Abstract: A method for etching a dielectric layer is provided. The dielectric layer is disposed over a substrate and below a patterned mask having a line-space pattern. The method includes (a) providing an etchant gas comprising CF4, COS, and an oxygen containing gas, (b) forming a plasma from the etchant gas, and (c) etching the dielectric layer into the line-space pattern through the mask with the plasma from the etchant gas. The gas flow rate of CF4 may have a ratio greater than 50% of a total gas flow rate of all reactive gas components. The gas flow rate of COS may be between 1% and 50%. The method reduces bowing in etching of the dielectric layer by adding COS to the etchant gas.

Abstract: A method for etching a differential metal gate structure on a substrate is described. The differential metal gate structure includes a metal gate layer overlying a high dielectric constant (high-k) dielectric layer, wherein the metal gate layer comprises a different thickness at different regions on the substrate. The metal gate layer is patterned by using a plasma etching process, wherein at least one etch step includes forming plasma using a halogen-containing gas and at least one etch step includes forming plasma using an additive gas having as atomic constituents C, H, and F.

Abstract: A method of etching silicon-containing material is described and includes a SiConi™ etch having a greater or lesser flow ratio of hydrogen compared to fluorine than that found in the prior art. Modifying the flow rate ratios in this way has been found to reduce roughness of the post-etch surface and to reduce the difference in etch-rate between densely and sparsely patterned areas. Alternative means of reducing post-etch surface roughness include pulsing the flows of the precursors and/or the plasma power, maintaining a relatively high substrate temperature and performing the SiConi™ in multiple steps. Each of these approaches, either alone or in combination, serve to reduce the roughness of the etched surface by limiting solid residue grain size.

Abstract: A method for selectively etching a substrate is described. The method includes preparing a substrate comprising a silicon nitride layer overlying a silicon-containing contact region, and patterning the silicon nitride layer to expose the silicon-containing contact region using a plasma etching process in a plasma etching system. The plasma etching process uses a process composition having as incipient ingredients a process gas containing C, H and F, and a non-oxygen-containing additive gas, wherein the non-oxygen-containing additive gas includes H, or C, or both H and C, and excludes a halogen atom.

Abstract: A method for controlling a plasma processing system using wafer bias information derived from RF voltage information is proposed. The RF voltage is processed via an analog or digital methodology to obtain peak voltage information at least for each of the fundamental frequencies and the broadband frequency. The peak voltage information is then employed to derive the wafer bias information to serve as a feedback or control signal to hardware/software of the plasma processing system.

Abstract: Methods of fabricating isolation regions of semiconductor devices and structures thereof are disclosed. A preferred embodiment includes forming at least one trench in a workpiece, and forming a thin nitride liner over sidewalls and a bottom surface of the at least one trench and over a top surface of the workpiece using atomic layer deposition (ALD). An insulating material is deposited over the top surface of the workpiece, filling the at least one trench. At least a portion of the insulating material is removed from over the top surface of the workpiece. After removing the at least a portion of insulating material from over the top surface of the workpiece, the thin nitride liner in the at least one trench is at least coplanar with the top surface of the workpiece. The thin nitride liner and the insulating material form an isolation region of the semiconductor device.

Abstract: A substrate structure is produced by forming a first material layer on a substrate having a recess, removing the first material layer from the portion of the substrate except for the recess using a second material that reacts with the first material, and forming a deposition film from the first material layer using a third material that reacts with the first material. A method of manufacturing a device may include the method of forming a substrate structure.

Abstract: A gate structure and a method for fabricating the same are described. A substrate is provided, and a gate dielectric layer is formed on the substrate. The formation of the gate dielectric layer includes depositing a silicon nitride layer on the substrate by simultaneously introducing a nitrogen-containing gas and a silicon-containing gas. A gate is formed on the gate dielectric layer, so as to form the gate structure.

Abstract: A method of growing single crystal III-N material on a semiconductor substrate includes providing a substrate including one of crystalline silicon or germanium and a layer of rare earth oxide. A layer of single crystal III-N material is epitaxially grown on the substrate using a process that elevates the temperature of the layer of rare earth oxide into a range of approximately 750° C. to approximately 1250° C. in the presence of an N or a III containing species, whereby a portion of the layer of rare earth oxide is transformed to a new alloy.

Abstract: A method for fabricating silicon dioxide layer is disclosed. The method includes the following steps. Firstly, a semiconductor substrate is provided. Next, the semiconductor substrate is cleaned with a solution containing hydrogen peroxide to form a chemical oxide layer on the semiconductor substrate. Then, the chemical oxide layer is heated in no oxygen atmosphere, such that the chemical oxide layer forms a compact layer. Then, the semiconductor substrate is heated in oxygen atmosphere to form a silicon dioxide layer between the semiconductor substrate and the compact layer.

Abstract: Methods are provided for depositing silicon dioxide containing thin films on a substrate by atomic layer deposition ALD. By using disilane compounds as the silicon source, good deposition rates and uniformity are obtained.

Abstract: Laser annealing scanning methods that result in reduced annealing non-uniformities in semiconductor device structures under fabrication are disclosed. The methods include defining a length of an annealing laser beam such that the tails of the laser beam resided only within scribe lines that separate the semiconductor device structures. The annealing laser beam tails from adjacent scan path segments can overlap or not overlap within the scribe lines. The cross-scan length of the annealing laser beam can be selected to simultaneously scan more than one semiconductor device structure, as long as annealing laser beam is configured such that the tails do not fall within a semiconductor device structure.

Abstract: A thermally protective, flame retardant fabric includes a substrate treated with a combination of a flame retardant agent and an intumescent agent. The substrate includes non-thermoplastic fibers or a blend of non-thermoplastic fibers and thermoplastic fibers having a basis weight ranging from 2.0 to 15.0 ounces per square yard. The fabric has a contact thermal protective performance value of at least 4.5 and a contact thermal protective performance efficiency greater than 1.1. Applications of the fabric include protective garments, articles of furniture, vehicle components, building components, electrical components, decorative components, appliances, and containers.

Abstract: The present invention provides a water-dispersed acrylic PSA composition suitable for forming a PSA sheet. The PSA composition contains 100 parts by weight of an acrylic copolymer with a Tg of ?70° C. to ?50° C. obtained by polymerization of a monomer starting material containing 60 wt % or more of an alkyl (meth)acrylate with a C8-12 alkyl group and 5 wt % or less of a radical polymerizable monomer with a carboxyl group. When an adhesive sheet is formed therefrom, it exhibits an average SUS adhesive strength of 11 N/20 mm or greater, PP adhesive strength of 8.5 N/20 mm or greater, 80° C. hold time of 1 hour or longer, and gap height of 10 mm or less in a curved surface adhesion test.

Abstract: Compositions comprising cationic compounds having fluorinated ether groups and hydrolyzable silane groups are provided, the compounds having the formula: (I)

Abstract: This invention provides compound solutions, emulsions and gels excellent in homogeneous dispersibility and long-term dispersion stability and also excellent in the properties as cosmetics, using disarranged nanofibers not limited in either form or polymer, widely applicable and small in the irregularity of single fiber diameter. This invention also provides a method for producing them. Furthermore, this invention provides synthetic papers composed of fibers, small in pore area and uniform in pore size, using disarranged nanofibers, and also provides a method for producing them. This invention provides compound solutions, emulsions, gels and synthetic papers containing disarranged nanofibers of 1 to 500 nm in number average diameter and 60% or more in the sum Pa of single fiber ratios.

Abstract: Basalt filament is manufactured such that the fiber diameter can be controlled and the filament is not severed during winding. A network former and a glass modifier are formed and maintained with respect to basalt rock ore, and the crystallization and binding of basalt fiber are inhibited, the heat-resistance property of basalt fiber is greatly improved from the conventional 750° C. to 850 or 900° C., and significant cost reduction is achieved over conventional products. The method includes: grinding basalt rock as a material; washing a resultant ground rock; melting the ground rock that has been washed; transforming a molten product into fiber; and drawing the fiber in an aligned manner, and winding it. The temperature of the molten product in the melting step is 1400 to 1650° C., and log ? is 2.15 to 2.35 dPa·s and preferably 2.2 to 2.3 dPa·s, where ? is the viscosity of the molten product.

Abstract: Disclosed are fibrous activated materials that can remove and/or deactivate potentially dangerous airborne agents from a gas or air stream. Disclosed materials are multi-layer materials that include a fibrous nonwoven interceptor layer and an active layer immediately adjacent the interceptor layer. The interceptor layer is a fibrous membrane of very low basis weight and defines a relatively low porosity, and the active layer describes geometries, chemistries, etc. that can entrap and/or decontaminate compounds contained in an airstream passing through the material. Disclosed materials can be utilized in forming protective garments, face masks, and the like.

Abstract: Filamentous bodies which are longitudinally extended and other film-like constructions are made by combining liquid silicone-containing precursors with air and extruding them. Distinct types or grades of fibers, strands, and other film-like constructions are produced which have a multiplicity of useful applications and indications for use owing to their inherent memory, compactability, tensile strength and density. Processes for making the novel enhanced filamentous bodies and products by the same can be optimized for uses ranging from safe and effective (“leak-free”) prosthetics to cushions, inserts, membranes, in a plurality of fields from consumer electronics to medical devices, and athletic or orthopedic shoe inserts.

Abstract: A non-woven fabric laminate that is excellent in strechability, flexibility, and bulkiness, and that is less sticky and is suitable for a mechanical fastening female material. The non-woven fabric laminate includes a mixed fiber spunbonded non-woven fabric and a non-woven fabric comprising a crimped fiber that is laminated on at least one face of the mixed fiber spunbonded non-woven fabric, which includes a continuous fiber of a thermoplastic elastomer (A) in the range of 10 to 90% by weight and a continuous fiber of a thermoplastic resin (B) in the range of 90 to 10% by weight (where (A)+(B)=100% by weight). The non-woven fabric laminate can be suitably used for a sanitary material and other materials. More specifically, there can be mentioned for instance an absorbent article such as a disposable diaper and a menstrual sanitary product as a sanitary material.

Abstract: The present invention provides high strength nonwoven wipe materials and the process of making the materials. The high strength nonwoven wipe materials contain cellulosic fibers, synthetic fibers, or mixtures thereof, with bicomponent fibers and optionally, a binder. The present invention provides a high strength, high elongation, reduced stiffness nonwoven wipe material with superior tensile strength.

Abstract: The disclosure relates to pre-moistened webs and wipes having visible compressed sites that provide the perception of a cloth-like texture. The disclosure also relates to a nonwoven web made of non-thermoplastic fibers with at least one compressed site on the surface of the web that remains visible when the web is pre-moistened.

Abstract: The present invention provides an optical glass, containing, in % by weight on an oxide basis, 30 to 50% of P2O5, 18 to 43% of BaO, 2 to 12% of B2O3, 1.4 to 5% of Al2O3, more than 0 to 6% of Li2O, more than 0 to 9% of La2O3, 0.1 to 8% of MgO, 0 to 10% of CaO, 0 to 15% of SrO, 0 to 5% of ZnO, 0 to 7% of Gd2O3, and 0 to 3% of SiO2, and having optical constants of a refractive index nd of 1.59 to 1.63 and an Abbe number ?d of 63 to 68.

Abstract: Dry mix for treating refractory substrates, comprising combustible particles of at least one oxidizable substance which, in the presence of oxygen, gives rise to an exothermic reaction, and particles of at least one other substance, wherein these particles form together, during said exothermic reaction, a coherent mass capable of adhering to and/or interacting with the treated substrate, characterized in that it comprises, as particles of at least one other substance, particles of at least one expanding substance, in that the dry mix without the particles of this at least one expanding substance has a first bulk density and in that the mix comprising said at least one expanding substance has a second bulk density lower than said first bulk density.

Abstract: A catalyst system comprising a half-sandwich chromium complex, an activator support and an optional cocatalyst. A compound of formula Cp?Cr(Cl)2(Ln), where Cp? is ?5—C5H4CH2CH2CH?CH2 and Ln is pyridine, THF or diethylether. A compound of formula Cp?Cr(Cl)2(Ln), where Cp? is ?5—C5H4C(Me)2CH2CH2CH?CH2 and Ln is pyridine, THF or diethylether.

Abstract: Catalysts and processes for forming catalysts for use in hydrogenating acetic acid to form ethanol. In one embodiment, the catalyst comprises a first metal, a silicaceous support, and at least one metasilicate support modifier. Preferably, the first metal is selected from the group consisting of copper, iron, cobalt, nickel, ruthenium, rhodium, palladium, osmium, iridium, platinum, titanium, zinc, chromium, rhenium, molybdenum, and tungsten. In addition the catalyst may comprise a second metal preferably selected from the group consisting of copper, molybdenum, tin, chromium, iron, cobalt, vanadium, tungsten, palladium, platinum, lanthanum, cerium, manganese, ruthenium, rhenium, gold, and nickel.

Abstract: Catalyst systems, processes of forming the same and polymers formed therefrom are described herein.

Abstract: The present invention provides dual catalyst systems containing a metallocene catalyst and a hydrogen scavenging catalyst, and polymerization processes employing these dual catalyst systems. Due to a reduction in hydrogen levels in the polymerization processes, olefin polymers produced from these polymerization processes may have a higher molecular weight, a lower melt index, and higher levels of unsaturation.

Abstract: Compositions useful for activating catalysts for olefin polymerization are provided. The compositions are derived from at least carrier having at least two hydrogen bonded hydroxyl groups, organoaluminum compound, Lewis base, and Bronsted acid, wherein the Lewis base and the Bronsted acid form at least one ionic Bronsted acid.

Abstract: A catalyst composition is provided, which may be used for ring closing metathesis. In the composition, a catalyst is immobilized on a siliceous mesocellular foam support. A suitable catalyst for use in the composition is a Grubbs-type catalyst or a Hoveyda-Grubbs-type catalyst.

Abstract: A catalyst for the desulfurization and deodorization of gasoline, which is expressed by the formula: QlBmHn[AxMyOz](1+m+n)?, where: Q denotes a quaternary ammonium cation consisting of R1R2R3R4N+, in which R1, R2, R3, and R4 each denotes independently a C1 to C20 saturated alkyl group, respectively, provided that at least one of R1, R2, R3, and R4 denotes a C4 to C20 saturated alkyl group; B denotes a metal cation of Na+ or/and K+; H denotes a hydrogen atom; A denotes a central atom of B, P, As, Si or Al; M denotes a coordinated atom of W or Mo; O denotes an oxygen atom; 1?l?10, 0?m?3, 0?n?3, l+m+n?14, x=1 or 2, 9?y?18, 34?z?62, and l, m, n, y and z all are integers. A method of the desulfurization and deodorization of gasoline by using the catalyst comprises the steps of: mixing the catalyst and an aqueous solution of hydrogen peroxide, and then adding the gasoline to react them with stirring under conditions of 25 to 90° C. and 0.1 to 1 MPa for 10 to 180 min.

Abstract: This invention provides a convenient method for converting imines and other electrophiles into heterocyclic ring systems. The process does not require the use of metallic reagents, and is catalyzed by an organic heterocyclic carbene catalyst. Accordingly, it produces the desired compounds without the concomitant production of a large volume of metallic waste. Chiral heterocyclic carbene catalysts of the invention and methods of using these catalysts produce chiral heterocycles in high enantiomeric and diastereomeric excess.

Abstract: A process for the preparation of N-arylamine compounds, the process including: reacting a compound having an amino group with an acylating compound in the presence of a base and a transition metal catalyst under reaction conditions effective to form an N-arylamine compound; wherein the transition metal catalyst comprises a complex of a Group 8-10 metal and at least one chelating ligand comprising (R)-(?)-1-[(S)-2-dicyclohexylphosphino]-ferrocenyl]ethyldi-t-butylphosphine.

Abstract: A nickel slurry comprising a nickel catalyst, water and at least one rheology modifier, the activity of the nickel catalyst being equal to or greater than the activity of the equivalent nickel catalyst contained in a slurry which does not comprise rheology modifiers, wherein the at least one rheology modifier provides high viscosity at low shear stress and low viscosity at high shear stress.

Abstract: A catalyst for purifying exhaust gases includes a substrate, and a catalytic layer. The catalytic layer includes a lower catalytic layer, a first upper catalytic layer, and a second upper catalytic layer. The lower catalytic layer being loaded with Pd and/or Pt is formed on the substrate. The first upper catalytic layer being loaded with Pd covers an upstream side of the lower catalytic layer, and exhibits a concentration of loaded Pd that falls in a range of from 4.5 to 12% by mass when the entirety of the first upper catalytic layer is taken as 100% by mass. The second upper catalytic layer being loaded with Rh covers a downstream side of the lower catalytic layer.

Abstract: In a ceramic honeycomb structure, a catalyst material used for burning soot discharged from an internal combustion engine is supported on partition walls that are inner surfaces of cells. For example, a catalyst material to be used for burning carbon includes silver and alumina as components, and the catalyst material has a dumbbell-shaped O—Ag—O structure. Thus, the ceramic honeycomb structure can burn soot at low temperature using the supported catalyst material without corroding the honeycomb structure.

Abstract: In the present, a procedure of obtaining adsorbent from a waste material and its use are disclosed. This invention provides a natural waste material, specifically avocado seed, its preparation and use for the filling of columns used in the elimination of contaminants present in wastewater. The particles have an irregular shape and variable size for filling columns of different diameter and length. The adsorbent has the sufficient hardness for avoiding a particle collapse. The material does not rot, is re-generable and ecological. In the present invention the preparation of the adsorbent, its pre-activation, carbonization and application to eliminate the color of textile wastewater is disclosed. The color elimination from textile wastewater, as well as decrease of salts, total suspended solids, chemical oxygen demand (COD) and total organic carbon (TOC), is carried out passing the textile wastewater through a column filled with the prepared adsorbent.

Abstract: A process for treating a carrier, or a precursor thereof, to at least partly remove impurities comprising contacting the carrier, or the precursor thereof, with a treatment solution comprising a salt; a process for preparing a catalyst; the catalyst; a process for preparing an olefin oxide by reacting an olefin with oxygen in the presence of the catalyst; and a process for preparing a 1,2-diol, a 1,2-diol ether or an alkanolamine.

Abstract: The present invention provides a method for manufacturing a film catalyst, including forming a catalyst layer on one side or each side of a base material to obtain a film catalyst, bending the film catalyst, and optionally cutting the film catalyst, wherein the bending step is conducted by bending the film catalyst with a bending tool composed of two gears that are oppositely arranged as meshing each other while a protective material having a compressibility of 40 to 95% is inserted between the catalyst layer of the film catalyst and the two gears.

Abstract: A thermal, non-silver halide-containing image receiver element includes a support and an aqueous-coated image receiving layer. This receiving layer comprises a water-dispersible polymer having a polyurea or polyurethane backbone and up to 25 weight % of the water-dispersible polymer comprising polysiloxane side chains that are covalently attached to the backbone, each of the side chains having a molecular weight of at least 500. Aqueous dispersions of polyester ionomers and crosslinking agents can also be present.

Abstract: Not so many reports on the practical use of herbicidal sulfonylurea compounds have been made since they easily decompose in water or a process for production of their suspensions is complicated. Therefore, it is desired to prepare a water-based herbicidal suspension in which a herbicidal sulfonylurea compound will not decompose in water and excellent suspensibility of which is maintained, without complicated process. A water-based herbicidal suspension comprising (1) a herbicidal sulfonylurea compound (excluding 1-[3-[(4,6-dimethoxypyrimidin-2-ylcarbamoyl)sulfamoyl]-2-pyridyl]-2-fluoropropyl methoxyacetate and N-[(4,6-dimethoxypyrimidin-2-yl)aminocarbonyl]-2-(2-fluoro-1-hydroxypropyl)-3-pyridinesulfonamide) or its salt, (2) an inorganic salt, (3) at least one sulfonate selected from the group consisting of an aryl sulfonate, an alkylaryl sulfonate and their formaldehyde condensates and (4) water.

Abstract: The invention provides a porous nanoscale membrane. In one embodiment, the membrane can be used as a filtration device to screen agents that disrupt or prevent molecular interactions. In one embodiment, the membrane allows for screening agents that disrupt or prevent molecular interactions using a small sample volume with efficient high-throughput screening applications.

Abstract: Systems and methods of screening biomarkers in bodily fluids. According to at least one embodiment of the system for analyzing stabilizing agents of the present disclosure, the system comprises a detection platform comprising a plurality of detection sites each capable of receiving a diagnostic marker, a stabilization agent, and a detection agent. The system, in at least one embodiment, further comprises a detection device capable of determining a binding characteristic between the detection agent and the diagnostic marker in the detection sites. Further, the system may also be able to compare the binding characteristic among a plurality of detection markers to order the level of effect of the stabilizing agents assayed on the binding characteristic between the detection agent and the diagnostic agent.

Abstract: A well treatment fluid and method of use includes water, at least one hydratable polymer, an optional crosslinking agent, and a delayed release percarbonate formulation effective to reduce initial viscosity of the fluid after a period of time. Also disclosed are processes for fracturing a subterranean formation.

Abstract: A process for producing a grease composition which is capable of homogeneously and surely dispersing a non-fluorine-based base oil blended with a thickening agent and a fluorine-based base oil blended with a thickening agent. A mixture of a non-fluorine-based base oil blended with a first thickening agent and a fluorine-based base oil blended with a second thickening agent that are not mutually compatible is homogeneously treated at a shear rate of 150 s?1 or higher to form a morphology structure in which one of the non-fluorine-based base oil and fluorine-based base oil is homogeneously dispersed in a particulate form having a mean particle diameter of not more than 25 ?m in the other base oil.

Abstract: A DLC-coated member (100) has a base (200), an intermediate layer (300) that covers the surface of the base (200), and a DLC film (400) that covers the surface of the intermediate layer (300). The intermediate layer (300) has a five-layer structure, constituted of a first intermediate layer (301), a second intermediate layer (302), a third intermediate layer (303), a fourth intermediate layer (304), and a fifth intermediate layer (305). The five layers (301 to 305) are made of DLC to which Si has been added. Among the layers (301 to 305), the Si concentration in the first intermediate layer (301) is the highest, and that in the fifth intermediate layer (305) is the second highest. The Si concentrations in the second intermediate layer (302), third intermediate layer (303), and fourth intermediate layer (304) are lower than those in the first intermediate layer (301) and fifth intermediate layer (305).

Abstract: A composition useful for lubricating an automatic transmission comprises an oil of lubricating viscosity and a hydrocarbyl amine with a hydrocarbyl group of 12 to 22 carbon atoms and having one or two additional groups of the structure —R3—NHC(O)R4, wherein R3 is an alkylene group of 1 to 4 carbon atoms and R4 is a hydrocarbyl group of 4 to 22 carbon atoms, or a nitrogen-containing heterocyclic group, or an aminoalkyl group.

Abstract: A lubricant formulation and method of blending a lubricant formulation is disclosed. The lubricant formulation comprises at least two base stocks. The first base stock comprises a viscosity greater than 135 cSt, Kv100° C. and a tight molecular weight distribution as a function of viscosity. The second base stock comprises a viscosity less than 60 cSt, Kv100° C. The formulation also comprises a polyol ester. The lubricant formulation provides favorable properties.

Abstract: The invention relates to the use of specific protein and/or peptide fractions having a high aspartate content for regulating plasma glucose concentrations and increasing insulin sensitivity in a mammal. The invention relates to a complete food fortified with aspartate equivalents as well as a supplement rich in aspartate equivalents that is given simultaneously with or even minutes up to an hour prior to the consumption of a meal comprising glucose. The nutritional or pharmaceutical composition contains at least one protein having a high aspartate content, preferably of soy or dairy origin, which is further enriched with aspartate equivalents from another protein and/or free aspartate equivalents. The protein fraction comprises glutamate equivalents in a weight ratio of aspartate equivalents to glutamate equivalents (asp:glu) between 0.41:1 and 5:1.

Abstract: The present invention provides methods of reducing or enhancing T cell activation and/or B cell activation in a subject, comprising administering to a subject an effective amount of an inhibitor or enhancer, respectively, of Semaphorin 6D (Sema6D) activity on T cells and/or B cells.