Abstract: A negative electrode active material, a binder resin, a water-soluble polymer, and water-insoluble polysaccharide polymer fibers are included.

Abstract: The invention pertains to the field of electronic devices and the preparation thereof. In an aspect is an electronic device comprising a nanocomposite of carbon nanodomains homogeneously embedded in an insulating ceramic matrix, wherein the size and distribution of carbon nanodomains is such that the nanocomposite has a permittivity of greater than or equal to 200.

Abstract: A switch assembly and method of operation comprises a housing for supporting a plunger arrangement for moveable positioning of a plunger relative to the housing and plunger arrangement. The plunger arrangement comprises a retainer support for fixedly holding at least one terminal member within a retainer groove having a transverse channel passing from a first end to a second end of the retainer support.

Abstract: The invention relates to a linear selector (1) for power-free preselection of tap contacts for a tapped transformer (100). The linear selector (1) according to the invention is cost-effective, simple and compactly constructed. The functions of a selector and a reverser are thus better connected. The linear selector (1) is constructed from a fine selector (2) and a reversing switch (3). The fine selector (2) and the reversing switch (3) are directly driven via a common gear unit (6).

Abstract: A circuit breaker includes a trip mechanism having reduced trip movement and an integrated signal flag. The trip mechanism includes a spring-biased trip lever and a latching member for keeping the trip lever in an on or latched position. Upon occurrence of an abnormal current condition, the latching member is moved away from the trip lever to trip the trip mechanism. The latching member also has a catch mechanism designed to catch the trip lever after it is released, thereby halting further progress of both the trip lever and the latching member. As a result, less space is needed within the circuit breaker for trip movement compared to existing solutions. Moreover, the location of the catch mechanism on the latching member is selected such that the halting of the latching member places the integrated signal flag in an optimal viewing position within a viewing window.

Abstract: A high power switching circuit suitable for injection of high currents, typically several tens of Amperes, at high drive voltages of up to 5-10 kV, is provided using a combination of electromechanical and semiconductor switching elements that, while providing switchable polarity, substantially bypasses semiconductor switching element(s) during a substantial portion of current injection duty cycles. In this way, thermal heating of switching elements can be reduced/managed in a way that improves long term reliability of geophysical survey equipment. In addition, circuit protections can be provided to address backflow currents generated upon collapse of electromagnetic fields in inductive loads, such as is typical in geophysical surveys.

Abstract: A keyboard device is disclosed. The keyboard device includes a base, a key top, a film actuator, a position sensor, and a controller. The key top is movably arranged on the upper surface side of the base. Disposed between the base and the key top, the film actuator bends according to an applied voltage. Also disposed between the base and the key top, the position sensor detects a position of the key top. The controller applies a voltage to the film actuator in order to generate a repulsive force corresponding to the position of the key top detected by the position sensor.

Abstract: Control device, including: a commutator (60) which has a body (6) and a rotating control rod (1) which extend along an axis (A), the control rod (1) being of plastics material, a button (2) of molded plastics material which includes an axial recess having an axis A in which the control rod is received, an anchoring ring (3) which is produced from sheet metal which is cut and folded, the anchoring ring being arranged around the control rod, the anchoring ring including: first resilient plates (4) which are directed counter to the body and in an oblique manner in the direction of the axis A, with a burr which abuts the rod, second resilient plates (5) which are directed toward the body and which are orientated in an oblique manner in a direction away from the axis, the second plates being in abutment with the button.

Abstract: A gas circuit breaker is configured by comprising a tank filled with arc extinguishing gas, a pair of fixed side arc contact and moving side arc contact in the tank, a puffer chamber formed with a puffer cylinder including the moving side arc contact at its end and a fixed piston, and an insulating nozzle, attached to the end of the puffer cylinder, surrounding the moving side arc contact, that forms a flow channel to guide arc extinguishing gas from the puffer chamber to the contacts. A puffer cylinder 104 has a cylindrical member 104a at a breaker side end, an end of the insulating nozzle 101 is provided in the cylindrical member 104a. And the gas circuit breaker is configured by further comprising a hollow moving side main contact 102 at a breaker side end of the cylindrical member 104a, a pressing metal fitting 103 to engage an insulating nozzle 101 in the hollow part of the moving side main contact 102.

Abstract: Modular switchgear and methods for manufacturing the same. The modular switchgear includes a vacuum interrupter assembly, a source conductor assembly, and a housing assembly. The vacuum interrupter assembly includes a bushing, a fitting, and a vacuum interrupter at least partially molded within the bushing and including a movable contact and a stationary contact. The source conductor assembly includes a bushing, a fitting, and a source conductor molded within the bushing. The housing assembly includes a housing defining a chamber and a drive shaft and conductor positioned within the chamber. The housing assembly also includes a first receptacle for receiving the fitting of the vacuum interrupter assembly and a second receptacle for receiving the fitting of the source conductor assembly. The vacuum interrupter assembly, the source conductor assembly, and the housing assembly are coupled without molding the assemblies within a common housing.

Abstract: A fuse may include a layer stack comprising a plurality of layers defining an air gap, the layer stack including an inner layer. The inner layer may include an insulative substrate, and at least one fusible element connecting to a first terminal on a first end of the fuse and to a second terminal on a second end of the fuse. A first portion of the at least one fusible element may be disposed on a first planar surface of the insulative substrate and a second portion of the at least one fusible element disposed on a second planar surface of the insulative substrate opposite the first planar surface, wherein the first portion is electrically connected to the second portion through at least one via within the insulative substrate.

Abstract: A bypass avoiding only abnormal cells or abnormal electronic components in an electronic appliance having a plurality of battery cells or electronic components is formed to decrease resistance while keeping functionality. An insulating substrate 2; a heat-generating resistor 3 arranged on the insulating substrate 2; a first and a second electrodes 4, 5 arranged adjacently to each other on the insulating substrate 2; a third electrode 6 arranged adjacently to the first electrode 4 and electrically connected to the heat-generating resistor; and a first meltable conductor 8 arranged between the first and third electrodes 4, 6 to constitute a current path capable of being blown by a heat generated by the heat-generating resistor 3 are provided. The first meltable conductor 8 melted by heat from the heat-generating resistor 3 gathers on the first and second electrodes 4, 5 to short-circuit them.

Abstract: A fuse (1) includes a fuse element (10) having a fusible portion (13) provided between opposed inner edges (11a, 12a) of flat plate portions (11, 12), and an insulating housing (50) covering the inner edge sides of the flat plate portions and the fusible portion in a state in which outer edge (11c, 12c) sides of the flat plate portions are protruded outward from slits at respective end walls (55, 58) of the insulating housing (50). The outer edge sides of the flat plate portions are formed as terminal portions (21, 22) each having a thickness twice as large as the thickness of the flat plate portion, and protrusions (11b, 12b) provided on upper and lower edges of the flat plate portions abut against inner surfaces of the end walls (55, 58) of the insulating housing (50).

Abstract: An apparatus for controlling the temperature of an ion source is disclosed. The ion source includes a plurality of walls defining a chamber in which ions are generated. To control the temperature of the ion source, one or more heat shields is disposed exterior to the chamber. The heat shields are made of high temperature and/or refractory material designed to reflect heat back toward the ion source. In a first position, these heat shields are disposed to reflect a first amount of heat back toward the ion source. In a second position, these heat shields are disposed to reflect a lesser second amount of heat back toward the ion source. In some embodiments, the heat shields may be disposed in one or more intermediate positions, located between the first and second positions.

Abstract: Provided is an X-ray tube including an anode, a target on the anode, a cathode disposed separate from the target and the anode and comprising an emitter providing an electron beam to the target, and a side wall disposed between the cathode and the anode, and surrounding the target and the emitter. The side wall reflects a light generated by collision of the electron beam with the target to the cathode, and electrically insulates the cathode from the anode.

Abstract: An electron microscope system includes a laser system operable to generate an optical pulse and a pump pulse and a microscope column. The microscope column includes a multiple cathode structure having a plurality of spatially separated cathode regions. Each of the cathode regions are operable to generate an electron pulse. The microscope column also includes an electron acceleration region adjacent the multiple cathode structure, a specimen region operable to support a specimen, and a detector.

Abstract: An electron microscope is disclosed which has a laser-driven photocathode and an arbitrary waveform generator (AWG) laser system (“laser”). The laser produces a train of temporally-shaped laser pulses of a predefined pulse duration and waveform, and directs the laser pulses to the laser-driven photocathode to produce a train of electron pulses. An image sensor is used along with a deflector subsystem. The deflector subsystem is arranged downstream of the target but upstream of the image sensor, and has two pairs of plates arranged perpendicular to one another. A control system controls the laser and a plurality of switching components synchronized with the laser, to independently control excitation of each one of the deflector plates. This allows each electron pulse to be directed to a different portion of the image sensor, as well as to be provided with an independently set duration and independently set inter-pulse spacings.

Abstract: A stage system includes a stage that holds an object, a linear motor mechanism that moves the stage by a thrust force generated by a current flowing through the coil, and a control section that controls the current flowing through the coil. The current flowing through the coil in a state where the stage is maintained in the static state be greater than a minimum current amount required for generating the thrust force greater than a maximum static friction force of the stage with respect to the guide rails.

Abstract: A charged particle beam writing apparatus includes a storage unit to store writing data of a region to be written in a target object, a first dividing unit to read the writing data and divide the region to be written into at least one first data processing region that overlaps with at least a first region where a pattern has been arranged, and at least one second data processing region that overlaps with a second region where no pattern is arranged without overlapping with the first region, a data processing unit to perform data processing of predetermined data processing contents for at least one first data processing region without performing the data processing for at least one second data processing region, and a writing unit to write a pattern on the target object, based on processed data.

Abstract: In one aspect, an ion implantation system is disclosed, which comprises a deceleration system configured to receive an ion beam and decelerate the ion beam at a deceleration ratio of at least 2, and an electrostatic bend disposed downstream of the deceleration system for causing a deflection of the ion beam. The electrostatic bend includes three tandem electrode pairs for receiving the decelerated beam, where each electrode pair has an inner and an outer electrode spaced apart to allow passage of the ion beam therethrough. Each of the electrodes of the end electrode pair is held at an electric potential less than an electric potential at which any of the electrodes of the middle electrode pair is held and the electrodes of the first electrode pair are held at a lower electric potential relative to the electrodes of the middle electrode pair.

Abstract: Embodiments of showerheads having a detachable gas distribution plate are provided herein. In some embodiments, a showerhead for use in a semiconductor processing chamber may include a base having a first side and a second side opposing the first side; a gas distribution plate disposed proximate the second side of the base, wherein the gas distribution plate is formed from a material having an electrical resistivity between about 60 ohm-cm to 90 ohm-cm; a clamp disposed about a peripheral edge of the gas distribution plate to removably couple the gas distribution plate to the base; and a thermal gasket disposed in a gap between the base and gas distribution plate.

Abstract: Gas distribution assemblies are described including an annular body, an upper plate, and a lower plate. The upper plate may define a first plurality of apertures, and the lower plate may define a second and third plurality of apertures. The upper and lower plates may be coupled with one another and the annular body such that the first and second apertures produce channels through the gas distribution assemblies, and a volume is defined between the upper and lower plates.

Abstract: Systems and methods for impedance-based adjustment of power and frequency are described. A system includes a plasma chamber for containing plasma. The plasma chamber includes an electrode. The system includes a driver and amplifier coupled to the plasma chamber for providing a radio frequency (RF) signal to the electrode. The driver and amplifier is coupled to the plasma chamber via a transmission line. The system further includes a selector coupled to the driver and amplifier, a first auto frequency control (AFC) coupled to the selector, and a second AFC coupled to the selector. The selector is configured to select the first AFC or the second AFC based on values of current and voltage sensed on the transmission line.

Abstract: A plasma enhanced chemical vapor deposition (PECVD) device includes a deposition box, a first electrode, and a second electrode, where the first electrode and the second electrode are arranged in the deposition box. A process chamber is arranged in the deposition box, a gas line and a pump port are respectively arranged along a first side wall and a second side wall of the deposition box, and a valve is arranged along a third side wall of the deposition box. The first electrode is arranged in an inside of the process chamber, and is connected to a radio frequency (RF) power source. A first end of the first electrode corresponds to the valve and is adjacent to the pump port.

Abstract: The invention relates to a plasma source (1) for depositing a coating onto a substrate (9), which is connectable to a power source (P) and includes: an electrode (2); a magnetic assembly (4) located circumferentially relative to said electrode and including a set of magnets mutually connected by a magnetic bracket (46) including a first and second central magnet (43, 44) and at least one head magnet (45); and an electrically insulating enclosure (5) arranged such as to surround the electrode and the magnets.

Abstract: A high-purity titanium target for sputtering having a purity of 5N5 (99.9995%) or higher, wherein the high-purity titanium target has no macro pattern on the target surface. An object of this invention is to provide a high-quality titanium target for sputtering, in which impurities causing particles and abnormal discharge phenomena are reduced, and which is free from fractures and cracks even during high-rate sputtering, and capable of stabilizing the sputtering characteristics, effectively inhibiting the generation of particles during deposition, and improving the uniformity of deposition.

Abstract: An object of the invention is to reduce sizes of an inert gas supply and exhaust devices used for a pulse sputtering device. Another object is to efficiently supply suitable quantity of the inert gas to a place where the inert gas is required in the pulse sputtering device. Therefore, a provided pulse sputtering device has a sputtering source that performs pulse discharge and generates plasma, a gas injection valve that injects and supplies an inert gas to the sputtering source and a controller that controls the sputtering source and the gas injection valve. The controller controls the sputtering source and the gas injection valve such that the gas injection valve injects the inert gas intermittently and such that a part of a period, in which the pulse discharge occurs in the sputtering source, overlaps with a part of a period, in which the gas injection valve injects and supplies the inert gas.

Abstract: An apparatus for mass spectrometry includes a laser ablation sampler comprising a laser ablation chamber and a laser which produces a laser beam. The laser irradiates and ablates a material from a sample placed within the laser ablation chamber so as to generate an ablated sample material. A transfer tube system comprising transfer tubes connect the laser ablation sample with, and provides a parallel and simultaneous transport of the ablated sample material to, each of a soft and a hard ionization source. The soft and hard ionization sources interact with the ablated sample material to respectively generate ion populations having a mass-to-charge ratio distribution. These respective mass-to-charge ratio distributions are respectively transmitted to a molecular mass spectrometer and to an elemental mass spectrometer which provide information on the mass-to-charge ratio distribution. The mass-to-charge ratio distributions are used to characterize a composition of the ablated sample material.

Abstract: An ion trap includes a containment region for containing ions, and a plurality of electrodes positioned on a regular polyhedral structure encompassing the containment region. An electrode is positioned on each vertex of the encompassing structure and at least one of the polygonal surfaces includes additional electrodes configured to form a plurality of quadrupoles on the surface. Alternating RF voltage is applied to the plurality of electrodes, so that directly neighboring electrodes are of equal amplitude and opposite polarity at any point in time. This configuration on the polyhedral structure forms a potential barrier for repelling the ions from each of the regular polygonal surfaces and containing them in the trap. Mass selective filters can be formed from the quadrupoles for parallel mass analysis in different m/z windows. Application of a small DC potential to a plate electrode outside the quadrupoles preferentially depletes single charged ions for enhanced signal-to-noise analysis.

Abstract: A multi-reflection mass spectrometer comprising two ion-optical mirrors, each mirror elongated generally along a drift direction (Y), each mirror opposing the other in an X direction and having a space therebetween, the X direction being orthogonal to Y; the mass spectrometer further comprising one or more compensation electrodes each electrode being located in or adjacent the space extending between the opposing mirrors; the compensation electrodes being configured and electrically biased in use so as to produce, in at least a portion of the space extending between the mirrors, an electrical potential offset which: (i) varies as a function of the distance along the drift length, and/or; (ii) has a different extent in the X direction as a function of the distance along the drift length. In a preferred embodiment the period of ion oscillation between the mirrors is not substantially constant along the whole of the drift length.

Abstract: A second gate in an Ion Mobility Spectrometer is used to select or block different time windows of the ion mobility spectrum. A second gate in the Ion Mobility Mass Spectrometer is used to modulate peak intensities in the IMS spectrum, allowing each peak in the IMS spectrum to be unambiguously matched with its set of fragment ions in a subsequent MS-MS mass spectrum.

Abstract: A mass spectrometer including an ion source, an ion guide, a pulsed converter, and an electrostatic analyzer is disclosed, along with a method of mass spectrometry and an ion injector. The ion source generates ions, such as ions within a continuous or a quasi-continuous ion beam. The ion guide receives a portion of the ions generated by the ion source. The pulsed converter, which receives ions from the ion guide, includes at least one electrode connected to a RF signal. The pulsed converter may include a means for ejecting the ions in the form of ion packets. The electrostatic analyzer forms a two-dimensional electrostatic field in an X-Y plane. The electrostatic field is substantially extended in a Z-direction that is locally orthogonal to the X-Y plane and may be curved or linear. Ions undergo isochronous ion oscillations in the electrostatic field. The pulsed converter and electrostatic analyzer are Z-directionally elongated.

Abstract: The invention relates to reflectors for time-of-flight mass spectrometers, and especially their design. A Mamyrin reflector is provided which consists of metal plates with cut-out internal apertures, and symmetric shielding edges which are set back from the inner edges. The dipole field formed by these shielding edges penetrates only slightly through the plates and into the interior of the reflector. With a good mechanical design, the resolving power of the time-of-flight mass spectrometer increases by around fifteen percent compared to the best prior art to date.

Abstract: An electrostatic mass spectrometer and a method of mass spectrometric analysis utilizing novel traps are disclosed. The mass spectrometer includes an ion source, an ion pulse injector, an ion detector, a set of analyzer electrodes connected to a set of power supplies, and a vacuum chamber enclosing the set of analyzer electrodes. The analyzer electrodes have multiple sets of elongated slits forming an array of elongated volumes. Each elongated volume is formed by a single set of slits aligned between the electrodes, and each volume forms a two-dimensional electrostatic field in an X-Y plane and is extended in a locally orthogonal Z-direction. Each two-dimensional field is arranged to trap moving ions in the X-Y plane and to enable isochronous ion motion along a mean ion trajectory within the X-Y plane.

Abstract: A multi-reflection mass spectrometer is provided comprising two ion-optical mirrors, each mirror elongated generally along a drift direction (Y), each mirror opposing the other in an X direction, the X direction being orthogonal to Y, characterized in that the mirrors are not a constant distance from each other in the X direction along at least a portion of their lengths in the drift direction. In use, ions are reflected from one opposing mirror to the other a plurality of times while drifting along the drift direction so as to follow a generally zigzag path within the mass spectrometer. The motion of ions along the drift direction is opposed by an electric field resulting from the non-constant distance of the mirrors from each other along at least a portion of their lengths in the drift direction that causes the ions to reverse their direction.

Abstract: The present disclosure provides a new tandem mass spectrometer and methods of using the same for analyzing charged particles. The differentially pumped dual linear quadrupole ion trap mass spectrometer of the present disclose includes a combination of two linear quadrupole (LQIT) mass spectrometers with differentially pumped vacuum chambers.

Abstract: An electrostatic analyzer including at least one first set of electrodes, at least one second set of electrodes, and a field free space separating the two sets of electrodes is disclosed. The two sets of electrodes form two-dimensional electrostatic fields of ion mirrors and are arranged to provide isochronous ion oscillations in an x-y plane. Both sets of electrodes are curves at a constant curvature radius R along a third locally orthogonal Z-direction to form a torroidal field region. A related method is also disclosed.

Abstract: A plasma light source includes a chamber having an ionizable medium therein, an ignition source configured to provide first electromagnetic radiation to the chamber, a sustaining source configured to separately provide second electromagnetic radiation to the chamber, a first curved mirror positioned adjacent the chamber, and a second curved mirror positioned opposite the first mirror and arranged to direct the first electromagnetic radiation toward the chamber. The second electromagnetic radiation may be different than the first electromagnetic radiation. Related devices and methods of operation are also discussed.

Abstract: An elongated microwave powered lamp (1) having one or more bulbs with any length or shape or disposition according to a linear series, straight or curved, includes: at least one transparent elongated bulb (2) containing, in an inner space thereof, a material apt to be excited by microwave irradiation thereby emitting an electromagnetic radiation; a coaxial microwave antenna placed outside the bulb (2) and respectively connected to a microwave source (81) via corresponding antenna lead (91), said bulb (2) and said at least one microwave coaxial antenna being displaced in a close relationship to each other to allow the microwave excitation of said material, wherein the outer tubular conductor of the coaxial antenna (5) has spaced holes (6) formed therethrough and facing the bulb (2), at which microwaves are released toward the bulb.

Abstract: A method for fabricating a semiconductor device includes obtaining first raw data by measuring an overlay of a semiconductor wafer of a first lot and generating a regression equation based on the first raw data. A semiconductor wafer of a second lot is aligned based on a coefficient of the regression equation, second raw data is obtained by measuring an overlay of the aligned semiconductor wafer of the second lot, and the regression equation is corrected based on the second raw data. Correction of the regression equation includes dividing the regression equation into an initial equation and a residual equation excluding the initial equation from the regression equation, correcting a coefficient of the initial equation; and correcting a coefficient of the residual equation.

Abstract: A cleaning and inspection system includes a cleaning chamber and retaining structure disposed within the cleaning chamber and configured to secure an article to be cleaned within the cleaning chamber. The cleaning and inspection system also includes a gas distributor disposed within the cleaning chamber and configured to distribute a turbulent flow of gas into the cleaning chamber that facilitates removal of foreign particles from a surface of the article. Further, the system includes a particle collection surface positioned to collect foreign particles removed from the surface of the article.

Abstract: In a substrate processing apparatus, with an internal space of a chamber brought into a reduced pressure atmosphere, a first processing liquid is supplied onto an upper surface of a substrate while the substrate is rotated, and the first processing liquid is thereby quickly spread from a center portion toward a peripheral portion on the upper surface of the substrate. It is thereby possible to coat the upper surface of the substrate with the first processing liquid in a shorter time as compared with under normal pressure. Further, by sucking the first processing liquid from the vicinity of an edge of the substrate, it is possible to coat the upper surface of the substrate with the first processing liquid in a still shorter time. As a result, it is possible to shorten the time required for the processing of the substrate.

Abstract: Provided is a method for producing a circular wafer using a grinding tape to grind the edge of a wafer comprising a crystalline material. A primary grinding step is provided for contacting a grinding body to the peripheral portion of a wafer placed centered on a horizontal stage and rotating the stage, thus grinding the peripheral portion. The radius of the wafer is measured, and a radius is set that is no greater than the measured smallest radius, and the difference ?r between the set radius and the measured wafer radius along the peripheral portion is determined. The portions of the peripheral portion at which ?r is greater than a predetermined value are determined and a secondary grinding step is provided for contacting the peripheral portion and the grinding body, rotating the stage forwards and backwards in a predetermined range of rotational angles, and grinding the peripheral portion.

Abstract: In one embodiment, a processing apparatus may include a process chamber configured to house a substrate and a hybrid source assembly that includes a gas channel coupled to a molecular source; and a plasma chamber configured to generate a plasma and isolated from the gas channel. The processing apparatus may also include an extraction assembly disposed between the hybrid source assembly and process chamber, coupled to the gas channel and plasma chamber, and configured to direct an ion beam to a substrate, the ion beam comprising angled ions wherein the angled ions form a non-zero angle with respect to a perpendicular to a substrate plane; and configured to direct a molecular beam comprising molecular species received from the gas channel to the substrate.

Abstract: A system and method for anti-reflective layers is provided. In an embodiment the anti-reflective layer comprises a floating additive in order to form a floating additive region along a top surface of the anti-reflective layer after the anti-reflective layer has dispersed. The floating additive may comprise an additive group which will decompose along with a fluorine unit bonded to the additive group which will decompose. Additionally, adhesion between the middle layer and the photoresist may be increased by applying an adhesion promotion layer using either a deposition process or phase separation, or a cross-linking may be performed between the middle layer and the photoresist.

Abstract: Embodiments of the invention relate to deposition of a conformal carbon-based material. In one embodiment, the method comprises depositing a sacrificial dielectric layer with a predetermined thickness over a substrate, forming patterned features on the substrate by removing portions of the sacrificial dielectric layer to expose an upper surface of the substrate, introducing a hydrocarbon source, a plasma-initiating gas, and a dilution gas into the processing chamber, wherein a volumetric flow rate of hydrocarbon source: plasma-initiating gas: dilution gas is in a ratio of 1:0.5:20, generating a plasma at a deposition temperature of about 300 C to about 500 C to deposit a conformal amorphous carbon layer on the patterned features and the exposed upper surface of the substrate, selectively removing the amorphous carbon layer from an upper surface of the patterned features and the upper surface of the substrate, and removing the patterned features.

Abstract: Disclosed herein is an ultra-low dielectric (k) film and methods of making thereof. A ultra-low k film has a covalently bonded network comprising atoms of silicon, oxygen, carbon, and hydrogen, a cyclotrisilane structure, and a plurality of pores having a pore size distribution (PSD) of less than about 1.1 nanometers (nm). The ultra-low k film has a k value of less than about 2.4 and at least about 28 atomic percent of carbon.

Abstract: Methods for fabricating a layered circuit structure are provided, which include, for instance: depositing a first material layer above a substrate, the first material layer having an oxidized upper surface; providing a second material layer over the oxidized upper surface of the first material layer; and inhibiting diffusion of one or more elements from the oxidized upper surface of the first material layer into either the first material layer or the second material layer during the providing of the second material layer over the oxidized upper surface of the first material layer. The inhibiting may include one or more of modifying a characteristic(s) of the first material layer, forming a protective layer over the oxidized upper surface of the first material layer, or altering at least one process parameter employed in providing the second material layer.

Abstract: A method for forming an aligned oxide semiconductor wire pattern includes: dissolving an oxide semiconductor precursor and an organic polymer in distilled water or an organic solvent to provide a composite solution of an oxide semiconductor precursor/organic polymer; continuously discharging the composite solution of the oxide semiconductor precursor/organic polymer in a vertical upper direction from a substrate to align an oxide semiconductor precursor/organic polymer composite wire on the substrate; and heating the oxide semiconductor precursor/organic polymer composite wire to remove the organic polymer and converting the oxide semiconductor precursor into an oxide semiconductor to form an aligned oxide semiconductor wire pattern.

Abstract: A method of manufacturing a thin film transistor substrate includes forming an amorphous silicon layer on a substrate, the substrate having a rectangular shape, and irradiating the amorphous silicon layer with a laser beam at a random pitch, such that the amorphous silicon layer is crystallizes into a polycrystalline silicon layer, wherein the laser beam has a major axis and a minor axis, the major axis being non-parallel with respect to sides of the substrate.