Patents Issued in June 12, 2008
  • Publication number: 20080137052
    Abstract: A measuring apparatus measures a substrate on which a registration mark is formed. The measuring apparatus includes an acquisition unit which acquires the edge interval information of an image of the registration mark sensed under a measurement condition which is changed to make the edge interval of the image of the registration mark have an extreme value corresponding to a different focus position of a projection exposure apparatus, and a calculation unit which calculates a defocus value on the basis of the edge interval information of the image of the registration mark sensed under each measurement condition.
    Type: Application
    Filed: November 13, 2007
    Publication date: June 12, 2008
    Applicant: CANON KABUSHIKI KAISHA
    Inventor: Takahiro Matsumoto
  • Publication number: 20080137053
    Abstract: A system and method are used to direct a radiation beam to illuminate non-perpendicularly a patterning array of individually controllable elements used for patterning the radiation beam. The individually controllable elements can change a telecentricity of the radiation beam. Projection of the radiation beam onto the individually controllable elements can be by a concave mirror or use a folding mirror placed in an object field of the individually controllable elements. Alternatively, the individually controllable elements can change the optical axis of the radiation beam.
    Type: Application
    Filed: January 28, 2008
    Publication date: June 12, 2008
    Applicants: ASML Netherlands B.V, ASML Holding N.V.
    Inventors: Arno Jan BLEEKER, Johannes Jacobus Matheus Baselmans, Marce Mathijs Theodore Marie Dierichs, Stanislav Smirnov, Christian Wagner, Lev Ryzhikov, Kars Zeger Troost
  • Publication number: 20080137054
    Abstract: An image exposure apparatus of a different angle incident type is provided having a single optical sensor unit for determining the timing for start point synchronization along the main scanning direction, an output level detecting device determining the output level of each beam of light which can be detected by the optical sensor unit, a first modulating device modulating the output level of each beam of light with a pixel data in the light path for exposure, and a second modulating device modulating the output level of each beam of light to a higher level outside of the light path for exposure than the level determined by said output level detecting device.
    Type: Application
    Filed: January 25, 2008
    Publication date: June 12, 2008
    Inventors: Mikiya Seto, Kazuhiro Yoshida
  • Publication number: 20080137055
    Abstract: A substrate support constructed to support a substrate for immersion lithographic processing is disclosed. The substrate support has a central part and a peripheral part, the peripheral part comprising an extraction duct configured to extract a liquid from a top surface of the substrate support, the extraction duct connected to an exit duct configured to duct the liquid away from the substrate support. The substrate support further includes a thermal stabilizer, arranged in the peripheral part, configured to thermally stabilize a central part of the substrate support relative to the peripheral part.
    Type: Application
    Filed: December 8, 2006
    Publication date: June 12, 2008
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Pieter Renaat Maria Hennus, Frits Van Der Meulen, Joost Jeroen Ottens, Peter Paul Steijaert, Hubert Matthieu Richard Steijns, Peter Smits
  • Publication number: 20080137056
    Abstract: In a substrate-processing method including a step of forming a liquid immersion area of a liquid on a substrate and performing exposure for the substrate by irradiating an exposure light beam onto the substrate through the liquid in the liquid immersion area, a liquid contact time, during which the substrate is in contact with the liquid in the liquid immersion area, is managed. Accordingly, in a device producing process, it is possible to suppress the occurrence of device defect.
    Type: Application
    Filed: December 6, 2005
    Publication date: June 12, 2008
    Inventors: Tomoharu Fujiwara, Takashi Horiuchi
  • Publication number: 20080137057
    Abstract: The present invention relates to a film holder for supporting at least one positive film or negative film. The film holder includes a rectangular base member and a rectangular cover member. The rectangular base member includes two long edges and two short edges. The rectangular base member further includes a rectangular concave portion for receiving the positive film or the negative film therein. The rectangular cover member includes two long rims and two short rims for fixing the positive film or the negative film on the rectangular base member. One of the two short rims of the rectangular cover member is pivotal about one of the two short edges of the rectangular base member and received within the rectangular concave portion.
    Type: Application
    Filed: February 9, 2007
    Publication date: June 12, 2008
    Applicant: PRIMAX ELECTRONICS LTD.
    Inventor: Hsi-Tien Tang
  • Publication number: 20080137058
    Abstract: Monostatic LIDARs use the same telescope to send the laser beam in atmosphere and to collect the backscattered echo. An important element of monostatic LIDARs is the optical separator between the emission and reception paths of the laser beam. By using a system made by a Faraday rotator in combination with two polarizing beam splitters suitably oriented, it is possible to achieve this separation with minimum losses with respect to prior systems using semi-reflective plates and/or polarizing beam splitters in conjunction with quarter-wave plates. The effectiveness of this system does not rely on the maintenance of the polarization status of the laser beam when backscattered by the atmosphere molecules and particles, neither on the reduction of the received laser power relatively to the transmitted one. The system is simple, compact, and can work at several wavelengths of the laser source.
    Type: Application
    Filed: November 18, 2004
    Publication date: June 12, 2008
    Inventor: Stefano Cesare
  • Publication number: 20080137059
    Abstract: The distance of objects to an optical system is estimated. An optical mask such as a diffractive optical element, continuous phase mask, hologram, amplitude mask, or combination thereof is placed within the optics in front of a sensor array such as a CCD, CID or CMOS device. The optical mask encodes the three-dimensional response of the system. The mask is designed to optimize depth estimation, for example, by maximizing Fisher information. A particular implementation creates a point spread function (“PSF”) that rotates as a function of the object position. The image or images obtained with different PSFs may be digitally processed to recover both a depth map of the scene and other parameters such as image brightness. The digital processing used to recover the depth map of the object may include deconvolution of a PSF from detected images.
    Type: Application
    Filed: June 5, 2007
    Publication date: June 12, 2008
    Applicant: University of Colorado
    Inventors: Rafael Piestun, Carol J. Cogswell, Adam D. Greengard, Yoav Y. Schechner
  • Publication number: 20080137060
    Abstract: The invention relates to a measuring device, in particular to a hand-held distance meter (10) comprising a measuring signal track (28, 34), an adjustable signalling means (36, 70) used for modifying said signal and a drive unit (40) which is used for adjusting the signalling means (36, 70) and comprises a static unit (52) and a driving element (46, 76) which is actuatable directly by the static unit (52) in such a way that it is displaceable with respect thereto. According to said invention, said driving element (46, 76) is driven rotatably with respect to the static unit (52).
    Type: Application
    Filed: June 30, 2006
    Publication date: June 12, 2008
    Applicant: ROBERT BOSCH GMBH
    Inventors: Uwe Skultety-Betz, Bjoern Haase, Joerg Stierle, Peter Wolf, Volker Bosch, Kai Renz, Clemens Schulte
  • Publication number: 20080137061
    Abstract: A displacement measurement sensor using the confocal principle for measuring small changes in distance to a specular target surface comprises a monochromatic light source such as a laser diode 12, an aperture, 31 an objective lens system 44 possessing spherical aberration that separates the monochromatic light at different focal distances according to the magnitude of angular deviation from the optical axis. Each distance of the target surface from the objective lens will select specific angular rays able to retrace the path through the objective lens and aperture. Each angle then will correspond to specific distance. The angle measurement is determined by detecting the light impinging on a light sensitive electronic detector array 36.
    Type: Application
    Filed: December 4, 2007
    Publication date: June 12, 2008
    Inventor: Christopher John Rush
  • Publication number: 20080137062
    Abstract: An optical method and apparatus are described for the measurement of properties of a travel vehicle or a travel surface upon which the travel vehicle travels, which includes providing an incident light from a light source to the travel surface, collecting light reflected from the travel surface, determining a surface induced Doppler shift from the incident and collected light and determining at least one of a motion property of the travel vehicle and a surface property of the travel surface based on the determined surface induced Doppler shift.
    Type: Application
    Filed: June 19, 2007
    Publication date: June 12, 2008
    Inventors: Carvel HOLTON, Mehdi Ahmadian
  • Publication number: 20080137063
    Abstract: A sensor has a sensing surface, to which a specific substance R to be detected can bind. Further, the sensor has a metal portion, at least a portion of which is exposed at the sensing surface, and in which localized plasmons can be excited. The sensor is used in sensing, in which the substance R to be detected is marked with a fluorescent marker Lu that selectively binds to the substance R to be detected and one of two-photon excitation fluorescence and multi-photon excitation fluorescence of the fluorescent marker Lu is detected. Further, the sensing surface is illuminated with measurement light L1 having a wavelength that can excite localized plasmons in the metal portion and that is an absorption wavelength of the fluorescent marker Lu, at which the fluorescent marker Lu emits one of the two-photon excitation fluorescence and the multi-photon excitation fluorescence.
    Type: Application
    Filed: December 10, 2007
    Publication date: June 12, 2008
    Applicant: FUJIFILM CORPORATION
    Inventor: Masayuki NAYA
  • Publication number: 20080137064
    Abstract: Optical contact liquid containing an amphipathic molecule is dripped onto a semiconductor device which is a sample as an inspection object (S104), and a solid immersion lens is set thereon (S105). The inserted position of the solid immersion lens is then adjusted (S106). The optical contact liquid is then dried (S108), and thereby the solid immersion lens is brought into optically-close contact with the semiconductor device. As a result, a sample observation method and a microscope or the like can be realized, in which the solid immersion lens can be easily aligned to a desired position on the sample, and the solid immersion lens can be securely brought into optically-close contact with the sample.
    Type: Application
    Filed: December 28, 2007
    Publication date: June 12, 2008
    Inventors: Ikuo Arata, Shigeru Sakamoto, Hirotoshi Terada
  • Publication number: 20080137065
    Abstract: A high performance liquid chromatography system employs a nebulizer with a flow restriction at the exit of its mixing chamber to produce finer droplets, and an adjustable impactor for increased control over droplet sizes. Downstream of the mixing chamber, the nebulizer can incorporate tubing that is permeable to the sample liquid, to promote aerosol drying through perevaporation. A condensation particle counter downstream of the nebulizer uses water as the working medium, and is adjustable to control threshold nucleation sizes and droplet growth rates. A particle size selector employing diffusion, electrostatic attraction or selection based on electrical mobility, is advantageously positioned between the nebulizer and the CPC.
    Type: Application
    Filed: November 6, 2007
    Publication date: June 12, 2008
    Inventors: Derek R. Oberreit, Frederick R. Quant, David B. Blackford
  • Publication number: 20080137066
    Abstract: A method and system are presented for use in determination of the concentration of an analyte in a subject's medium. The medium is irradiated with at least two radiation components to produce detectable radiation responses of the medium thereto. These at least two radiation components are selected to have different mean wavelengths and such that the spectral bandwidth of at least one of said at least two radiation components is characterized by relatively high variability of the extinction coefficient of the analyte of interest across said spectral bandwidth. This enables analysis of data indicative of detected radiation responses of the medium to said at least two radiation components and determination of the concentration of said analyte.
    Type: Application
    Filed: December 12, 2006
    Publication date: June 12, 2008
    Applicant: Orsense Ltd.
    Inventors: Aharon Weinstein, Harel Primack
  • Publication number: 20080137067
    Abstract: A system and method for distinguishing a first light source from other light sources utilizes an image receiver that can selectively engage and disengage a filter. The filter can be configured to either block bands of light corresponding to the light being emitted by either the first source or the other sources. By sequentially engaging and disengaging the filter from the image receiver, the first light source may be distinguished from other light sources.
    Type: Application
    Filed: October 3, 2007
    Publication date: June 12, 2008
    Applicant: EVIDENT TECHNOLOGIES
    Inventors: Luis Sanchez, James Hayes, Clinton T. Ballinger, Eva Sbardella
  • Publication number: 20080137068
    Abstract: A detection apparatus includes a sample holding section, an irradiation means, a detection means, a calculation means, and an evaluation means. The irradiation means irradiates a substance held in the sample holding section with a THz wave. The detection unit detects a THz wave passed through or reflected from the substance. The calculation unit determines a frequency dependence of a property of the substance with respect to the irradiated THz wave and then calculates a slope of a straight line or a slope of a straight line obtained by straight-line approximation of the frequency dependence of the property of the substance. The evaluation unit evaluates the state change of the substance by comparing a previously-obtained slope of a straight line of the frequency dependence of the property of the substance in a standard state and the slope of the straight line of the substance calculated.
    Type: Application
    Filed: November 30, 2007
    Publication date: June 12, 2008
    Applicants: CANON KABUSHIKI KAISHA, RIKEN
    Inventors: Toshihiko Ouchi, Shintaro Kasai, Haruko Yoneyama, Masatsugu Yamashita
  • Publication number: 20080137069
    Abstract: Methods and systems related to soil testing are disclosed. One exemplary embodiment of a system of the present disclosure includes a calibrated near-infrared (NIR) spectrophotometer and a soil sample with an unknown value of at least one of pH and b disposed in proximity to the calibrated NIR spectrophotometer, the NIR spectrophotometer configured to produce a spectrum from a reading of the sample.
    Type: Application
    Filed: December 15, 2005
    Publication date: June 12, 2008
    Inventors: David E. Kissel, Miguel L. Cabrera
  • Publication number: 20080137070
    Abstract: An optical measurement device for determining at least two parameters of a measurement location of a surface of a workpiece positioned in a known coordinate system by a workpiece support is described. The device comprises a first light source providing a first measurement beam at a first wavelength and a second light source providing a second measurement beam at a second wavelength. The device also comprises a beam steering system positioning the first and second measurement beams to be collocated on the surface of the workpiece. Further, the device comprise a first imaging system, detecting the incoming position of the first measurement beam and an optical receiving system, detecting the incoming position of the second measurement beam.
    Type: Application
    Filed: December 6, 2006
    Publication date: June 12, 2008
    Inventor: Mark T. Girard
  • Publication number: 20080137071
    Abstract: An optical displacement sensor for measuring distance or surface displacement of an object by surface profile scanning includes an optical source, a first optical detector and a second optical detector. The optical source is located intermediate the first and second optical detectors. The first and second optical detectors are arranged to collect light emitted by the optical source when scattered by and/or reflected from the object.
    Type: Application
    Filed: December 12, 2006
    Publication date: June 12, 2008
    Applicant: Hong Kong Applied Science and Technology Research Institute Co. Ltd.
    Inventor: Yeung Ming Chow
  • Publication number: 20080137072
    Abstract: A sheet recognizing device and method for precisely checking the authentication of a sheet by performing recognition of color and watermark of a sheet and detecting the subtle characteristic of a hue ink printed on one side of the sheet.
    Type: Application
    Filed: November 11, 2005
    Publication date: June 12, 2008
    Inventors: Eiji Itako, Yasuyuki Kimura, Futoshi Houjo, Satoru Tsurumaki, Seiji Takamatsu
  • Publication number: 20080137073
    Abstract: In an optical inspection tool, an image of an object under inspection, such as a semiconductor wafer, may be obtained using imaging optics defining a focal plane. Light comprising the image can be detected using multiple detectors which each register a portion of the image. The image of the object at the focal plane can be split into two, three, or more parts by mirrors or other suitable reflecting elements positioned tangent to the focal plane and/or with at least some portion at the focal plane with additional portions past the focal plane so that the focal plane lies between the imaging optics and the splitting apparatus. In some embodiments, reflective planes may be arranged to direct different portions to different detectors. Some reflective planes may be separated by a gap so that some portions of the light are directed while some portions pass through the gap.
    Type: Application
    Filed: November 26, 2007
    Publication date: June 12, 2008
    Applicant: NEGEVTECH, LTD.
    Inventors: Dov Furman, Shai Silberstein, Effy Miklatzky, Daniel Mandelik, Martin Abraham
  • Publication number: 20080137074
    Abstract: In an optical inspection tool, an image of an object under inspection, such as a semiconductor wafer, may be obtained using imaging optics defining a focal plane. Light comprising the image can be split into portions that are detected using multiple detectors which each register a portion of the image. The image of the object at the focal plane can be split into two, three, or more parts by polarization-based beam splitters and/or lenses positioned tangent to the focal plane. The splitting apparatus may comprise a pair of arrays of half-cylinder lenses comprising a convex side and a flat side. The arrays can be positioned with the cylinder axes perpendicular to one another and the flat sides facing each other. Thus, the pair of arrays can divide incoming light into a plurality of rectangular portions without introducing non-uniformities which would occur if several spherical lenses are configured for use in a rectangular array.
    Type: Application
    Filed: November 26, 2007
    Publication date: June 12, 2008
    Applicant: NEGEVTECH, LTD.
    Inventors: Dov Furman, Roy Kaner, Ori Gonen, Daniel Mandelik, Eran Tal, Shai Silberstein
  • Publication number: 20080137075
    Abstract: The present invention relates to a method for inspecting a slider, wherein the state of the slider is one in which a row bar is not yet diced into sliders, the row bar including a plurality of rectangular sliders which are aligned in a longitudinal direction of the row bar. The method of the present invention comprises: a holding step for holding the row bar such that both a first normal vector that extends from a first side of the slider and a second normal vector that extends from a second side of the slider have upward components with regard to a vertical direction, wherein the first normal vector and the second normal vector are two normal vectors among four normal vectors that extend from four sides of the slider, the four sides not facing an adjacent slider; and an inspection step for optically inspecting the first and second sides of the slider of the row bar by means of first and second inspection means, respectively, the row bar being held.
    Type: Application
    Filed: December 7, 2007
    Publication date: June 12, 2008
    Applicant: SAE Magnetics (H.K.) Ltd.
    Inventors: Ryujii Fujii, Yoshikazu Sato
  • Publication number: 20080137076
    Abstract: A contact lens package includes a base member including a cavity dimensioned to accommodate contact lens and a liquid therein. The combination of the cavity, the contact lens, and the liquid cooperate to collimate partially collimated light directed toward a bottom surface of the cavity. The cavity can be sealed by attaching a removable sealing member to the base member around the cavity. Methods of inspecting ophthalmic lenses using the present packages are also described.
    Type: Application
    Filed: December 7, 2006
    Publication date: June 12, 2008
    Applicant: COOPERVISION, INC.
    Inventors: Julie Clements, Steve Hope, Kevin Aldridge
  • Publication number: 20080137077
    Abstract: A system constructs an image using virtual lenslets.
    Type: Application
    Filed: December 8, 2006
    Publication date: June 12, 2008
    Inventors: W. Daniel Hillis, Nathan P. Myhrvold, Lowell L. Wood
  • Publication number: 20080137078
    Abstract: A method of measuring a damaged structure formed on a semiconductor wafer using optical metrology, the method includes obtaining a measured diffraction signal from a damaged periodic structure. A hypothetical profile of the damaged periodic structure is defined. The hypothetical profile having an undamaged portion, which corresponds to an undamaged area of a first material in the damaged periodic structure, and a damaged portion, which corresponds to a damaged area of the first material in the damaged periodic structure. The undamaged portion and the damaged portion have different properties associated with them. A simulated diffraction signal is calculated for the hypothetical damaged periodic structure using the hypothetical profile. The measured diffraction signal is compared to the simulated diffraction signal.
    Type: Application
    Filed: January 28, 2008
    Publication date: June 12, 2008
    Applicant: Tokyo Electron Limited
    Inventors: Kevin LALLY, Merritt FUNK, Radha SUNDARARAJAN
  • Publication number: 20080137079
    Abstract: An automated system for illuminating and inspecting the inner surface areas of tubular samples, especially stents, is disclosed. The system comprises rotatable means for receiving the sample to be inspected; at least one fluorescent surface area arranged in the immediate vicinity of the sample to be inspected; an UV-light source for illuminating the at least one fluorescent surface area; an electronic line-scan camera for inspecting the sample; and a computer based electronic imaging system, functionally connected to the camera, whereby the imaging system creates a line-by-line image of an area extending along the length of the sample as it rotates under the camera.
    Type: Application
    Filed: February 19, 2008
    Publication date: June 12, 2008
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Achim Kreckel, Christian Laue, Edgar Maehringer-Kunz
  • Publication number: 20080137080
    Abstract: The present invention is directed to deconvolution and normalization of assay data. The present invention includes a control and analysis system, used in conjunction with a signal generation and detection apparatus, for capturing, processing and analyzing images of samples having resonance light scattering (RLS) particle labels. The control and analysis system processes instructions and algorithms for performing multiplexed assays of two or more colors, for example, to allow separation and analysis of detected light that contains information from two or more different types or sizes of RLS particles. The multiplexing analysis software is preferably incorporated within the system of the present invention, and the multiplexing analysis is preferably performed in real-time during a scanning or assay procedure. The invention provides for a computer readable medium containing instructions for carrying out the same.
    Type: Application
    Filed: August 8, 2007
    Publication date: June 12, 2008
    Inventors: Leon J. Bodzin, Juan Yguerabide, Laurence Warden, Richard R. Anderson, Kate Rhodes
  • Publication number: 20080137081
    Abstract: In a Raman spectroscopic system: a sample cell in which a sample is filled or through which the sample flows down, where the sample has fluidity and contains one or more materials being to be measured, and having an electrophoretic feature or being conditioned in advance so as to have an electrophoretic feature; a Raman scattering device which has a sample-contact surface, is arranged so that the sample is in contact with the sample-contact surface, and outputs Raman-scattered light when the sample-contact surface is illuminated with measurement light; an optical system which illuminates with the measurement light the sample in contact with the sample-contact surface; a voltage application unit which is provided with the sample cell and applies an electric voltage to the sample so as to bring the one or more materials close to the sample-contact surface by electrophoresis; and a detection unit which detects the Raman-scattered light.
    Type: Application
    Filed: December 6, 2007
    Publication date: June 12, 2008
    Applicant: FUJIFILM CORPORATION
    Inventor: Naoki MURAKAMI
  • Publication number: 20080137082
    Abstract: A spectroscopic detector for identifying the presence of a substance includes a laser for illuminating the substance with electromagnetic radiation at a plurality of wavelengths to induce the emission of radiation characteristic of the substance; a spectrometer or photometer for measuring the emitted radiation at a plurality of emission wavelengths to obtain a plurality of spectral measurement data; and a processor for processing the spectral measurement data. The processor includes a processing algorithm configured for combining the plurality of spectral measurement data into a composite spectrum; and applying the algorithm to the composite spectrum whereby at least one parameter characteristic of the substance is identified while information in the composite spectrum contributed by an emission of radiation from any other substance is removed to thereby identify the presence of the substance, and thereby obtain a characteristic spectral signature of the substance.
    Type: Application
    Filed: November 28, 2007
    Publication date: June 12, 2008
    Inventors: Jacob Grun, Charles K. Manka, Jeffrey H. Bowles, Michael R. Corson, Jay F. Sperry
  • Publication number: 20080137083
    Abstract: A process monitoring system has a process chamber configured to hold an object to be processed, an illumination source configured to emit a light to the object, a polarizer configured to polarize the light, a monitor window having a birefringent material and provided on the process chamber to propagate the light, direction adjusting equipment configured to adjust a relationship between a polarization plane of the light and a direction of an optic axis of the monitor window, and a monitoring information processor configured to detect the light reflected from the object.
    Type: Application
    Filed: January 31, 2008
    Publication date: June 12, 2008
    Applicant: Kabushiki Kaisha Toshiba
    Inventors: Takayuki Sakai, Masanobu Kibe, Tokuhisa Ohiwa
  • Publication number: 20080137084
    Abstract: A method for reducing fringe interference of light created in a passive cavity defined by partially reflecting optical surfaces, wherein the optical path length of the cavity is varied with a Gaussian distribution, where the standard deviation is at least one-quarter of the light's wavelength.
    Type: Application
    Filed: November 30, 2007
    Publication date: June 12, 2008
    Inventor: Pawel Kluczynski
  • Publication number: 20080137085
    Abstract: Provided is a method for determining the optimal resonant length, among a large number of local resonant lengths which satisfy a resonant condition, that maximizes wave intensity in a resonant structure. In the second harmonic generation or the cascaded difference frequency generation device using the resonant structure by which the second harmonic wave of a pump wave resonates, the optimal resonant length is determined so that the intensity of an optical wave is maximized. The intensity distribution of the optical wave is defined, according to the resonant feedback condition or the no-resonant feedback condition, as a function of the resonant lengths to determine the optimal resonant length.
    Type: Application
    Filed: November 29, 2007
    Publication date: June 12, 2008
    Inventor: Jong Bae KIM
  • Publication number: 20080137086
    Abstract: In an optical property measuring method and an optical property measuring apparatus, a spectral transmittance characteristic of a reference colored layer prepared as a reference is corrected based on a measured spectral reflection characteristic of a colored layer, and the spectral reflection characteristic of the reference colored layer. With this arrangement, information on the measured spectral transmittance characteristic of the colored layer can be obtained with sufficient precision in conformity with a printing condition of a sample to be measured. Thus, colorimetry of a printed color of a fluorescent sample i.e. a colored surface on a fluorescent substrate can be accurately performed by using the corrected spectral transmittance characteristic of the reference colored layer.
    Type: Application
    Filed: December 5, 2007
    Publication date: June 12, 2008
    Inventor: Kenji Imura
  • Publication number: 20080137087
    Abstract: A system and method for measuring a quality parameter of a harvested crop are provided. Specifically, the system is adapted to be carried by a harvesting device such that a sensor is enclosed in a controlled environment and such that the sensor is capable of precisely and reliably measuring the quality parameter while the harvesting device is in operation. The system includes a verification device and an actuator device contained within the controlled environment. The actuator device periodically conveys the sensor device to at least one of a verification position relative to the verification device and a measurement position. Thus, the sensor device may be periodically and reliably referenced and/or validated while in use in harsh agricultural environments such that the sensor device is capable of accurately measuring the quality parameter as the crop is harvested.
    Type: Application
    Filed: November 19, 2007
    Publication date: June 12, 2008
    Inventors: WILHELM G. GRETEN, Carlos Hildebrand, Roland Welle
  • Publication number: 20080137088
    Abstract: A device is provided for optically measuring shapes and/or examining objects, comprising at least one camera, at least one lens, a scattering body and at least two light sources. The device is characterized in that the scattering body is opaque and that at least two light sources are disposed on the inside of the scattering body and illuminate the inside thereof, and that either only two light sources are used, which are disposed opposite from one another on an imaginary diameter line, or that the light sources are disposed at the corners of a—preferably equilateral—triangle or a cross.
    Type: Application
    Filed: March 23, 2006
    Publication date: June 12, 2008
    Applicant: OBE OHNMACHT & BAUMGARTNER GMBH & CO. KG
    Inventor: Christoph Wagner
  • Publication number: 20080137089
    Abstract: Improved calibration of a dual-etalon frequency monitor having x-y outputs is provided. An ellipse is fit to the (x,y) points from a set of calibration data. For each (x,y) point, an angle ? is determined. A linear fit of frequency to ? is provided. Differences between this linear fit and the determined values of ? are accounted for by including a spline fit to this difference in the calibration.
    Type: Application
    Filed: December 4, 2007
    Publication date: June 12, 2008
    Inventor: Sze Meng Tan
  • Publication number: 20080137090
    Abstract: A method of manufacturing an optical element (5) comprises testing an optical surface (3) of the optical element, using an interferometer 1a directing measuring light (23a) onto the optical surface wherein the measuring light traverses two successive holograms (44, 48) disposed in the beam path of the measuring light upstream of the optical surface.
    Type: Application
    Filed: January 20, 2006
    Publication date: June 12, 2008
    Applicant: Carl Zeiss SMT AG
    Inventors: Jochen Hetzler, Susanne Beder, Heiko Feldmann
  • Publication number: 20080137091
    Abstract: Apparatus is provided for a fiber optic gyro. The fiber optic gyro includes a ring resonator having first and second counter-propagating directions. The ring resonator includes a coil having an axis and an optical fiber having a hollow core. The ring resonator is configured to produce a first resonance frequency when a first light beam circulates through the hollow core in the first counter-propagating direction and produce a second resonance frequency when a second light beam circulates through the hollow core in the second counter-propagating direction. A difference between the resonance frequencies indicates a rotation rate of the fiber optic gyro about the axis.
    Type: Application
    Filed: January 27, 2006
    Publication date: June 12, 2008
    Inventors: Glen A. Sanders, Lee K. Strandjord
  • Publication number: 20080137092
    Abstract: An integrated measurement system for measuring a plurality of parameters is disclosed. The integrated system includes a fiber Bragg grating (FBG) sensor configured for modulating a wavelength of an FBG input signal to provide an FBG output signal corresponding to an FBG parameter, a fiber Faraday rotator (FFR) sensor module configured for rotating a polarization and modulating an intensity of an FFR input signal to provide an FFR output signal corresponding to an FFR parameter, wherein the FBG sensor and FFR sensor module are coupled to provide an integrated system output signal, and a detection system configured for receiving the integrated system output signal and for using the integrated system output signal to obtain values associated with at least one FBG or FFR parameter.
    Type: Application
    Filed: December 8, 2006
    Publication date: June 12, 2008
    Applicant: GENERAL ELECTRIC COMPANY
    Inventors: Sebastian Gerhard Maxim Kraemer, Bastian Lewke
  • Publication number: 20080137093
    Abstract: An apparatus and method for generating a terahertz (THz) wave are provided. The apparatus comprises: an fiber optic probe injecting an optical wave transmitted through an optical fiber into a device under test (DUT); a driving oscillator generating and injecting an electrical wave into the DUT; and the device under test (DUT) generating a THz wave using the produced optical and electrical waves.
    Type: Application
    Filed: June 7, 2007
    Publication date: June 12, 2008
    Applicant: Electronic and Telecommunications Research Institute
    Inventors: Kwang Yong Kang, Mun Cheol Paek, Doo Hyeb Youn, Min Hwan Kwak, Suk Gil Han
  • Publication number: 20080137094
    Abstract: An optical tomographic imaging apparatus capable of obtaining a high resolution tomographic image rapidly. Light beams swept in wavelength intermittently and repeatedly within first and second wavelength ranges respectively are outputted simultaneously from a light source unit. If the wavelength of either one of the light beams is within a fifth wavelength range, the other light beam is not outputted. The first or second wavelength range includes at least a portion of the fifth wavelength range. Each light beam is split into measuring and reference beams by a coupler. Wavelengths of reflected beams from a measuring object when the measuring beams are irradiated on the object and the reference beams are divided by a WDM coupler. The reflected beams and reference beams are combined by an optical coupler, and each interference beam produced thereby is detected with respect to each light beam as an interference signal.
    Type: Application
    Filed: December 6, 2007
    Publication date: June 12, 2008
    Applicant: FUJIFILM CORPORATION
    Inventors: Yuichi TERAMURA, Karin KUROIWA
  • Publication number: 20080137095
    Abstract: A method for out-of-plane displacement detection is disclosed. The out-of-plane displacement is detected by analyzing all the fringe density indexes calculated using the frequency-domain information extracted from a series of interference images of the sample vibrating at different frequencies. The present invention further discloses a method and an apparatus for resonant frequency identification by detecting the peak value of all the fringe indexes calculated at different scanning frequencies. With the identified resonant frequency, the full-field vibratory surface profile of the sample in various resonance modes can be reconstructed.
    Type: Application
    Filed: November 28, 2007
    Publication date: June 12, 2008
    Inventors: Liang-Chia Chen, Chung-Chu Chang, Yao-Ting Huang, Jin-Liang Chen
  • Publication number: 20080137096
    Abstract: An exposure apparatus includes a stage configured to hold an original thereon and to move in a horizontal direction, a first interferometer configured to emit first measurement light used for measuring a position of the stage in a vertical direction thereof, a first mirror provided on a bottom surface of the stage, and a second mirror provided directly below the first mirror. The second mirror is disposed so as to guide the first measurement light emitted from the first interferometer to the first mirror.
    Type: Application
    Filed: December 5, 2007
    Publication date: June 12, 2008
    Applicant: CANON KABUSHIKI KAISHA
    Inventor: Hideo Tanaka
  • Publication number: 20080137097
    Abstract: A position measuring system includes a laser interferometer, and a wavelength detection unit detecting the wavelength change of a laser beam. A phase compensation unit compensates for the wavelength change detected by the wavelength detection unit based on the phase difference of aerial vibration between the wavelength detection unit and the optical path of the laser interferometer, which is determined based on the difference in length between a first path of the aerial vibration from the aerial vibration source of an air conditioner to the wavelength detection unit and a second path of the aerial vibration from the aerial vibration source to the optical path of the laser interferometer. A position measuring unit compensates for a measurement value obtained by the laser interferometer on the basis of the compensated wavelength change. In the position measuring system, the first path is designed to be shorter than the second path.
    Type: Application
    Filed: December 6, 2007
    Publication date: June 12, 2008
    Applicant: CANON KABUSHIKI KAISHA
    Inventor: Takatoshi Tanaka
  • Publication number: 20080137098
    Abstract: A method for creating an image of an object includes setting an illumination source at an initial nominal wavelength, illuminating an object with an illumination source to create interference patterns, changing the wavelength of the illumination source to drift from the nominal wavelength to a drift wavelength over a time period that causes a 360° shift in the phase angle of the interference patterns, sampling the interference patterns multiple times during the time period, reconstructing the phase angle of several points on the object, and creating an image of the object based on the sampled and reconstructed information.
    Type: Application
    Filed: December 3, 2007
    Publication date: June 12, 2008
    Inventor: Michael J. Mater
  • Publication number: 20080137099
    Abstract: In a scatterometer, an aperture plate comprising an array of transmissive apertures is inserted into a plane in the illumination optical system that is conjugate with the pupil plane of the projection optical system. Aberrations in the optical systems can be measured by measuring the relative positions of bright spots in the pupil plane.
    Type: Application
    Filed: December 7, 2006
    Publication date: June 12, 2008
    Applicant: ASML NETHERLANDS B.V.
    Inventor: Ronald Franciscus Herman Hugers
  • Publication number: 20080137100
    Abstract: The probe comprises a light source (20), means for shaping (24, 25, 21) the beam emitted by said light source and the beam coming from a surface arranged close to a target distance, an optical detector unit (22), comprising a pinhole diaphragm (26) and a photoelectric detector (28), providing a voltage peak (31) when said surface is at said target distance and further comprising a diaphragm (27) with a hole larger than said pinhole and a photoelectric detector (29), providing a voltage greater than that produced by said detection sensor (28), except when said surface is a the target distance. The method uses the probe to measure the thickness of an optical lens.
    Type: Application
    Filed: January 11, 2006
    Publication date: June 12, 2008
    Applicants: Essilor International (Compagnie Generale D' Optique, MB Optique
    Inventors: Frederic Dubois, Michael Bray
  • Publication number: 20080137101
    Abstract: An apparatus and method for obtaining surface texture information using photometric stereo. The material for which surface height and reflectance function information is desired (“the material”) is illuminated with an illumination source emitting electromagnetic waves, preferably in the form of white light, which is consequently reflected by the material to be scanned into an imaging sensor. The position and orientation of the illumination source relative to the sensor is constant. The material is placed within or on top of a holding apparatus, such as a pane of glass, which is oriented in order to keep the illumination vector constant with respect to the imaged surface. The illumination source and sensor are moved in unison across the surface in order to progressively capture a complete image of the surface; this operation may be facilitated in practice through the use of hardware such as a flatbed scanner.
    Type: Application
    Filed: November 3, 2005
    Publication date: June 12, 2008
    Applicant: Heriot-Watt University
    Inventors: Andrew Desmond Spence, Michael J. Chantler