Patents Issued in June 24, 2008
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Patent number: 7391463Abstract: An image sensing apparatus includes an image sensing element to form an object image which enters via a photographing optical system, a distance measuring unit to measure distances to at least first and second points within a photographing frame using an optical path different from the optical system. A determination unit determines a relationship between a distance measuring result and a drive amount of the optical system, on the basis of the distance measuring result upon measuring a distance to the first point by the distance measuring unit and a change in contrast of the object image formed at a position corresponding to the first point on the image sensing element when a focal point position of the optical system has changed. A control unit controls the focal point position of the optical system, on the basis of a distance measuring result at the second point and the relationship.Type: GrantFiled: August 4, 2003Date of Patent: June 24, 2008Assignee: Olympus CorporationInventor: Osamu Nonaka
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Patent number: 7391464Abstract: A camera unit includes a soft substrate on which electrode regions and an image pickup device region are disposed, a driving electrode group disposed on one of the electrode regions, an image pickup device disposed on the image pickup device region, stationary unit frame attaching portions disposed at positions surrounding the image pickup device region, a stationary unit frame attached to the stationary unit frame attaching portions, and movable units disposed in the stationary unit frame. The soft substrate is bent along bending positions between the electrode regions and the image pickup device region, the electrode regions are fixed on sides of the stationary unit frame inwardly thereof, and the image pickup device region is fixed on an end surface of the stationary unit frame toward the movable units.Type: GrantFiled: September 29, 2003Date of Patent: June 24, 2008Assignee: Kabushiki Kaisha ToshibaInventors: Akihiro Koga, Toshikatsu Akiba, Yasuo Shima, Hiroyuki Kayano, Makoto Aoki
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Patent number: 7391465Abstract: An electronic device with a rotatable image capture device. The electronic device includes a body and an image capture module. The body includes a first surface, a second surface and a sleeve. The second surface is opposite the first surface. The image capture module is disposed in the body, and includes a rotary shaft and a charge-coupled device. The image capture module rotates among a first position, a second position, a third position, and a fourth position. The rotary shaft is disposed in the sleeve in a manner such that it can move between a fifth position and a sixth position. When the rotary shaft moves between the fifth position and the sixth position, the image capture module can rotate through the first position, the second position, the third position, and the fourth position.Type: GrantFiled: June 10, 2004Date of Patent: June 24, 2008Assignee: Wistron Corp.Inventors: Yang-Po Chiu, An-Chung Hsieh, Deng-Zhou Zheng, Yu-Hsin Chen, Ming-Chin Yang, Ying-Fung Lau
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Patent number: 7391466Abstract: A camera module for capturing an image. The camera module including an image sensor including a die mounted on a substrate, a housing coupled with the substrate to substantially enclose the die, and a dust trap substance adhered to the housing configured to capture and maintain at least one dust particle to decrease movement of dust particles within the housing, which decreases a number of blemishes in the captured image.Type: GrantFiled: May 4, 2004Date of Patent: June 24, 2008Assignee: Micron Technology, Inc.Inventor: Akihiro Machida
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Patent number: 7391467Abstract: A hinge apparatus for an image photographing apparatus wherein the hinge apparatus rotatably connects a housing with respect to a main body so that the housing can rotate in a predetermined rotation range. The hinge apparatus includes a fixing bracket secured to the main body, a hinge unit secured to the housing and connected to the fixing bracket to be reciprocatingly rotatable within a predetermined angle, a shaft member for rotatably connecting the hinge unit and the fixing bracket so that the hinge unit and the fixing bracket can be rotated with respect to each other, and a sensing unit disposed on the hinge unit and/or the fixing bracket to sense the relative rotational range of the hinge unit with respect to the fixing bracket.Type: GrantFiled: February 13, 2004Date of Patent: June 24, 2008Assignee: Samsung Electronics Co., Ltd.Inventor: Nam-il Kim
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Patent number: 7391468Abstract: A moving average filter with a weighting factor calculates a continuously programmable threshold to determine whether fields could be considered identical or not. This decision is used to detect the cadence of a TELECINE encoded video signal. This moving average filter is also used for detecting the presence of still images in the video data stream by detecting total difference in Y (luminance) of the fields and then calculating the average difference in luminance (Y) of the field. This average difference in luminance value indicates a degree of difference between fields. For two frames of data input to the system, each having two fields, a difference is calculated between the luminance values of the two top fields for each frame. From this difference value a maximum absolute difference history is stored, along with the Sum of Absolute Differences (SAD). The programmable threshold is then calculated by summing the saturated SAD history over time.Type: GrantFiled: September 24, 2004Date of Patent: June 24, 2008Assignee: Magnum Semiconductor, Inc.Inventor: Anup U. Shah
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Patent number: 7391469Abstract: An apparatus for video decoding and de-interlacing contains a video decoder for decoding video data to generate decoded video data of a next picture; a storage device coupled to the video decoder, the storage device having four frame buffers for buffering the decoded video data of the next picture into one of the four frame buffers according to data stored in the frame buffers; an interlace/progressive converter coupled to the storage device, for de-interlacing data stored in the frame buffers to generate corresponding progressive video data; and a controller coupled to the video decoder and the interlace/progressive converter, for controlling data access of the video decoder and the interlace/progressive converter to the frame buffers of the storage device.Type: GrantFiled: October 5, 2003Date of Patent: June 24, 2008Assignee: MediaTek Inc.Inventor: Chi-Chin Lien
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Patent number: 7391470Abstract: An apparatus and method for providing caption information effectively provides information on the status of a caption service for a broadcast signal depending on a user's selection by checking the caption service status of the broadcast signal at a predetermined time interval and storing the caption service status information obtained through the check. The apparatus includes a caption information collecting unit for checking the status of a caption service for a broadcast signal at a predetermined time interval and collecting information on the caption service status, and a caption information processing unit for displaying the collected caption service status information on a display unit.Type: GrantFiled: July 14, 2004Date of Patent: June 24, 2008Assignee: Samsung Electronics Co., Ltd.Inventor: Kwang-won Kim
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Patent number: 7391471Abstract: This invention teaches an apparatus and method for merging information transmitted in vertical blanking interval (VBIs) of several services into a single VBI. The system includes a pair of memories for each service wherein each memory is toggled between a read and write cycle. While the first memory is in a write cycle, the second memory is in a read cycle and vice versa. A field programmable gate array (FPGA) controls the first and second pairs of memory to merge the VBIs.Type: GrantFiled: September 21, 1999Date of Patent: June 24, 2008Assignee: General Instrument CorporationInventor: Anthony Cucinotta
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Patent number: 7391472Abstract: We describe and claim an adaptive color burst phase correction system and method. The adaptive color burst phase correction system includes a signal detector to extract a color burst from a video signal, the color burst including a phase and an amplitude, an adaptive phase corrector to adjust the color burst phase responsive to corruption in the color burst, a Y/C separator to separate luminance and chrominance data from the video signal, responsive to the adjusted color burst phase, and a panel to display the luminance and chrominance data. The adaptive phase corrector includes a corruption detector to detect corruption in a color burst, a selector to select a phase correction value responsive to the detected corruption, and a phase adjuster to adjust a color burst phase responsive to the phase correction value.Type: GrantFiled: January 5, 2005Date of Patent: June 24, 2008Assignee: Pixelworks, Inc.Inventor: Neil D. Woodall
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Patent number: 7391473Abstract: Video information and sub-information pertaining to a partial image to be displayed on a small-screen monitor are input from a receiver, disk playback unit, or memory data reader. On the basis of the sub-information, a target region data extractor and target region setting unit extract and set a partial image. A partial enlargement processor enlarges the partial image and displays the enlarged image on the small-screen monitor.Type: GrantFiled: May 25, 2004Date of Patent: June 24, 2008Assignee: Canon Kabushiki KaishaInventor: Koji Takahashi
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Patent number: 7391474Abstract: Display interface embodiments are provided to capture various types of analog video signals and digitize them for presentation on advanced digital displays (e.g., computer displays and television displays). The embodiments include at least an error converter channel and a reference converter channel that can each amplify an analog input signal S with a fixed gain G and a programmed gain g and convert the amplified signal to a corresponding digital code. The embodiments also include a channel controller that is configured to conduct process steps that adjust the transfer function of the error converter channel to conform to (e.g., matches) the transfer function of the reference converter channel.Type: GrantFiled: August 12, 2005Date of Patent: June 24, 2008Assignee: Analog Devices, Inc.Inventors: Ralph David Moore, Jr., Michael Joseph Fernald
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Patent number: 7391475Abstract: A method of producing a display image comprises receiving image information representing an image to be displayed, producing an image formed of a plurality of images of different colors, and projecting the produced image along an optical path. The differently colored images have color intensities related to energy applied to a light source. A level of energy is applied to the light source during production of the image of one color that is different than the level of energy applied to the light source during production of the image of another color.Type: GrantFiled: March 14, 2003Date of Patent: June 24, 2008Assignee: Hewlett-Packard Development Company, L.P.Inventors: Michael A Pate, William J. Allen, Brian S Dixon
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Patent number: 7391476Abstract: A method and device for interpolating a pixel of an interline of a first field in a sequence of interlaced fields includes selecting at least one first pixel and one second pixel from scan lines of the first field adjacent the interline, and a third pixel from a second field temporally preceding or following the first field. The image position of the third pixel corresponds to the image position of the pixel to be interpolated. Also selected are fourth and fifth pixels which lie vertically adjacent the third pixel in the second field. A first filter value is generated by low-pass filtering the at least one first and second image information values. A second filter value is generated by high-pass filtering the third, fourth and fifth image information values. An image information value of the interpolated pixel is generated using the first and second filter values.Type: GrantFiled: April 4, 2005Date of Patent: June 24, 2008Assignee: Micronas GmbHInventor: Marko Hahn
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Patent number: 7391477Abstract: An amplitude discrimination circuit separates a received video signal into a signal component with a minute amplitude level and other signal component with a high amplitude level. A contour correction circuit performs contour correction processing on a signal with the high amplitude level and a nonlinear processing circuit performs nonlinear processing after adding the signal with high amplitude level to an output from a delay circuit which delays the received video signal by the time required for the contour correction processing performed by the contour correction circuit. A minute amplitude contour correction circuit performs contour correction processing on the signal with the minute amplitude level and an adder circuit adds the signal with the minute amplitude level to an output from the nonlinear processing circuit after delaying the signal with the minute amplitude level by the time required for the nonlinear processing performed by a delay circuit.Type: GrantFiled: June 22, 2005Date of Patent: June 24, 2008Assignee: Kabushiki Kaisha ToshibaInventor: Hirotoshi Miyazawa
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Patent number: 7391478Abstract: Methods and systems for 3D comb filtering of a video signal are provided. Aspects of the method may include generating a plurality of interpolated pixels for corresponding video samples for a first video frame, determining at least one direction of least bandwidth among the video samples and the interpolated pixels, and blending combing according to the determined direction of least bandwidth. A plurality of interpolated pixels for corresponding video samples may be generated in a first pixel line of the first video frame. The plurality of interpolated pixels in the first pixel line may be generated, so that each of the plurality of interpolated pixels in the first pixel line is one quarter cycle phase-shifted from a corresponding adjacent pixel in the first pixel line.Type: GrantFiled: September 17, 2004Date of Patent: June 24, 2008Assignee: Broadcom CorporationInventor: Shawn V. Johnson
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Patent number: 7391479Abstract: Methods and systems for 3D bidirectional comb filtering of a video signal are provided. Aspects of the method may include generating a plurality of interpolated pixels for a current line, a next line and a previous line in a current frame. A plurality of interpolated pixels may be generated in a previous frame, which corresponds to the interpolated pixels in the current frame. A plurality of interpolated pixels may be generated in a next frame, which corresponds to the interpolated pixels in the current frame. At least one direction of least bandwidth may be determined among at least a portion of all the generated interpolated pixels and true pixels in the current frame. Combing may be blended according to the determined at least one direction of least bandwidth.Type: GrantFiled: September 17, 2004Date of Patent: June 24, 2008Assignee: Broadcom CorporationInventor: Shawn Val Johnson
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Patent number: 7391480Abstract: An image processing apparatus carrying out a gamma correction for input data includes polygonal line approximating apparatus for carrying out the gamma correction by a polygonal line approximation, a look-up table partially storing gamma correction data corresponding to the input data, and a correction deciding portion and a selector which select the output of one of the polygonal line approximating apparatus and the look-up table corresponding to the input data.Type: GrantFiled: March 10, 2005Date of Patent: June 24, 2008Assignee: Matsushita Electric Industrial Co., Ltd.Inventors: Tetsu Fukue, Satoshi Shigenaga
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Patent number: 7391481Abstract: An interlace motion artifact detector which identifies video image spatial frequencies characteristic of motion artifacts. The detected frequency is the maximum which can be represented by the vertical sampling rate of the video format (i.e., the Nyquist frequency). This frequency is detected by a pair of partial Discrete Fourier Transforms (DFT) which each calculate only the frequency component of interest. Additional vertical frequency components at one half and one quarter the interlace motion artifact frequency are also detected via a partial DFT. The presence of these lower frequencies acts as an indication of an erroneous motion artifact detection. Additionally, the dynamic range and maximum level of the video data is used as an indication of when to boost the frequency detection levels in areas of low brightness and/or contrast.Type: GrantFiled: February 9, 2005Date of Patent: June 24, 2008Assignee: Silicon Image, Inc.Inventor: Dale R. Adams
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Patent number: 7391482Abstract: An improved multiparameter lighting fixture is provided comprising a base, a yoke, a lamp housing, and a communication port for receiving address and command signals. The lamp housing may be comprised of a lamp, a light valve, and a lens. The lamp, the light valve and the lens may cooperate to project, for example, an ownership image, a fixture identifier image, a time identifier image, a show identifier image, a content identifier image, or an effects identifier image. The lamp, the light valve and the lens may cooperate to produce a first image on a projection surface and a second image may be created from the first image by applying an interactive effect to the first image in response to an image captured by a camera.Type: GrantFiled: February 8, 2005Date of Patent: June 24, 2008Inventor: Richard S. Belhveau
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Patent number: 7391483Abstract: Four-mask and three-mask process for TN-type liquid crystal display made with combination of the formation process of the signal line and the formation process of the pixel electrode by forming a signal line of a laminate of a transparent conductive layer and a low-resistance metal layer and a pseudo-pixel electrode, removing a low resistance metal layer on the pseudo-pixel electrode during formation of an opening in a passivation insulating layer to obtain a pixel electrode having a transparent conductive layer. Contact formation process by removing the gate insulating layer during formation of the semiconductor layer, and the formation process of the contact and the formation process of the semiconductor layer, or the formation process of the scan line and the formation process of the contact or the formation process of the scan line and the formation process of the semiconductor layer by introducing half-tone exposure technology.Type: GrantFiled: November 24, 2004Date of Patent: June 24, 2008Assignee: Quanta Display Japan Inc.Inventor: Kiyohiro Kawasaki
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Patent number: 7391484Abstract: An electro-optical device includes a substrate; electrodes formed on the substrate; switching elements connected to the electrodes, respectively; an electro-optical material layer disposed on the electrodes and the switching elements; photospacers that regulate the thickness of the electro-optical material layer; and spacer light-shielding films, each being provided between a corresponding photospacer and the substrate. Each of the spacer light-shielding films is made of the same material as at least one of a plurality of elements constituting each of the switching elements.Type: GrantFiled: August 11, 2005Date of Patent: June 24, 2008Assignee: Seiko Epson CorporationInventors: Hideki Kaneko, Keiji Takizawa, Kimitaka Kamijo, Tomoyuki Nakano
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Patent number: 7391485Abstract: A dual LCD device includes a liquid crystal panel having a liquid crystal layer interposed between a first substrate and a second substrate, first and second polarizing plates attached to opposing surfaces of the liquid crystal panel, a first front light unit attached to a front side of the liquid crystal panel, and a second front light unit attached to a rear side of the liquid crystal panel.Type: GrantFiled: March 18, 2004Date of Patent: June 24, 2008Assignee: LG.Philips LCD Co., Ltd.Inventors: Kyeong Jin Kim, Hoon Kang
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Patent number: 7391486Abstract: In a liquid crystal display device, a field sequential liquid crystal display device includes a liquid crystal panel having an upper substrate, a lower substrate and a liquid crystal layer therebetween; a backlight device under the liquid crystal panel for irradiating light to the liquid crystal panel and having three color light sources; and an image signal processor controlling a sequential lighting order and combination of the three color light sources.Type: GrantFiled: December 6, 2004Date of Patent: June 24, 2008Assignee: LG Display Co., Ltd.Inventor: Hyung-Ki Hong
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Patent number: 7391487Abstract: A liquid crystal display device include: first substrate and a second substrate facing each other, the first and second substrate including pixel regions; a first alignment layer on the first substrate; an black matrix on the second substrate; a first sloped side of the black matrix that is less steep than a second sloped side of the black matrix; a color filter layer on the black matrix; a second alignment layer on the color filter layer; a liquid crystal material interposed between the first and second alignment layers; and a rubbing direction of the second alignment layer corresponding to a first direction from the first sloped side to the second sloped side.Type: GrantFiled: March 22, 2007Date of Patent: June 24, 2008Assignee: LG Display Co., Ltd.Inventors: Woong-Kwon Kim, Seung-Ryull Park
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Patent number: 7391488Abstract: In a reflection type liquid crystal display device having a front light and a reflection type liquid crystal panel including a reflection electrode of uneven structure, average tilt angles of the uneven structure of the reflection electrode are changed to form a high directivity reflective region having a characteristic reflecting an incident light from the front light in a vertical direction and a wide viewing angle reflective region having a characteristic reflecting an outside light incident slantingly from the front in a vertical direction, thereby forming the high directivity reflective region and the wide viewing angle reflective region to be mixed in the reflection electrode in the same display device.Type: GrantFiled: May 28, 2003Date of Patent: June 24, 2008Assignee: NEC LCD Technologies, Ltd.Inventors: Fumihiko Fujishiro, Hironori Kikkawa, Michiaki Sakamoto
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Patent number: 7391489Abstract: The liquid crystal display device of the present invention includes a first substrate, a second substrate and a vertically aligned liquid crystal layer interposed between the first and second substrate. The device has a plurality of pixels each including a first electrode formed on the first substrate, a second electrode formed on the second substrate, and the liquid crystal layer interposed between the first and second electrode, and a shading region provided around the pixels. A plurality of supports for defining the thickness of the liquid crystal layer are placed regularly on the surface of the first or second substrate facing the liquid crystal layer in the shading region. The liquid crystal layer forms at least one liquid crystal domain exhibiting axisymmetric alignment when at least a predetermined voltage is applied, and the tilt direction of liquid crystal molecules in the at least one liquid crystal domain is defined with inclined sides of the plurality of supports.Type: GrantFiled: March 8, 2005Date of Patent: June 24, 2008Assignee: Sharp Kabushiki KaishiaInventors: Yasuhiro Kume, Kazuhiko Tamai, Noriaki Onishi
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Patent number: 7391490Abstract: The invention relates to liquid crystal displays used in television receivers and display sections of electronic apparatus and, more particularly, to a liquid crystal display in which a polymeric material included in a liquid crystal material is polymerized to impart a pre-tilt angle to the liquid crystal material. The invention provides a liquid crystal display in which gradation/luminance characteristics in an oblique direction are improved and in which reduction in luminance is suppressed. The liquid crystal display includes a TFT substrate and an opposite substrate provided opposite to each other and a liquid crystal composition including a liquid crystal material and a polymer sealed between the substrates.Type: GrantFiled: January 17, 2006Date of Patent: June 24, 2008Assignee: Sharp Kabushiki KaishaInventors: Yohei Nakanishi, Tsuyoshi Kamada, Kazuya Ueda, Hideaki Tsuda
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Patent number: 7391491Abstract: The invention provides, an electro-optic device that can include a pair of substrates sandwiching an electro-optic substance therebetween. The electro-optic device can further include a coating member including an antistatic material and being disposed on a surface not opposing the electro-optic substance of at least one of the pair of substrates. Accordingly, problems of dust adhesion on the surface of the electro-optic device and dust projection can be solved so as to enable images with high quality to be displayed.Type: GrantFiled: March 14, 2007Date of Patent: June 24, 2008Assignee: Seiko Epson CorporationInventor: Hiromi Saitoh
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Patent number: 7391492Abstract: A multi-domain LCD device includes first and second substrates opposing each other, gate and data lines formed on the first substrate and crossing each other, thereby defining pixel regions, pixel electrodes formed on the first substrate in the pixel regions, each pixel electrode having one or more slits in the pixel region, dielectric patterns formed on the second substrate and spaced apart from the slits, compensation patterns formed below the pixel electrodes corresponding to the dielectric patterns, a concave portion formed on the first substrate below the slits, and a liquid crystal layer filled between the first and second substrates.Type: GrantFiled: December 23, 2005Date of Patent: June 24, 2008Assignee: LG.Philips LCD Co., Ltd.Inventor: Jung Hyun Kim
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Patent number: 7391493Abstract: A liquid crystal display device and a method of fabricating the same are disclosed in the present invention. The liquid crystal display device includes first and second substrates facing into each other, a sealant outside a liquid crystal display panel region between the first and second substrates, a first column spacer surrounded by the sealant, and a liquid crystal layer between the first and second substrates.Type: GrantFiled: December 12, 2002Date of Patent: June 24, 2008Assignee: LG Display LCD Co., Ltd.Inventor: Jong Woo Kim
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Patent number: 7391494Abstract: Method for fabricating an LCD having the liquid crystal dropping method applied thereto, including providing a first substrate and a second substrate having seals formed thereon, loading the first and second substrates into a bonding chamber, bonding the first and second substrates, setting the bonded first and second substrates, venting the bonding chamber for applying a pressure to the first and second substrates, and unloading the first and second substrates having the pressure applied thereto.Type: GrantFiled: August 10, 2004Date of Patent: June 24, 2008Assignee: LG Display Co., Ltd.Inventors: Sang Seok Lee, Sang Ho Park
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Patent number: 7391495Abstract: A stage apparatus includes a base having a reference surface, a moving unit which moves along the reference surface, a static bearing which is provided in the moving unit and which supports the moving unit such that the moving unit can move along the reference surface, and a temperature controller which is provided in the moving unit and which controls the temperature of gas supplied to the static bearing. In the stage apparatus, air fluctuation in the measurement area of interferometers due to gas exhausted from the static bearing and/or distortion caused by heat transmitted to a retainer of a target is suppressed, and the stage positioning accuracy is thereby increased.Type: GrantFiled: April 8, 2004Date of Patent: June 24, 2008Assignee: Canon Kabushiki KaishaInventors: Yoshikazu Miyajima, Yasuhito Sasaki, Hitoshi Sato
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Patent number: 7391496Abstract: An exposure apparatus which exposes a substrate to a pattern. The apparatus includes a channel which causes pure water to flow as a coolant, a temperature adjustment unit which adjusts a temperature of the coolant flowing in the channel, and a UV sterilization unit which performs UV sterilization processing for the coolant flowing in the channel.Type: GrantFiled: October 7, 2005Date of Patent: June 24, 2008Assignee: Canon Kabushiki KaishaInventors: Keiji Emoto, Hirohide Matsuhisa, Kotaro Akutsu
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Patent number: 7391497Abstract: A second communications server obtains adjustment information of an adjustment unit in an exposure apparatus and information related to image forming quality (such as wavefront aberration) of a projection optical system under an exposure condition that serves as a reference, via a first communications server, and then calculates an optimal adjustment amount of the adjustment unit under a target exposure condition based on the information. In addition, the second communications server obtains adjustment information of the adjustment and actual measurement data of image forming quality of the projection optical system via the first communications server, and then calculates the optimal adjustment amount of the adjustment unit under the target exposure condition based on the information. And, the second communications server controls the adjustment unit in the exposure apparatus via the first communications server, based on the calculations results.Type: GrantFiled: April 17, 2007Date of Patent: June 24, 2008Assignee: Nikon CorporationInventors: Yasuo Shimizu, Shigeru Hirukawa, Kousuke Suzuki, Tomoyuki Matsuyama
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Patent number: 7391498Abstract: An exposure apparatus includes a projection optical system which has a plurality of optical elements, and directs light from an original to an object to be exposed; a first stage which holds the object to be exposed; a first vacuum chamber which contains the first stage; and a second vacuum chamber which is adjacent to the first vacuum chamber, contains a part of the plurality of optical elements, and communicates with the first vacuum chamber through a first opening. The pressure in the second vacuum chamber is higher than pressure in the first vacuum chamber.Type: GrantFiled: September 24, 2004Date of Patent: June 24, 2008Assignee: Canon Kabushiki KaishaInventor: Tatsuya Hayashi
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Patent number: 7391499Abstract: A lithographic apparatus for reducing the visibility of artifacts in the pattern is provided. The apparatus comprises an illumination system, a patterning device, a projecting system, and a modulating device. The illumination system supplies a beam of radiation. The patterning device patterns the beam. The projection system projects the beam onto a target portion of a substrate. The modulating device modulates the beam to impart the pattern with a modulation scheme.Type: GrantFiled: December 2, 2004Date of Patent: June 24, 2008Assignee: ASML Netherlands B.V.Inventor: Robert-Han Munnig Schmidt
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Patent number: 7391500Abstract: In view of stably forming resist patterns with an excellent resolution, a light exposure apparatus 100 comprises a light source 101 irradiating a mask 102 with light, a projection optical system 103 projecting an image of the mask 102 onto a wafer 110, and a liquid supply unit 105 filling a liquid medium 109 between the projection optical system 103 and the wafer 110. A saturated cyclic hydrocarbon or its derivative is used as the liquid medium 109.Type: GrantFiled: June 13, 2005Date of Patent: June 24, 2008Assignee: NEC Electronics CorporationInventor: Taisaku Nakata
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Patent number: 7391501Abstract: Compositions for immersion liquid materials and associated immersion lithography systems and techniques. Examples of polymer or oligomer-based immersion liquids are described to exhibit superior material properties for immersion lithography in comparison with water and some other commonly-used immersion liquids. In addition, certain material additives may be added to water and water-based immersion liquids to improve the performance of the immersion liquids in immersion lithography.Type: GrantFiled: January 22, 2004Date of Patent: June 24, 2008Assignee: Intel CorporationInventors: Hai Deng, Yueh Wang, Huey-Chiang Liou, Hok-Kin Choi, Robert M. Meagley, Ernisse Putna
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Patent number: 7391502Abstract: A method of manufacturing a component that will, in use, experience a thermal load and will be operated at a mean temperature, includes selecting a material having a coefficient of thermal expansion having a zero-crossing at a first temperature and manufacturing the component using the selected material at a second temperature. The first temperature is between the second temperature and the mean operating temperature. Deformation of the component at the mean operating temperature are thus minimized. A lithographic apparatus includes a radiation system configured to provide a beam of radiation and a projection system configured to project a patterned beam of radiation onto a target portion of a substrate. At least one component of the apparatus that in use experiences a thermal load is made of the selected material.Type: GrantFiled: February 25, 2004Date of Patent: June 24, 2008Assignee: ASML Netherlands B.V.Inventor: Wilhelmus Josephus Box
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Patent number: 7391503Abstract: To prevent a substrate from expanding significantly to generate overlay errors an exposure operation takes place in two parts. A first part exposes boundary areas and a second part exposes the larger, bulk areas. In one example, a portion of the substrate is fixed and the substrate is exposed progressively from parts furthest from the fixed portions towards the fixed portion. In another example, a plurality of high velocity scans take place instead of a single slow scan, and the substrate is allowed to cool between the high velocity scans. In another example, a lithographic apparatus is heated in order to maintain a temperature differential between the apparatus and the surrounding environment, and to minimize any fluctuation due to the exposing radiation.Type: GrantFiled: October 25, 2005Date of Patent: June 24, 2008Assignee: ASML Netherlands B.V.Inventors: Willem Jurrianus Venema, Johannes Jacobus Matheus Baselmans
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Patent number: 7391504Abstract: A cost considered arrangement for evaluating local illumination interference with operation of a night vision apparatus in for example the confines of an illumination inclusive aircraft cockpit. The evaluation is especially applicable to identifying interference between aircraft instrument lighting having infrared content for example, and night vision apparatus operation in the aircraft. The evaluation is cost is limited by use of a common household lamp night vision apparatus source calibrated with a common light measuring instrument operated at close range and with modification of the measured illumination through mathematical manipulation of the source operating distance to achieve the low light levels needed for night vision apparatus operation. A standard visual acuity chart and multiple operator interpretations of the chart resolutions achieved are included.Type: GrantFiled: December 14, 2005Date of Patent: June 24, 2008Assignee: The United States of America as represented by the Secretary of the Air ForceInventors: Alan R. Pinkus, Harry L. Task
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Patent number: 7391505Abstract: The invention relates to a solid-state range sensing system. As with previous solid-state range sensing systems, an energy source is activated and deactivated in a cyclic pattern with a selected source frequency. A receiver is adapted to sense the reflection of emitted energy from the target. The receiver includes a shielding system to block the sensing of the reflected energy from the target in a cyclic pattern with a selected receiver frequency. Unlike the prior art, the frequency of the source and receiver are offset by a small frequency. The resulting output signal of the receiver is a further cyclic pattern beat signal of frequency equal to the difference between the source activation and receiver shielding modulation frequencies. The best signal is effectively a down-converted version of the source modulation frequency and, unlike the prior art, is compared with a reference beat signal whereby the phase difference between the two beat signals is used to determine a range value.Type: GrantFiled: April 6, 2004Date of Patent: June 24, 2008Assignee: The University of WaikatoInventor: Adrian Andrew Dorrington
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Patent number: 7391506Abstract: A coherent laser radar or lidar device (2;20;84;90) for measuring wind speed is described that comprises a transmitter for transmitting a beam of light to a remote probe volume (6;54), a receiver for detecting back-scattered light and an analyzer for calculating wind velocity at the remote probe volume from the Doppler shift in frequency of the detected back-scattered light. The analyzer is arranged to monitor for the presence of, and/or to ensure the calculated wind speed is corrected for, any Doppler frequency components of the detected back-scattered light that arise from back-scatter off cloud located at a range greater than the range of the remote probe volume. It is described how the lidar (2;20;84;90) may be scanned and wind velocity components calculated by fitting the scanned line of sight velocity values to a predetermined function. Furthermore, it is outlined how an initial fit may be performed to determine which points are to be used in this calculation.Type: GrantFiled: May 18, 2005Date of Patent: June 24, 2008Assignee: QinetiQ LimitedInventors: Michael Harris, David Arthur Smith, Adrian Sean Coffey
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Method of photo-reflectance characterization of strain and active dopant in semiconductor structures
Patent number: 7391507Abstract: A new method of photo-reflectance characterization of strain and active dopant in semiconductor structures has been developed for characterization of physical properties of semiconductor structures. The underlying principle of the strain and active dopant characterization technique is to measure photo-reflectance signals occurring nearby to interband transitions in the semiconductor bandstructure and which are highly sensitive to strain and/or active dopant through the effect of the nanometer scale space charge fields induced at the semiconductor surface. To attain this, the present disclosure comprises an intensity modulated pump laser beam and a continuous wave probe laser beam, focused coincident on a semiconductor structure. The pump laser provides approximately 15 mW optical power in the NIR-VIS. The pump light is amplitude modulated by a signal generator operating in the range of 100 kHz-50 MHz.Type: GrantFiled: October 25, 2006Date of Patent: June 24, 2008Assignee: Xitronix CorporationInventor: William W. Chism, II -
Patent number: 7391508Abstract: Two or more high-frequency microphones are used to determine where an individual spark or other excitation beam strikes a sample in an optical emission spectroscopy (OES) instrument. The position of the spark can be correlated with the elemental composition of the material in the sample vaporized by the spark. The microphones are placed appropriately in air around a sparker of the instrument, or appropriately on the sample, or on both the sample and in the air. Arrival times of sound from the spark to the microphones, or a difference in the arrival times, yields information, from which the position of the spark relative to the microphones, and hence the absolute position of the spark, is deduced, such as by triangulation. Optionally or in addition, a signal that indicates a time when the spark is produced is correlated with one or more spectra detected by a spectrometer, so a spectrum that results from the vaporized sample can be distinguished from a spectrum that results from heated gas above the sample.Type: GrantFiled: July 13, 2006Date of Patent: June 24, 2008Assignee: Thermo NITON Analyzers LLCInventor: Lee Grodzins
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Patent number: 7391509Abstract: An analytical microscope provides both UV fluorescence imaging and spectroscopic analysis of a sample with use of the same light collection element (objective lens or other optical element). An incident UV light beam travels to the sample via a dark field illumination path about the periphery of the collection lens, with the collection lens then collecting the emitted light from the sample and forwarding it to an eyepiece and/or camera for viewing. The sample is also illuminated with a laser through the collection lens to generate Raman emissions, which are then collected through the same collection lens and provided to a spectrograph for wavelength identification. Use of the same collection lens for both imaging and spectroscopic analysis better ensures that any imaged regions of interest on the sample are the same as those being spectroscopically analyzed.Type: GrantFiled: February 2, 2006Date of Patent: June 24, 2008Assignee: Thermo Electron Scientific Instruments LLCInventors: Francis J. Deck, Mark H. Wall, Joe Hodkiewicz
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Patent number: 7391510Abstract: An inspection system operative to inspect patterned devices having microscopic conductors, the system comprising a camera viewing a location of a candidate defect on a patterned substrate and acquiring thereat at least one image of the location, the camera defining an optical axis, the at least one image being illuminated by at least one illumination offset from the optical axis, the illumination being supplied along at least first and second axes of illumination that are mutually non-parallel in a plane corresponding to a plane of the patterned substrate, wherein a response to the illumination supplied along the first axis is differentiable from a response to the illumination supplied along the second axis and a defect classifier operative to receive the at least one image and to distinguish therewithin a candidate defect caused by a cut or a candidate defect caused by excess material, from one another and/or from other types of candidate defects.Type: GrantFiled: January 26, 2006Date of Patent: June 24, 2008Assignee: Orbotech LtdInventors: Raphael Ben-Tulila, Emil Berladsky, Ilya Leizerson, Ofer Saphier
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Patent number: 7391511Abstract: A Raman signal-enhancing structure includes a substrate and a plurality of protrusions located at predetermined positions relative to a surface of the substrate. Each protrusion includes a Raman signal-enhancing material and has cross-sectional dimensions of less than about 50 nanometers. The structure also includes an edge that includes an intersection between two nonparallel surfaces of at least one protrusion. A Raman spectroscopy system includes such a Raman signal-enhancing structure, and Raman spectroscopy may be performed on an analyte using such structures and systems. A method for forming such a Raman signal-enhancing structure includes nanoimprint lithography.Type: GrantFiled: January 31, 2007Date of Patent: June 24, 2008Assignee: Hewlett-Packard Development Company, L.P.Inventors: Alexandre M. Bratkovski, Shih-Yuan Wang, Zhiyong Li
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Patent number: 7391512Abstract: An optoelectronic system for measuring fluorescence or luminescence emission decay, including (a) a light source being a light emitting diode, a semiconductor laser or a flash tube; (b) a first integrated circuit comprising at least one circuit causing the light source to emit light pulses towards a sample which causes a fluorescence or luminescence emission from the sample; (c) a photodiode detecting the emission; (d) a second integrated circuit comprising a detection analysis system determining information about the sample by analyzing decay of the detected emission; and (e) an enclosure enclosing the light source, the first integrated circuit, the second integrated circuit and the photodiode.Type: GrantFiled: December 22, 2004Date of Patent: June 24, 2008Assignee: Avago Technologies General IP Pte. Ltd.Inventors: Julie E Fouquet, Ian Hardcastle, Rene P Helbing, Annette C. Grot, John Francis Petrilla