Abstract: A TFT array panel includes an insulating substrate, a gate line and a storage electrode line formed thereon. The gate line and the storage electrode line are covered with a gate insulating layer, and a semiconductor island is formed on the gate insulating layer. A pair of ohmic contacts are formed on the semiconductor island, and a data line and a drain electrode are formed thereon. The data line and the drain electrode are covered with a passivation layer having a contact hole exposing the drain electrode. A pixel electrode is formed on the passivation layer and connected to the drain electrode through the contact hole. The TFT array panel is covered with an alignment layer rubbed approximately in a direction from the upper left corner to the lower right corner of the TFT array panel or the pixel electrodes. The pixel electrode has approximately a rectangular shape and overlaps the gate line and the data line.

Abstract: An array substrate device having a color filter-on-thin film transistor (COT) structure for a liquid crystal display device includes a gate line formed on a substrate along a transverse direction, the gate line including a gate pad at one end thereof, a first insulating layer formed on the substrate to cover the gate line, the first insulating layer exposing a first portion of the gate pad, a data line formed over the first insulating layer along a longitudinal direction on the substrate, the data line defining a pixel region with the gate line and including a data pad at one end thereof, a thin film transistor formed at a crossing region of the gate and data lines, the thin film transistor including a gate electrode, a semiconductor layer, a source electrode, and a drain electrode, a black matrix overlapping the thin film transistor, the gate line, and the data line except a second portion of the drain electrode, a second insulating layer formed over an entire surface of the substrate to cover the black matr

Abstract: A method for repairing a storage capacitor on gate or a storage capacitor on common line is described. A portion of each pixel electrode is disposed above a scan line or a common line. An upper electrode is disposed between the pixel electrode and the corresponding scan line or the common line. The pixel electrode and the upper electrode are electrically connected. A defective capacitor is formed when a particle/defect is produced between the upper electrode and the common line or the scan line. The method of repairing the defective capacitor includes removing a portion of the pixel electrode corresponding to the upper electrode of a defective storage capacitor and electrically isolating the upper electrode and the corresponding pixel electrode of the defective storage capacitor. The upper electrode and the scan line or the common line of the defective capacitor are welded together.

Abstract: The present invention relates to a flat panel display having integral fastening structures for holding the top and bottom chassis. The flat panel display comprises a mold frame enclosing an internal storage space and having a plurality of fastening hooks protruding outward from a side surface thereof; a bottom chassis having a plurality of first coupling openings fastened to the plurality of fastening hooks of the mold frame; and a top chassis having a fastening structure fastened to the bottom chassis, wherein the fastening structure is formed on the area where the mold frame is fastened to the bottom chassis.

Abstract: A method for providing a hot spot filter for a light guide is provided by taking an image of the light output pattern of an illuminated light guide. The hot spot filter may be a film, a layer, or an additional liquid crystal display dedicated to attenuating bright spots from the light guide. The hot spot filter may be incorporated into the image display by adjusting the grey scale of individual pixels to provide sufficient compensation.

Abstract: An exemplary backlight module (200) includes a light emitting unit (220). The light emitting unit includes a plurality of light sources (227, 228, 229) configured for providing color light beams respectively, and a mixer (222) configured for mixing the color light beams into white color beams. The mixer includes a plurality of light guide structures (223) respectively corresponding to the light sources and a mixing body (226) connected to the light guide structures. The light guide structures are configured for guiding color light beams emitted from the light sources to the mixing body. The color light beams emitted from all the light sources being partially mixed into white light beams in the mixing body.

Abstract: Provided is a light emitting diode array including: a plurality of light emitting chips spaced apart from one another by a predetermined distance; and a fixing member that positions the plurality of light emitting chips at predetermined heights and/or predetermined directions. Also provided are methods for manufacturing the light emitting diode array, a backlight assembly including the light emitting diode array, and a liquid crystal display device including the light emitting diode array.

Abstract: An illumination device has a plurality of main illumination areas subdivided into at least a first and a second sub-illumination area, wherein a luminous element for outputting radiation is arranged on each sub-illumination area, and wherein a beam deflection unit is associated with each main illumination area, which is designed to deflect the radiation output by the luminous element of the first sub-illumination area into another direction than the radiation output by the luminous element of the second sub-illumination area.

Abstract: A production method for a display panel according to the present invention is production method for a display panel 100 including a display panel 101 and a plurality of microlenses 107 provided on a light-incident side of the display panel 101, including: (a) a step of providing a display panel having a plurality of pixels in a matrix arrangement, wherein each of the plurality of pixels has a plurality of picture elements, including a first picture element 104B transmitting first color light and a second picture element 104R (104G) transmitting second color light which is different from the first color light; (b) a step of forming a photocurable material layer 105 on one of a pair of principal faces, being opposite to each other, of the display panel; (c) a step of exposing the photocurable material layer to light via the display panel, wherein the photocurable material layer is at least partially cured with light which has been transmitted through at least the first picture element; and (d) a step of removin

Abstract: A reflective polarizer contains: (a) a light-entrance medium having a light-entrance surface and a microstructured surface with a series of prismatic structures, wherein first and second sidewalls of each prismatic structure have an inclination angle of more than 53 degrees with respect to the light-entrance surface; (b) a polarization-selective thin film optical coating on the series of prismatic structures, for transmitting a first polarization of light and reflecting a second polarization; and (c) a light-exit medium on the polarization-selective thin film optical coating that provides a smooth light-exit surface.

Abstract: A transflective Liquid Crystal Display device has a liquid crystalline (LC) cell with reflective portions (101 R) and transmissive portions (101 T). The LCD device has a dual cell-gap design, the cell gap (dT) for the transmissive portions differs from the cell gap (dR) for the reflective portions. According to the invention, this cell gap difference is effected by means of an optical retarder (120) inside the LC cell. A thickness of said optical retarder (120) is such as to compensate the difference in cell gaps. Preferably, the optical retarder is a patterned retarder extending essentially only over the reflective portions (101 R) of the cell, and having quarter wave retardance.

Abstract: A transflective liquid crystal display including upper and lower panels facing each other. A plurality of gate lines and a plurality of data lines intersecting each other are formed on the lower panel to define pixel areas arranged in a matrix. A plurality of thin film transistors connected to the gate lines and the data lines and a plurality of pixel electrodes connected to the thin film transistors are also provided on the lower panel. Each pixel electrode includes a transparent electrode and a reflecting electrode with high reflectance having a transmitting window. A black matrix having apertures opposite the pixel areas and a plurality of red, green and blue color filters are formed on the upper panel, and a passivation layer covers the color filters. The passivation layer includes thicker and thinner portions, and the thinner portion is disposed opposite the transmitting window.

Abstract: Disclosed is a liquid crystal display device having an improved display quality. The device includes a substrate; black matrix formed in a matrix pattern on one side of the substrate, wherein the black matrix divides the substrate into a plurality of cell areas; a color filter layer having a red color filter of a first thickness formed in one of the plurality of cell areas, a green color filter of a second thickness which is higher than the first thickness, and a blue color filter of a third thickness which is higher than the second thickness; and a first compensation layer formed by coating the color filter layer and the black matrix with a polymerizable liquid crystal, wherein the first compensation layer is hardened, thereby leveling the substrate, and includes a positive C-plate; and a second compensation layer on another side of the substrate, wherein the second compensation layer is made of one of an A-plate and a biaxial film.

Abstract: A liquid crystal display device comprising a liquid crystal cell, two polarizing plates having a polarizer and a protective film satisfying (1) and (2) below, and an optical compensatory film satisfying (3)-(8) below and disposed between the liquid crystal cell and the polarizer: 0 nm?Re(?)?5 nm??(1) ?20 nm?Rth(?)?20 nm??(2) 20 nm<Re(548)<150 nm??(3) 50 nm<Rth(548)<400 nm??(4) 0.5<Re(446)/Re(548)<1??(5) 1.0<Re(628)/Re(548)<2.0??(6) 1.0<Rth(446)/Rth(548)<2.0??(7) 0.5<Rth(628)/Rth(548)<1.0??(8).

Abstract: Provided is a method of manufacturing an LCD device in which alignment films are formed by a method of printing non-contact alignment films on substrates. Print control patterns are provided between a sealing member and each of display regions. Each of the print control patterns is formed of a highly water-repellent region as well as any one of fine concave structures, fine convex structures and pillar-shaped bodies. The print control patterns control the spreading as liquid of alignment film materials to make the film thickness of each of the alignment film materials uniform.

Abstract: The liquid crystal display device includes a first substrate, a second substrate opposed to the first substrate, and a vertically aligned liquid crystal layer interposed between the first and second substrates, and has a plurality of pixels arranged in a matrix having rows and columns. Each pixel includes a first electrode formed on the first substrate, a second electrode formed on the second substrate, and the liquid crystal layer interposed between the first and second electrodes. The first substrate has a shading region in gaps between the plurality of pixels, and a wall structure is placed regularly on the surface of the first substrate facing the liquid crystal layer in the shading region. The first and second electrodes have at least one opening formed at a predetermined position in the pixel.

Abstract: A liquid crystal panel and a liquid crystal display device having stable liquid crystal alignment, excellent display quality, and high display response speed are obtained. In this liquid crystal panel, uneven portions for bending the alignment of liquid crystal molecules towards the direction along the substrate surface are installed on the surfaces where the liquid crystal layer contacts its adjacent layers, and the liquid crystal layer comprises a liquid crystal having a positive dielectric constant anisotropy, and a polymer obtained by subjecting a polymerizable compound in the liquid crystal layer to irradiation with active energy rays, with or without application of a voltage.

Abstract: A liquid crystal display device and a method for manufacturing the same are disclosed which are capable of preventing occurrence of contact errors between pads of gate or data lines and pad electrodes. The liquid crystal display device includes a signal line and a signal line pad arranged in one direction, an insulating film formed on the signal line and the signal line pad, the insulating film including at least one contact hole, through which a predetermined portion of the signal line pad is exposed, and a pad electrode formed on the insulating film, and electrically connected with the signal line pad via the at least one contact hole. The insulating film includes inner side walls defining the at least one contact hole, and at least one of the inner side walls has a slope gentler than a slope of the remaining inner side walls.

Abstract: A liquid crystal device includes a pair of substrates between which liquid crystal is sandwiched, a plurality of pixel electrodes arranged in a matrix on one of the substrates, switching elements that control the supply of current to the pixel electrodes, scanning lines that supply scanning signals to the switching elements, and data lines that cross the scanning lines and that supply image signals to the switching elements. The pixel electrodes are arranged in pairs, and each pair of the pixel electrodes are adjacent in an extending direction of the data lines and are disposed between a corresponding pair of the scanning lines in the extending direction of the data lines. The switching elements corresponding to each line of the pixel electrodes arrayed in the extending direction of the data lines are alternately connected to either of opposing sides of an adjacent pair of the data lines in the extending direction of the data lines.

Abstract: A pixel structure including a first active device, a second active device, a first pixel electrode electrically connecting the first active device, a second pixel electrode electrically connecting the second active device and a first capacitance lower electrode is provided. Both the first active device and the second active device electrically connect a scan line and a data line. The first pixel electrode has a first interlacing pattern and first stripe patterns connected thereto. The second pixel electrode has a second interlacing pattern and second stripe patterns connected thereto. The first capacitance lower electrode located under the first interlacing pattern has a first region and second regions. The first pixel electrode substantially shields the first region but does not shield the second regions. An area ratio of the first region to the second regions is about 10:1˜300:1.

Abstract: The present invention can easily inspect the connection between a flexible printed circuit board and terminals. In a display device which includes a display panel which forms a plurality of lines as first lines on a terminal portion thereof, and a film-like substrate which forms a plurality of lines as second lines thereon, the display panel has a determination terminal which is arranged close to the terminal portion, has a width larger than a width of the terminal, and has a portion thereof removed, the film-like substrate forms third lines and fourth lines arranged close to the second lines thereon, the third lines face the determination terminal, and the fourth lines face the removed portion of the determination terminal from which the portion is removed.

Abstract: Liquid crystal displays and fabrication methods thereof are provided. The liquid crystal display includes first substrate and second substrate facing the first substrate, and liquid crystal layer interposed therebetween. The first substrate includes a peripheral part spacer of which a surface includes a transparent conductive material, the peripheral part spacer being connected to a common voltage connector of the second substrate. A common voltage is applied to the first substrate through the common voltage connector and the peripheral part spacer. The peripheral part spacer is formed in the same process step with a display part spacer. To provide the peripheral part spacer with conductivity, the surface of the peripheral part spacer is covered with a transparent conductive material in the same process step in which the common electrode is formed on the first substrate.

Abstract: The liquid crystal display (LCD) device of the present invention includes a LCD panel and a resin-molded frame that houses the LCD panel, the LCD panel including first and second substrates, and a liquid crystal layer sandwiched between the first and second substrates. The two-dimensional shapes of the first and second substrates are rectangles having longer and shorter sides, the longer side of the first substrate being longer than that of the second substrate. The first substrate has a non-overlapping area that does not overlap with the second substrate. Among the four corners of the first substrate, the non-overlapping area of the first substrate has two corners adjacent to each other. At least one of the two corners forms a chamfered structure having a diagonal side that intersects the longer and shorter sides of the first substrate with the diagonal side inclined to the longer and shorter sides.

Abstract: A method of fabricating a liquid crystal display device, including: forming alignment layers over a first substrate and a second substrate, wherein the first and second substrates have a first region and a second region, the first and second regions each including a panel region, wherein a panel region in the first region has a different driving mode than a panel in the second region; producing a first alignment direction in the alignment layers of the first region; producing a second alignment direction in the alignment layers of the second region; assembling the first and second substrates together; and dividing the assembled substrates into liquid crystal display panels.

Abstract: A double processing technique for device manufacture includes performing a first patterning step to form apertures in a resist layer which apertures are filled before the first resist layer is stripped and replaced by a second resist layer to be used in the second exposure.

Abstract: An immersion lithography system is provided which includes an optical source operable to produce light having a nominal wavelength and an optical imaging system. The optical imaging system has an optical element in an optical path from the optical source to an article to be patterned thereby. The optical element has a face which is adapted to contact a liquid occupying a space between the face and the article. The optical element includes a material which is degradable by the liquid and a protective coating which covers the degradable material at the face for protecting the face from the liquid, the protective coating being transparent to the light, stable when exposed to the light and stable when exposed to the liquid.

Abstract: A lithography system and a lithography method is provided for increasing reliability and efficiency of immersion lithography. By varying a scan speed between a wafer and an optical component depending on at least one process parameter during exposure of the wafer, loosening of a fluid meniscus during the relative movement of the optical component and the wafer is avoided.

Abstract: A level sensor for a lithographic projection apparatus according to one embodiment of the invention includes a light source, a first reflector, a second reflector and a detector. The first reflector is positioned to direct light from the light source towards a wafer surface, and the second reflector is positioned to direct light reflected from the wafer surface to the detector. The first and second reflectors are selected to incur a minimal process dependent apparent surface depression.

Abstract: Provided are an off-axis illumination apparatus, an exposure apparatus, and an off-axis illumination method. The off-axis illumination apparatus may include a mask, a light source for emitting light to the mask, and an incident angle varying section for varying an incident angle of the light. The exposure apparatus may include the off-axis illumination apparatus in addition to a wafer stage and an optical detector. The off-axis illumination method may include irradiating light from the light source to a mask, and moving positions of the light source and the mask to vary an incident angle of the light to the mask.

Abstract: An apparatus, computer software, and a method of determining position inside a building comprising selecting on a PDA at least two walls of a room in a digitized map of a building or a portion of a building, pointing and firing a laser rangefinder at corresponding physical walls, transmitting collected range information to the PDA, and computing on the PDA a position of the laser rangefinder within the room.

Abstract: A measuring device for analyzing an analyte contained in a sample. The device includes a hollow housing, a sample holding part provided inside the housing for holding the sample, a sample supply inlet provided for the housing so as to communicate with the sample holding part, an optical measurement part provided for the sample holding part for making an optical measurement, a reagent holding part provided for the sample holding part for holding a reagent for the optical measurement, and at least one electrode provided on an outer surface of the housing.

Abstract: A device for automatically measuring characteristics of an ophthalmic lens (L1), includes: a support (2) designed to receive such a lens; on one first side of the lens support, illuminating elements (208) including an optical system for producing a light beam directed towards the ophthalmic lens mounted on the support; and on a second side of the support, elements for analyzing (210) the image transmitted by the ophthalmic lens mounted on the support and illuminated by the illuminating elements (208); elements for splitting the light beam including a first mask (220) forming a Hartmann array and arranged on the first side of the lens support to be illuminated, upstream of the lens by the light beam.

Abstract: A method for analyzing defect information on a substrate, including logically dividing the substrate into zones, and detecting defects on the substrate to produce the defect information. The defect information from the substrate is analyzed on a zone by zone basis to produce defect level classifications for the defects within each zone. The zonal defect level classifications are analyzed according to at least one analysis method. The defect level classifications are preferably selected from a group of defect level classifications that is specified by a recipe. Preferably, the at least one analysis method includes at least one of zonal defect distribution, automatic defect classification, spatial signature analysis, and excursion detection. The defect level classifications preferably include at least one of individual defect, defect cluster, and spatial signature analysis signature.

Abstract: A pattern inspection apparatus includes a light source which emits ultraviolet light, an irradiator which reduces coherency of the ultraviolet light and irradiates the coherency reduced ultraviolet light onto a specimen on which a pattern is formed through an objective lens, and a focus control means which projects light on the specimen from outside the objective lens, detects light reflected from the specimen by the projection and adjusts a height of the specimen relative to the objective lens. The apparatus further includes an image which forms an image of the specimen irradiated with the ultraviolet light and detects the formed image with a sensor, an image processor which processes a signal outputted from the sensor to detect a defect of the specimen, and a display which displays information of the defect detected by the image processor.

Abstract: An apparatus for examining spectral characteristics of an object may include a chuck configured to support and releasably fix the object, wherein the chuck is larger than the object, a first light source assembly integral with the chuck and configured to illuminate a bottom surface of the object with light having a predetermined spectrum and intensity, and a transmission analysis unit for collecting and analyzing light transmitted through the object. The first light source assembly may include multiple and/or adjustable light sources. A second light source assembly may illuminate a top surface of the object, and a reflection analysis unit may collect resultant reflected light.

Abstract: An apparatus can correctly discriminate between types of a recording medium, and obtain good fixed image by performing fixing in the optimum fixing conditions for a variety of different types of recording media. The apparatus includes an LED 101 serving as a first irradiation section, an LED 104 serving as a second irradiation section, a phototransistor 103 serving as a first reading section, and a phototransistor 102 serving as a second reading section. The light output from the LED 101 operating as the light source and passing through a slit 111 illuminates a surface of recording paper P on a recording paper conveyance guide 105. Besides, the recording paper conveyance guide 105 has a window opened for illuminating the recording paper from its underside in the present embodiment. The reflected light from the recording paper P is gathered via slits 112 and 113 and is received by the phototransistors 102 and 103.

Abstract: Apparatus for imaging the wall of a borehole drilled through an underground formation, comprising: a light source; an optical detector device such as a CCD camera; a sensor head including a window for application against the wall of the borehole, the light source being connected to the sensor head so as to illuminate the region of the borehole wall when the sensor head is applied to the wall; and an optical fiber bundle connecting the window to the optical detector device so as to pass optical signals from the wall to the optical detector device; wherein the optical fiber bundle comprises a coherent bundle, each fiber of the coherent bundle providing one pixel of a two-dimensional, multi-pixel image of the borehole wall.

Abstract: A method and a microscope, in particular a laser scanning fluorescence microscope, for high spatial resolution examination of samples, the sample (1) to be examined comprising a substance that can be repeatedly converted from a first state (Z1, A) into a second state (Z2, B), the first and the second states (Z1, A; Z2, B) differing from one another in at least one optical property, comprising the steps that the substance in a sample region (P) to be recorded is firstly brought into the first state (Z1, A), and that the second state (Z2, B) is induced by means of an optical signal (4), spatially delimited subregions being specifically excluded within the sample region (P) to be recorded, are defined in that the optical signal (4) is provided in such a way that a standing wave with defined intensity zero points (5) is formed in the sample region (P) to be recorded.

Abstract: An apparatus and method for optically analyzing samples in a biological sample container containing samples arranged at different locations on the base of the container. An optical acquisition device is provided comprising a detector and an objective. The position of the upper and lower surfaces of the base at each of the sample locations is determined by a confocal polychromatic displacement sensor. Light is collected from each of the sample locations by adjusting the focal plane to be coincident with, or vertically offset from, the upper surface of the base, as determined from the displacement sensor. This allows for rapid scanning of large numbers of samples in a multi-well plate or other biological sample containers.

Abstract: A light emitting device with an integrated measuring module for determining at least one measured value for calculating the power consumption of the lamp, the luminosity emitted by the lamp and/or the operating time of the lamp. The measuring module is integrated in the lamp and is used in the light emitting device considerably simplifies the measuring of the energy operating characteristics of the lamp.

Abstract: A method of determining an optical parameter or function thereof for a liquid, the method comprising: flowing the liquid through a flow cell; transmitting a pulse of light into the liquid in the flow cell; generating a signal responsive to energy that the material emits responsive to a portion of the light from the light pulse that is absorbed by the liquid; and using the signal to determine the optical parameter or function thereof.

Abstract: A method and apparatus for enhancing the accuracy of spectroscopic measurements using a cavity ringdown spectrometer (CRDS) is provided. A first aspect of the invention consists of a novel algorithm for the processing of ring-down data that significantly reduces the amplitude of an exponential fitting artifact, and thereby gives a better estimate of the actual loss. The primary cause of the artifact is the presence of an unwanted backwards-traveling wave that counter-propagates within the ringdown cavity. Scattering due to small imperfections at the cavity mirrors produces this wave and its intensity may be minimized by adjustment of the mirror positions during cavity construction. A second aspect of the invention consists of an apparatus for measuring the backscattered wave within a cavity to allow such cavity mirror adjustments to be made.

Abstract: A modulated reflectance measurement system includes lasers for generating an intensity modulated pump beam and a UV probe beam. The pump and probe beams are focused on a measurement site within a sample. The pump beam periodically excites the measurement site and the modulation is imparted to the probe beam. For one embodiment, the wavelength of the probe beam is selected to correspond to a local maxima of the temperature reflectance coefficient of the sample. For a second embodiment, the probe laser is tuned to either minimize the thermal wave contribution to the probe beam modulation or to equalize the thermal and plasma wave contributions to the probe beam modulation.

Abstract: A reflectance measuring apparatus is provided in the present invention. In addition to measuring the intensity of light directly reflected from a sample, the apparatus is further capable of collecting large-angle reflected light scattered from the sample through a reflecting cover disposed over the sample and measuring the intensity thereof. In one embodiment, the reflecting cover has a parabolic surface for modulating the large-angle reflected light to become parallel light projecting onto a photo-detector. In another embodiment, the reflecting cover has an elliptic surface for modulating the large-angle scattered light to focus on the photo-detector.

Abstract: A positioning apparatus includes a stage base, a stage moving along a surface of the stage base, a cable having one end connected to the stage, and a straightening structure configured to straighten air currents around the cable. The straightening structure is provided to at least one of the stage and the cable.

Abstract: A film thickness measuring apparatus of the present invention includes: a light source that emits white light to be irradiated onto a multilayer thin film; a spectroscope that disperses reflected light obtained as a result of irradiating the white light onto the multilayer thin film in order to obtain reflectance spectrums; and a computation section, said computation section including: a setting section that sets a plurality of wavelength ranges for the reflectance spectrums; a first conversion section that obtains wavenumber range reflectance spectrums by re-sequencing, among the reflectance spectrums, reflectance spectrums in the plurality of wavelength ranges set in said setting section at equal intervals, respectively; a second conversion section that converts the wavenumber range reflectance spectrums in the plurality of wavelength ranges obtained in said first conversion section into power spectrums, respectively; and a calculation section that obtains a film thickness of the multilayer thin film based

Abstract: A test object including: an arrangement of optical elements defining a first partially reflecting surface and a second partially reflecting surface, at least one of the first and second partially reflecting surfaces being curved, wherein the first partially reflecting surface is arranged to receive a substantially collimated input beam and produce therefrom a first transmitted beam that passes on to the second partially reflecting surface, wherein the second partially reflecting surface is arranged to receive the first transmitted beam from the first partially reflecting surface and produce a collimated second transmitted beam and a first reflected beam therefrom, wherein the first partially reflecting surface is arranged to receive the first reflected beam and produce a second reflected beam therefrom, and wherein the first and second reflecting surfaces are configured to cause the second reflecting beam to converge onto a spot on a back surface to produce a diverging beam traveling in the same direction as

Abstract: A method, system and computer program product for determining an Azimuth angle of an incident beam to a wafer are disclosed. A method comprises: using the incident beam to make a first set of measurements of calibration targets of a first set of grating angles that are different than one another; analyzing the first set of measurements to determine an reference grating angle which corresponds to a grating line to which the incident beam has a practically zero Azimuth angle; and determining the Azimuth angle of the incident beam to the wafer using the determined reference grating angle.

Abstract: An optical measuring device includes: a screen having a reference line; a movable stage; an optical system for forming on the screen an optical image of a to-be-measured object placed on the stage; and an edge detecting sensor (112) for detecting a passage of a measurement edge of the optical image at an arbitrary position on the screen. The optical measuring device further includes: an offset value storage (143) storing a distance between the reference line and the edge detecting sensor (112) as an offset value; and a correction data calculator (144) for correcting measurement data measured with the reference line and the edge detecting sensor (112) by use of the offset value.

Abstract: A solid state image pickup device includes a light receiving area, a plurality of layers, and a light collecting unit disposed above the plurality of layers. The plurality of layers includes first and second layers, such that a pattern of the first layer is formed by a plurality of exposure shots each illuminating a different region, and a pattern of the second layer is formed by a one shot exposure. The patterns of the first and second layers have apertures corresponding to the light receiving area, and the light collecting unit and the aperture of the pattern of the second layer define a light path through which light is incident in the light receiving area, and the pattern of the first layer is disposed outside of the light path.