Patents Issued in September 25, 2008
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Publication number: 20080231819Abstract: A method of displaying an image for a document projector is disclosed. The method includes capturing the image of an object to get an input image; generating a frame; overlapping the frame and the input image, wherein the frame separates the input image into an emphasized area and a not-emphasized area to form an output image; and displaying the output image.Type: ApplicationFiled: October 11, 2007Publication date: September 25, 2008Applicant: AVERMEDIA TECHNOLOGIES, INC.Inventors: Yung-Che Chang, Chih-Ming Chen, Lien-Kai Chou, Yung-Hsi Wu
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Publication number: 20080231820Abstract: A contamination prevention system constructed and arranged to prevent material emanating from a radiation source from propagating with radiation from the radiation source into or within a lithographic apparatus. The contamination prevention system includes a channel barrier constructed and arranged to traverse the radiation from the radiation source. The channel barrier includes a plurality of elongated channel members constructed and arranged to absorb or deflect the material. The channel members are rotatable around an axis of rotation by a drive connected to the channel barrier. The contamination prevention system also includes a cooling system provided on an outer surface of the channel barrier.Type: ApplicationFiled: March 23, 2007Publication date: September 25, 2008Applicant: ASML Netherlands B.V.Inventor: Arnoud Cornelis Wassink
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Publication number: 20080231821Abstract: An exposure method of a semiconductor device includes the steps of: providing a wafer on which a photoresist is coated; rotating and aligning a reticle and the wafer so that a swing direction of a light source passing through the reticle is identical to a direction of a word line formed on the wafer; and performing an exposure process employing a polarized light source of an X direction, the polarized light source being generated by passing the light source through a dipole X-illumination systemType: ApplicationFiled: June 28, 2007Publication date: September 25, 2008Applicant: HYNIX SEMICONDUCTOR INC.Inventor: Jong Hoon Kim
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Publication number: 20080231822Abstract: An immersion lithography tool with a diverter element, positioned between the immersion element and the substrate, for altering the “footprint” or shape of the meniscus of the body of immersion liquid between the last optical element and an immersion element on one side, and the substrate on the other side when the substrate is moved. The apparatus includes a substrate holder to hold the substrate having an imaging surface and a projection optical system having a last optical element. The projection optical system projects an image onto a target imaging area on the substrate through the immersion liquid filled in a gap between the imaging surface of the substrate and the last optical element. An immersion element maintains the immersion fluid in the gap. The diverter element is positioned between the immersion element and the substrate.Type: ApplicationFiled: March 10, 2008Publication date: September 25, 2008Applicant: NIKON CORPORATIONInventors: Alex Ka Tim Poon, Leonard Wai Fung Kho, Gaurav Keswani, Derek Coon
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Publication number: 20080231823Abstract: A stage assembly includes a workpiece table that supports the workpiece adjacent to an optical assembly. An environmental system supplies and removes immersion liquid to and from a space between the workpiece and the optical assembly to form an immersion area. The environmental system has a lower surface disposed opposite from an upper surface of the workpiece and/or the workpiece table. The lower surface is spaced a first distance from the workpiece and/or the workpiece table to form a meniscus at a periphery of the immersion area. An edge member is provided on the environmental system and extends past the lower surface of the environmental system so that a lower portion of the edge member is spaced a second distance, smaller than the first distance, from the upper surface of the workpiece and/or the workpiece table at a position beyond the periphery of the immersion area.Type: ApplicationFiled: March 19, 2008Publication date: September 25, 2008Applicant: NIKON CORPORATIONInventors: Alex Ka Tim Poon, Leonard Wai Fung Kho, Gaurav Keswani, Derek Coon, Yasufumi Nishii
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Publication number: 20080231824Abstract: An exposure apparatus comprises a recovery member that recover a liquid. The recovery ability with which the recovery member recovers the liquid differs in accordance with the region of the recovery member.Type: ApplicationFiled: May 8, 2008Publication date: September 25, 2008Applicant: NIKON CORPORATIONInventor: Hiroyuki Nagasaka
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Publication number: 20080231825Abstract: An exposure apparatus includes an optical element via which a patterned beam is projected onto a substrate through exposure liquid filled in a space between the optical element and the substrate. The apparatus also includes a member having a flow passage in which exposure liquid flows, the flow passage being in fluidic communication with the space. The apparatus also includes a cleaning system which cleans the member.Type: ApplicationFiled: May 15, 2008Publication date: September 25, 2008Applicant: NIKON CORPORATIONInventors: Naoyuki Kobayashi, Akikazu Tanimoto, Yasushi Mizuno, Kenichi Shiraishi, Katsushi Nakano, Soichi Owa
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Publication number: 20080231826Abstract: A device manufacturing method comprising applying patterns to a plurality of arrays of individually controllable elements, such that they modulate a beam of radiation, and projecting the modulated beam of radiation onto a substrate. The patterns applied to the arrays of individually controllable elements are arranged such that pre-determined amounts of background radiation are included in the modulated beam of radiation. The pre-determined amounts of background radiation being different for different locations on the arrays.Type: ApplicationFiled: March 22, 2007Publication date: September 25, 2008Applicant: ASML Netherlands B.V.Inventors: Paul Antoon Cyriel Desmedt, Patricius Aloysius Jacobus Tinnemans, Minne Cuperus
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Publication number: 20080231827Abstract: The invention relates to a hand-held measuring device (1a), comprising at least one rangefinder, embodied with integration of a positional detection component such that the positional detection component records the position (GP1,GPn) of the measuring device (1a) and the orientation of the rangefinder for each rangefinder measurement, whereby an automatically-controlled sequence of rangefinder measurements with corresponding positions (GP1,GPn) and orientations may be generated. All rangefinder measurements are recorded and correlated as field points (AP1,APn) in the form of a trace (SP) by means of said linked recording, such that complex calculations, such as for example, the measurement of inaccessible objects or the determination of the planarity of a surface are possible.Type: ApplicationFiled: December 7, 2005Publication date: September 25, 2008Applicant: LEICA GEOSYSTEMS AGInventor: Knut Siercks
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Publication number: 20080231828Abstract: The invention is based on a piece of distance measuring equipment, particularly a laser rangefinder (10) in the form of a hand-held appliance, having a lead frame unit (18) and an electrooptical unit (20, 26) which comprises a transmission or reception unit (22, 28) and a lens support unit (24, 30, 62). It is proposed that the lens support unit (24, 30, 62) be supported by the lead frame unit (18).Type: ApplicationFiled: June 26, 2006Publication date: September 25, 2008Inventors: Uwe Skultety Betz, Bjoern Haase, Joerg Stierle, Peter Wolf, Cedric Pahud, Kai Renz
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Publication number: 20080231829Abstract: Embodiments of an arm-worn rangefinder device includes a rangefinder body and a switch. The rangefinder body is shaped for coupling to a user's arm and has an electronic rangefinder circuit operable to emit an energy beam directed at a selected target, to receive a reflected beam from the target, and to calculate the target's approximate range based on properties of the reflected beam and indicate the calculated approximate range to the user. The switch is coupled to the rangefinder body, and the user can use the switch to selectively actuate the rangefinder circuit.Type: ApplicationFiled: May 22, 2008Publication date: September 25, 2008Inventors: Thomas Hinchliff, Michael Pfau
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Publication number: 20080231830Abstract: An electric optical distance meter is provided that makes an input power level of a reference light entering a light receiving device via an internal optical path comparable between low and high reflectivity targets.Type: ApplicationFiled: January 3, 2008Publication date: September 25, 2008Applicant: SOKKIA CO., LTD.Inventor: Futoshi OSADA
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Publication number: 20080231831Abstract: A first ranging apparatus includes a synchronizing signal generator for generating a synchronizing signal at a constant interval, a light-emitting unit for emitting an intensity-modulated light in response to the synchronizing signal input thereto, a light-detecting unit for detecting a reflected light from an object irradiated with the modulated light, in response to the synchronizing signal input thereto, a calculating unit for calculating the distance up to the object based on the phase difference between the modulated light and the reflected light, and a synchronizing signal control unit for changing an arrival time of the synchronizing signal from the synchronizing signal generator at the light-detecting unit, depending on the number of times that the synchronizing signal is generated. The light-detecting unit samples the amount of the reflected light in exposure periods established at a constant cycle length with reference to a time at which the synchronizing signal is input thereto.Type: ApplicationFiled: March 22, 2008Publication date: September 25, 2008Applicant: FUJIFILM CORPORATIONInventors: Tomonori MASUDA, Youichi SAWACHI
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Publication number: 20080231832Abstract: A first ranging apparatus includes a light emitter for emitting a modulated light which is intensity-modulated, a light detector for detecting a reflected light from an object that is irradiated with the modulated light, a distance calculator for calculating the distance up to the object based on the phase difference between the modulated light and the reflected light, and a gate controller. The gate controller outputs gate pulses to control a light emission controller to intermittently emit the modulated light to the object and also control an electrooptical shutter or an electronic shutter of an image capturing device to intermittently detect the reflected light from the object based on the intermittent emission of the modulated light.Type: ApplicationFiled: March 22, 2008Publication date: September 25, 2008Applicant: FUJIFILM CORPORATIONInventor: Youichi SAWACHI
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Publication number: 20080231833Abstract: An apparatus for determining location of at least one inclusion in a gemstone having a first refractive index, comprising: a container adapted for containing a material having a second refractive index, a holder operative to support a gemstone in the material when the container contains the material; an illuminator positioned and adapted to illuminate said gemstone when disposed within said material in said container, with illumination at which said gemstone and said material have their respective first and second indices; a detector that detects illumination from the illuminated gemstone and said material and produces signals responsive thereto; a controller that receives the signals and is operative to determine a location of an inclusion in the gemstone based on the signals; and a system, operative to reduce the presence within said material, at least when the gemstone is disposed therein, of any substance other than inclusions, having a third refractive index.Type: ApplicationFiled: February 21, 2008Publication date: September 25, 2008Applicant: Galatea Ltd.Inventors: Haim Shlezinger, Ran Ziskind, Gabi Horowitz, Michael Eroshov, Adam Devir, Dan Sheffer
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Publication number: 20080231834Abstract: The present invention includes a microscope and a method for using the microscope for single molecule with reduced photobleaching of a fluorophore (20) that includes a light translucent material (16); a metal layer (18) disposed on the light translucent material (16); a medium (15) disposed on the metal layer (18), the medium (15) having one or more fluorophores (20) capable of binding a target analyte (e.g.Type: ApplicationFiled: January 22, 2008Publication date: September 25, 2008Applicant: University of North Texas Health Science Center at Fort WorthInventors: Zygmunt Gryczynski, Ignacy Gryczynski, Nils Calander, Julian Borejdo
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Publication number: 20080231835Abstract: The present invention relates to a method and system for detecting and mapping three-dimensional information pertaining to one or more target objects. More particularly, the invention consists of selecting one or more target objects, illuminating the one or more target objects using a first light source and capturing an image of the one or more target objects, then, illuminating the same one or more target objects using a second light source and capturing an image of the one or more target objects and lastly calculating the distance at the midpoint between the two light sources and the one or more target objects based on the decay of intensities of light over distance by analyzing the ratio of the image intensities on a pixel by pixel basis.Type: ApplicationFiled: March 23, 2007Publication date: September 25, 2008Inventor: Keigo Iizuka
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Publication number: 20080231836Abstract: A fuel cell (9) includes a removable and replaceable fuel supply (12) having fuel disposed therein. A system for monitoring various parameters of the fuel such as temperature, pressure, and the levels of dissolved oxygen is provided. A plurality of sensors (30) is disposed on the fuel supply side that is capable of communicating with a controller (18) and memory (13) on the fuel cell side. In another embodiment, at least one sensor for measuring a system parameter of the fuel communicates with an RFID tag (50) either remotely or via a hardwired link. The sensor and/or the RFID tag may be coated with a substance impervious to the caustic fuel. An RFID reader station collects the data. The controller may be included to use the data in real time to alter system parameters, such as fuel pumping rates or a bleed off, or to trigger a signal, such as to notify a user of an empty fuel supply. In another embodiment, an optical sensor (61, 102) may be used.Type: ApplicationFiled: July 28, 2006Publication date: September 25, 2008Applicant: Societe BICInventors: Andrew J. Curello, Charles Loonis, Hung T. Than, Michael Curello, Floyd Fairbanks
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Publication number: 20080231837Abstract: An apparatus includes a material in a resonator and containing systems, each of the systems having five energy states, a unit generating first and second pulse that resonate in a second transition and a third transition, respectively, a unit controlling the first and second pulse to make the first and second pulse temporally overlap each other to obtain third light, a unit emitting the third light to each system, a unit generating observation light to be coupled to the resonator mode, a unit introducing the observation light to the resonator from an outside thereof, a unit reading one of quantum bits by measuring an intensity of one of reflected light and transmitted light of the observation light, a unit controlling the first and second pulse to make the first and second pulse temporally overlap each other to obtain fourth light, and a unit emitting the fourth light to each system.Type: ApplicationFiled: March 11, 2008Publication date: September 25, 2008Inventors: Kouichi ICHIMURA, Hayato Goto
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Publication number: 20080231838Abstract: A detection sensor to detect a receiving position of laser light according to the present invention includes a pair of light receiving element arrays (11X and 11Y), wherein adjacent light receiving elements (PDXi) are positioned as spaced equidistantly from one another and are mutually connected via a resistor (RXj), and wherein the output lines (11a and 11b) are respectively connected to the light receiving elements that are present at both ends of the respective light receiving element arrays (11X and 11Y). The light receiving element arrays (11X and 11Y) configure a composite array wherein the light receiving elements of a first light receiving element array are respectively positioned between the mutually adjacent light receiving elements of a second light receiving element array.Type: ApplicationFiled: March 19, 2008Publication date: September 25, 2008Inventor: Yasutaka Katayama
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Publication number: 20080231839Abstract: A power-saving control method in a laser measuring system, which comprises a laser rotary irradiation device for forming a laser reference plane by projecting a laser beam in rotary irradiation and a photodetection device for carrying out position measurement by receiving the laser beam, comprising a step of detecting using status of the photodetection device by the photodetection device, a step of selecting steady operation or power-saving mode based on the detection of using status, a step of transmitting a power-saving mode transition instruction to the laser rotary irradiation device by the photodetection device when the power-saving mode is selected, a step of receiving the power-saving mode transition instruction by the laser rotary irradiation device, and a step of executing power-saving control.Type: ApplicationFiled: February 27, 2008Publication date: September 25, 2008Inventors: Takaaki Yamazaki, Yasutaka Katayama
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Publication number: 20080231840Abstract: Methods and apparatus for measuring wavefronts and for determining scattered light, and related devices and manufacturing methods. 2.1. The invention relates to a method and apparatus for spatially resolved wavefront measurement on a test specimen, a method and apparatus for spatially resolved scattered light determination, a diffraction structure support and a coherent structure support therefor, and also to an objective or other radiation exposure device manufactured using such a method, and an associated manufacturing method. 2.2.Type: ApplicationFiled: March 17, 2006Publication date: September 25, 2008Applicant: CARL ZEISS SMT AGInventors: Wolfgang Emer, Helmut Haidner, Ulrich Wegmann
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Publication number: 20080231841Abstract: An FTIR measurement is conducted on a background gas to obtain a single beam spectrum SB(BG) [C] and a synthetic single beam spectrum SSB(BG)[D], and an FTIR measurement is conducted on a sample gas to obtain a single beam spectrum SB(Samp)[E] and a synthetic single beam spectrum SSB(Samp)[F].Type: ApplicationFiled: March 18, 2008Publication date: September 25, 2008Inventors: Satoshi NITTA, Yoshihiro Osawa
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Publication number: 20080231842Abstract: An optical time domain reflectometer (OTDR) operates in a gated mode, enabling a predetermined width of an optical fiber to be analyzed. The OTDR may test only a desired position on the fiber. Data obtained along different lengths of the fiber may be combined together, providing a thorough representation of the fiber characteristics. Alternatively, specific regions of the fiber may be analyzed. The OTDR measures the backscattered signal using photon-counting techniques, and improves the accuracy of such algorithms by attenuating the incoming backscattering signals automatically and independently at each position in the fiber being tested. The OTDR simultaneously achieves a high dynamic range and a high temporal/spatial resolution, an improvement over conventional OTDRs.Type: ApplicationFiled: December 19, 2007Publication date: September 25, 2008Inventor: Jurgen Brendel
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Publication number: 20080231843Abstract: An identification apparatus for identifying an optical passive device product. The apparatus includes an optical input output monitor section for monitoring an optical input and an optical output of the optical passive device product respectively; a loss calculation section for calculating a loss in the optical passive device product based on a monitoring result of the optical input output monitor section; and a product identification section in which product information indicating a correspondence between a loss characteristic and a product has been stored in advance, and which identifies the optical passive device product by comparing the stored product information and the loss calculated by the loss calculation section.Type: ApplicationFiled: March 7, 2008Publication date: September 25, 2008Applicant: Fujitsu LimitedInventors: Tatsuo NAGAYOSHI, Akira YAMAMOTO, Katsumi SUGAWA, Makoto OHTOU, Takuji MAEDA
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Publication number: 20080231844Abstract: In one embodiment the present invention provides for a method for checking the alignment of a stator core that comprises placing a laser source 14 and a target 18 a given distance apart on a stator core 10 and activating the laser such that the laser strikes the target. Then measuring on the target where the laser strikes, and interpreting the measurement to determine any misalignment of the stator core in the given distance.Type: ApplicationFiled: June 6, 2008Publication date: September 25, 2008Applicant: SIEMENS POWER GENERATION, INC.Inventors: James Allan Cook, Thomas M. Majernik
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Publication number: 20080231845Abstract: A method for inspecting a region, including irradiating the region via an optical system with a pump beam at a pump wavelength. A probe beam at a probe wavelength irradiates the region so as to generate returning probe beam radiation from the region. The beams are scanned across the region at a scan rate. A detector receives the returning probe radiation, and forms an image of the region that corresponds to a resolution better than pump and probe Abbe limits of the optical system. Roles of the pump and probe beams may be alternated, and a modulation frequency of the pump beam may be changed, to produce more information.Type: ApplicationFiled: December 6, 2007Publication date: September 25, 2008Inventors: Dan Grossman, Moshe Langer, Roman Kris, Silviu Reinhorn, Ron Naftali, Haim Feldman
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Publication number: 20080231846Abstract: A level detection apparatus includes an illumination slit in which a rectangular first opening which causes illumination light to pass is formed, an optical system configured to illuminate a target object surface by illumination light passing through the illumination slit and focuses reflected light from the target object surface, first and second detection slits which are arranged in front of and in back of a focal point and in each of which a second opening is formed such that a short side of a rectangle is shorter than a short side of a illumination slit image formed by the illumination slit and a long side of the rectangle is larger than a long side of the illumination slit image, first and second light amount sensors configured to detect amounts of light of the reflected lights passing through the first and second detection slits, and a calculating unit configured to calculate a level of the target object surface based on outputs from the first and second light amount sensors.Type: ApplicationFiled: February 14, 2008Publication date: September 25, 2008Applicant: Advanced Mask Inspection Technology, Inc.Inventor: Riki OGAWA
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Publication number: 20080231847Abstract: An optoelectronic sensor device is described for recording of soiling on a transparent cover, with at least one light source that emits at least two light beams, a test surface arranged in the cover, having a concave surface exposed to environmental effects, through which the light beams emerge and reenter, as well as at least one receiver that measure the radiation powers of the light beams, on which the light beams are imaged independently of each other after reentry.Type: ApplicationFiled: March 21, 2008Publication date: September 25, 2008Applicant: odelo GmbHInventor: Bernd Mack
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Publication number: 20080231848Abstract: A frictional pivot 100 for use in a device measuring gravitational alignment is provided. The frictional pivot 100 comprises a gravity-responsive directional means 200 for indicating a datum direction of alignment with gravity; frictional pivoting means 300, 400 for allowing the gravity-responsive means coarsely to align with gravity; vibration means 303, 403 for vibrating one or more elements of the pivoting means; and portable power means 303a for powering the vibration means 303, 403.Type: ApplicationFiled: February 18, 2005Publication date: September 25, 2008Inventor: Nigel Emlyn Williams
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Publication number: 20080231849Abstract: A gas sensor uses optical interferents in a porous thin film cell to measure the refractive index of the pore medium. As the medium within the pores changes, spectral variations can be detected. For example, as the pores are filled with a solution, the characteristic peaks exhibit a spectral shift in one direction. Conversely, when tiny amounts of gas are produced, the peaks shift in the opposite direction. This can be used to measure gas evolution, humidity and for applications for other interferometric-based sensing devices.Type: ApplicationFiled: December 23, 2004Publication date: September 25, 2008Inventors: Michael L. Myrick, Paul G. Miney, Maria V. Schiza
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Publication number: 20080231850Abstract: A frequency resolution for measuring transmission characteristics of a device under test is increased. With a measuring device including a first terahertz light generator that generates incident light, a second terahertz light generator that generates reference light having an optical frequency f1?f2?fIF different from an optical frequency f1?f2 of the incident light by a constant difference frequency fIF, a terahertz light detector which outputs an light detection signal having the difference frequency fIF based on response light obtained by making the incident light incident to an optical fiber and the reference light, and a network analyzer that receives the light detection signal, thereby measuring characteristics of the optical fiber, a spectrum of the incident light (terahertz light) incident to the optical fiber includes the carrier frequency (f1?f2), but does not include sideband frequencies (f1?f2±fIF). It is thus possible to reduce the effective spectrum width of the incident light.Type: ApplicationFiled: September 4, 2006Publication date: September 25, 2008Applicant: ADVANTEST CORPORATIONInventors: Tomoyu Yamashita, Eiji Kato
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Publication number: 20080231851Abstract: Systems and methods for authentication of materials used in imaging members and assemblies. Authentication of imaging materials ensure that compatible components are being used with the imaging members and assemblies. Embodiments provide a system and method for efficiently detecting whether materials being used in the imaging members and assemblies are compatible and authentic materials authorized for such uses.Type: ApplicationFiled: March 21, 2007Publication date: September 25, 2008Applicant: Xerox CorporationInventors: David H. Pan, Santokh S. Badesha, Randall R. Hube
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Publication number: 20080231852Abstract: A broadband light source with a sufficiently long coherence length is impinged on the optical cavity. The broadband laser light reflects from the first and second surfaces of the cavity. The two light beams, either reflected or transmitted, are phase shifted from one another by an amount proportional to the optical path length of the cavity and inversely proportional to the wavelength of the light (4?nd/?) The two light beams interfere with each other and form a modulated light beam that has a spectrum approximately like the laser's broadband spectrum multiplied by a cosine with a frequency 4?nd/?. The modulated light beam is coupled to a spectrometer that measures the intensity of the light as a function of wavelength over a range of wavelengths. The Fourier transform of the spectrum contains a peak that is related to the OPL and is located at 2*n*d where n*d is the OPL.Type: ApplicationFiled: October 19, 2007Publication date: September 25, 2008Applicant: Board of Regents, The University of Texas SystemInventors: Chih-Kang Shih, Christopher Frank Wieland, Edward Bradstreet Flagg
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Publication number: 20080231853Abstract: A system for the qualitative analysis of an agricultural product comprises a scanning cell (1) for the transmittance of a sample of an agricultural product, means for the emission of a quantity of light (6) and means for the detection of a quantity of light (5,50), at least one optical sensor (9,90) and a remote control unit (10) connected to the above mentioned at least one optical sensor (9,90). The system is characterized by the fact that means for the detection of a quantity of light (5) are mounted in a mobile manner on said cell (1) and arranged frontally to said means of emission of a quantity of light (6), in such a way that the distance between said means of emission (6) and said means of detection (5) can be altered.Type: ApplicationFiled: September 22, 2006Publication date: September 25, 2008Applicant: UNIVERSITA DEGLI STUDI DI PADOVAInventor: Paolo Berzaghi
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Publication number: 20080231854Abstract: An apparatus for determining the particle size and/or particle shape of a mixture of particles is provided, comprising a feeding device, which passes the mixture of particles through a zone of measurement as a particle flow; an illumination module, which generates illumination beams and illuminates the zone of measurement with them; a detection module comprising two cameras, each recording an area of the zone of measurement assigned to the respective camera, said cameras recording the areas with different magnifications, and comprising an evaluating module, which determines the particle size and/or particle shape on the basis of the recordings of the cameras, characterized in that the illumination module is provided such that it illuminates the two areas with different intensities.Type: ApplicationFiled: March 19, 2008Publication date: September 25, 2008Applicant: JENOPTIK Laser, Optik, Systeme GmbHInventors: Ruediger Seifert, Ernst Gaertner, Frank Reichel, Erhard Dammann
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Publication number: 20080231855Abstract: This method comprises the steps of transmitting a beam of light onto a surface (17) of an element (1) comprising a fissile material, passing the beam of light reflected by the surface into a polarisation analyser (27) having a modifiable analysis direction, transmitting the beam from the polarisation analyser (27) to a device (31) for acquiring digital images, acquiring at least one digital image (31) of the surface (17) of the element (1) and processing the digital image acquired in order to measure the anisotropy. Use, for example, in controlling particles of nuclear fuel for an HTR/VHTR type reactor.Type: ApplicationFiled: March 16, 2006Publication date: September 25, 2008Applicants: Areva NP, Commissariat A L'Energie AtomiqueInventors: Gregory Maveyraud, Jean-Marie Vallerot, Xavier Bourrat, Olivier Dugne
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Publication number: 20080231856Abstract: A substrate inspection method includes forming a conductive thin film on a surface of an inspection target substrate with a pattern formed thereon, generating an electron beam and irradiating the substrate having the thin film formed thereon with the electron beam, detecting at least any of secondary electrons, reflected electrons and backscattered electrons released from the surface of the substrate and outputting signals constituting an inspection image, and selecting at least any of a material, a film thickness and a configuration for the thin film, or at least any of a material, a film thickness and a configuration for the thin film and an irradiation condition with the electron beam according to an arbitrary inspection image characteristic so that an inspection image according to an inspection purpose can be obtained.Type: ApplicationFiled: March 21, 2008Publication date: September 25, 2008Inventor: Ichirota NAGAHAMA
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Publication number: 20080231857Abstract: A sensor system for detection of a gaseous chemical substance is provided, which includes an optical sampling cell holding a sampling chamber of a volume of at most 20 mm3, a light emitter and a light receiver. The sampling cell is adapted for free-space, single monomodal propagation of the light beam. With the sensor system, high sensitivity is obtained by elimination of interferometric noise.Type: ApplicationFiled: March 11, 2008Publication date: September 25, 2008Inventors: Christian Depeursinge, Daniel Salzmann
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Publication number: 20080231858Abstract: A printing device includes a light input unit that inputs light fluxes emitted from a light source to a measurement-target surface of a print medium on which an image is printed at a predetermined incidence angle, an image pickup unit that picks up an image of the measurement-target surface by collecting reflection light fluxes, which are reflected from the measurement-target surface of the print medium within a predetermined range of reflection angles, for the light fluxes input by the light input unit, receiving the collected light fluxes using a plurality of light receiving elements, and performing a photoelectric conversion process for the light fluxes received by the plurality of light receiving elements, and a measurement-target surface status value calculating unit that calculates a status value of the measurement-target surface representing a status relating to appropriateness or inappropriateness of the measurement-target surface of the print medium for printing based on image data having luminance iType: ApplicationFiled: March 18, 2008Publication date: September 25, 2008Applicant: SEIKO EPSON CORPORATIONInventor: Naoki KAYAHARA
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Publication number: 20080231859Abstract: A photodetection device, a photodetection method, an image sensor and an image pickup method can increase the number of pixels, while suppressing degradation of the S/N ratio. The photodetection device includes a spectroscopic element formed by means of an optical microresonator having a plurality of resonant wavelength bands differentiated by positions as a function of a geometric structure and a plurality of photoelectric conversion elements arranged at different positions to detect light of the plurality of resonant wavelength bands.Type: ApplicationFiled: March 18, 2008Publication date: September 25, 2008Applicant: CANON KABUSHIKI KAISHAInventor: Masaya Ogino
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Publication number: 20080231860Abstract: A method for measuring the velocity of a multiphase fluid flowing in a pipe. The method comprises directing at least two collimated beams of light from an illuminator through the multiphase fluid by transparent portions of the pipe. The at least two collimated beams are spaced apart in a direction of flow of the multiphase fluid by a predetermined distance. The method also includes detecting scattered, deflected and attenuated light with at least two photodetectors to produce at least two signals. The at least two photodetectors are associated with the at least two collimated beams. The method also includes calculating a cross-correlation function between the at least two signals to determine a time delay between the signals and calculating the average velocity of the multiphase fluid by taking the ratio of the predetermined distance to the time delay.Type: ApplicationFiled: November 16, 2004Publication date: September 25, 2008Inventor: Ivan Melnyk
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Publication number: 20080231861Abstract: The invention relates to a polarization maintaining optical delay circuit (1) for providing a time delay to an incident light (S1), comprising an optical directional element (11) adapted for directing an incident light (S1) from a first port (111) to a second port (112) and directing a returning light from the second port to a third port (113), a mirror element (12) adapted for reflecting the incident light (S1), thereby changing the polarization state, so that the returning light (S2) has a substantially orthogonal polarization state compared to the polarization state of the incident light (S1), and an optical waveguide (13) adapted for optically connecting the second port (112) of the optical directional element (11) and the mirror element (12). The invention also relates to a ring cavity (2,3) comprising such an optical delay circuit, and an optical interferometer (4,5) with said optical delay circuit.Type: ApplicationFiled: August 24, 2005Publication date: September 25, 2008Applicant: AGILENT TECHNOLOGIES, INC.Inventor: Bernd Nebendahl
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Publication number: 20080231862Abstract: A device and method for the interferometric measurement of phase masks, particularly from lithography. Radiation passing through a coherence mask is brought to interference by a diffraction grating. A phase mask is arranged in or near the pupil plane of the first imaging optics which can be positioned exactly in the x-y direction by which interferograms are generated which are phase-shifted in the x-y direction by translational displacement of the coherence mask or of the diffraction grating. The interferograms are imaged onto the spatially resolving detector by second imaging optic and the phase and transmission functions of the phase mask are determined by an evaluation unit. The invention can, of course, generally be applied to planar phase objects, such as biological structures, for example, points of establishment with respect to an interference microscope.Type: ApplicationFiled: August 31, 2006Publication date: September 25, 2008Applicant: CARL ZEISS SMS GMBHInventors: Helmut Haidner, Ulrich Wegmann
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Publication number: 20080231863Abstract: A fabrication cluster can be controlled using optical metrology. A fabrication process is performed on a wafer using a fabrication cluster. A photonic nanojet, an optical intensity pattern induced at a shadow-side surface of a dielectric microsphere, is generated. An inspection area on the wafer is scanned with the photonic nanojet. A measurement is obtained of the retroreflected light from the dielectric microsphere as the photonic nanojet scans the inspection area. The existence of a structure in the inspection area is determined with the obtained measurement of the retroreflected light. One or more process parameters of the fabrication cluster is adjusted based on the determination of the existence of the structure in the inspection area.Type: ApplicationFiled: March 20, 2007Publication date: September 25, 2008Applicant: Tokyo Electron LimitedInventors: Zhigang Chen, Hanyou Chu, Shifang Li, Manuel Madriaga
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Publication number: 20080231864Abstract: A method of measuring and storing a center of rotation of a nozzle in a pick and place machine is provided. The method includes coupling an artifact to the nozzle. A substantially collimated laser beam is directed at the artifact, which is rotated while the collimated laser beam is energized. Edges of a shadow cast by the rotating artifact are detected and used to calculate error of a coordinate of the center of rotation of the nozzle. A coordinate of the center of rotation of the nozzle is calculated based upon a previous coordinate of the center of rotation and the error. The calculated coordinate of the center of rotation is stored for subsequent measurements.Type: ApplicationFiled: March 20, 2008Publication date: September 25, 2008Inventors: David M. Kranz, David W. Duquette, Matthew W. Dawson
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Publication number: 20080231865Abstract: The invention relates to a method for the quantitative determination of surface properties, wherein a spatially resolved image of a surface to be analysed, which contains a large number of measured values, is recorded. In a first method step, the measured values are analysed in order to determine those surface areas which have a specific physical property. A result value of this physical property is then determined, wherein this result value is characteristic of the values of the physical property of all those surface areas of the image determined by analysing the image. According to the invention, in addition to the result value, a further value (B) characteristic of the surface is determined and this characteristic value is displayed together with the result value (I).Type: ApplicationFiled: March 21, 2008Publication date: September 25, 2008Inventors: Peter Schwarz, Konrad Lex
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Publication number: 20080231866Abstract: A number of wafer center finding methods and systems are disclosed herein that improve upon existing techniques used in semiconductor manufacturing.Type: ApplicationFiled: February 15, 2008Publication date: September 25, 2008Inventor: Paul E. Fogel
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Publication number: 20080231867Abstract: The present invention relates to a positioning device, and in particular to a mechanism using an image detecting module. The present invention comprises a base having an image detecting module, a control circuit, and a driving module therein. The base has a rotateable plate on the base for carrying an object. The base further has a light pervious area for receiving a light beam coming from a remote control. A convex reflector is located within the base to reflect the image to the image detecting module.Type: ApplicationFiled: April 27, 2007Publication date: September 25, 2008Applicant: KYE SYSTEMS CORP.Inventor: Yu-Qi Wang
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Publication number: 20080231868Abstract: An image processing apparatus includes a driver control unit configured to perform processing relating to uninstallation or updating of a driver associated with a device, and a relay unit configured to switch a storage destination of device configuration information which has been transmitted from the device associated with the driver to another storage destination in response to switch information, and to store the device configuration information in the other storage destination.Type: ApplicationFiled: March 17, 2008Publication date: September 25, 2008Applicant: CANON KABUSHIKI KAISHAInventor: Takahiro Onsen