Patents Issued in December 4, 2008
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Publication number: 20080297710Abstract: A system for displaying images is provided including a liquid crystal display panel. The liquid crystal display panel has a plurality of sub-pixels, each defined between two adjacent data lines extending along a vertical direction and two adjacent scan lines extending along a horizontal direction. The liquid crystal display panel comprises a transparent bottom electrode on the data lines, and a transparent top electrode on the transparent bottom electrode, wherein the transparent top electrode has an extended portion at a corner of the sub-pixel, extending along the horizontal direction to overlap at least a portion of the data line.Type: ApplicationFiled: May 29, 2008Publication date: December 4, 2008Applicant: TPO Displays Corp.Inventors: Su-Jung HSU, Shao-Wu Hsu
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Publication number: 20080297711Abstract: In a conventional manufacturing process where the number of manufacturing processes is reduced to form a semiconductor layer of a channel etch-type insulating gate-type transistor and source-drain wires in one photographic etching processing using half-tone exposure technology, the manufacturing margin is narrow, lowering the yield if the distance between the source and the drain wire shortens.Type: ApplicationFiled: July 30, 2008Publication date: December 4, 2008Inventor: Kiyohiro Kawasaki
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Publication number: 20080297712Abstract: An IPS-LCD device includes TFT and CF (color filter) substrates sandwiching therebetween an LC layer, first and second polarizing films sandwiching therebetween the pair of substrates, an optical compensation film having a negative single-axis optical anisotropy and sandwiched between the TFT substrate and the first polarizing film, and a second optical compensation film having a two-axis optical anisotropy and sandwiched between the CF substrate and the second polarizing film. The retardation I1 of the first optical compensation film and the retardation I2 of the second optical compensation film satisfy the following relationships: either 240 nm?I1?425 nm; and 200 nm?I2?(0.75×I1+61)nm, or 500 nm?I1?730 nm; and (0.60×I1?272)nm?I2?1830 nm.Type: ApplicationFiled: July 1, 2005Publication date: December 4, 2008Inventors: Hiroshi Nagai, Hidenori Ikeno
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Publication number: 20080297713Abstract: A circuit signal connection interface, a manufacturing method thereof, and an electronic device using the same are provided. The circuit signal connection interface includes a first signal line and a second signal line juxtaposed to each other, an insulation layer, and a first conductive pad. The first conductive pad electrically connects to the first signal line, and crosses the second signal line. The insulation layer is disposed between the second signal line and the first conductive pad. The electronic device further includes a circuit device including a first conducting bump and a second conducting bump connected to each other in a parallel manner. The first conducting bump electrically connects to a first portion of the first conductive pad while the second conducting bump electrically connects to a second portion of the first conductive pad.Type: ApplicationFiled: May 29, 2008Publication date: December 4, 2008Applicant: AU OPTRONICS CORPORATIONInventor: Chih-Chia Chen
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Publication number: 20080297714Abstract: A display device includes first and second substrates with a liquid crystal layer therebetween, video signal lines and scan lines on one of the substrates, and display electrodes connected to a video signal line through an active device. Pixel areas are defined by the video signal and scan signal lines, and each pixel area has the display electrode, a reference electrode and the active device. Display electrodes are arranged on the first substrate and reference electrodes are arranged the second substrate. A part of the reference electrodes have a plurality layers and is conductive. A sealing material is formed between the substrates and along a periphery thereof and include conductive beads. A connecting terminal is formed from an edge of the first substrate to under the sealing material, and is connected electrically to the reference electrodes thorough the sealing material.Type: ApplicationFiled: August 4, 2008Publication date: December 4, 2008Inventors: Kazuhiko Yanagawa, Masuyuki Ohta, Kazuhiro Ogawa, Keiichiro Ashizawa, Masahiro Yanai, Nobutake Konishi
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Publication number: 20080297715Abstract: Provided are a liquid crystal cell of a liquid crystal display and a method of manufacturing the same, comprising spacers disposed between a color filter substrate and an array substrate, wherein the color filter substrate comprises a central area and a peripheral area, and the spacers provided in the peripheral area are higher than those provided in the central area. The embodiments of the present invention can effectively prevent the occurrence of the gravity mura, the peripheral mura, and the gap mura to improve the display quality.Type: ApplicationFiled: April 17, 2008Publication date: December 4, 2008Applicant: BEIJING BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.Inventor: Dong Ki OH
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Publication number: 20080297716Abstract: A pair of eyeglasses includes an eyeglasses body, and a light emitting device; the eyeglasses body has a holding room therein, and a covering part thereon, which seals the holding room; the light emitting device is held in the holding room so as to be protected with the covering part; thus, the light emitting device will emit light to prettify the eyeglasses when turned on; furthermore, the wearer of the eyeglasses is prevented from contacting the light emitting device to have accidents.Type: ApplicationFiled: June 1, 2007Publication date: December 4, 2008Inventor: Tien-Chun TSAI
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Publication number: 20080297717Abstract: A spring hinge for an eyewear includes a front frame having an attachment portion and a first articulation hinge element, a temple connected to the front frame and having a hollow housing at an end portion, a cover member with a front bump for covering an outside opening of the temple, and a U-shaped slide member with a second articulation hinge element. The U-shaped slide member is housed in the hollow housing to be slidable along a longitudinal direction of the temple. A compression coil spring is provided between the front bump and the U-shaped member in a compressed state. The temple and the attached portion are rotationally connected at the first and second articulation hinge elements. When the temple is pushed outwardly, the temple is opened from a position perpendicular to the front frame, while the compression coil spring is being compressed.Type: ApplicationFiled: May 28, 2008Publication date: December 4, 2008Applicant: EURO VISION CO., LTD.Inventor: Hiroshi Fukuoka
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Publication number: 20080297718Abstract: A glasses combined with retractable screens is provided. The glasses combined with retractable screens is comprised of a frame of glasses that has void space therein. Small spring re-winders are installed inside of both of legs of the glasses frame and inside of upper glasses frame that surrounds lenses. Screens such as veils, satins, and gauzes etc., are engaged to the re-winders. When a wearer of the glasses of current application is exposed to strong sun light or winds, she/he drags small pulls, which are small metal hooks and attached at one end of the screen, out of the frame and fix them by proper means, such as tie to other pulls or fix them with hair pin. Screens, which came out lower face of legs of the glasses frame, cover cheeks of the wearer and other screen, which comes out of the upper glasses frame, covers upper part of the face of the wearer including hair.Type: ApplicationFiled: May 30, 2007Publication date: December 4, 2008Inventor: Yong Chu K. Brillouet
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Publication number: 20080297719Abstract: A glasses combined with retractable screens is provided. The glasses combined with retractable screens is comprised of a frame of glasses that has void space therein. Small spring re-winders are installed inside of both of legs of the glasses frame. Screens such as veil, scarf, satin, and gauze etc., are engaged to the re-winders. When a wearer is exposed to strong sun light or winds, the wearer drags small pulls, which are small metal hooks and attached at one end of the screen, out of the frame and fix it to proper means, such as tying it to other pulls that attached to other screen. The screens come out of lower face of the legs of the glasses frame to cover cheeks of the wearer and the screens come out of the upper face of the legs of the glasses frame to cover upper part of the face of the wearer including hair.Type: ApplicationFiled: May 30, 2007Publication date: December 4, 2008Inventor: Yong Chu K. Brillouet
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Publication number: 20080297720Abstract: A transparent optical component comprises a set of cells (15) juxtaposed on a surface of the component. Each cell encloses a determined substance so as to endow the component with particular optical characteristics, and two neighbouring cells are separated by a wall (18). Some walls are not straight at the surface of the component, so that the light diffracted by the walls does not form any luminous glint or any flashing. In particular, the walls can be curved or made up of straight segments disposed end-to-end.Type: ApplicationFiled: July 13, 2006Publication date: December 4, 2008Applicant: Essilor InternationalInventors: Jerome Ballet, Christian Bovet, Jean-Paul Cano, Gilles Mathieu
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Publication number: 20080297721Abstract: The invention provides ophthalmic lenses that provide correction for each of refractive asthenopia, muscular asthenopia and foveal suppression.Type: ApplicationFiled: May 29, 2007Publication date: December 4, 2008Inventors: Amitava Gupta, Susan W. Neadle, G. Benjmain Wooley
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Publication number: 20080297722Abstract: An ophthalmic apparatus capable of performing alignment of the apparatus with respect to an examinee's eye with ease regardless of characteristics of the eye or an environment of the apparatus includes a measurement unit performing examination/measurement of the eye, a projection optical system for projecting an alignment target onto an anterior segment of the eye, an image-pickup optical system for picking up an anterior-segment image with an image of the projected target by a two-dimensional image-pickup element, and a calculation and control unit detecting the target image, and based on the detection result, detecting an alignment condition of the measurement unit with the eye, wherein the calculation and control unit detects two-dimensional luminance distribution in an image obtained by the element, and based on the detection result, changes projection light intensity of light of the target and/or gain of the element so that the target image becomes detectable.Type: ApplicationFiled: May 30, 2008Publication date: December 4, 2008Applicant: NIDEK CO., LTD.Inventor: Naoto Honda
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Publication number: 20080297723Abstract: Devices, systems, and methods measure, diagnose, and/or treat one or both eyes of a patient. Adaptive optics systems (such as those having a deformable mirror) may be configured to an aspherical or multi-spherical presbyopia-mitigating prescriptive shape to allow objective and/or subjective measurements of a candidate prescription. A plurality of viewing distances allow subjective and/or objective evaluations of performance using a light spot or a test viewing image. Measurements of aberrations at selected viewing conditions (including distances and/or brightness) with correlating pupil sizes may also be provided. Wavefront measurement systems and methods may help position and isolate the eye from ambient light.Type: ApplicationFiled: August 14, 2008Publication date: December 4, 2008Applicant: AMO MANUFACTURING USA, LLCInventors: Guangming DAI, Seema Somani
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Publication number: 20080297724Abstract: An ophthalmic apparatus capable of obtaining characteristics of a cornea which are suitable for calculating power of an intraocular lens to be injected into an examinee's eye which has undergone refractive surgery comprises an input unit which inputs data on a shape of the cornea after refractive surgery, and a calculation unit having a program which calculates post-operative corneal refractive power based on the post-operative corneal shape, wherein the program determines a non-corrected region based on the post-operative corneal shape, estimates a pre-operative corneal shape in a corrected region by calculating an approximate curve from a corneal shape in the non-corrected region, calculates pre-operative corneal refractive power based on the pre-operative corneal shape, calculates correction refractive power in the refractive surgery based on the post-operative corneal shape and the pre-operative corneal shape, and calculates post-operative corneal refractive power based on the pre-operative corneal refracType: ApplicationFiled: May 30, 2008Publication date: December 4, 2008Applicant: NIDEK CO., LTD.Inventors: Kazunari Shimizu, Yukinobu Ban, Tomohiro Kamikawa
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Publication number: 20080297725Abstract: To provide an ophthalmic apparatus by which an examiner can provide assistance such as lifting an examinee's eyelid while easily observing an observation image of an examinee's eye displayed on a monitor. The ophthalmic apparatus has a measurement part including a measurement optical system for examining or measuring the examinee's eye, a fixed support part which supports the measurement part to be movable, an observation optical system provided in the measurement part and having an image-pickup element, for observing an anterior segment of the eye, a monitor which displays an image of the anterior segment picked up by the element, and a holding unit which holds the monitor to be movable with respect to the measurement part or the fixed support part to change a placement position of the monitor between a first position where its screen is approximately vertical and a second position where the screen is approximately horizontal.Type: ApplicationFiled: August 22, 2005Publication date: December 4, 2008Applicant: Nidek Co., Ltd.Inventor: Yoshiaki Mimura
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Publication number: 20080297726Abstract: A projection system includes a projection device and a viewing surface. The projection device is configured to project an image onto the viewing surface. The viewing surface has a first side and a second side. The viewing surface is substantially diffuse reflective when viewed from the first side and substantially transparent when viewed from the second side. The viewing surface can also include a plurality of louvers adapted to attenuate light passing through the viewing surface. The viewing surface and the plurality of louvers can be part of a projection screen. The projection system can be included in a motor vehicle.Type: ApplicationFiled: April 16, 2008Publication date: December 4, 2008Inventors: Ernesto M. RODRIGUEZ, JR., Joseph C. Carls
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Publication number: 20080297727Abstract: An apparatus includes a laser projector and a laser beam ECU that is connected to a vehicle communication apparatus for communicating with an information center that provides a guidance service by an operator. According to an operation guidance by the operator, information indicating a switch to be operated is sent from the information center to the laser beam ECU through the vehicle communication apparatus. Then, the laser beam ECU identifies the switch to be operated based on the information and controls the laser projector to direct a laser beam to the switch to be operated.Type: ApplicationFiled: April 28, 2008Publication date: December 4, 2008Applicant: DENSO CORPORATIONInventor: Kenichi Mori
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Publication number: 20080297728Abstract: In the color projector (200, 300, 400), a light source (220) produces first, second, and third colored light beams. An optical integrator (230, 330, 430) integrates the first colored light beam, the second colored light beam, and the third colored light beam. The integrated first colored light beam, second colored light beam, and third colored light beam are modulated by first (252), second (254), and third (256) light modulators, respectively, producing first, second, and third colored images. An optical synthesizer (260) combines the first, second, and third colored images to form a synthesized color image, and a projection lens (180) projects the synthesized color image. The optical integrator (230, 330, 430) includes a polarizing beam splitter (240, 441) in an optical path of at least one of the first, second, and third colored light beams to increase the effective integration length of the corresponding colored light beam.Type: ApplicationFiled: November 28, 2006Publication date: December 4, 2008Applicant: KONINKLIJKE PHILIPS ELECTRONICS, N.V.Inventors: Bart Salters, Marcellinus Petrus Carolus Michael Krijn, Oscar Hendrikus Willemsen
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Publication number: 20080297729Abstract: A projector includes: an image creation unit that projects image information upon a screen, comprising a plurality of picture elements that create an image pattern corresponding to the image information; and an illumination unit in which light emitting members are disposed upon a vertical plane with respect to an optical axis which passes through a center of the image creation unit, at equal distances from the optical axis and moreover in different locations.Type: ApplicationFiled: September 21, 2005Publication date: December 4, 2008Applicant: NIKON CORPORATIONInventors: Nobuhiro Fujinawa, Hirotake Nozaki, Tetsuya Yamamoto, Tadashi Ohta
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Publication number: 20080297730Abstract: A projector includes: a plurality of light sources for generating lights having different colors; a spatial optical modulator for performing a line-modulation of the lights; wavelength selection filters, disposed between the light sources and the spatial optical modulator, for transmitting or reflecting the lights according to light wavelengths; and a scanner for projecting the light incident from the spatial optical modulator in a line-scan scheme.Type: ApplicationFiled: March 28, 2008Publication date: December 4, 2008Inventors: Mun-Kue Park, Yong-Kwan Kim
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Publication number: 20080297731Abstract: A laser projection system is disclosed having reduced apparent speckle. The system includes a laser emitting a first beam on an optical element. The optical element emits a second beam incident on a scanner that scans the beam onto a projection screen. The optical element may be an exit pupil expander, delay plate, or have a locally electrically modulated index of refraction. In other embodiments, the laser has a tunable wavelength distribution that is changed for each frame displayed by the projection system to reduce apparent speckle. In still other embodiments, the angular content of a beam incident on a scanner is modulated to produce a time varying speckle pattern.Type: ApplicationFiled: June 1, 2007Publication date: December 4, 2008Applicant: MICROVISION, INC.Inventors: Karlton D. Powell, Margaret K. Brown, Bin Xue, Thomas W. Montague
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Publication number: 20080297732Abstract: A light source unit and an image projection apparatus are provided. The light source unit includes: a light source part including a light source and a reflective member which reflects light emitted from the light source; and an infrared ray dividing part which is provided corresponding to a shape of the reflective member, is spaced apart from the reflective member, and includes a blocking part to block part of infrared rays generated from the light source and passing through the reflective member and a passing part having an opening formed through the blocking part. The image projection apparatus includes the light source unit and a casing accommodating the light source unit.Type: ApplicationFiled: December 6, 2007Publication date: December 4, 2008Applicant: Samsung Electronics Co., Ltd.Inventors: Ki-soo PARK, Byung-jo Kang, S-ru Kim
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Publication number: 20080297733Abstract: The present invention relates to a distortion detecting system and a distortion detecting method having a structure for efficiently detecting distortion of a projected image that is projected onto a projected surface by a projector. The distortion detecting system includes a photodetecting apparatus, and an analyzing apparatus. When a reference brightness image is projected onto the projected surface by the projector, the photodetecting apparatus forms the projected image on the projected surface onto the photosensitive surface of the photodetector, and outputs light intensity profile data that indicates a one-dimensional distribution of incident light intensity in each of a first direction and a second direction on an image for inspection formed on the photosensitive surface.Type: ApplicationFiled: June 16, 2005Publication date: December 4, 2008Inventor: Yukinobu Sugiyama
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Publication number: 20080297734Abstract: A projection display device and a method for controlling off-beams thereof are provided. The projection display device includes a case, a light source which is disposed in the case and outputs color light, a digital micro mirror device (DMD) which is disposed in the case, and controls micro mirrors and reflects the color light received from the light source, thereby outputting on-beams and off-beams, and an output unit which is disposed in the case and allows the off-beams output from the DMD to be projected to the outside of the case. Accordingly, the off-beams output from the DMD are output to the outer case through a shutter, prism, color filter, or an integral lens, so that a color of the outer case can be adjusted and also an exterior of the projection display device can be brightened.Type: ApplicationFiled: April 8, 2008Publication date: December 4, 2008Applicant: Samsung Electronics Co., Ltd.Inventor: Jeong-phil SEO
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Publication number: 20080297735Abstract: A lamp driving method for a projection apparatus is provided. The projection apparatus has a light valve and a lamp. The lamp driving method includes adjusting a brightness of the lamp to different values according to multiple states of the light valve. The lamp driving method improves the energy efficiency of the projection apparatus.Type: ApplicationFiled: September 7, 2007Publication date: December 4, 2008Applicant: YOUNG OPTICS INC.Inventors: Mei-Ling Chen, S-Wei Chen, Chao-Shun Chen, Hung-Cheng Lung, Chun-Fa Hsu, Cheng-Shun Liao
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Publication number: 20080297736Abstract: Disclosed herein is a projector that can be loaded with lamps of a plurality of kinds, each of a plurality of the lamps loadable into the projector being given a lamp serial code formed by arranging lamp information including at least a minimum wattage and a maximum wattage of the lamp and a check sum in predetermined order, the projector including: a lamp power supply for driving the lamp loaded in the projector, the lamp power supply being provided in advance with a plurality of mode ranges each as a range from a minimum wattage to a maximum wattage of output of the lamp power supply, and one predetermined mode range of the plurality of mode ranges being freely set in the lamp power supply; and a control circuit for controlling the lamp power supply.Type: ApplicationFiled: February 22, 2008Publication date: December 4, 2008Applicant: Sony CorporationInventors: Toshiyuki SHIRASU, Daizo Oka, Hirobumi Nagumo, Tessho Ishida
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Publication number: 20080297737Abstract: A projector to form image light by modulating light emitted from a light source according to image information and enlarges and projects the image light includes a projector main body with a light passing opening regulated by a blocking member, a reproduction device, and a control unit to control operation of projector components. The reproduction device reproduces information recorded on inserted recording medium. The control unit includes a startup information receiving section, a closed condition checking section, a medium judging section, and a light source controlling section. The light source controlling section executes immediate light turn-on control when the light passing opening is in the opened condition and image/video media exists.Type: ApplicationFiled: May 13, 2008Publication date: December 4, 2008Applicant: Seiko Epson CorporationInventor: Mitsuhiko Igarashi
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Publication number: 20080297738Abstract: The projector with at least two light sources for emission of light beams and a projection unit for controllable deflection of the light beams onto a projection surface has a control device to control light output of the light sources and a deflection of the projection unit, and also at least one digital delay element and at least one analog delay element for combined time delay of at least one of the light beams and/or deflection of the projection unit.Type: ApplicationFiled: May 27, 2008Publication date: December 4, 2008Inventor: Jan Oliver Drumm
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Publication number: 20080297739Abstract: A projector includes an discharge lamp which has a first electrode and a second electrode and emits light by generating discharge between the first and second electrodes, and a driving system which supplies power by alternating polarities of the first electrode and the second electrode. The driving system is operable in a restoration mode. The driving system melts surface layers of a tip and a surrounding area of the tip extending from a main body of one of the first and second electrodes, and expands a new tip on a tip area of the main body of the one electrode in the restoration mode.Type: ApplicationFiled: May 29, 2008Publication date: December 4, 2008Applicant: SEIKO EPSON CORPORATIONInventors: Kentaro YAMAUCHI, Shigeyasu SOMA
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Publication number: 20080297740Abstract: A projection system and method of use thereof, wherein a computer in electrical communication with at least one projector projects a layout, preferably onto a floor projection surface utilizing short throw lenses, wherein the layout preferably comprises a grid and indicia relating to an exhibitor.Type: ApplicationFiled: May 29, 2007Publication date: December 4, 2008Inventors: Phong Huynh, Liem Huynh
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Publication number: 20080297741Abstract: A video projection device has one of a plurality of types of projection lenses replaceably loaded and projects a video on a screen at a fixed position. The video projection device includes: a converter lens which is composed of a plurality of lenses, which is afocal as a whole, and which is detachably provided in front of the projection lens to convert projection magnification; and a gap adjustment mechanism changing a predetermined gap in the converter lens to a setting in accordance with at least one of a projection distance to the screen and the type of the projection lens loaded.Type: ApplicationFiled: May 28, 2008Publication date: December 4, 2008Applicant: Konica Minolta Opto, Inc.Inventors: Tokuji Matsuda, Shigeru Sawamura
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Publication number: 20080297742Abstract: A projector apparatus capable of adjusting a projecting image without the user manually adjusting the image or selecting the past setting information for every usage opportunity. A projector apparatus according to the present invention is a projector apparatus capable of performing automatic adjustment based on past setting information related to before-use adjustment; the projector apparatus including an identification information receiving device for receiving, at an arbitrary installation location, information specific to the installation location; and a CPU for executing the automatic adjustment based on the specific information received by the identification information receiving device.Type: ApplicationFiled: May 27, 2008Publication date: December 4, 2008Inventors: Keiichi Muneishi, Hideaki Kosaka
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Publication number: 20080297743Abstract: A scanning exposure apparatus exposing a substrate to a pattern of an original through a projection optical system while relatively moving the original and the substrate, includes a substrate stage movable while holding the substrate; a measurement system measuring a position of the substrate in an optical-axis direction of the projection optical system; and a controller relatively moving the original and the substrate while controlling a position of the substrate stage in the optical-axis direction, on the basis of the position of the substrate detected by the measurement system. The controller keeps accelerating the substrate stage up to a starting position of the irradiation of the exposure light for a target shot area on the substrate, and during the acceleration, controls the position of the substrate stage in the optical-axis direction, on the basis of a position of a surface of an exposed shot area, which has been exposed previously.Type: ApplicationFiled: May 12, 2008Publication date: December 4, 2008Applicant: CANON KABUSHIKI KAISHAInventor: Keiichi Arita
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Publication number: 20080297744Abstract: An immersion lithographic apparatus is described with a drain configured to remove liquid from a gap between an edge of the substrate and the substrate table on which the substrate is supported. The drain is provided with a means to provide liquid to the drain irrespective of the position of the substrate table and/or a means to saturate gas within the drain. Those measures reduce the variations in heat load due to evaporation of liquid in the drain.Type: ApplicationFiled: June 1, 2007Publication date: December 4, 2008Applicant: ASML NETHERLANDS B.V.Inventors: Frederik Eduard De Jong, Marcel Hendrikus Maria Beems, Marinus Aart Van Den Brink, Johannes Henricus Wilhelmus Jacobs, Martinus Hendrikus Antonius Leenders, Leon Martin Levasier, Frits Van Der Meulen, Joost Jeroen Ottens, Koen Jacobus Johannes Maria Zaal, Richard Bernardus Johannes Droste, Johannes Wilhelmus De Klerk, Peter Franciscus Wanten, Jan Cornelis Van Der Hoeven, Edwin Cornelis Kadijk, Marteijn De Jong, David Lucien Anstotz
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Publication number: 20080297745Abstract: In a projection objective provided for imaging a pattern arranged in an object plane of the projection objective into an image plane of the projection objective with the aid of an immersion medium arranged between a last optical element of the projection objective in the light path and the image plane, the last optical element has a transparent substrate and a protective layer system that is fitted to the substrate, is provided for contact with the immersion medium and serves for increasing the resistance of the last optical element to degradation caused by the immersion medium.Type: ApplicationFiled: August 6, 2008Publication date: December 4, 2008Inventors: Karl-Stefan WEISSENRIEDER, Alexander HIRNET, Alexander PAZIDIS, Karl-Heinz SCHUSTER, Christoph ZACZEK, Michael LILL, Patrick SCHEIBLE, Guenter SCHEIBLE, Sigrid SCHEIBLE, Harald SCHINK, Markus BROTSACK, Ulrich LOERING, Toralf GRUNER
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Publication number: 20080297746Abstract: A liquid immersion exposure apparatus in which a substrate is exposed with an exposure beam, includes a projection optical system by which the substrate is exposed to the exposure beam, a first inlet disposed at a first position, which is capable of supplying a first liquid to a space adjacent to a bottom surface of the projection optical system, and a second inlet disposed at a second position which is different from the first position, the second inlet being capable of supplying a second liquid that is different from the first liquid to the space.Type: ApplicationFiled: July 31, 2008Publication date: December 4, 2008Applicant: NIKON CORPORATIONInventor: Hiroyuki Nagasaka
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Publication number: 20080297747Abstract: One or more patterning arrays are mounted to a mounting plate via height adjustment structures that enable the flatness of the active surfaces of the patterning arrays to be controlled. The height adjustment structures may comprise an array of piezoelectric actuators or screws. Alternatively, the backside of the patterning means may be polished to optical flatness and bonded by crystal bonding to an optically flat surface of a rigid mounting body.Type: ApplicationFiled: July 9, 2008Publication date: December 4, 2008Applicants: ASML Netherlands B.V., ASML Holding N.V.Inventors: Arno Jan BLEEKER, Dominicus Jacobus Petrus Adrianus Franken, Peter C. Kochersperger, Kars Zeger Troost
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Publication number: 20080297748Abstract: A substrate table for a lithographic apparatus includes a mask constructed and arranged to prevent exposure of a peripheral exposure region of a substrate on the substrate table. The mask is attached to a moveable carrier. The moveable carrier has a range of movement which at least partially circumnavigates the substrate table.Type: ApplicationFiled: May 30, 2007Publication date: December 4, 2008Applicant: ASML NETHERLANDS B.V.Inventors: Erik Marie Jose Smeets, Remko Wakker
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Publication number: 20080297749Abstract: A lithography system and a lithography method is provided for increasing reliability and efficiency of immersion lithography. By varying a scan speed between a wafer and an optical component depending on at least one process parameter during exposure of the wafer, loosening of a fluid meniscus during the relative movement of the optical component and the wafer is avoided.Type: ApplicationFiled: January 14, 2008Publication date: December 4, 2008Inventor: Rene Wirtz
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Publication number: 20080297750Abstract: In order to adjust the optical axis of a light beam L1 in an exposure apparatus, on a support body in an XYZ three-dimensional coordinate system are mounted: a first mirror 10 having a reflective surface M1 obtained by rotating a plane parallel to the XY plane around an axis 11 parallel to the Y axis by an angle of ?; and a second mirror 20 having a reflective surface M2 obtained by rotating a plane parallel to the XZ plane around an axis 21 parallel to the X axis by an angle of ?. There are provided: position adjustment means for moving the entire support body having the two mirrors parallel to the XY plane; and angle adjustment means for adjusting the angle of the second mirror 20. The incident light L1 is reflected on the reflective surfaces M1 and M2 to be output as an outgoing light L3, where it is possible to perform an optical axis adjustment concerning position and angle by controlling the position adjustment means and the angle adjustment means.Type: ApplicationFiled: April 15, 2008Publication date: December 4, 2008Inventors: Yoshinori Tabata, Toshihide Ito, Takeshi Kawakami, Tsuyoshi Kashiwagi, Tsuyoshi Yamauchi
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Publication number: 20080297751Abstract: An exposure method includes measuring coordinates of alignment marks before and after exposing a first wafer to determine a fluctuation amount of a parameter of the alignment; measuring coordinates of alignment marks before exposing a second wafer to determine a parameter of the alignment; and aligning and exposing the second wafer based on a parameter obtained by correcting the parameter with the fluctuation amount determined for the first wafer. A high overlay accuracy can be obtained even when the alignment information is gradually changed, for example, due to the linear expansion and contraction of the substrate during the exposure of the substrate.Type: ApplicationFiled: May 27, 2008Publication date: December 4, 2008Applicant: NIKON CORPORATIONInventor: Yuichi Shibazaki
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Publication number: 20080297752Abstract: A system includes an illuminator, a mask, and a measurement device. The illuminator includes a light source. The mask includes at least one focus determination pattern having a first pattern portion and an adjacent second pattern portion. The first pattern portion and the second pattern portion have substantially the same width but produce a phase difference in light transmitted through the pattern portions. The measurement device measures a first critical dimension and a second critical dimension of a feature produced on a target by the at least one focus determination pattern. The difference between the first critical dimension and the second critical dimension relates to an amount of defocus and is sensitive to the focus change. The system may also include a feedback control loop where a determination regarding an amount of defocus is used to focus the position of a wafer or a mask or both of them onto the target. Additional apparatus, systems, and methods are disclosed.Type: ApplicationFiled: May 29, 2007Publication date: December 4, 2008Inventors: Fei Wang, Xinya Lei
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Publication number: 20080297753Abstract: An illumination source pupil for microlithography includes a substrate of substantially opaque material having an x-axis and a y-axis defined with respect to the substrate. The substrate has a first arcuate opening therein, and a second arcuate opening therein. The substrate also includes a third opening therein positioned at the intersection of the x-axis and the y-axis.Type: ApplicationFiled: May 31, 2007Publication date: December 4, 2008Inventors: Fei Wang, Ezequiel Vidal-Russell, William A. Stanton
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Publication number: 20080297754Abstract: The disclosure relates to a microlithographic projection exposure apparatus, such as are used for the production of large-scale integrated electrical circuits and other microstructured components. The disclosure relates in particular to coatings of optical elements in order to increase or reduce the reflectivity.Type: ApplicationFiled: February 14, 2008Publication date: December 4, 2008Applicant: CARL ZEISS SMT AGInventors: Vladimir Kamenov, Daniel Kraehmer, Toralf Gruner, Karl-Stefan Weissenrieder, Heiko Feldmann, Achim Zirkel, Alexandra Pazidis, Bruno Thome, Stephan Six
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Publication number: 20080297755Abstract: A focusing-device for the radiation from a light source (2) is provided with a collector mirror (1, 1?) which is arranged in a mount (24) and collects the light, in virtual or real terms, from the light source (2) at the second focus (200). The collector mirror (1, 1?) is displaceably connected to the mount (24) via a bearing in such a way that its optical properties remain at least approximately the same even in the event of temperature changes.Type: ApplicationFiled: July 15, 2008Publication date: December 4, 2008Applicant: Carl Zeiss SMT AGInventors: Martin Antoni, Frank Melzer, Andreas Seifert, Wolfgang Singer
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Publication number: 20080297756Abstract: A process of manufacturing a liquid crystal display device of transverse electric-field type, wherein a halftone photomask which is used to form a photoresist pattern has a fully light-shielding area preventing UV irradiation of a portion of an active matrix substrate in which a thin-film transistor element is to be formed, so that the photoresist pattern includes a positive resist portion which has a first thickness and which is formed on the above-indicated portion of the substrate. The halftone mask further has a fully light-transmitting area which permits fully UV transmission therethrough to provide the photoresist pattern with a resist-free area which corresponds to a portion of the substrate in which a contact hole serving as a third connection portion connecting an external scanning-line driver circuit and a scanning-line terminal portion through a junction electrode is to be formed.Type: ApplicationFiled: July 28, 2008Publication date: December 4, 2008Inventor: Naoto Hirota
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Publication number: 20080297757Abstract: An optical modulating fine aperture array device is provided.Type: ApplicationFiled: July 22, 2005Publication date: December 4, 2008Applicant: INDUSTRY-ACADEMIC COOPERATION FOUNDATION,YONSEI UNInventor: Jae Won Hahn
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Publication number: 20080297758Abstract: The invention relates to a transfer apparatus for transferring an object (W). the transfer apparatus comprises a gripper (15) for at least one of gripping the object (W) at a first position and then releasing the object (W) at a second position proximate to a receiver (20) and releasing the object (W) at a first position after gripping the object at a second position proximate to the receiver (20). The transfer apparatus is further provided with a measurement device (22) arranged to measure the relative position of the gripper (15) with respect to the receiver (20) in at least one dimension. Further, a relative position error is defined with respect to a desired relative position based on the relative position measured. The relative position of the gripper (15) and the receiver (20) are adjusted for minimizing the relative position error in the second position.Type: ApplicationFiled: June 26, 2008Publication date: December 4, 2008Applicant: ASML NETHERLANDS B.V.Inventors: Patricius Aloysius Jacobus Tinnemans, Edwin Johan Buis, Sjoerd Nicolaas Lambertus Donders, Jan Van Elp, Jan Frederik Hoogkamp, Aschwin Lodewijk Hendricus Van Meer, Patrick Johannes Cornelus Smulders, Franciscus Andreas Cornelis Spanjers, Johannes Petrus Martinus Ber Vermeulen, Raimond Visser, Henricus Gerardus Tegenbosch, Johannes Charles Adrianus Van Den Berg, Henricus Johannes Adrianus Van De Sande, Thijs Vervoort
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Publication number: 20080297759Abstract: The invention relates to a device for optical distance measurement, in particular a handheld device, having an emission branch (14) which defines a emission channel and has at least one emission unit (22, 24) for emitting modulated optical radiation (36) in the direction of a target object (20), having a reception branch (18) which defines a reception channel (44) and has at least one receiver (54), and having a reference branch (15) which defines a reference path (40), and having switch means (38) for deflecting the measurement signal (36) between the emission branch (14) and the reference branch (15). According to the invention, it is proposed that the switch means (38) are mechanically driven.Type: ApplicationFiled: March 31, 2005Publication date: December 4, 2008Inventors: Uwe Skultety-Betz, Peter Wolf