providing a white light, and the first integral lens array, the cylindrical lens array, the polarization beam splitter converter, the cylindrical lens, the condenser lens, and the collimator lens are sequentially disposed on a optical path of the white light. Thus, the cylindrical lens array can adjust the shape of the light spots which are formed by focusing the white light for the light spots nearly completely passing through the polarization beam splitter converter to increase the light utilization of the illumination system. Additionally, a projection system including the illumination system mentioned above and a liquid crystal display panel is also provided.

Abstract: An object of the present invention is to provide illumination optics that enables improvement in brightness and reestablishment of an irradiation state which is provided with illumination light and which corresponds with a display area, and is to provide illumination optics including a first fly-eye lens and a second fly-eye lens where emission light from the first fly-eye lens enter, wherein at least one of lens elements configuring the second fly-eye lens covers an irradiation area smaller than an irradiation area provided by the second fly-eye lens.

Abstract: A projector lamp module for use with a cooler is provided. The lamp module comprises a light device, a housing and at least one cover. The housing is disposed on one end of the light device. An airflow entrance is formed on the housing. The cover plate is movably disposed on the housing and covers the airflow entrance. When the lamp module and the cooler are assembled together, the cover plate is removed and uncovered the entrance draft.

Abstract: A projection type display device of the invention includes a lamp unit (4) having a lamp holder (44) for holding a lamp, a power source cooling fan (6) for cooling a power source unit (3), and a duct (8) through which air caused to circulate by driving of the power source cooling fan (6) is guided, and which has at least a part of a wall portion defined by the lamp holder (44), so that heat exchange is performed between the air sent out by the power source cooling fan (6) and the lamp holder (44).

Abstract: Each of a power source unit for a projection type display device, and the projection type display device having the same of the present invention includes a box (91) for accommodating therein a substrate (92) having heating elements (92b) mounted thereto, a fan (94) for a lamp power source which causes air to flow into the box (91), a partitioning portion (95b) for partitioning the inside of the box (91), and discharge holes (95d) which are formed in the partitioning portion (95b) and through which the air is blown to the heating elements (92b).

Abstract: The invention provides an illumination optical system that guides light emitted from light source device 1 to DMD 2, the illumination optical system including: light tunnel 20 that uniformizes luminance distribution of light emitted from light source device 1; relay optical system 40 that guides light having uniformized illumination distribution to DMD 2; and shield board 30 disposed on an optical path between light tunnel 20 and relay optical system 40. Shield board 30 is smaller than outlet end face 22 of light tunnel 20 and at the same time has an opening of a shape similar to the image formation area on DMD 2, and is movable in a plane containing the opening.

Abstract: Provided are a focusing apparatus of an optical projection device having a simple structure and capable of a precisely in focusing and a projection optical system. The focusing apparatus includes: a frame including a female screw part having a first pitch; a body tube moveably installed in the frame and comprising a male screw part having a second pitch smaller than the first pitch; and an adjusting ring including a male screw part corresponding to the female screw part having the first pitch and a female screw part corresponding to the male screw part having the second pitch to support the body tube in the frame and move the body tube toward an optical axis direction.

Abstract: An image forming apparatus includes an image data input unit configured to take in image data, an image data storing unit having a hard disk drive and a volatile memory for saving the image data inputted from the image data input unit, a mode selecting unit configured for a user to select one of a normal security mode and a high security mode as a security mode for the image data, and an image data output unit configured to output the image data saved in the image data storing unit, in a predetermined format. If the normal security mode is selected by the mode selecting unit, the image data is saved in the hard disk drive, and if the high security mode is selected, the image data is saved in the volatile memory.

Abstract: An image forming apparatus includes a main body of the image forming apparatus and an enabler connectable to the main body. Identification information of a user and parameter information concerning an arbitrary function among plural functions which the image forming apparatus can process, are stored in the enabler. When the enabler is set in the main body of the image forming apparatus, authentication check of the identification information is performed. When the identification information is authenticated, use of any one or all of the plural functions is permitted. The parameter information is read out from the enabler and a function corresponding to the parameter information among the functions permitted is carried out according to the parameter information.

Abstract: PDL data in a storage area on a network is stored into a hard disk drive 13 of an MFP 1 in the form in which it is converted into image data. The image data in the hard disk drive 13 can be printed at any time, any number of times and repeatedly.

Abstract: The alignment marks formed in a scribe line of a semiconductor substrate include at least one main mark, a first sub-mark and second sub-marks. The first sub-mark is formed at a central portion of the main mark. The second sub-marks are disposed symmetrically with respect to the first sub-mark and are used for detecting asymmetry of the main mark by measuring distances between respective side edges of the main mark and the first sub-mark, and by measuring respective side edges between the main mark and each of the second sub-marks. Alternatively, the alignment marks include main outer and inner marks and a sub-mark disposed in between the main outer and inner marks. In this case, the sub-mark is used for detecting asymmetry of the main mark by measuring distances between respective side edges of the main outer mark and the sub-mark, and by measuring respective side edges between the main inner mark and the sub-mark.

Abstract: An exposure apparatus for exposure-transferring an image of a pattern projected through an optical system having a plurality of optical units L1 to L13 onto an object P, comprises a correcting device which corrects a position of at least one of a plurality of images to be projected onto the object P by the plurality of optical units L1 to L13 so that displacements of the optical units L1 to L13 are compensated.

Abstract: Embodiments of the invention present a system, method, etc. for illumination light in an immersion lithography stepper for particle or bubble detection. More specifically, embodiments herein provide an immersion lithography expose system comprising a wafer holder for holding a wafer, an immersion liquid for covering the wafer, an immersion head to dispense and contain said immersion liquid, and a light source adapted to lithographically expose a resist on the wafer. The system also comprises a light detector at a first location of the immersion head and a laser source at a second location within said immersion head.

Abstract: A method of reducing a wave front aberration is provided for a lithographic process whereby the reducing is based on the selected pattern to be printed and the selected illumination mode used for exposure. Wave front aberrations of a projection system of a lithographic apparatus are measured and reduced by calculating adjustments of optical elements of the projection system and applying the calculated adjustments to the projection system. The calculation of adjustments is based on information on a spatial distribution of radiant intensity in a pupil of the projection system as present during exposing the radiation sensitive layer, and is limited to aberrations in projection lens pupil areas of relative high radiant flux.

Abstract: An exposure apparatus comprises a first member, which is arranged so as to oppose a surface of a substrate, and between which and the surface of the substrate a liquid immersion space is formed; and a second member, which traps liquid that is present at the surface of the substrate. A distance between the second member and the substrate is smaller than a distance between the first member and the substrate.

Abstract: A method of pattern forming includes forming a resist film on a substrate, transferring a pattern onto the resist film by an immersion lithography method using a liquid immersion fluid to form a latent image on the resist film, conducting a first inspection to inspect whether or not the liquid immersion fluid remains on the resist film after said forming the latent image, developing the resist film after the first inspection, and performing predetermined processing when residual of the liquid immersion fluid is found in the first inspection.

Abstract: An optical system is able to achieve a substantially azimuthal polarization state in a lens aperture while suppressing loss of light quantity, based on a simple configuration. The optical system of the present invention is provided with a birefringent element for achieving a substantially circumferential distribution or a substantially radial distribution as a fast axis distribution in a lens aperture, and an optical rotator located behind the birefringent element and adapted to rotate a polarization state in the lens aperture. The birefringent element has an optically transparent member which is made of a uniaxial crystal material and a crystallographic axis of which is arranged substantially in parallel with an optical axis of the optical system. A light beam of substantially spherical waves in a substantially circular polarization state is incident to the optically transparent member.

Abstract: A lithographic apparatus comprises an illumination system, an array of individually controllable elements, a projection system, and a control system. The illumination system conditions a radiation beam. The array of individually controllable elements modulates the cross-section of the radiation beam. The projection system projects the modulated radiation beam onto a target portion of a substrate. The control system calculates a pattern that is to be formed on the array of individually controllable elements. The calculation includes an adjustment of the pattern, such that its focal plane is shifted in response to a measured separation between the target portion of the substrate and a focal plane of the projection system.

Abstract: An optical apparatus is disclosed that has a convex mirror and a concave mirror with an aperture, wherein, in use, radiation from a radiation emitter passes through the aperture and is incident upon the convex mirror before being incident upon the concave mirror, the optical apparatus arranged to form the radiation into a radiation beam, wherein the concave mirror is translatable towards and away from the convex mirror or the convex mirror is translatable towards and away from the concave mirror, to adjust divergence of the radiation beam.

Abstract: A system and method allow for a more effective and efficient patterning device architecture and control arrangement. A lithography apparatus comprises an illumination system, a patterning device, and a projection system. The illumination system is configured to condition a beam of radiation. The patterning device is configured to pattern the beam of radiation. The patterning device comprises a control system and an array of individually controllable elements. The control system is configured to convert analog signals having respective first voltage values to corresponding differential control signals having second, higher voltage values. Corresponding ones of the individually controllable elements in the array of individually controllable elements are configured to actuate based on receiving a corresponding one of the differential control signals. The projection system is configured to project the patterned beam onto a target area of a substrate.

Abstract: An exposure apparatus includes an illumination optical system to illuminate an original with exposure light of plural wavelengths, a projection optical system to project an image of a pattern of the original onto a substrate, an original-side reference pattern provided at an original side of the projection optical system, a substrate-side reference pattern provided at a substrate side of the projection optical system, and an image plane detecting system configured so that the original-side reference pattern is illuminated with the exposure light or light equivalent to the exposure light with respect to a wavelength component rate.

Abstract: A method and apparatus to create two dimensional and three dimensional structures using a maskless photolithography system that is semi-automated, directly reconfigurable, and does not require masks, templates or stencils to create each of the planes or layers on a multi layer two-dimensional or three dimensional structure. In an embodiment, the pattern generator comprises a micromirror array wherein the positioning of the mirrors in the micromirror array and the time duration of exposure can be modulated to produce gray scale patterns to photoform layers of continuously variable thickness. The desired pattern can be designed and stored using conventional computer aided drawing techniques and can be used to control the positioning of the individual mirrors in the micromirror array to reflect the corresponding desired pattern. A fixture for mounting of the substrate can be incorporated and can allow the substrate to be moved three dimensions. The fixture can be rotated in one, two, or three directions.

Abstract: An immersion lithography system is provided which includes an optical source operable to produce light having a nominal wavelength and an optical imaging system. The optical imaging system has an optical element in an optical path from the optical source to an article to be patterned thereby. The optical element has a face which is adapted to contact a liquid occupying a space between the face and the article. The optical element includes a material which is degradable by the liquid and a protective coating which covers the degradable material at the face for protecting the face from the liquid, the protective coating being transparent to the light, stable when exposed to the light and stable when exposed to the liquid.