Abstract: It is an aim of the present invention to overcome urgent and pressing global troubles directly associated with the human right to live, such as the energy crisis, the economic crisis, and environmental pollution and the like which cannot be delayed or neglected any longer in order to meet the needs of the times. Further, it is an aim of the present invention to significantly reduce the dependency on a variety of fossil directly associated with global warming. Therefore, the present invention provides a cylinder driving apparatus using air pressure, with maximized energy, characterized in that the use of fossil fuel energy is reduced and the use of clean energy is proposed. The present invention relates to a cylinder diving apparatus in which a plurality of flexible tubes connected to a crankshaft are filled with high pressure air, alternately expand by expansion energy, and are elevated to operate and rotate the crankshaft.

Abstract: The present utility model is a free-piston engine comprising pinions, with various stages, providing excellent efficiency and control.

Abstract: The variable displacement compressor has a suction-pressure region, a discharge-pressure region and a crank chamber. The compressor includes a supply passage, a bleed passage and a control valve that adjusts cross-sectional area of the bleed passage. The control valve includes a valve chamber, a valve portion and a valve seat member. The valve portion is disposed in the valve chamber for dividing the valve chamber into a bleed chamber, a backpressure chamber and a communication passage. The bleed chamber forms a part of the bleed passage. The backpressure chamber communicates with the supply passage. The communication passage is formed between an outer circumferential surface of the valve portion and an inner circumferential surface of the valve chamber for providing fluid communication between the bleed chamber and the backpressure chamber. The valve seat member is disposed in the bleed chamber and provided separately from a compressor housing forming the valve chamber.

Abstract: An impact filter suitable for a kitchen exhaust hood is provided with a grease trap to capture grease particles and channel the particles away. The trap can be of different configurations. The filter can be used in various processes to clean air streams, such as filtering processes for removing grease and other cooking exhaust particles and other processes for removing grease particles.

Abstract: The present invention relates to a carbon dioxide absorbent. In particular, the present invention relates to a carbon dioxide absorbent comprising an ionic liquid, amine and glycol. Since the carbon dioxide absorbent of the present invention can retain excellent CO2 absorption capacity despite repetitive regenerations at low temperature, it can reduce energy consumption and a loss of absorbents used, and therefore, can be effectively used for a process of collecting carbon dioxide from exhaust gas and natural gas and separating the same.

Abstract: A portable handheld canister vacuum comprising an upper, central, and lower housing is disclosed. First and second grills can separate the housing sections. An air intake opening can direct air and dirt in a first axial direction to a dirt capturing device in the lower housing. An air propulsion device directs air in a second axial direction opposite to the first axial direction into the central housing and from there into the upper housing. An exhaust opening disposed through the upper housing and leading to the interior region of the upper housing allows air to exit the interior region of the upper housing. The exhaust can exit the upper housing in a direction substantially perpendicular to the first and second axial directions.

Abstract: Systems and methods for capturing pollutants from braking mechanisms are provided. The systems can include a housing partially surrounding at least a portion of a vehicle brake assembly and disposed to receive brake dust from the brake assembly and a collector disposed to capture the brake dust received in said housing. A method can include providing the a providing a housing partially surrounding at least a portion of a vehicle brake assembly and disposed to receive brake dust from the brake assembly and a collector disposed to capture the brake dust received in said housing, creating a first air flow using the forward motion of the vehicle to move the pollutants from said housing to said collector, and capturing the brake dust in said collector.

Abstract: A system includes a particulate matter (PM) filter including an upstream end for receiving exhaust gas and a downstream end. A radiant zoned heater includes N zones, where N is an integer greater than one, wherein each of the N zones includes M sub-zones, where M is an integer greater than or equal to one. A control module selectively activates at least a selected one of the N zones to initiate regeneration in downstream portions of the PM filter from the one of the N zones, restricts exhaust gas flow in a portion of the PM filter that corresponds to the selected one of the N zones, and deactivates non-selected ones of the N zones.

Abstract: A method for filtering particles from water mist laden air involves passing the air through a medium that has a nanoweb layer in fluid contact with a hydrophobic nonwoven web. The hydrophobic web can be made of an intrinsically hydrophobic material, or can be coated with a hydrophobic coating. The medium does not undergo the large pressure drops normally associated with filtration of water mists and retains its efficiency well.

Abstract: A degassing apparatus (27) for degassing a liquid (240) comprises a vacuum chamber (200), a liquid conveyance member (210) disposed in the vacuum chamber (200) and adapted for transporting the liquid (240), and a pump (220) adapted to evacuate the vacuum chamber (200). The vacuum chamber (200) comprises a vent (270) adapted for venting the vacuum chamber (200).

Abstract: A canister includes a first fuel vapor adsorption device and a second fuel vapor adsorption device. The second fuel vapor adsorption device can adsorb a part of fuel vapor that still remains in a gas after desorption by the first fuel vapor adsorption device. The second fuel vapor adsorption device includes a first passage containing a fuel vapor adsorption material and a second passage containing no fuel vapor adsorption material. The first passage and the second passage allow the gas to flow therethrough. A gas introduction device allows the fuel vapor to flow from the second passage into the first passage.

Abstract: Provided is an apparatus for producing cereal puffs, which heats cereals under pressure by means of a continuous circulating operation, puffs the cereals several times by means of a multistage rising operation, and causes the puffed cereals, i.e. the cereal puffs, to stand by at a predetermined position, and then to be rapidly discharged in a forward direction. Thus, it is possible to process the cereal puffs in a uniform shape, and to discharge the cereal puffs in a constant direction. Further, it is possible to simultaneously produce a plurality of cereal puffs having a uniform shape by means of one heating and pressurizing operation in a single apparatus.

Abstract: A frying-and-baking oven includes a baking outer pot, a heating cover assembly covering the outer pot, and a frying inner pot disposed between the outer pot and the heat cover assembly. The heating cover assembly includes a cover, an actuator, a hot-air supplying module, and a speed-reducing mechanism. The actuator has a driving shaft. The hot-air supplying module has an air-blowing impeller and a heating element. The driving shaft drives the air-blowing impeller to blow the hot airflow generated by the heating element. The driving shaft also drives a transmission shaft of the speed-reducing mechanism and in turn a stirring member to rotate at a low speed, thereby stirring food materials in the inner pot. With this arrangement, the food materials received in the inner pot can be stirred automatically and cooked sufficiently. Further, the oven can cook the food materials by baking or frying, which increases the functionality and convenience thereof.

Abstract: A lifting mechanism of a fry device and a frying pan has a lifting mechanism connected between a basement and a reflector plate, and a heating pipe is set on the reflector plate. The lifting mechanism includes a slide rail, an inner support bracket, an outer support bracket, a support basement and a joint pin. The slide rail is installed on the basement of the fry device, and the inner support bracket is intercrossed with the outer support bracket. Rotatable axes connected with the slide rail are provided on the base ends of the inner support bracket and the outer support bracket. Moreover, the support basement is installed on the basement of the fry device and is opened with a longitudinal guide slot, and the joint pin is connected with the longitudinal guide slot and through slots of the inner and the outer support brackets slidably.

Abstract: A stepless height adjusting mechanism of a grilling pan lever, has a lever, a lifting pin, a cam and a knob. The cam is a disk-shaped element with a gradually increasing diameter and rotates around a fixed shaft disposed on the rear portion of the side of the lower housing, the inside of the articulated portion of the lever is fixed with a skew surface wall, the distance between the skew surface wall and the articulated shaft of the rear portion of the lower grilling pan increases gradually, the lifting pin is disposed between the cam and the skew surface wall, and moves vertically between the cam and the skew surface wall, and leaned against the outer peripheral surface of the cam and the skew surface wall; the outside of the cam is fixed with the knob. The mechanism realizes stepless height adjustment of the lever from 0° to 45°.

Abstract: Provided is an apparatus for producing confectionery including a grain supply unit installed on a main body and uniformly supplying grains inserted from the outside, a grain processing unit rotatably installed on the main body, receiving the grains and crushing the grains using a rotating spiral, and simultaneously discharging the grains in a jellylike state using frictional heat generated during collision of the grains, and a drive unit for driving the grain processing unit and the grain supply unit.

Abstract: A strapping machine includes a machine body, a strap chute, a strap supplying device, and a controlling device. The machine body has a working surface. The strap chute includes an access guiding portion and an exit guiding portion. The controlling device can control the access guiding portion and the exit guiding portion moving to suitable heights independently. So, an object to can be moved in for a strapping work and then be moved out. Hence, the vertical moving distances of the access guiding potion and the exit guiding portion can be adjusted independently. In addition, it can save the waiting time.

Abstract: The subject invention relates to a knotter assembly for use in a wire-tieing system. The knotter assembly includes a slidably removable twist module assembly, a ratcheted cover arm assembly, and a torque tube assembly having two operating arms that carry all of the operating components for actuating various elements of the knotter assembly.

Abstract: An embossing roll for producing fibrous products especially tissue paper products, non-woven products or a hybrid thereof, and preferably hygiene and cleaning products, with an embossing surface is suitable to run against an anvil roll, the embossing surface includes protrusions starting from a base circumferential surface of the embossing roll; the embossing protrusions form a pattern with a base surface area of at least 3 cm×3 cm; within each pattern there is a high number of embossing protrusions which are sized and/or positioned such as to represent a rastered motive element covering the base surface area; at least some of the embossing protrusions are dimensioned and/or positioned such that consecutive minimum distances between opposed side surfaces of pairs of embossing protrusions arranged in sequence vary gradually. A device employing the embossing roll and a method for arranging embossing protrusions on a circumferential surface of the embossing roll are described.

Abstract: The invention relates to a unit for cold film transfer in a printing press. In order to improve the transfer process, a control device is used to control the film transfer, said control device adjusting the color values and the coating parameters of the transferred films.

Abstract: A sub-caliber bullet with an aerodynamic shape has long-range accuracy due to a high muzzle velocity and reduced time of flight to a target. The bullet has a forward portion, a mid-portion and an aft portion. The forward portion has a density in excess of 10/cm3 while the mid-portion has a lower density. The bullet has an aspect ratio of at least 5:1 and a diameter, d, that satisfies a Power Law equation: d=D*(x/L)n where D is a maximum bullet diameter, L is the length, x is a distance rearward from a nose of the bullet and n is a Power Law exponent that is between 0.5 and 0.75. In some embodiments, a blind bore extends into the mid-portion from the aft portion and a sustainer propellant within the blind bore ignites as the bullet exits a gun muzzle to provide a velocity boost and to overcome aerodynamic drag.

Abstract: The present invention includes a modular cartridge system for firearms. The system includes a plurality of cartridges that each having a base, a rim, a case, and a projectile coupled to the case. Each cartridge of the system includes base and rim dimensions that are functionally equivalent to each other, projectile diameters that are variable between 0.220 inches and 0.4050 inches, and case lengths that are variable between 0.500 inches and 2.000 inches.

Abstract: A projectile for delivering an incapacitating agent through a barrier includes a canister containing the agent and having a closure. The canister is retained in a holder to which is fixed a sleeve formed of a plurality of axial fingers configured to spread radially outward upon impact with the barrier. A ballistic body, configured to penetrate the barrier and having a dispersion port, is connected to the holder forward of the canister so as to be axially movable from a forward position to a rearward position upon impact with the barrier, the ballistic body including a closure-breaching member located so as to breach the closure as the ballistic body moves rearward, thereby placing the canister in fluid communication with the dispersion port. The fingers spread radially against the surface of the barrier opposite the dispersion port so as to lodge the projectile in the barrier.

Abstract: The present invention relates to an electrical disabling projectile system for disabling a moving vehicle comprising: a disabling device, where the disabling device includes a power supply means and a launching projectile, where the projectile is capable of transmitting a disabling current; a control panel, where the control panel includes a means to release the projectile and a means to activate the disabling current; and a power supply means to supply power to the control panel and the disabling device. The disabling device includes at least one mounting bracket that enables the placement of the disabling device onto the front of a vehicle.

Abstract: Disclosed is a mobile robotic arm workcell. A robotic arm is mounted on a superstructure that carries all the equipment associated with the workcell's task. Thus, the workcell is self-contained needing only power. The workcell may be moved by activating air bearings that are pressurized by an air compressor that is also mounted on the superstructure. Power is received via power contacts that engage a power rail. Guidance is provided a guide system. The guide system may include guide rails engaged by guide carriages. Propulsion is provided by a drive system that may engage the guide system or the factory floor.

Abstract: An elevated bicycle-based transportation system comprises a bicycle, a front suspension member, connected to a front portion of the bicycle and having on the upper end a rolling, sliding, or gliding member, a rear suspension member, connected to a rear portion of the bicycle and having on the upper end a rolling, sliding, or gliding member, and an overhead track, which is a supporting member substantially horizontal in orientation, on which the rolling, sliding or gliding members of the suspension members rest. When suspended in this way, the bicycle can be ridden along the overhead track. When the suspension members are not suspended from the overhead track, the bicycle can be used in the normal manner, and at least one of the suspension members can be retracted, collapsed, folded, pivoted, detached, or otherwise modified by a simple operation, to be made less prominent.

Abstract: A guidance system for a medical facility includes at least one floor element that extends along a path of the medical facility and is arranged in a floor area of the path. The at least one floor element is configured for magnetic interaction such that through the magnetic interaction of the floor element with a magnetic guide element arranged on a mobile transport device, a magnetic attraction is generated. The mobile transport device is guided along the at least one floor element by the generated magnetic attraction during forward motion of the mobile transport device along the path through the medical facility.

Abstract: The present invention provides a functionally dry warm mix asphalt binder composition modified with lubricating agents or additives that can be mixed with aggregate and compacted at temperatures substantially below asphalt binder compositions that do not contain the disclosed lubricating additives.

Abstract: The present invention relates to the use of sterically hindered amines comprising one or more groups of the general formula (I) to stabilize inanimate organic material, more particularly plastics or coating materials, where R1 and R2 each independently, alike or different, are H, C1-C20 alkyl, C3-C15 cycloalkyl, aryl, hetaryl or a heterocycle, R4, R5, R6, and R7 each independently, alike or different, are C1-C20 alkyl, or R4 and R6 or R5 and R7 together are a tetramethylene or pentamethylene group, and R3 is aryl or hetaryl. The invention further relates to methods of stabilizing inanimate organic material, especially plastics or coating materials. Additionally provided by the invention are selected sterically hindered amines comprising one or more groups of the general formula (I). Additionally provided by the invention are materials that comprise selected sterically hindered amines.

Abstract: In sulfate resistant cement obtained by mixing ground granulated blast furnace slag, Portland cement, and high-dissolution rate gypsum for raising the sulfate resistance, the high-dissolution rate gypsum differs in grain size and specific gravity from the Portland cement, so uniform mixture is not easy. To obtain sulfate resistant cement exhibiting homogeneous initial solidification, it is important to uniformly mix the blast furnace slag, Portland cement, and high-dissolution rate gypsum. Therefore, by premixing ground granulated blast furnace slag with an alumina content of 12 to 17.5% with high-dissolution rate gypsum and then mixing in Portland cement, it is possible to obtain uniformly mixed sulfate resistant cement. At this time, the high-dissolution rate gypsum may be hemihydrate gypsum, type III anhydrous gypsum, or anhydrous gypsum with a specific surface area of 8000Blaine or more.

Abstract: An embodiment of the present invention is a rotating structure. An outer ring is placed on a first surface of a trench in a foundation having a ground surface. An inner ring is positioned inside the outer ring on the first surface. A bar assembly is positioned between the outer ring and the inner ring. A plurality of rollers supports the bar assembly. A plurality of motors engages to the bar assembly to cause the bar assembly to rotate when activated.

Abstract: An eco-friendly system for generating thermal energy from waste biomass comprises a furnace, a set of boiler tubes placed on the top of the furnace, a rectangular or tubular structure housing the boiler tube and the furnace, an outlet for the flue gases leading to a cyclone, said cyclone carrying a tubular body for leading away a part of flue gases and fitted with a butterfly control valve for regulating flow of effluent gases, a tubular body connecting the body to the suction blower, a water tank, a hopper for waste biomass, and a fuel injection blower for introducing fuel inside the furnace by means of pressurized air jet blown through the pipe.

Abstract: A multi-hull sailboat or motorboat that are made of a number of single-hull vessels in the process of modification or utilization of old yachts, wherein said multi-hull vessel can be configured as a pivoted train-like combined vessel, as a permanently-merged vessel or can be configured as a catamaran or triamaran. Also, said multi-hull sailboat or motorboat can be made of a number of new single-hull vessels equipped by a universal connecting device.

Abstract: A sail includes at least two layers of durable sailcloth material (e.g., Mylar), a scrim of load bearing yarns arranged in predetermined load path orientations, and at least one heat-activated adhesive layer securing the layers of material to the scrim, such that the scrim is positioned between the layers of material. At least one of the layers of material includes visible content on an outside surface thereof. The visible content is preferably applied to the outside surface(s) of the layer(s) of material using dye sublimation to provide durable imaging. An opaque layer may be optionally included between the two outer layers of material to prevent the passage of light through the sail. Alternatively, the adhesive layer(s) may be dyed or otherwise colored to effectuate an opaque layer. The sail is preferably manufactured using a high temperature, vacuum lamination process to mitigate the quantity of voids between the layers of material.

Abstract: A vertically installed Spar-type floater for offshore wind turbine and related construction method are provided. The floating system is a gravity stabilized deep-draft floater including a plurality of vertically extending columns, each column containing a ballast material; a ballast tank coupled to the lower end of each of the columns; a top deck having a plurality of through-bores approximate its periphery coupled to the upper end of each of the columns; a wind turbine assembly supported by the top deck at the center; a plurality of mooring lines linking the floating system to the sea floor. The floating system has a temporary vertically towing configuration which: allows the entire, floating wind turbine system to be assembled at a quayside and towed vertically to an offshore site, and self-installed into operating configuration.

Abstract: A whistle for producing resonant frequencies comprising a body which includes a mouth piece having an inlet, and at least two sound chambers to which inlet air is blown from the inlet. The whistle further includes air passageways for communicating inlet air from the inlet to the sound box and sound chambers. The body further includes at least two exhaust ports in communication with the sound chambers for discharging air and sound. The two sound chambers are dimensioned to create peak principal frequencies which interactively produce a pulsating sound having a periodic pulse frequency of less than 100 hertz. The whistle preferably includes air intake ports for communicating additional port air into the sound box.

Abstract: An informational display device and method for displaying informational material about an item to potential customers for the item. The device includes a housing for removably receiving informational material, and a clip portion for attachment to the item. In example forms, a vehicle information sheet or buyer's guide is secured to a window of a vehicle and can be removed, replaced and reused. In one form, the display device is modular and includes a clip adapted to be slipped over the top of a door glass of the vehicle, a rail removably attached to the clip, and a document display housing secured to the rail and comprising an inner panel and an outer panel, and defining a chamber therebetween for receiving and displaying a document, with at least a portion of the document display housing being transparent to allow viewing of the document therethrough.

Abstract: A circuit breaker is disclosed that provides a warning that the current through the circuit breaker exceeds a warning threshold. The circuit breaker comprises: a switch that carries a current I; an indicator for alternatively indicating: (i) that the current I has not exceeded IW, and (ii) that the current I has exceeded IW; and an actuator in series with the switch that: (i) causes the indicator to indicate that the current I has exceeded IW when and only when the current I has exceeded IW, and (ii) opens the switch when and only when the current I exceeds IT; wherein 0<IW<IT.

Abstract: The invention relates to an indicator comprising a substrate and an optical grating structure fabricated on the substrate, the grating structure being formed from an indicator material comprising a binder and deliquescent salt and varying in volume by the effect of moisture. Further, the invention relates to a method for fabricating an indicator wherein a substrate is coated by an indicator material forming an optical grating structure, and the optical grating structure is fabricated onto the substrate, and use of an indicator for detecting quality and/or authenticity. Furthermore, the invention relates to a package and a method for detecting a change induced by moisture without breaking the package.

Abstract: An indicator assembly for an aircraft landing gear for providing indication of a hard landing. The indicator assembly including a actuator member movable when the pressure on a shock strut of the aircraft landing gear exceeds a desired load and stroke threshold indicative of a hard landing. A shear pin is coupled to the actuator member which is configured to shear when a desired level of force is applied to at least a portion of the shear pin. A visibly recognizable indictor is moved from a non-indicating position to an indicating position upon shearing of the shear pin.

Abstract: A precise critical temperature indicator is applied to small products requiring refrigeration or freezing to control the operation of a temperature sensor built into an integrated structure of a single body. A method for manufacturing said precise critical temperature indicator, wherein a plurality of development medium members and a plurality of development material members are opposed to each other, and blocking members are interposed therebetween to support the development medium members and the development material members separately from each other, the development medium members are provided with paths for moving development materials, or paths for movement of development materials can be shortened to adjust speed, and an indication unit is arranged to indicate the state of the development materials at an end or central portion of the development medium when the development materials are exposed to a critical temperature for a predetermined time period.

Abstract: The present invention provides a method of manufacturing a silicon single crystal which can more greatly suppress a pinhole formation in the silicon single crystal, which is a method of manufacturing a silicon single crystal by the Czochralski method in which a silicon material to be silicon melt is melted in a furnace body and then a silicon single crystal is pulled up. After melting the silicon material and before the start of pulling up the silicon single crystal, a heater power is set to be higher than that during the step of pulling up the silicon single crystal, and an internal furnace pressure is set as 30 Torr or less, which is lower than that during the step of pulling up the silicon single crystal, the power and pressure being maintained for a predetermined time, and then the step of pulling up the silicon single crystal is carried out.

Abstract: The present invention is directed to an upper heater for use in the production of a single crystal, the upper heater in which at least electrodes to which a current is supplied and a heat generating section which generates heat by resistance heating are provided, the upper heater being used when a single crystal is produced by Czochralski method, the upper heater being placed above a graphite heater which is placed so as to surround a crucible containing silicon melt, wherein the heat generating section is ring-shaped and is placed so as to surround the crucible, and has slits formed from the inside and the outside of the heat generating section in a horizontal direction.

Abstract: The present invention provides a silicon single crystal manufacturing method for manufacturing a single crystal based on a horizontal magnetic field applied CZ method for pulling the single crystal while applying a horizontal magnetic field to a silicon raw material melt accommodated in a quartz crucible by a magnetic field application device, comprising: measuring a center position of the magnetic field generated by the magnetic field application device; and deviating the measured center position of the magnetic field from a pulling member serving as a rotation axis of the single crystal in a horizontal direction within the range of 2 to 14 mm before manufacture of the single crystal and/or during manufacture of the single crystal.

Abstract: A crucible includes: a crucible body configured to hold the sublimation raw material; a lid configured to close an opening of the crucible body and provided with a mounting portion configured to support the seed crystal; and a guide member extending toward a sublimation raw material side from an outer peripheral portion of the mounting portion. The guide member has a cover portion configured to cover an outer peripheral portion of the seed crystal from the sublimation raw material side, the cover being protruded from a mounting unit side end portion provided on a mounting portion side.

Abstract: A spray edger device, which is suitable for use with a material application apparatus, said spray edger device includes a planar blade member, a substantially V-shaped frame member for supporting the planar blade member, and a collar member configured for moveably connecting the planar blade member to a barrel portion of a material application apparatus.

Abstract: An electroless plating system includes a plating solution, and controlling reducing agents in the plating solution for deposition over outlier features smaller than about five hundred nanometers and isolated by about one thousand nanometers.

Abstract: An atmospheric plasma apparatus for depositing a layer on a continuous base film transported in its longitudinal direction includes an electrode for treatment provided opposite to the peripheral surface of a drum electrode and upstream of an electrode for deposition in the direction of transportation of the base film, an electric power source for treatment which applies voltages to the electrode for treatment, and a reactive gas-feeding element for feeding a reactive gas for surface treatment between the drum electrode and the electrode for treatment. The atmospheric plasma apparatus as such is capable of depositing a layer without impairing effects of surface treatment, allowing a higher adhesion between the base film and the layer deposited thereon and, consequently, an efficient, successive deposition of a high-quality layer.

Abstract: It is an object to provide a homogeneous semiconductor substrate in which defective bonding is reduced. Such a semiconductor substrate can be formed by the steps of: disposing a first substrate in a substrate bonding chamber which includes a substrate supporting base where a plurality of openings is provided, substrate supporting mechanisms provided in the plurality of openings, and raising and lowering mechanisms which raise and lower the substrate supporting mechanisms; disposing a second substrate over the first substrate so as not to be in contact with the first substrate; and bonding the first substrate to the second substrate by using the raising and lowering mechanisms to raise the substrate supporting mechanisms.

Abstract: A film deposition apparatus is provided with a gas nozzle in which ejection holes that eject a reaction gas are formed along a longitudinal direction of the gas nozzle, and a flow regulation member that protrudes from the gas nozzle in either one of upstream and downstream directions of a rotation direction of a turntable. In such a configuration, a separation gas flowing from an upstream side of the rotation direction to the gas nozzle is restricted from flowing between the gas nozzle and the turntable on which a substrate is placed, and the reaction gas flowing upward from the turntable is restricted by the separation gas, thereby impeding a reaction gas concentration in a process area from being lowered.