Abstract: In some variations, this invention provides an electro-mechanical device for automated cleaning validation of a selected surface. The device moves a wetted swab over a cleaned surface to recover any remaining soil left over from the cleaning process. The device accepts a standard sampling swab that has been wetted with the required liquid solution. The device maintains constant swab pressure to ensure maximum recovery of soil or contaminants. The device includes an electronic controller for adjusting the movement of parts to effectively validate cleaning of the selected surface. The surface to be validated may be a substantially flat surface, or rounded. The surface may be contained within a vessel, reactor, a pipe, tank, or other equipment. The device may be disposed on an extension arm to allow the device to be positioned appropriately, without the need for a person to be close to the device for validation.

Abstract: Sample handling device which enables to take samples (samples of living beings) from single celled invertebrate living beings which live in different depths of aqueous mediums such as lakes, ponds, barrages and sea shore zones. The aim is to take samples from vertebrate living beings which live by attaching themselves on living beings or non living materials such as plants, stones and shells in aqueous medium such as lakes, ponds, barrages and shore zones. Another aim is to present the medium where single cell living beings live and to carry such living beings to the laboratory in order to examine them.

Abstract: A breath analysis system that includes a handle assembly with an analysis cartridge on an upper end thereof. The handle includes a main body portion with a pressure opening and a pressure transducer therein. The analysis cartridge includes a main body portion with an upper portion that defines a breath chamber, a lower portion that defines a fluid chamber and a filter assembly that is movable between a breath capture position and an analysis position. The filter assembly has an opening defined therethrough. In the breath capture position, the opening partially defines the breath chamber and in the analysis position the opening partially defines the fluid chamber. The system also includes an analysis device with a case, a door, a controller that controls the motor and a fluorescence detection assembly and a rotation assembly positioned in the case interior. The rotation assembly includes a shroud with a funnel portion for receiving the analysis cartridge.

Abstract: In an embodiment, the present invention is an apparatus, configured to collect emitted sample dose from a drug delivery device, wherein the sample dose is an aerosol, wherein the apparatus comprises a collection assembly and a removable plunger.

Abstract: A system for measuring water and/or gaseous phase content of high temperature process gases includes a probe for gas sample extraction and cooling temperatures below those which probe filter or gas analyzer components degrade. A heated gas extraction tube provided within the probe interior operates to maintain the thermal stability of the cooled gas sample to preserve chemical integrity.

Abstract: A non-invasive method of obtaining a melanin derivative from a test subject. The method includes contacting a target skin surface with an adhesive to provide a sample of biological material and obtaining the melanin derivative from the sample of biological material.

Abstract: Nanoporous polymorphic crystals of CaCO3 were used as sorbent and were applied in the dispersive micro-solid-phase extraction of selected polycyclic aromatic hydrocarbons as target analytes. After separation of the analytes on gas chromatography, they were successfully quantified with external calibration using flame ionization detection. Performance of the dispersive micro-solid-phase extraction was compared with a previously optimized solid-phase extraction technique.

Abstract: Methods and systems capturing particles suspended in a fluid flowed through a micro-channel, can include flowing the fluid including the particles to be captured through a micro-channel and past a groove defined in a surface of a wall of the micro-channel such that flowing the fluid past the groove forms microvortices in the fluid; contacting at least some of the particles against an adherent disposed on one or more of walls of the microchannel after the microvortices form in the fluid; and capturing at least some of the particles contacting the adherent.

Abstract: A universal materials testing machine is disclosed. In one embodiment, the machine comprises a plurality of grips holding a circular material specimen sheet; the grips being capable of pulling the material specimen radially outward. Each grip is connected to a force measurement sensor such as a load cell. The grip and the load cell assembly is connected to a linear actuator assembly. The linear actuator assembly comprises a motor connected to an arm that can move along a straight line. The actuator pulls or pushes the load cell and grip assembly. A camera module captures images of the specimen while being stretched or released. A data processing system gathers camera module images along with force measurements from the load cells. An analysis module running on the data processing unit computes stress and strain measurements and fits them to user selectable material model.

Abstract: A tensile test apparatus that enables tensile tests on test specimens such as metallic pieces shaped into stud/bolt by means of a compression method, wherein the apparatus includes a centering sleeve that enables centering of the tensile test apparatus to fit on the tray of the hydraulic press, a lower grip part that enables gripping of the stud/bolt (test specimen) movably positioned in the center sleeve from one end, and containing the bearing area of the pressure appliers on which the pressure applier applies pressure, an upper grip part that enables gripping of the stud/bolt (test specimen) immovably positioned in the center sleeve from the other end, and containing pressure applier holes within which the pressure applier passes through, and a press ram that transfers the compressive force to the lower grip part via the pressure appliers.

Abstract: A plastically deformable almen strip is held under a predetermined underwater environment in which water jet peening is carried out, and a result of providing compressive residual stress in the water jet peening is confirmed by jetting water jet to the almen strip.

Abstract: This innovation is a new type of the small specimens, nun-destructive, creep testing techniques, which are used to obtain creep properties and the remaining life time of the critical high temperature engineering components; when only small amount of material is available for creep testing. The small Two bar specimen (TBS) is suitable for use to obtain both uniaxial creep strain and creep rupture life data, using small material samples. The specimen has a simple geometry and can be conveniently machined and loaded through pin-connections for testing. This innovation is also an efficient testing method to determine the material creep constants which are used in creep models. The small two bar specimen can be made from small material samples removed from the component surfaces and then creep tested. The specimen is loaded using two loading pins under high temperature until the rupture of the specimen.

Abstract: A viscometer, comprising: a source of fluid pressure, a tube, an array of optical detectors, an acquisition driver circuit and viscosity computation logic. The tube has an inside volume that is hydraulically responsive to the source of fluid pressure. The array of optical detectors is positioned along a length of the first tube with a plurality of its detectors optically responsive to the inside volume of the first tube and including an image data output. The acquisition driver circuit is responsive to the image data output of the first array to acquire a series of successive images of the inside volume of the first tube. The viscosity computation logic is responsive to the acquisition driver circuit and operative to compute the viscosity of a fluid flowing along the first tube from the series of images of the inside volume of the first tube.

Abstract: Provided is a new method to obtain a shear rate of a fluid and Provided are a program and a device for the method. In the method, a pair of vibrators (1,1) are vibrated by an electromagnetic drive (2) and a viscosity of the sample liquid (9) is calculated by measuring a driving current of a coil (2b), which has a step (S1) of calculating the viscosity (?) of the sample liquid (9), a step (S2) of calculating a driving force (F) on a center of a wet part of the vibrator from the driving current (I), and a step (S3) of calculating a shear stress (S) exerted on the sample liquid from the driving force (F) and a liquid contact area of the vibrator (A), wherein the shear rate (D) is calculated from a ratio between the shear stress (S) and the viscosity (S4).

Abstract: A sample receiving chip comprising a substrate that receives an aliquot volume of a sample fluid and a sample region of the substrate, sized such that the volume of the sample fluid is sufficient to operatively cover a portion of the sample region. The energy imparted into the sample fluid is transduced by the sample region to produce an output signal that indicates energy properties of the sample fluid. The sample receiving chip also includes a channel formed in the substrate, the channel configured to collect the aliquot volume of a sample fluid and transfer the aliquot volume of sample fluid to the sample region.

Abstract: A particle size distribution measuring apparatus having: a light intensity distribution obtaining unit for obtaining the light intensity distribution that occurs when the sample cell is irradiated with light for measurement from a light source through detection by a detector; and a particle size distribution calculating unit for calculating the particle size distribution of the particles to be measured included in the sample by using the light intensity distribution obtained by the light intensity distribution obtaining unit, the temperature adjusting member for adjusting the temperature of the sample cell is movable between a first location along the light path around the sample cell and a second location that is outside the light path, and the temperature adjusting member is moved to the second location when the sample is irradiated with the light for measurement from the light source.

Abstract: An airborne-substance detection device includes a cartridge and an optical detector. The cartridge includes: an inflow plate having formed therein a micropore that allows inflow of a microparticle-containing gas; a trapping plate disposed opposite the micropore and having the ability to capture the microparticles on a surface facing the micropore; and a main body in which the inflow plate and the trapping plate are installed, and in which a channel is formed that channels the gas to the micropore. The optical detector optically detects the microparticles captured on the trapping plate. The trapping plate is disposed on the outermost side of the cartridge, and is configured from a light transmissive member. The optical detector detects the captured microparticles on the trapping plate from the back side of the trapping plate.

Abstract: There is provided a microparticle analysis apparatus including a sample channel configured to receive liquid containing a plurality of microparticles, a first pair of electrodes configured to form an alternating electric field in at least a part of the sample channel, a measuring part configured to measure impedance between the first pair of electrodes, an analyzing part configured to calculate property values of the microparticles from the impedance measured in the measuring part, and a determining part configured to determine whether data of the impedance measured in the measuring part is derived from the microparticles.

Abstract: A system for trapping particles in a gas comprising a chamber; an intake for intake of a gas containing at least one particle to be trapped and released, and an outlet for exit of the gas out of the chamber containing at least one particle; a first passage operatively connected to the intake operating to create a flow of a gas containing at least one particle into the chamber, a second passage operatively connected to the outlet for flow of the gas; a third passage operatively connected to a gaseous flow for creating a flow of fluid in a direction substantially opposite to the transfer of gas from the first passage so as to counteract the flow of gas from the first passage; an image sensor for recording an image; and a laser for generating a light beam for forming a photophoretic trap between the first and third passages.

Abstract: Sensing systems include a tube defining a Fabry-Perot cavity and an optical fiber including a distal end disposed within the Fabry-Perot cavity and a proximal end. A corrodible material caps the Fabry-Perot cavity. Devices for sensing corrosion of downhole equipment include an optical fiber with a corrodible material disposed over a distal end of the optical fiber. Systems for sensing a condition in equipment include an optical fiber with a fiber Bragg grating proximate a distal end thereof and a mass of sensor material coupled to the distal end of the optical fiber. The mass of sensor material is suspended from above the fiber Bragg grating. Other systems for sensing a condition in a wellbore include an optical fiber and a plurality of fiber Bragg gratings along a length thereof. A plurality of sensor materials are coupled to the optical fiber and surround respective fiber Bragg gratings.

Abstract: A method for analyzing a three-dimensional stress concentrating feature of a component (60), such as a borehole (62), using a two-dimensional probabilistic technique. A circumferentially-dependent stress concentration profile around the stress concentrating feature is determined, and then a probability of failure of the component is calculated using a 2D probabilistic failure analysis of the stress concentration profile. The probabilistic failure analysis may include a Monte Carlo theta integration approach.

Abstract: An optical chamber for a gas detection device, which includes reflecting device for reflecting radiation issued from a radiation source and for redirecting the radiation toward a radiation detector, the reflecting device including a first series of adjacent mirrors and a second series of adjacent mirrors. The mirrors of the first series and the mirrors of the second series are of the truncated ellipsoid of revolution type. The first series of mirrors and the second series of mirrors are arranged relative to each other so that the radiation emitted by the radiation source is reflected alternatively by a mirror of the second series and by a mirror of the first series and defines an optical path extending from the radiation source to the radiation detector.

Abstract: An optofluidic platform is constructed to comprise a vertical integration of optical and fluidic layers. The optical layer enables interaction of light with a fluid for a variety of purposes, including particle detection, manipulation, and analysis. The vertical integration allows layers to be permanently or temporarily attached to each other. Temporary attachments provide the advantage of reusing the same optical layer with different fluidic layers. Most preferably, the optical layer comprises antiresonant reflecting optical waveguide. Further, a fluidic layer can be configured to act as an interface between the optical layer and other fluidic layers attached thereon. Moreover, the fluidic layers can be configured to perform fluidic functions. The optofluidic platform can also comprise a protective layer.

Abstract: Examples of an optical standard and a calibration apparatus for calibrating or characterizing a spectroscopy system using such optical standard are disclosed. The optical standard can comprises a mixture of acetaminophen and barium sulfate, wherein a mass of the acetaminophen in the mixture is being less than a mass of the BaSO4. Such optical standard can be used in a calibration device for calibrating or characterizing a spectroscopy system. The calibration device can comprise a substrate base with a top surface and a bottom surface. The top surface can include a section for receiving the optical standard sample. The receiving section can be adhesive. The calibration device can further comprise a film that can be attached to the top surface of the substrate base to cover at least the section of the substrate where the optical standard is being placed. The calibration device can be disposed after the calibration measurements are completed.

Abstract: A spectral measurement apparatus includes a light source for generating a excitation light; an integrator having an input opening portion and an output opening portion; a housing portion arranged in the integrator and for housing a sample; an incidence optical system for making the excitation light incident to the sample; a photodetector for detecting a light to be measured output from the output opening portion; and an analysis means for calculating a light absorptance of the sample, based on a detection value detected by the photodetector, and an irradiation area with the excitation light at a position of incidence to the sample is set larger than an irradiated area of the sample, and the analysis means performs an area ratio correction regarding the irradiation area with the excitation light and the irradiated area of the sample, with respect to the light absorptance calculated.

Abstract: A display is provided for an automatic analyzer to display statistics such as measurement results. A width of a display in a window that displays statistics may be adjusted and the amount of information to be displayed on the display is changed according to a level of detail of the information which the operator wants to confirm. Sample information, measurement results, and detailed information related to the measurement results are simultaneously displayed without a subwindow being displayed in overlapped form in the limited display area.

Abstract: The present invention provides a means of measuring the concentration of ozone dissolved in water or another solvent. Small, discrete samples are sparged with air or another unreactive gas for a short period of time to measure a profile of ozone vs time in the sparge gas. The total amount of ozone in the original sample is obtained by integrating under the ozone vs time profile. A correction may be made for ozone remaining in the sample after a finite sparge time by integrating under the profile tail using a decay constant obtained from the measured ozone vs time profile. The method differs from previous methods based on sparging of the sample in that a Henry's Law equilibrium or constant ratio of ozone present in the gas and liquid phases is not assumed and the flow rates of sample and sparge gas are not continuous. Instead, discrete samples are analyzed by nearly complete sparging.

Abstract: The present invention is thus directed to an automated system of varying the optical path length in a sample that a light from a spectrophotometer must travel through. Such arrangements allow a user to easily vary the optical path length while also providing the user with an easy way to clean and prepare a transmission cell for optical interrogation. Such path length control can be automatically controlled by a programmable control system to quickly collect and stores data from different path lengths as needed for different spectrographic analysis. Moreover, the system utilizes configured wedge shaped windows to best minimize the reflections of light which cause periodic variation in transmission at different wave lengths (commonly described as “channel spectra”). Such a system, as presented herein, is able to return best-match spectra with far fewer computational steps and greater speed than if all possible combinations of reference spectra are considered.

Abstract: The disclosure relates to spectroscopic systems and spectrometers configured for hydrocarbon gas composition monitoring which provides compound speciation capability and function. In certain embodiments, the system identifies two or more bands of spectral data—e.g., including a band in each of (i) the near infrared and (ii) mid infrared wavelength regions, though bands covering subsets from about 800 nm to about 12 ?m can be used—from the signal corresponding to the hydrocarbon fluid in the gas flow cell, where the two or more bands are not contiguous (e.g., there is at least a 50 nm separation between the nearest ends of two bands). A combined spectrum is then formed from the two or more non-contiguous bands of spectral data and processed to identify and/or quantify the constituents of the hydrocarbon fluid.

Abstract: A device includes a light emitting element, a light receiving element, an electronic part capable of processing a signal output from the light receiving element, an optical member covering the light emitting element and the light receiving element, and a board on which the light emitting element, the light receiving element, the electronic part, and the optical member are mounted. The board includes conductor wiring electrically connected to the light receiving element.

Abstract: A system and method for determining characteristics of a multiphase flow in a well/pipe are disclosed. The disclosed system and method use an optical immersion probe including a flow gap across which two or more types of radiation are transmitted in order to measure absorptions of two or more substances within the multiphase flow. Primarily, broadband ultraviolet (UV) and/or near infrared radiations (NIR) are utilized with the probe to gather absorption data at and/or around at least one of the water peaks and at and/or around one or more oil or oil-condensate peaks. This data may be utilized to calculate the water-cut of the multiphase flow over a wider range of gas volume fractions.

Abstract: A method and apparatus for imaging a live cell object, the method including the steps of: (a) modulating the phase of an electromagnetic wave in a periodic pattern with a two dimensional phase grating to produce a phase modulated electromagnetic wave in two axes; (b) projecting a real image of the phase grating onto an object to produce phase modulated electromagnetic wave illumination of the object; (c) varying a location of the periodic pattern in time along the two axes to change the phase of the periodic pattern; (d) projecting a real image of the object to a detector; (e) recording multiple images of the object with the detector, each of the images is recorded with the periodic pattern in a different location; and (f) calculating a synthetic image of the object by extracting information 90 degrees out of phase with the illumination.

Abstract: A scattering tomography method includes: radiating waves to an object from transmitting antenna elements arranged on a curved surface; receiving scattered waves by receiving antenna elements arranged on the curved surface; and reconstructing an image relating to the information on the interior of the object from scattered wave data representing the scattered waves received by the receiving antenna elements, and in the reconstructing, a function ? for reconstructing the image relating to the information on the interior of the object is set in advance, an equation which a fundamental scattered function satisfies is constructed, a visualization function ? that is obtained by solving the equation is derived from the scattered wave data, and the image relating to the information on the interior of the object is reconstructed using the visualization function.

Abstract: An evaluation method of a device wafer on which plural devices are formed on a front surface and inside which a gettering layer is formed is provided. In the evaluation method, electromagnetic waves are radiated toward a back surface of the device wafer and excitation light is radiated to generate excess carriers. Furthermore, the gettering capability of the gettering layer formed in the device wafer is determined based on the damping time of reflected electromagnetic waves.

Abstract: A device for detecting an analyte includes a light source emitting substantially monochromatic light; a two-dimensional diffraction element that interacts with the light from the light source, the diffraction element having one or more features that can generate plasmon waves upon receipt of the light from the light source, at least some of the features being configured to interact with the analyte; and a two-dimensional image sensor facing the diffraction element to receive diffracted light from the diffraction element so as to detect a diffraction pattern projected thereto and to measure a two-dimensional spatial change in the diffraction pattern that occurs as a result of the analyte interacting with the feature of the diffraction element.

Abstract: There are provided Nano-Opto-Mechanical sensors for measuring concentration of a component in a gas flow, methods for their use and system comprising the same.

Abstract: The present invention relates to a terahertz system for generating and time-resolved incoherent detecting of THz radiation, said system comprising a pulse laser light source (1) emitting laser pulses with a pulse duration of up to 1 ps at a repetition frequency of at least 1 MHz, a first THz antenna serving as sender (3) which is optically coupled to the laser light source (1) and converts the laser pulses into THz pulses with a pulse duration of up to 10 ps, and a second THz antenna serving as receiver (5). It is the object of the present invention to provide an improved terahertz system. As compared with the state of the art, it is above all intended to allow for a faster incoherent measurement of THz radiation. To this end, the present invention proposes to couple the second THz antenna to a detector circuitry whose bandwidth is at least equivalent to the repetition frequency of the laser light source.

Abstract: A system and method for determining fluorescence decay in a biological sample is provided. The method includes acquiring optical signal data from at least a part of a biological sample undergoing fluorescence, assembling the optical signal data into a set of spatial time-series data, and converting the set of spatial time-series data into a set of spatial frequency time-series data. The method also includes applying a spatial filter to the set of spatial frequency time-series data to yield a set of filtered frequency-series data, the spatial filter configured to separate, from the set of frequency-series data, fluorescence signals consistent with a non-diffuse component and converting the set of filtered frequency-series data into a set of filtered time-series data.

Abstract: A fluorescence detection assembly that includes an emitter, a detector, a housing that defines an light chamber, a fluorescence chamber and a well, a light path that extends from the emitter, through the light chamber and through the well, and a fluorescence path that extends from the well, through the fluorescence chamber and to the detector.

Abstract: A particle detecting device includes: a storing device that stores first boundary information wherein the third light intensity is recorded in a first range at a discriminating boundary for particles of first and second classifications, second boundary information wherein the third light intensity is recorded in a second range at a discriminating boundary for particles of first and second classifications, and discriminating information wherein identifiers for particles of the first and second classifications are recorded in cells bounded and not bounded by the discriminating boundary, respectively; and a particle identifying portion that evaluates a particle being measured as a particle of the first classification when the identifier for a particle of the first classification is acquired based on the measured values for the first and second light intensities and the measured value for the third light intensity falls between the first and second boundary values.

Abstract: A particle detecting device includes: a light measuring instrument that measures measured values for intensities of first, second, and third lights of mutually differing wavelengths, produced by particles to be measured; a boundary information storing portion that stores a non-linear discriminating boundary for separating a class of a first classification of particles and a class of a second classification of particles; and a particle classifying portion that classifies the particle being measured into either of the classifications for the first and second classifications of particles, based on measured values for the intensities of the first through third lights and on the discriminating boundary.

Abstract: Examples of a spectroscopy probe for performing measurements of Raman spectra, reflectance spectra and fluorescence spectra are disclosed. The integrated spectral probe can comprise one or more light sources to provide a white light illumination to generate reflectance spectra, an excitation light to generate an UV/visible fluorescence spectra and a narrow band NIR excitation to induce Raman spectra. The multiple modalities of spectral measurements can be performed within 2 seconds or less. Examples of methods of operating the integrated spectroscopy probe disclosed.

Abstract: An optical sensor head detects only the refractive index inside a through hole and is not susceptible to influence from the outside of the through hole. An optical sensor head includes a light emitting device 2 in which a first reflection surface 4, a second reflection surface 5 that opposes the first reflection surface 4 and a waveguide 6 provided between the first reflection surface 4 and the second reflection surface 5 are formed; a light blocking film 7 in which a through hole 8 for generating near-field light is provided, and that is formed on the first reflection surface 4; and a detector 3 that detects the light intensity of light emitted from the light emitting device 2 through the second reflecting surface 5. The opening area of the through hole 8 on the emission surface 7b of the light of the light blocking film 7 is larger than the opening area of the through hole 8 on the opposing surface 7a of the light blocking film 7 opposing the first reflection surface 4.

Abstract: The present invention is directed to a reflectometer-based apparatus and method for colorimetric analysis. Advantageously, the present invention includes use of a test strip provided with an aperture over which a translucent colorimetric, indicator-bearing matrix is affixed. In addition, the present invention beneficially includes a test strip holder that includes a test strip-holding channel provided with a white background.

Abstract: A water testing system having a water sample container that is adapted to retain a water sample, a color indicator container that is adapted to dispense a color indicator which is adapted change the color of the water sample when the water sample contains DTC, and a colorimeter that is adapted to automatically determine a blank value and the concentration of sodium dimethyldithiocarbamate in the water sample. A method for determining the concentration of DTC in a water sample comprising providing a water testing system, placing the water sample in the water sample container, placing the water sample container in the colorimeter, automatically determining a blank value, adding the color indicator to the water sample, placing the water sample container in the colorimeter, and automatically determining the concentration of DTC in the water sample.

Abstract: A gas sensor configured to be discolored in response to a pH change upon reaction with a target gas, a refrigerator including the gas sensor, and a method of controlling the refrigerator includes a hydrogel support discolored through reaction with the target gas, and the hydrogel support includes dye provided to be discolored in response to a pH change upon reaction with the target gas.

Abstract: Disclosed are fibers which contains identification fibers. The identification fibers can contain a plurality of distinct features, or taggants, which vary among the fibers and/or along the length of the identification fibers of the fibers, a fiber band, or. The disclosed embodiments also relate to the method for making and characterizing the fibers. Characterization of the fibers can include identifying distinct features, combinations of distinct features, and number of fibers with various combinations of distinct features to supply chain information. The supply chain information can be used to track the fibers, fiber band, or yarn from manufacturing through intermediaries, conversion to final product, and/or the consumer.

Abstract: There are provided a computerized method of grading a gemstone and a system thereof. The method comprises: upon obtaining in a memory of a computer a single grading scale including for each parameter a sub-grade scale, borderlines thereof, unique groups of values of the parameter and final grades corresponding to the unique groups; and upon obtaining values of the parameters of the gemstone to be graded, assigning to the obtained value of each parameter its sub-grade using the sub-grade scale and borderlines thereof specified in the single grading scale; recognizing among the unique groups specified in the single grading scale a unique group corresponding to the assigned sub-grades; and assigning to the gemstone, in accordance with the recognized unique group, a final grade in the single grading scale.

Abstract: Inspection with multiple illumination regions includes generating a primary beam of illumination directed along a primary illumination direction, transmitting a portion of the primary beam of illumination along a first illumination direction, deflecting a portion of the primary beam of illumination along a second illumination direction different from the first illumination direction with one or more angular selection elements, focusing the transmitted portion of the primary beam of illumination onto a first inspection region of the substrate, and focusing the deflected portion of the primary beam of illumination onto a second inspection region of the substrate being spatially separated from the first inspection region.

Abstract: A system and method for inspecting a surface of a wafer. The system includes a source generating an optical beam at a deep ultraviolet wavelength; a solid immersion lens, receiving the optical beam, positioned such that the air gap between the lens and the wafer surface is less than the wavelength, an enhanced electric field being generated at the wafer surface, at least one particle on the wafer receiving the enhanced electric field generating scattered light; a detector receiving the scattered light and generating a corresponding electrical signal; and a processor receiving and analyzing the electrical signal.