Abstract: A drive system for controllably driving an electric actuator includes a current sensor system to sense a current conducted by the actuator and a driver to electrically drive the actuator based on an output signal of the current sensor system. The current sensor system includes at least a first and a second %forwardcurrent sensor that have a mutually different sensitivity for the current to be sensed and the drive system includes a current sensor controller to control an extent to which each of the current sensors to determine the output signal of the current sensor system.

Abstract: An resist exposure and contamination testing apparatus for extreme ultraviolet lithography utilizing a wafer coated with a resist. A source of electromagnetic radiation produces a first electromagnetic beam. A deflection mirror receives the first electromagnetic beam and removes debris therefrom. The deflection mirror also produces a second electromagnetic beam free of such debris. A filter receives the second electromagnetic beam and removes visible light and near ultraviolet radiation therefrom while passing a third electromagnetic beam. A focusing element receives the third electromagnetic beam and produces a fourth electromagnetic beam of extreme ultraviolet radiation in the form of a spot onto the wafer coated with a resist.

Abstract: A substrate is transported between a first space and a second space, which are separated by a partition wall, through an opening portion formed in the partition wall. A transport apparatus includes a support device having a support portion which supports the substrate, the support device being provided so as to block the opening portion while a clearance between the partition wall and the support device is formed, the support device moving the support portion from a state where the support portion faces the first space to a state where the support portion faces the second space; and an adjustment device which adjusts an amount of the clearance, thereby suppressing the movement of fluid from the first space to the second space.

Abstract: In an imprint lithography system, a recessed support on a template chuck may alter a shape of a template positioned thereon providing minimization and/or elimination of premature downward deflection of outer edges of the template in a nano imprint lithography process.

Abstract: Systems and methods to protect a mask from being contaminated by airborne particles are described. The systems and methods include providing a reticle secured in a two-part cover. The two part cover includes a removable protection device used to protect the reticle from contaminants. The cover can be held inside a pod or box that can be used to transport the cover through a lithography system from an atmospheric section to a vacuum section. While in the vacuum section, the removable cover can be moved during an exposure process during which a pattern on the reticle can be formed on a wafer.

Abstract: An exposure method comprises a calculation step of calculating a correction amount of a correction unit which corrects a change in imaging characteristics of a projection optical system based on at least one of parameters including a numerical aperture and effective light source of an illumination optical system, a numerical aperture of the projection optical system, and a size and pitch of a pattern, and an amount of change in environment condition in the projection optical system; and a correction step of making the correction unit operate in accordance with the correction amount calculated in the calculation step.

Abstract: A distance-measuring optoelectronic sensor for the monitoring of a working zone is provided which is located within a detection zone of the sensor and at a first distance from the sensor, wherein the sensor has a lighting unit having a light source to illuminate the working zone at least partly as well as an object detection unit by means of which unauthorized objects in the working zone can be detected. In this respect, an illumination control is designed, in a switching-on phase, first to activate the lighting unit with a lower power so that a provisional working zone at a second distance from the sensor less than the first distance is illuminated with at most a preset maximum power; to check by means of the object detection unit whether an unauthorized object intrusion is taking place into the provisional working zone; and if no unauthorized object intrusion is recognized, to activate the lighting unit at a higher power so that the working zone is illuminated with at most the preset maximum power.

Abstract: A laser based coordinate measuring device measures a position of a remote target. The laser based coordinate measuring device includes a stationary portion, a rotatable portion, and at least a first optical fiber. The stationary portion has at least a first laser radiation source and at least a first optical detector, and the rotatable portion is rotatable with respect to the stationary portion. The first optical fiber system, which optically interconnects the first laser radiation source and the first optical detector with an emission end of the first optical fiber system, has the emission end disposed on the rotatable portion. The emission end emits laser radiation to the remote target and receives laser radiation reflected from the remote target with the emission direction of the laser radiation being controlled according to the rotation of the rotatable portion.

Abstract: Optical fiber lines of a PON system can be monitored with the remote fiber test system having a practical structure, comprising a branch-type optical fiber line constituting the PON system and test equipment connected to the branch-type optical fiber line on the central office side. The test equipment comprises a light source, an optical splitter, a detecting part, and a control unit. The light source outputs light having an optical coherence function of a comb shape that is formed as a result of the optical frequency being modulated by a modulation signal of period p. The optical splitter receives light output from the light source and splits the light into probe light and reference light. The detecting part detects interference light that occurs from mutual interference between the reference light and reflected light arising while the probe light propagates through the branch-type optical fiber line.

Abstract: The present invention relates to a wavefront sensor using a pair of screens, each having a two-dimensional array of circular apertures, to achieve Moiré effects, and its use to measure the slope of a wavefront.

Abstract: The invention relates to a security sensor (10) comprising a sensing device (21), a coming optical fiber element and a going optical fiber element, the sensing device (21) comprising a housing that receives a first end of the coming element and a first end of the going element. It is characterized in that the first end of the coming element and the first end of the going element in the housing are not aligned, and in that when a light beam enters the housing through the first end of the coming element, at least part of said light beam is reflected within the housing and exits through the first end of the going element.

Abstract: In the inspection of a defect in a fine concave-convex pattern, a spectral waveform of a detection area of an inspection object is detected, area determination as to which area section determined by a pattern type of the inspection object the detection area belongs to is performed, a feature calculation equation and a determination index value which correspond to a determined area section and vary according to defect type is selected, feature calculation on the spectral waveform data in accordance with the selected feature calculation equation is performed, and a calculated feature value and the selected determination index value are compared to perform determination processing according to defect type.

Abstract: A system and method for the measurement of multiple emissions in multiple flow channels in a flow cytometry system is disclosed where each excitation source is modulated with a different frequency. A single detector is used to collect the fluorescent emissions excited by all sources in all flow channels, and the emissions are segregated using Fourier Transform techniques. The system and method are well-suited to microfluidic applications.

Abstract: A photo acoustic detector for detecting a concentration of a sample in a sample mixture, the photo acoustic detector has a light source for producing a light beam for exciting molecules of the sample, a light modulator for modulating an intensity of the light beam for generating pressure variations in the sample mixture, an amplitude of the pressure variations being a measure of the concentration of the sample, and an acoustic cell with an acoustic resonator for amplifying the pressure variations. Furthermore, the photo acoustic detector has a resonant pickup element for converting the pressure variations inside the acoustic resonator into a detector signal, and a processing section for processing the detector signal to generate 1) a sample signal caused by the pressure variations, and 2) a background signal caused by direct excitation of the pickup element by the light beam.

Abstract: Spectroscopy apparatuses oriented to the critical angle of the sample are described that detecting the spectral characteristics of a sample wherein the apparatus consists of an electromagnetic radiation source adapted to excite a sample with electromagnetic radiation introduced to the sample at an angle of incidence at or near a critical angle of the sample; a transmitting crystal in communication with the electromagnetic radiation source and the sample, the transmitting crystal having a high refractive index adapted to reflect the electromagnetic radiation internally; a reflector adapted to introduce the electromagnetic radiation to the sample at or near an angle of incidence near the critical angle between the transmitting crystal and sample; and a detector for detecting the electromagnetic radiation from the sample. Also, provided herein are methods, systems, and kits incorporating the peri-critical reflectance spectroscopy apparatus.

Abstract: Systems and methods are provided for monitoring materials using ultra fast laser pulses. Ultra fast laser pulses, such as femtosecond or attosecond laser pulses, are applied to the materials and laser pulses that result from interactions between the ultra fast laser pulses and the materials are collected. Spectral content of the resulting pulses is generated and presented. The elemental composition of the materials is determined using the spectral content.

Abstract: In a localized surface plasmon detection system using a metal thin film pattern, by radiating light for detection on a detecting element using an effective light source which has a peak out of an axis, the present invention strikes a balance between narrowing a peak width of a spectrum and highly efficient illumination even if it is a case of using converging or diffused light.

Abstract: The invention relates to spectrometer measuring heads (12) for analysing characteristic variables of liquid, pasty or solid substances for optical spectrometer systems. Said measuring heads are characterised, in particular, by their long-term stability, low maintenance and simple production. A rotationally mounted mirror (I) and at least one source of optical radiation (2) or a device for uncoupling optical radiation are arranged in a housing (6) in such a manner that the optical radiation is incident, by orientating the rotationally mounted mirror either on a reference body (3) in the housing or on the substance (14) that is to be analysed via a window (7) of the housing. The mirror is mechanically coupled to a drive (4) or a bending beam and as a flexing resonator in the housing.

Abstract: There is provided a dynamic light-scattering measuring apparatus including: a Mach-Zehnder interferometer; and a low-coherence light source. Further, there is provided a method for measuring light-scattering intensity of particles in a medium, including the steps of: providing a Mach-Zehnder interferometer; and measuring light-scattering intensity from light emitted from a low-coherence light source, in accordance with a dynamic light-scattering intensity measuring process.

Abstract: A method and apparatus are disclosed for providing image data for generating an image of a region of a target object. The method includes the steps of providing incident radiation, focusing the radiation downstream or upstream of a target object and via at least one detector located downstream of a focusing element, detecting an intensity of radiation scattered by the target object at an observation plane offset from a back focal plane associated with the focusing element.

Abstract: There is provided an electromagnetic field measurement apparatus capable of achieving correct and timely circuit operation detection in an area where electronic devices are mounted at high density. An electromagnetic field measurement apparatus includes: a laser light source; a polarized wave controller that linearly polarizes laser light; an optical fiber probe that has an electrooptic material or a magnetooptic material at its leading end and in which the laser light reflected at the leading end is subjected to polarization modulation in accordance with an electric field intensity or a magnetic field intensity; and an analyzer that converts the laser light reflected by the optical fiber probe into intensity modulated light. The laser light source emits time-multiplexed laser light of a plurality of wavelengths different from one another.

Abstract: An inspection apparatus and method includes a light source, an illuminating unit having a polarization controller and an object lens for illuminating a specimen with light emitted from the light source and passed through the polarization controller and the object lens, a detection unit having a sensor for detecting light from the specimen illuminated by the illuminating unit, a processor which processes a signal output from the sensor so as to detect a defect on the specimen, and a display which displays information output from the processor. The processor processes an image formed from the signal output from the sensor in which the image is reduced in speckle pattern.

Abstract: An optical comparator arranged for rear projection onto a viewing screen combines an optical projector that projects an optical image of a test part under inspection onto the viewing screen with a video projector that projects an optical image of a pixilated template pattern containing illustrated specifications of the test part onto the same viewing screen. The images of the test part and the pixilated template pattern are projected concurrently onto the viewing screen for visually comparing the form of the test part against its specified form.

Abstract: An alignment apparatus for a planar member includes, an image capturing unit which captures an image of a rotationally asymmetrical alignment mark provided on the planar member, a position detection unit which detects a position of the alignment mark from the image, a position adjusting unit which adjusts, based on the detected position of the alignment mark, the position of the planar member relative to a reference position, and an orientation detection unit which detects an orientation of the planar member based on the rotational asymmetry of the alignment mark captured in the image.

Abstract: The current invention provides a devices methods and systems for efficient biosensing using the Surface Plasmon Resonance (SPR) and Cavity Plasmon Resonance (CPR) phenomena. The miniature biosensor comprises a stratified structure having a channel for analyte form between a substrate and thin metallic absorber layer in which plasmon are resonantly excited. Presence of analyte in the channel, changes the resonance conditions, thus changing the energy absorbed by the biosensor. Bolometric signal from the absorber; layer or detection of the radiation not absorbed by the biosensor is used to detect, measure the concentration of, or monitor the analyte.

Abstract: The present invention provides an apparatus for biogenic substance concentration measurement including: a cell including therein a first region, a second region, and a test solution retention space; a light source; a polarizing plate; and a photoreceiver, in which a plurality of first metallic nanorods each having a first antibody on a surface thereof are immobilized on the first region, a plurality of second metallic nanorods each having a second antibody on a surface thereof are immobilized on the second region, the respective long axes of the plurality of first metallic nanorods are aligned in the same direction, the respective long axes of the plurality of second metallic nanorods are aligned in the same direction, the long-axis direction of the first metallic nanorod is orthogonal to the long-axis direction of the second metallic nanorod, and at least one of the polarizing plate and the cell is capable of rotation with an optical axis as the rotation axis.

Abstract: A light detecting device includes a case, a light introducing member and a light receiving element. A predetermined light is incident into an inlet face of the introducing member, and an outlet face of the introducing member emits the light incident into the inlet face. A first distance is defined between a top point of the outlet face and a focus of the introducing member, and a second distance is defined between the top point of the outlet face and a light receiving face of the receiving element. The outlet face has a convex lens shape in a manner that the first distance is smaller than the second distance.

Abstract: A method of determining an overlay error between two successive layers produced by a lithographic process on a substrate, including using the lithographic process to form a calibration structure including a periodic structure of the same pitch on each of the layers, such that an overlaid pair of periodic structures is formed, the structures being parallel, but offset relative to each other by an overlay amount. A spectrum produced by directing a beam of radiation onto the calibration structure is measured and compared with one or more modeled spectra so as to determine values of the grating parameters for the calibration structure from the measured spectrum. The lithographic process is used to form further overlaid periodic structures on the same or one or more subsequent substrates, the determined grating parameter values for the calibration structure being used to determine overlay amounts for the further overlaid periodic structures.

Abstract: A tunable optical spectrometer is disclosed that includes a medium configured to perform polarization rotation within a frequency band on a linearly polarized test beam, wherein the medium is circularly birefringent, and wherein the polarization rotation is achieved based on two-photon-absorption. The medium includes a gaseous substance, a reference laser beam of circular polarization and a longitudinal magnetic field. The test beam propagates through the medium twice, once in the same direction as the magnetic field, and once in the opposite direction of the magnetic field. The test beam undergoes polarization rotation an amount that depends upon the frequency of the test beam.

Abstract: An optical phase processing system for a scattering medium. A first beam has a direction and a wavefront and the first beam is configured to enter a holographic recording medium. A scattering medium is illuminated by a signal beam generating at least one scattered beam. An interference pattern is recorded from the at least one scattered beam and the first beam. A second beam is generated in a direction opposite to the direction of the first beam, the second beam having a wavefront and a phase substantially opposite to a phase of the wavefront of the first beam, and the second beam is configured to enter the holographic recording medium. The second beam and the interference pattern interact to generate at least one reconstructed beam having a phase substantially opposite to a phase of the at least one scattered beam, and the at least one reconstructed beam is configured to be viewable through the scattering medium.

Abstract: In certain embodiments, an optical device and a method of use is provided. The optical device includes a fiber Bragg grating having a substantially periodic refractive index modulation along a length of the fiber Bragg grating. The fiber Bragg grating has a power transmission spectrum with a plurality of local transmission minima, wherein each pair of neighboring local transmission minima has a local transmission maximum therebetween. The local transmission maximum has a maximum power at a transmission peak wavelength. The optical device further includes a narrowband optical source in optical communication with a first optical path and a second optical path.

Abstract: The present invention relates to an optical imaging apparatus and a method, and more particularly to an optical imaging apparatus and a method with short coherence length optical source. The apparatus comprises an optical source with a plurality of outputs for providing a reference light and a sample light; a sample probe module for leading the sample light to a sample, and leading an information light out; an interference module for leading the reference light to a photo detector, and leading the information light to the photo detector; and a signal processing unit electrically coupled to the photo detector; wherein the reference light and the information light are superimposed on the photo detector, an interference light pattern is detected by the photo detector, and a signal that represents the interference light pattern is transmitted to said signal processing unit for analyzing the spatial information of the sample.

Abstract: In one embodiment, a three dimensional imaging system includes a portable housing configured to be carried by a user, microelectrical mechanical system (MEMS) projector supported by the housing. sensor supported by the housing and configured to detect signals emitted by the MEMS projector, a memory including program instructions for generating an encoded signal with the MEMS projector, emitting the encoded signal, detecting the emitted signal after the emitted signal is reflected by a body, associating the detected signal with the emitted signal, comparing the detected signal with the associated emitted signal, determining an x-axis dimension, a y-axis dimension, and a z-axis dimension of the body based upon the comparison, and storing the determined x-axis dimension, y-axis dimension, and z-axis dimension of the body, and a processor operably connected to the memory, to the sensor, and to the MEMS projector for executing the program instructions.

Abstract: An apparatus for imaging the inner surface of a cavity in a workpiece has an optical system including a panoramic field of view that is linked to an imager and a downstream evaluation device by an image communication link. The apparatus furthermore has an illumination system including a light source to illuminate an imaging region of the inner surface, which region has been captured by the optical system. According to the invention, the illumination system is disposed in such a way relative to optical system, and for which the beam path is selected in such a way, that a first axial section of the imaging region is able to be illuminated under brightfield illumination, while simultaneously a second axial region spaced apart from the first axial region is able to be illuminated under darkfield illumination.

Abstract: The measurement apparatus is capable of performing measurement of a relative displacement amount or a relative displacement speed between the apparatus and a measuring object (20). The apparatus includes a light source (10) emitting a divergent light flux with coherency, and a light-receiving element (31) converting reflection optical images (SP) formed by the divergent light flux into electrical signals. A light-emitting surface of the light source and a light-receiving surface of the light-receiving element are disposed on a same plane (C), and the apparatus projects the divergent light flux onto the measuring object without using an optical surface. A condition of tan(?/2)>D/(2·L) is satisfied where ? represents a light distribution angle range of the light source, D represents a distance between centers of a light-emitting area and a light-receiving area, and L represents a distance between the light source and the measuring object.

Abstract: A position-determining apparatus, such as measuring or surveying instruments, is disclosed. In at least one embodiment, the present invention relates to a tilt sensor for a measuring instrument including a movable housing that is controllably rotatable around a rotational axis, wherein the rotational axis may be positioned so that it deviates from a true vertical axis being parallel with a gravitational axis. In at least one embodiment, the tilt sensor includes a gravity sensitive gradient indicating element arranged such that a surface of the element is positioned orthogonally to the true vertical axis during movements of the measuring instrument, wherein the gravity sensitive gradient indicating element is arranged in connection to the non-rotating base; and a detecting device adapted to produce at least one detecting signal and to receive at least one response signal, wherein a deviation between the rotational axis and the true vertical axis is detectable using the at least one response signal.

Abstract: An alignment device includes an incoherent light source, a first convex lens, a mirror rod, and a second convex lens. The incoherent light source emits incoherent light that is received by the first convex lens that produces a low divergence light beam. The low divergence light beam is directed to the mirror rod that reflects the light beam to the second convex lens that focuses the light beam to a convergent light beam.

Abstract: An apparatus for measuring a thickness, which includes: a first beam splitter for reflecting or transmitting a ray irradiated from an optical source or a ray reflected by a measurement object; a first lens part which condenses a ray to the measurement object and generates a reference ray having a difference of a light path in comparison with a ray reflected by the measurement object; a second lens part for condensing a ray to the object to be measured; an interference light detector which corresponds to at the first lens part so as to form a light path and detects an interference signal generated by the ray reflected by the measurement object and the reference ray; a spectroscopic detector which corresponds to the second lens part so as to form a light path different from the light path formed by the interference light detector and splits the ray reflected by the measurement object so as to detect an intensity and a wavelength of each split ray; and a light path converter for selectively transmitting a ray to

Abstract: Systems and methods of scanning, enlarging, and printing one or more selected areas of a document are disclosed. The systems and methods include an imaging device that partitions a document into a plurality of grid areas and receives, from a user, a selection for one or more of the grid areas to be enlarged and printed. The imaging device further receives or determines an enlarged output size for the selected grid areas. The imaging device scans the document to form digital images corresponding to the selected grid areas, and adjusts and enlarges the digital images to equate to the enlarged output size. A printer of the imaging device outputs the enlarged digital images on paper of the output size.

Abstract: An image forming apparatus is capable of adjusting a print density with a plurality of set values including a first set value and a second set value. The image forming apparatus includes a storage unit for storing a first density as a target value of the print density; a density detection unit for detecting a second density as a print density of an image printed on a transfer medium; and a control unit for adjusting the print density. The control unit compares the first density and the second density, and calculates a first correction value applied to one of the first set value and the second set value for correcting the second density to the first density according to a density difference generation condition determined in advance. The control unit corrects the first set value or the second set value according to the first correction value for adjusting color balance.

Abstract: An image processing device includes a first and a second image processing module including an image processing unit, and a connection module that is connected to the first and second image processing modules, and moves an image data from one image processing module to the other image processing module. At least one of the image processing modules includes a weighted average processing unit that calculates, based on a weighting coefficient included in an attribute value, a weighted average of a pixel value of the input image data and a image processed pixel value, and an output unit which outputs at least one of the image processed pixel value and the weighted-averaged pixel value.

Abstract: An image processing apparatus comprising: a generation unit configured to determine characteristic information associated with image data which expresses an image, to generate an attribute value based on the determination result, and to set the attribute value in an attribute value field included in the image data; and an image processing device configured to apply an image process to a pixel value set in a pixel value field included in the image data, based on the attribute value set in the attribute value field.

Abstract: An image processing apparatus which previously sets a reduction order based on saturation with respect to inks to be used in a saving mode. When a color uses two or more colors of ink, the image processing apparatus reduces the ink featuring high on the reduction order, or increases the reduction amount of the ink featuring high on the reduction order.

Abstract: A foreground layer generating unit generates a foreground layer on the basis of a foreground mask generated by a foreground mask generating unit and an original image. A binary image processing unit generates N binary images corresponding to N kinds of foreground identifiers on the basis of the foreground layer, and sets a plurality of tiles for each of the N binary images. Further, the binary image processing unit determines whether or not adjacent tiles are to be merged, and then sets tiles obtained by merging tiles determined to be merged, and leaving tiles determined not to be merged as they are. An image compressing unit cuts out rectangular regions from the individual set tiles by employing the binary images, and compresses the rectangular regions.

Abstract: A form printing system comprising an information processing apparatus, a server, and a printing apparatus that are connected to each other, wherein the server includes: a device identification information management unit that manages device identification information in association with user-specific user authentication information; an encryption unit that encrypts the field data and the form information received from the information processing apparatus; an encoded code generation unit that generates the first encoded code from an encrypted character string generated by the encryption unit; an encoded code sending unit that sends the first encoded code generated by the encoded code generation unit to the information processing apparatus; a form data distribution unit that, in a case where a form data acquisition request that includes form information is received from the printing apparatus, sends form data that is in accordance with the acquisition request to the printing apparatus.

Abstract: According to one embodiment, an image forming apparatus includes a setting section configured to set setting information for forming an image on a recording medium, feeding cassette configured to contain the recording medium, a printer configured to form the image on the recording medium in the feeding cassette, a media sensor configured to detect characteristic information of the recording medium, an image forming condition determination section configured to determine a first image forming condition to regulate an image forming operation of the printer based on the characteristic information of the first recording medium in a first print job, a control section configured to control the image forming operation for a second or later recording medium in the first print job in accordance with the first image forming condition, and a storage section configured to classify and store the characteristic information detected by the media sensor.

Abstract: Systems and methods of adding information to an N-Up output document. The systems and methods include a user interface of a printer driver that can prompt a user to enter information about an accessed original document to be printed as N-Up. The entered information relates to specific page images, N-Up pages, as well as to the N-Up document itself. A printer can print an N-Up output document with both the page images and the associated entered information. The entered information is displayed either in proximity to the respective components, or in a list which provides a reference for a viewer.

Abstract: Selective rerouting of document processing jobs is disclosed. A printer driver first converts electronic document data is into a device compatible format and assigned a unique document ID. The printer driver then determines a set of network devices, such as document processing devices, that are participating in the performance of received document processing jobs. The converted document data is then divided into portions and one or more portions are then sent to each of the participating network devices. One of the devices is then selected as the output device, whereupon the output device broadcasts/multicasts a request for processed data portions from each of the other network devices. The received portions are then recombined, and released for further processing in accordance with the received document processing job.

Abstract: Provided is a control method for controlling a data processing apparatus that can be connected to an external apparatus via a network. The control method includes obtaining and displaying a user interface held in the external apparatus. An instruction from a user is received via the displayed user interface. The received instructions are transmitted to the external apparatus. A session for communicating with the external apparatus is reserved when authentication of the user manipulating the data processing apparatus has succeeded. The reserved session is used to execute control to receive from the external apparatus a processing request that corresponds to the instruction transmitted to the external apparatus.

Abstract: An electric device is capable of transmitting and receiving data relative to an external device. The electric device includes an error detection unit for detecting an error occurred in the electric device; an error restoration command holding unit for holding an error restoration command to restore the error; and an error analyzing unit for analyzing the error occurred in the electric device and retrieving the error restoration command from the error restoration command holding unit according to an analysis result of the error. In the electric device, when the error detection unit detects the error, the error restoration command is retrieved from the error restoration command holding unit according to an analysis result analyzed with the error analyzing unit.