Patents Issued in December 1, 2011
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Publication number: 20110292341Abstract: An imaging method according to some embodiments of the present invention includes obtaining working distance information from an optical coherence tomography system, the working distance being the working distance to the sample; obtaining information from one or more ocular systems; combining the information from said optical coherence tomography information and said ocular system; and displaying said combined information.Type: ApplicationFiled: June 1, 2011Publication date: December 1, 2011Inventors: Seema SOMANI, Jay WEI
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Publication number: 20110292342Abstract: A system and method for assessing the function of parts of the nervous system of a subject by measuring the pupillary responses to at least one stimulus ensemble comprising a plurality of individual stimuli; the method comprising: presenting a sequence of selected individual stimuli from the at least one stimulus ensemble to the nervous system of a subject thereby evoking pupillary responses in at least one pupil of the subject, selected individual stimuli being concurrently presented in the sequence, wherein the individual stimuli are each individually balanced such that the pupillary responses evoked by individual stimuli in the ensemble are balanced according to the strength of the neural responses evoked by the individual stimuli; detecting responses of the pupil or pupils evoked by the stimuli using a sensor; and processing the detected responses to relate them to the function of the subject's neural responses to some or all of the individual stimuli of the ensemble.Type: ApplicationFiled: December 4, 2009Publication date: December 1, 2011Applicant: THE AUSTRALIAN NATIONAL UNIVERSITYInventors: Teddy Lee Maddess, Andrew Charles James
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Publication number: 20110292343Abstract: An ophthalmic illuminator includes a one or more light combining stages arranged in series to augment a white light source with various color spectral bands. A first stage combines white light from a white light source with colored light from a first color source. Each subsequent stage in the series adds its own respective colored light. The color sources may be selectively turned on/off or driven with variable amounts of power. In this fashion, a combined light is produced by the final stage that represents a desired chromaticity and brightness as desired for a particular ophthalmic therapeutic procedure.Type: ApplicationFiled: March 31, 2011Publication date: December 1, 2011Inventors: Michael Papac, Ronald T. Smith, Michael J. Yadlowsky, Alexander N. Artsyukhovich
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Publication number: 20110292344Abstract: An ophthalmic illuminator is provided that includes a plurality of color sources, each color source producing a light of a corresponding color; a combiner for combining the light from the color sources to produced a combined light; at least one optical fiber configured to receive the combined light and propagate the received combined light towards a distal end of the ophthalmic illuminator; and a controller configured to control an intensity for each of the color sources responsive to a sampling of a spectral content for the combined light.Type: ApplicationFiled: March 31, 2011Publication date: December 1, 2011Inventors: Michael Papac, Ronald T. Smith, Michael J. Yadlowsky
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Publication number: 20110292345Abstract: A measurement device (100) for measuring a characteristic reading distance of an individual in a natural posture for near vision, includes: a portable or freely movable reading medium (110) presenting a plane display portion (120) suitable for displaying signs; and a measurement subassembly (140) including at least one ultrasound emitter member (150) and at least one ultrasound receiver member (151); wherein the emitter and receiver members are carried by the reading medium, and wherein at least one of the members, referred to as the first measurement member possesses a measurement axis (AME, AMR) along which emission or reception by the first measurement member is privileged and that is inclined relative to the plane of the display portion by an angle lying in the range 10 degrees to 80 degrees or that is inclinable relative to this plane of the display portion at least over an angular range extending from 10 degrees to 80 degrees.Type: ApplicationFiled: May 23, 2011Publication date: December 1, 2011Applicant: ESSILOR INTERNATIONAL (COMPAGNIE GENERALE D'OPTIQUE)Inventor: Ahmed HADDADI
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Publication number: 20110292346Abstract: A head-up display including a hybrid illumination system is provided. A light mixing unit provides a substantially homogenous light source to a reflective display unit. A concentrating optics unit collects ambient light and directs it towards the light mixing unit. At the same time, an electrically-powered light source emits light which is directed towards the light mixing unit. One or more optical elements direct the ambient light and the light source light into the light mixing unit for homogenization. A condensing unit receives the homogenized light mixture and outputs the condensed light to a polarizing beam splitter. A reflective display modulates the light from the polarizing beam splitter with information from a source of electrical information signals back towards the polarizing beam splitter. A projection unit projects the modulated light to create an image on a windshield.Type: ApplicationFiled: May 28, 2010Publication date: December 1, 2011Applicant: Hong Kong Applied Science and Technology Research InstituteInventor: Lo Ming Fok
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Publication number: 20110292347Abstract: Techniques for utilizing an infrared illuminator, an infrared camera, and a projector to create a virtual 3D model of a real 3D object in real time for users' interaction with the real 3D object.Type: ApplicationFiled: May 28, 2010Publication date: December 1, 2011Applicant: Microsoft CorporationInventors: Chunhui Zhang, Ji Zhao, Chunshui Zhao, Rui Gao
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Publication number: 20110292348Abstract: Provided is a balloon including an envelope and a projecting unit that projects an image, which switches display mode between first display mode that displays the image projected by the projecting unit on the envelope and second display mode that displays the image projected by the projecting unit on an external object through the envelope.Type: ApplicationFiled: March 31, 2011Publication date: December 1, 2011Applicant: Sony CorporationInventors: Hiroaki TOBITA, Shigeaki Maruyama
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Publication number: 20110292349Abstract: For a lighting device for obtaining output light in the wavelengths of light of three colors of red, green, and blue, a lighting device using a semiconductor laser for the blue light has been proposed. When using this lighting device in an image display device, etc., there are problems in blue color rendering properties and reduced image quality due to speckle noise. A light source device designed to emit red light, green light, a first blue light, and a second blue light, the light source device including: a red solid-state light source; a green solid-state light source; a semiconductor laser for emitting the first blue light; and a blue light generation part for emitting the second blue light, wherein the main component of the second blue light is light in a wavelength range of wavelengths longer than that of the first blue light.Type: ApplicationFiled: May 27, 2011Publication date: December 1, 2011Applicant: Panasonic CorporationInventors: Hiroshi Kitano, Yoshimasa Fushimi, Shigekazu Yamagishi, Takaaki Tanaka
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Publication number: 20110292350Abstract: A 2-dimensional beam scan unit reflects emission beams from a red laser light source, a green laser light source and a blue laser light source and scans in a 2-dimensional direction. Diffusion plates diffuse the respective light beams scanned in the 2-dimensional direction to introduce them to corresponding spatial light modulation elements. The respective spatial light modulation elements modulate the respective lights in accordance with video signals of the respective colors. A dichroic prism multiplexes the lights of the three colors after the modulation and introduces the multiplexed lights to a projection lens so that a color image is displayed on a screen. Since the 2-dimensional light emitted from the beam scan unit is diffused to illuminate the spatial light modulation element, it is possible to change the optical axis of the beam emerging from the light diffusion member for irradiating the spatial light modulation element moment by moment, thereby effectively suppressing speckle noise.Type: ApplicationFiled: August 8, 2011Publication date: December 1, 2011Inventors: Kenichi KASAZUMI, Yasuo Kitaoka, Kiminori Mizuuchi, Kazuhisa Yamamoto
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Publication number: 20110292351Abstract: The image projection apparatus includes a light modulating element modulating light according to an image signal, a correcting part performing correction processing on the image signal to decrease geometric distortion in a projection image by using correction data, a memory storing first correction data corresponding to interchangeable optical units, and a controller acquiring identification information of the interchangeable optical unit attached to the apparatus, reading the first correction data corresponding to the acquired identification information from the memory, and setting the read first correction data as the correction data for the correction processing. The controller acquires, when no first correction data corresponding to the acquired identification information is stored in the memory, second correction data stored in a memory in the attached interchangeable optical unit, and sets the acquired second correction data as the correction data for the correction processing.Type: ApplicationFiled: May 24, 2011Publication date: December 1, 2011Applicant: CANON KABUSHIKI KAISHAInventor: Atsushi ISHII
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Publication number: 20110292352Abstract: A method for calculating a position adjustment amount of projected image includes a first image step of obtaining first image data which is obtained by an image capturing device imaging first feature points which are displayed using light modulated by a first light modulation device, a second imaging step of obtaining second image data which is obtained by the image capturing device imaging a second feature point which is displayed using light modulated by a second light modulation device, an adjustment amount calculation step of calculating an adjustment amount based on the first image data and the second image data.Type: ApplicationFiled: May 24, 2011Publication date: December 1, 2011Applicant: Seiko Epson CorporationInventor: Koichi Yoshizawa
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Publication number: 20110292353Abstract: An optical device includes: a light synthesis prism that synthesizes incident light beams which are incident to a plurality of incidence surfaces and outputs the synthesized light beams; a light modulation unit that includes an optical compensation element and a reflective light modulation device; and a fixing member that fixes a reflective polarization element and the light modulation unit to the light synthesis prism so as to correspond to one of the incidence surfaces, wherein the light modulation unit includes a light blocking member that blocks light from reaching the light modulation unit and limits light with which the optical compensation element and the reflective light modulation device are irradiated, to light passing an aperture portion; and a heat insulating member that comes into contact with the light blocking member and the fixing member.Type: ApplicationFiled: May 17, 2011Publication date: December 1, 2011Applicant: Sony CorporationInventors: Tetsuaki Iwane, Yoshihisa Aikoh, Hideki Yamamoto, Keisuke Homma
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Publication number: 20110292354Abstract: The invention relates to a device for projecting an image on a surface, comprising: a light source generating a light beam; a mask arranged in the path of the light beam; a lens arranged behind the mask to focus the image of the mask on a surface, wherein the surface is not parallel to the lens, wherein at substantially each position along the edges of the mask the distance v to the lens and the distance b of the corresponding position at the edges of the image of the mask to the lens correspond substantially to the formula 1/v+1/b=1/f, wherein f is the focal length of the lengths. The invention also relates to a device for moving the image on the surface.Type: ApplicationFiled: December 22, 2009Publication date: December 1, 2011Applicant: SOLMATES B.V.Inventors: Joska Johannes Broekmaat, Jan Matthijn Dekkers, Jan Arnaud Janssens
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Publication number: 20110292355Abstract: Disclosed are a projection display apparatus and a projection optics provided in the projection display apparatus. The projection optics has a refractive optics and a reflective optics. In the refractive optics, a lens (non-circular lens) provided on a reflective optics side has a non-circular shape forming part of an imaginary circular region whose center is an optical axis center of the refractive optics. In other words, the non-circular lens has a shape of a cut-out portion of an imaginary circular lens having an optical axis center coinciding with the optical axis center of the refractive optics.Type: ApplicationFiled: April 1, 2011Publication date: December 1, 2011Applicants: RICOH OPTICAL INDUSTRIES CO., LTD., SANYO ELECTRIC CO., LTD.Inventors: Ryuhei AMANO, Takashi IKEDA, Kazuhisa TAKAHASHI, Yoshitsugu KOHNO, Osamu NAGASE
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Publication number: 20110292356Abstract: Provided is a substrate processing system including a group controller which determines a combination of processing apparatuses having the shortest total processing time including the processing end time in a final processing apparatus, determines a predictable elapsed time up to a processing start time by a predetermined downstream processing apparatus for a wafer lot from a processing end time of the wafer lot by a predetermined processing apparatus in the combination of the processing apparatuses, and determines a timing of discharging the substrate to the predetermined processing apparatus or an upstream processing apparatus of the predetermined processing apparatus so that the predictable elapsed time is set within a predetermined time when the predictable elapsed time exceeds the predetermined time.Type: ApplicationFiled: May 24, 2011Publication date: December 1, 2011Applicant: TOKYO ELECTRON LIMITEDInventors: Wataru TSUKINOKI, Yuichi YAMAMOTO
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Publication number: 20110292357Abstract: A fluid handling structure to confine immersion liquid in a space between a projection system and a facing surface of a substrate, of a table to support the substrate, or both, is disclosed. The fluid handling structure includes a transponder to dissolve at least some of the gas in a bubble in the immersion liquid or to control a bubble in the immersion liquid so that it avoids entering an optical path of a beam from the projection system.Type: ApplicationFiled: May 2, 2011Publication date: December 1, 2011Applicant: ASML NETHERLANDS B.V.Inventors: Ronald Van Der Ham, Martinus Hendrikus Antonius Leenders, Johannes Catharinus Hubertus Mulkens, Richard Moerman, Michel Riepen, Sergei Shulepov, Koen Steffens, Jan Willem Cromwijk, Johanna Antoinette Maria Sondag-Huethorst, Marco Baragona, Robertus Leonardus Maria In 'T Groen, Ralph Theodorus Hubertus Maessen, Jacob Marinus Jan Den Toonder, Milica Kovacevic-Milivojevic
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Publication number: 20110292358Abstract: Various types of pressure regulating devices are disclosed to reduce a pressure gradient in a liquid supply system of a lithographic apparatus, the liquid supply system having a liquid confinement structure configured to at least partially confine a liquid between a projection system and a substrate table of the lithographic apparatus. A high pressure gradient may cause particulate contamination in the liquid supply system and/or liquid confinement structure. A pressure gradient can be reduced by, for example, the use of slow switching in one or more valves, a bleed flow around or through one or more valves, diversion of liquid to a drain rather than or in addition to switching a valve off, a pressure regulator or flow restrictor to prevent shock waves, and a buffer volume/damper to compensate for pressure fluctuation.Type: ApplicationFiled: August 4, 2011Publication date: December 1, 2011Applicant: ASML NETHERLANDS B.V.Inventors: Marco Koert STAVENGA, Martinus Cornelis Maria Verhagen, Johannes Hericus Wilhlemus Jacobs, Hans Jansen
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Publication number: 20110292359Abstract: A cleaning tool to clean a surface of a component of a lithographic apparatus is disclosed. The cleaning tool includes a sonic transducer, a liquid supply device configured to provide liquid to a reservoir between the surface to be cleaned and the sonic transducer, and a liquid outlet configured to remove liquid provided by the liquid supply device, the cleaning tool constructed and arranged such that, in use, liquid flows into the outlet under the influence of gravity.Type: ApplicationFiled: August 4, 2011Publication date: December 1, 2011Applicant: ASML NETHERLANDS B.V.Inventors: Anthonius Martinus Cornelis Petrus De Jong, Hans Jansen, Marco Koert Stavenga, Peter Franciscus Wanten, Bauke Jansen, Johannes Wilhelmus Jacobus Leonardus Cuijpers, Raymond Gerardus Marius Beeren, Kornelis Tijmen Hoekerd
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Publication number: 20110292360Abstract: A system for forming a pattern on a part comprises a chamber base, a pressure vessel and a retaining device. The retaining device is positionable between the chamber base and the pressure vessel to secure a deformable mask therebetween. The system further comprises a first pressure source, a second pressure source and a third pressure source. The first pressure source provides a negative pressure within the chamber to draw the mask towards a part installed within the chamber base. The second pressure source provides a positive pressure within the pressure vessel to direct the mask towards the part so that the mask corresponds to at least one complex non-planar surface of the part. The third pressure source provides a negative pressure within pressure vessel. An exposure source exposes the part through the mask while the mask is deformed corresponding to the at least one complex non-planar surface of the part.Type: ApplicationFiled: August 10, 2011Publication date: December 1, 2011Applicant: BATTELLE MEMORIAL INSTITUTEInventors: Eric L. Hogue, Stephen J. Krak, Timothy J. Stanfield
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Publication number: 20110292361Abstract: An exposure apparatus including a warp deformation forming mechanism having a plane-parallel plate for warp deformation provided on a projection optical path of a mask pattern to be projected to a work substrate, and configured to be deformed by warping, a restraint member configured to cause an intermediate part of the plane-parallel plate between neighboring two of corner parts to serve as a fulcrum, each corner part formed by two intersecting sides of the plane-parallel plate, and a pressure member configured to warp and deform the plane-parallel plate with the restraint member used as a fulcrum by applying a pressurizing force to the corner parts of the plane-parallel plate in an optical axis direction of the projection optical path.Type: ApplicationFiled: May 25, 2011Publication date: December 1, 2011Applicant: Kabushiki Kaisha TOPCONInventors: Koji Watanabe, Yukio Ishiba, Kenichi Nakano
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Publication number: 20110292362Abstract: An exposure apparatus which forms a predetermined mask pattern on a target workpiece through exposure by: casting exposure light upon a mask in which the pattern and a mask-side alignment mark are formed, and forming an image of the mask on the target workpiece by projecting the exposure light, which passes the mask, on the target workpiece through a projection lens, includes: an alignment lighting unit configured to cast, as alignment light, light in a wavelength range included in the exposure light onto the mask-side alignment mark of the mask; and an alignment camera unit including an image pickup device for capturing images, and configured to receive the incident alignment light coming from the alignment lighting unit through the mask and the projection lens.Type: ApplicationFiled: May 31, 2011Publication date: December 1, 2011Applicant: Kabushiki Kaisha TOPCONInventors: Yoshiyuki Enomoto, Hirohide Minakawa
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Publication number: 20110292363Abstract: A light beam collimated by illumination optics (4) from a radiation source (6) illuminates the surface of a wave front modulator (8) such as an Spatial Light Modulator (SLM) or Computer Generated Hologram photomask (CGH). The resulting wave travels via projection optics (10) to the substrate (12), passing through a projection lens assembly (14). The SLM (8) is programmed or CGH configured with a modulation pattern that is determined by the substrate (12) topography and desired pattern. The substrate topography is provided by Digital Holography (DH) surface profilometery performed by a DH microscope (18), which provides geometrical or topographical input to the CGH calculation routines (16). An arrangement for vertical or sloping surface patterning has a grating (22) superimposed onto the CGH pattern (24) to generate +1 and ?1 orders.Type: ApplicationFiled: July 30, 2009Publication date: December 1, 2011Inventors: Peter Anthony Ivey, Richard Peter McWilliam, Alan Purvis, Gavin Lewis Williams, Nicholas Luke Seed, Richard Ian Curry, Jose Juan De Jesus Toriz-Garcia
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Publication number: 20110292364Abstract: An imaging apparatus (1000) includes: an imaging device (110), a lens (120), an initial focal point detecting unit (130) detecting a positional relationship between the imaging device (110) and the lens (120) to specify an initial focal point which is a focal point found when an exposure start instruction is received from a user; a shift pattern determining unit (140) determining a shift pattern of the focal point, such that the focal point in an exposure time moves from the initial focal Point, passes through both of a nearest end and a farthest end of a predetermined range of focus at least once, and returns to the initial focal point, the initial focal point being specified by the positional relationship between the imaging device (110) and the lens (120); and a shift control unit (150) moving one of the imaging device (110) and the lens (120) based on the shift pattern, such that the focal point moves from the initial focal point as soon as exposure starts, and arrives at the initial focal point again asType: ApplicationFiled: December 3, 2010Publication date: December 1, 2011Inventor: Takashi Kawamura
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Publication number: 20110292365Abstract: Disclosed are methods, apparatuses, and lithographic systems for calibrating an inspection apparatus. Radiation is projected onto a pattern in a target position of a substrate. By making a plurality of measurements of the pattern and comparing the measured first or higher diffraction orders of radiation reflected from the pattern of different measurements, a residual error indicative of the error in a scatterometer may be calculated. This error is an error in measurements of substrate parameters caused by irregularities of the scatterometer. The residual error may manifest itself as an asymmetry in the diffraction spectra.Type: ApplicationFiled: December 1, 2009Publication date: December 1, 2011Applicant: ASML Netherlands B.V.Inventors: Hugo Augustinus Joseph Cramer, Maurits Van Der Schaar
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Publication number: 20110292366Abstract: A multilayer mirror to reflect radiation having a wavelength in the range of 2-8 nm has alternating layers. The alternating layers include a first layer and a second layer. The first and second layers are selected from the group consisting of: U and B4C layers, Th and B4C layers, La and B9C layers, La and B4C layers, U and B9C layers, Th and B9C layers, La and B layers, U and B layers, C and B layers, Th and B layers, U compound and B4C layers, Th compound and B4C layers, La compound and B9C layers, La compound and B4C layers, U compound and a B9C layers, Th compound and a B9C layers, La compound and a B layers, U compound and B layers, and Th compound and a B layers. An interlayer is disposed between at least one of the first layers and the second layer.Type: ApplicationFiled: January 11, 2010Publication date: December 1, 2011Inventors: Denis Alexandrovich Glushkov, Vadim Yevgenyevich Banine, Leonid Aizikovitch Sjmaenok, Nikolay Nikolaevitch Salashchenko, Nikolay Ivanovich Chkhalo
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Publication number: 20110292367Abstract: The disclosure generally relates to imaging optical systems that include a plurality of mirrors, which image an object field lying in an object plane in an image field lying in an image plane, where at least one of the mirrors has a through-hole for imaging light to pass through. The disclosure also generally relates to projection exposure installations that include such imaging optical systems, methods of using such projection exposure installations, and components made by such methods.Type: ApplicationFiled: August 8, 2011Publication date: December 1, 2011Applicant: CARL ZEISS SMT GMBHInventor: Hans-Juergen Mann
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Publication number: 20110292368Abstract: An exposure apparatus is provided with: a conveying device that conveys the subject to be exposed in a given direction; a spatial light modulating device having a plurality of light modulating elements, which are composed of an electro-optical crystalline material and arranged at least in one row in a direction intersecting a conveying direction of the subject to be exposed; an optical beam shaping device that limits the width of light emitted from each light modulating element in the conveying direction to a predetermined width; and a control device that on/off-controls light transmitted through the spatial light modulating device so as to generate a predetermined pattern. The light modulating element is formed tilted by a predetermined angle with respect to an axis parallel to the conveying direction. The control device shifts the optical beam shaping device in the conveying direction.Type: ApplicationFiled: August 10, 2011Publication date: December 1, 2011Inventors: Michinobu MIZUMURA, Koichiro Fukaya, Tetsuo Ando
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Publication number: 20110292369Abstract: A substrate table to support a substrate is disclosed. The substrate table includes a substrate support to support the substrate and to apply a bending force to an edge of the substrate in a first direction. A substrate edge manipulator is provided that is configured to apply a variable bending force to the edge of the substrate in a second direction, which second direction has at least a component opposite in direction to the first direction.Type: ApplicationFiled: May 11, 2011Publication date: December 1, 2011Applicant: ASML NETHERLANDS B.V.Inventors: Raymond Wilhelmus Louis LAFARRE, Niek Jacobus Johannes ROSET, Martijn HOUBEN
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Publication number: 20110292370Abstract: Phase-based TOF systems operate with reduced depth error due to motion blur, and/or spatial blur, and/or pixel offset by intelligently determining how best to combine pixel values, and how best to compensate for individual pixel offsets. Such determination(s) may be carried out on a per pixel basis, dynamically, in real-time during TOF operation, or on archived TOF data. Offsets for individual pixels may be dynamically calculated and subtracted from the values acquired by those pixels Individual pixel offsets may be calculated for example by combining data acquired by the same pixel at two acquisitions, 180° out of phase with respect to each other. Calculated offsets may be averaged, or on a per pixel basis, and if target object motion is detected, one or more offset calculations can be discarded rather than averaged to reduce motion blur. Offsets acquired a priori during a TOF system calibration procedure may be used.Type: ApplicationFiled: May 29, 2010Publication date: December 1, 2011Inventors: Gage Hills, Travis Perry, Cyrus Bamji
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Publication number: 20110292371Abstract: Systems and methods are disclosed for measuring a distance, a velocity, etc., of a target using coherent laser radiation. In one example, a method is provided comprising measuring a time required for a light pulse to travel to and from a target, the light pulse reflecting from the target, and determining the distance to the target based on the measuring. The method also comprises measuring a Doppler shift of the reflected light pulse using an optical detection technique and determining the velocity of the target from the Doppler shift. In a further example, a system is disclosed comprising a transceiver, a coherent source, an optical system and a detector configured to measure the distance to the target based on a measured time for a light pulse to travel to and from the target. The system is also configured to determine the velocity of the target from a measured Doppler shift.Type: ApplicationFiled: May 26, 2011Publication date: December 1, 2011Applicant: Optical Air Data Systems, LLCInventor: Chia Chen CHANG
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Publication number: 20110292372Abstract: A current transformer (5) having a plurality of primary and secondary windings, comprising a top Strain measuring system of wind turbine blades (11) during the performance of static tests that comprises an equipment for measuring the strain at multiple locations in mono-mode optical fibres (5, 7, 9) using Rayleigh scattered light, that includes an OBR interrogator (23), an interface device (25) and an Acquisition System (27), said mono-mode optical fibres (5, 7, 9) being attached to the blade (11) subjected to said tests for obtaining high spatial resolution measurements of the blade strain during said tests. Said optical fibres (5, 7, 9) may be placed whether in a longitudinal direction or in a non-longitudinal direction or in a non-linear shape in given blade sections and may be bonded whether to the outer skin (31) of the blade (11), or into grooves (51, 53) in the outer skin (31) of the blade (11) or embedded between two structural laminates (33, 35) of the blade (11).Type: ApplicationFiled: January 30, 2009Publication date: December 1, 2011Inventors: Alfredo Criado Abad, Miguel Riezu Corpas, Antonio Fernandez López, Alfredo Güemes Gordo
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Publication number: 20110292373Abstract: A method for determining a quality of an etched thin film deposited onto a transparent substrate is provided. The method includes depositing the thin film onto the transparent substrate. Then, the thin film is etched at least at portions of the transparent substrate. At least one transparency level of the transparent substrate having deposited thereon the at least partially etched thin film is measured at least at one wavelength in a wavelength range from 280 nm to 340 nm. Then the quality of the etch process is evaluated on the basis of the at least one measured transparency level.Type: ApplicationFiled: June 1, 2010Publication date: December 1, 2011Applicant: APPLIED MATERIALS, INC.Inventors: Karin Elisabeth WITTING, Joachim BARTELLA, Juergen SCHROEDER
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Publication number: 20110292374Abstract: A method for measuring spectral characteristics includes capturing spectral-spatial data that includes radiance measurements over spectrally flat, highly emissive surface portions of a sample material and heater at least two different heater temperatures for transmissive and/or emissive configurations. Temperatures of the sample material and heater are determined at the different heater temperatures for each configuration using, in each instance, radiance measurements taken after the temperatures of the heater and sample material have both stabilized. The transmissivity of the sample material is determined using the temperatures determined in the transmissive configuration and spectral-spatial data collected at selected points of interest over the sample material. The emissivity of the sample material is determined using the temperatures determined in the emissive configuration, the spectral-spatial data collected at selected points of interest over the sample material, and the transmissivity.Type: ApplicationFiled: June 1, 2010Publication date: December 1, 2011Inventors: Nielson Wade Schulenburg, David Wheeler Warren, Donald J. Rudy, Michael G. Martino, Mark Alan Chatelain, Michael Arthur Rocha
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Publication number: 20110292375Abstract: A system (10) for directly measuring the depth of a high aspect ratio etched feature on a wafer (80) that includes an etched surface (82) and a non-etched surface (84). The system (10) utilizes an infrared reflectometer (12) that in a preferred embodiment includes a swept laser (14), a fiber circulator (16), a photodetector (22) and a combination collimator (18) and an objective lens (20). From the objective lens (20) a focused incident light (23) is produced that is applied to the non-etched surface (84) of the wafer (80). From the wafer (80) is produced a reflected light (25) that is processed through the reflectometer (12) and applied to an ADC (24) where a corresponding digital data signal (29) is produced. The digital data signal (29) is applied to a computer (30) that, in combination with software (32), measures the depth of the etched feature that is then viewed on a display (34).Type: ApplicationFiled: June 15, 2011Publication date: December 1, 2011Inventors: David S. Marx, David L. Grant
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Publication number: 20110292376Abstract: An apparatus and method for detecting Raman and photoluminescence spectra of a substance and identifying said substance by Raman and/or photoluminescence spectral characteristics of said substance are disclosed. An apparatus comprises a replaceable laser source aggregate with a laser source, a collimating system, a socket for receiving said replaceable laser source aggregate, while ensuring the operation of said apparatus with no further adjustment of a positioning of said collimating system or said laser source, a filtering system, a light dispersing system optimized for a spectral resolution and a spectral range sufficient to simultaneously obtain Raman and photoluminescence spectra of said substance, a detector, and at least one controller for processing electrical signals.Type: ApplicationFiled: December 31, 2010Publication date: December 1, 2011Inventors: Igor V. Kukushkin, Leonid V. Kulik, Aleksandr B. Van'kov, Oleg A. Volkov
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Publication number: 20110292377Abstract: The invention relates to a fibre-optic measuring apparatus (1) and a related method comprising a number of sensors (3, 4, 5) which are integrated in a cable (20) and detect a mechanical load, a temperature and/or corrosive gases, characterised in that the sensors (3, 4, 5) are supplied with light from a source (2) and the sensors (3, 4, 5) form a fibre-optic network (3, 4, 5, 21).Type: ApplicationFiled: January 29, 2010Publication date: December 1, 2011Applicant: DRAKA CABLE WUPPERTAL GMBHInventors: Reinhard Osenberg, Nico Emde, Peter Funken
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Publication number: 20110292378Abstract: Failure events detected by a laser surgery monitoring feedback circuit are analyzed in order to distinguish between events that result from fiber breakdown and those arising from other sources, such as burning of tissues. If the number of failure events within a predetermined time exceeds a predetermined count, then it is determined that the radiation is the result of fiber breakdown. If the number of failure events within the predetermined time is less than the predetermined count, then it is determined that the failure events result from other causes, such as heating of tissues by the laser. Based on the analysis, an override switch or alarm may be initiated.Type: ApplicationFiled: June 1, 2011Publication date: December 1, 2011Inventor: Joe Denton Brown
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REFRACTIVE INDEX DISTRIBUTION MEASURING METHOD AND REFRACTIVE INDEX DISTRIBUTION MEASURING APPARATUS
Publication number: 20110292379Abstract: A method includes the steps of measuring a first transmitted wavefront in a first medium having a first refractive index and a second transmitted wavefront in a second medium having a second refractive index different from the first refractive index, and obtaining a refractive index distribution projected value of the object in each orientation by removing a shape component of the object utilizing measurement results of the first transmitted wavefront and the second transmitted wavefront and each transmitted wavefront of a reference object that has the same shape as that of the object and a specific refractive index distribution and is located in one of the first medium and the second medium with the same orientation as that of the object, and calculating a three-dimensional refractive index distribution of the object based on a plurality of refractive index distribution projected values corresponding to the plurality of orientations.Type: ApplicationFiled: May 24, 2011Publication date: December 1, 2011Applicant: CANON KABUSHIKI KAISHAInventor: Seima Kato -
Publication number: 20110292380Abstract: A CMOS detector with pairs of interdigitated elongated finger-like collection gates includes p+ implanted regions that create charge barrier regions that can intentionally be overcome. These regions steer charge to a desired collection gate pair for collection. The p+ implanted regions may be formed before and/or after formation of the collection gates. These regions form charge barrier regions when an associated collection gate is biased low. The barriers are overcome when an associated collection gate is high. These barrier regions steer substantially all charge to collection gates that are biased high, enhancing modulation contrast. Advantageously, the resultant structure has reduced power requirements in that inter-gate capacitance is reduced in that inter-gate spacing can be increased over prior art gate spacing and lower swing voltages may be used. Also higher modulation contrast is achieved in that the charge collection area of the low gate(s) is significantly reduced.Type: ApplicationFiled: February 16, 2010Publication date: December 1, 2011Applicant: CANESTA, INC.Inventor: Cyrus Bamji
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Publication number: 20110292381Abstract: A method to monitor an output of an APD is disclosed. The method includes steps of, (a) measuring dark currents of the APD at several temperatures in advance to a practical operation of the APD, (b) measuring an output current of the APD by illuminating the APD practically at a measured temperature, (c) estimating a dark current at the measured temperature from measured dark currents, and (d) subtracting the estimated dark current from the output current.Type: ApplicationFiled: May 31, 2011Publication date: December 1, 2011Applicant: SUMITOMO ELECTRIC DEVICE INNOVATIONS, INC.Inventors: Tetsu MURAYAMA, Moriyasu Ichino
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Publication number: 20110292382Abstract: A system for determining the asphaltene content of crude oil includes a first optical flow cell, a first spectrometer operably associated with the first optical flow cell, and a mixer in fluid communication with the first optical flow cell. The system further includes a crude oil injection/metering device configured to receive the crude oil, the crude oil injection/metering device being in fluid communication with the first optical flow cell; a titrant injection/metering device in fluid communication with the mixer, the titrant injection/metering device configured to receive a titrant; and a filtration unit in fluid communication with the mixer. The system further includes a second optical flow cell in fluid communication with the filtration unit, and a second spectrometer operably associated with the second optical flow cell.Type: ApplicationFiled: May 31, 2010Publication date: December 1, 2011Inventors: Farshid Mostowfi, Abdel M. Kharrat, Kentaro Indo
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Publication number: 20110292383Abstract: Micro cuvette assembly for examining biological samples has a first partial plate with one or more first cuvette surfaces and a second partial plate opposite the first and which also has one or more second cuvette surfaces. In an active position of the assembly, the second cuvette surfaces are arranged parallel and in register with the first cuvette surfaces and are spaced apart from the first cuvette surfaces whereby one or more micro cuvettes are formed. The first and second partial plates also have openings arranged in register with the cuvette surfaces and transparent bodies are provided as the cuvette surfaces. The first and second plates are completely penetrated by these openings and the transparent bodies are manufactured from a different material than the partial plates and span the openings close to a first surface of the partial plates.Type: ApplicationFiled: July 28, 2011Publication date: December 1, 2011Applicant: TECAN TRADING AGInventors: Walter Gotschy, Josef Grassl, Fritz Payr, Markus Schürf
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Publication number: 20110292384Abstract: A system and method for detecting breakage, rupture or malfunctioning of a pipe or cable structure, including sensing elements for monitoring the structure and placed in, on or around the structure for monitoring the breakage, rupture or malfunctioning of the structure. The sensing elements provide sensing data regarding events related to breakage, rupture or malfunctioning and are placed near the structure so as to perform a breakage, rupture or malfunction detection function, and within a distance sufficient to obtain a measureable strain, tension, torsion, vibration, acceleration, and/or temperature response signal based on the breakage, rupture or malfunctioning of the structure. One of the sensing elements is based on Coherent Rayleigh Noise (CRN) sensing techniques, and the system is configured to interpret the sensed data for determining the breakage, rupture or malfunctioning of the structure.Type: ApplicationFiled: September 8, 2009Publication date: December 1, 2011Inventors: Rogerio Ramos, Gareth Lees, Stephen Mullens
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Publication number: 20110292385Abstract: Producing images of a specimen includes introducing a specimen into a specimen chamber of a particle-beam device, selecting a specific position on the surface of the specimen, supplying a contrast-agent precursor on the specific position, providing a particle beam and/or a light beam, guiding the particle beam and/or the light beam onto the specific position, applying a contrast-agent layer to the specific position as a result of the interaction of the particle beam and/or the light beam with the contrast-agent precursor, leaving the contrast-agent layer on the surface of the specimen for a predetermined amount of time. During the predetermined amount of time, a first part of the contrast-agent layer diffuses into the specimen and a second part of the contrast-agent layer remains on the surface of the specimen. The specimen is imaged using an optical device and/or a particle-optical device and/or using the particle beam.Type: ApplicationFiled: March 18, 2011Publication date: December 1, 2011Inventors: Elke Haustein, Wolfram Bûhler, Camille Stebler, Holger Dömer
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Publication number: 20110292386Abstract: A spectral measurement device includes an optical band-pass filter section having a spectral band of first to n-th wavelengths (n is an integer of 2 or more), a light receiving section, a correction operation section, and a signal processing section. When an m-th wavelength band (1?m?n) is an interest wavelength band, and a k-th wavelength band (k?m and 1?k?n) other than the m-th wavelength band is a non-interest wavelength band, the optical band-pass filter section functions as a m-th band-pass filter corresponding to the m-th wavelength band and a k-th band-pass filter corresponding to the k-th wavelength band.Type: ApplicationFiled: May 20, 2011Publication date: December 1, 2011Applicant: SEIKO EPSON CORPORATIONInventor: Tatsuaki FUNAMOTO
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Publication number: 20110292387Abstract: A simple method and apparatus for circular dichroism spectrophotometry are provided that allow a liquid, cream-type, and gel-type specimens having a low degree of transparency to be measured directly and nondestructively without passing light through the specimens. Right-handed or left-handed circularly polarized light enters a prism from an entrance face and hits a specimen mounting face of the prism, on which a specimen is placed, at an angle of 80°. Then, after being totally reflected by the specimen mounting face and going out from an exit face, the light is detected, and the absorbance is determined.Type: ApplicationFiled: May 24, 2011Publication date: December 1, 2011Applicant: JASCO CORPORATIONInventors: Yoshiro Kondo, Ettore Castiglioni
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Publication number: 20110292388Abstract: The present invention relates to a method of identifying in a fluid by measuring the amount of optical rotation the fluid causes in a beam of polarized light. The invention further provides for the use of an optional optically active marker in the fluids in order the impact the amount of rotation the fluid will cause. The invention provides a convenient and reliable means for identifying the fluid before, during and/or after the fluid's use.Type: ApplicationFiled: December 10, 2009Publication date: December 1, 2011Applicant: THE LUBRIZOL CORPORATIONInventors: John S. Manka, Ying Wang
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Publication number: 20110292389Abstract: The invention relates to a method and to a device for determining at least one piece of polarisation information on a measurement point of a target sample, the device comprising: —a light source capable of emitting a rectilinearly polarised light beam, the light beam being intended to be reflected by the measurement point; —a means for computing polarisation information on the measurement point using the beam reflected by the target sample; —at least one waveguide for guiding the incident beam towards the target sample and the reflected beam towards the computing means; and—a means for rotating the polarisation, capable of rotating two orthogonal polarimetric components of the incident beam after passing through the waveguide and two orthogonal polarimetric components of the reflected beam before passing through the waveguide.Type: ApplicationFiled: January 15, 2010Publication date: December 1, 2011Applicant: CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE-CNRSInventors: Dominique Pagnoux, Frédérie Louradour, Jérôme Desroches, Alain Barthelemy, Julien Brevier
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Publication number: 20110292390Abstract: A defect inspection apparatus includes an illumination optical system, a detection optical system which includes a reflecting objective lens, and wavelength separation optics for conducting wavelength separation, and after the wavelength separation, branching the scattered light into at least a first detection optical path and a second detection optical path. The detection optical system further includes, on the first detection optical path, a first sensor, and on the second detection optical path, a second sensor. A signal processor is provided which, in accordance with at least one of a first signal obtained from the first sensor and a second signal obtained from the second sensor, discriminates defects or defect candidates present on a surface of a sample.Type: ApplicationFiled: August 4, 2011Publication date: December 1, 2011Inventors: Yukihiro Shibata, Shunji Maeda