Abstract: A method for fabricating a micro-electro-mechanical system (MEMS) provides a semiconductor chip having a cavity with a radiation sensor MEMS. The opening of the cavity at the chip surface is covered by a plate transmissive to the radiation sensed by the MEMS. A patterned metal film is placed across the plate surface remote from the cavity.

Abstract: A method for fabricating an integrated circuit device is disclosed. The method includes providing a first substrate; bonding a second substrate to the first substrate, the second substrate including a microeelectromechanical system (MEMS) device; and bonding a third substrate to the first substrate.

Abstract: The present invention relates to a process for producing a 3-dimensional structure assembled from nanoparticles by using a mask having a pattern of perforations, which comprises the steps of: in a grounded reactor, placing a mask having a pattern of perforations corresponding to a determined pattern at a certain distance above a substrate to be patterned, and then applying voltage to the substrate to form an electrodynamic focusing lens; and introducing charged nanoparticles into the reactor, the charged particles being guided to the substrate through the pattern of perforations so as to be selectively attached to the substrate with 3-dimensional shape. According to the process of the present invention, a 3-dimensional structure of various shapes can be produced without producing noise pattern, with high accuracy and high efficiency.

Abstract: A micro-electromechanical device and method of manufacture are disclosed. A sacrificial layer is formed on a silicon substrate. A metal layer is formed on a top surface of the sacrificial layer. Soft magnetic material is electrolessly deposited on the metal layer to manufacture the micro-electromechanical device. The sacrificial layer is removed to produce a metal beam separated from the silicon substrate by a space.

Abstract: A method for releasing a diaphragm of a micro-electro-mechanical systems (MEMS) device at a stage of semi-finished product. The method includes pre-wetting the MEMS device in a pre-wetting solution to at least pre-wet a sidewall surface of a cavity of the MEMS device. Then, a wetting process after the step of pre-wetting the MEMS device is performed to etch a dielectric material of a dielectric layer for holding the diaphragm, wherein a sensing portion of the diaphragm is released from the dielectric layer.

Abstract: A method for producing a holder of at least one substrate from a first and a second plate, each including first and second parallel flat faces, the method including: a) delimitation on the first face of the second plate of plural surfaces by a non-bondable area in which a direct bonding with a face of the first plate is prevented; b) bringing the first face of the second plate into contact with the first face of the first plate; c) direct bonding between the first faces except in the non-bondable area; and d) removal of the portions of the second plate located vertically below surfaces inside the non-bondable area.

Abstract: A device is provided, including a supplying unit and an arranging unit. The supplying unit includes a guiding axle. A supplying element is located on the guiding axle and a first motor. The supplying element supplies the at least one carbon nanotube wire to the arranging unit, and the first motor drives the supplying element reciprocating straightly along the guiding axle. The arranging unit includes a prism shaped supporter, a whirling arm and a driving mechanism. The prism shaped supporter supports at least one planar substrate, and the driving mechanism drives the whirling arm and the prism shaped supporter rotating round an axis of the prism shaped supporter.

Abstract: A process in a resulting product of the process in which a hydrogen storage metal amide is modified by a ball milling process using an additive of TPP. The resulting product provides for a hydrogen storage metal amide having a coating that renders the hydrogen storage metal amide resistant to air, ambient moisture, and liquid water while improving useful hydrogen storage and release kinetics.

Abstract: This invention relates to a process for co-producing methanol and ammonia, wherein a syngas mixture consisting essentially of carbon monoxide (CO), carbon dioxide (CO2) and hydrogen (H2) is first partially reacted in a methanol once-through reactor, unreacted syngas is divided into a first and a second stream, the first stream is purified and fed to an ammonia synthesis section, and the second stream is fed to a methanol synthesis and purification section. With this process it is possible to produce methanol and ammonia at very high capacities in an integrated single process, applying unit operations not exceeding current practical capacity limitations. For example, the process allows production of 8000 mtpd of methanol and 2000 mtpd of ammonia starting from natural gas and air. The process further shows a balanced production of ammonia and carbon dioxide, thus allowing co-production of urea also to be integrated.

Abstract: The invention provides a system designed for the complete conversion of carbonaceous feedstock into syngas and slag. The system comprises a primary chamber for the volatilization of feedstock generating a primary chamber gas (an offgas); a secondary chamber for the further conversion of processed feedstock to a secondary chamber gas (a syngas) and a residue; a gas-reformulating zone for processing gas generated within one or more of the chambers; and a melting chamber for vitrifying residue. The primary chamber comprises direct or indirect feedstock additive capabilities in order to adjust the carbon content of the feedstock. The system also comprises a control system for use with the gasification system to monitor and regulate the different stages of the process to ensure the efficient and complete conversion of the carbonaceous feedstock into a syngas product.

Abstract: A process to convert light hydrocarbons such as natural gas to a liquid or liquids. Vacuum pressure swing adsorption (VPSA) is used to produce a stream of relatively high purity oxygen. The relatively high purity oxygen is reacted with light hydrocarbons and steam in a partial oxidation reactor in order to produce synthesis gas. The synthesis gas is thereafter converted to a hydrocarbon liquid or liquids via a Fischer Tropsch or related reaction.

Abstract: A method for decreasing steam methane reformer (SMR) tube temperature is provided. The method can include the steps of introducing a hydrocarbon containing feed to be reformed to a plurality of SMR tubes in the presence of steam under conditions effective to produce hydrogen and carbon monoxide, monitoring the temperature of at least a plurality of the tubes within the SMR during operation, comparing the monitored temperature against a first predetermined value, and introducing an effective amount of water to a reformer tube when the monitored temperature of the reformer tube is at or above the predetermined value, such that the temperature of the reformer tube is reduced.

Abstract: The present invention concerns a process for producing synthesis gas by steam reforming a hydrocarbon load in a reforming furnace provided with a combustion chamber and a convection chamber; the combustion chamber includes vertical tubes filled with catalyst wherein a mixture of hydrocarbons and steam circulates from top to bottom recovering raw synthesis gas at the bottom of the tubes, and burners disposed in rows heat the tubes; the convection chamber discharges fumes containing the gases produced by the combustion. The process also comprises steps of using the heat contained in the fumes for preheating and/or heating various fluids related or unrelated to the process. In the event of the reduction of the mass flow of fumes, the quantity of energy to be transferred into the convection area is maintained by supplying a supplementary gaseous flow to the combustion area.

Abstract: In some implementations, a system for producing hydrogen and oxygen from water includes a target, an oxygen selective membrane, a cooling chamber, and a hydrogen selective membrane. The target heats to at least a temperature that thermally decomposes water, receives water vapor, heats the received water vapor to the temperature that thermally decomposes water to form a heated vapor, and passes the heated vapor to an oxygen selective membrane. The oxygen selective membrane separates, at or near the temperature that thermally decomposes water, oxygen from the heated vapor to form a hydrogen-rich vapor. The cooling chamber cools the hydrogen-rich vapor to at least a specified temperature. The hydrogen selective membrane separates hydrogen in the hydrogen-rich vapor to leave substantially water vapor.

Abstract: An ozone generator includes a housing having an internal cavity and a plurality of electrode pairs located in the internal cavity. The electrode pairs each contain two electrodes arranged at a distance of a predetermined gap length, and a discharge space is formed between the two electrodes, whereby ozone is produced when a source gas flows at least between the two electrodes and a discharge is generated between the two electrodes. The ozone generator has a non-discharge portion in an arbitrary cross-section having a normal direction parallel to a main flow direction of the source gas in the internal cavity.

Abstract: The present invention allows low-concentration hydrogen sulfide gas to be recovered and supplied to a processing plant that uses hydrogen sulfide gas. The hydrogen sulfide gas production plant is provided with a first supply pipe that supplies hydrogen sulfide gas obtained from a sulfur recovery facility to a processing plant, and a second supply pipe that is branched at a predetermined point in the first supply pipe and supplies the hydrogen sulfide gas from the sulfur recovery facility to the processing plant. The first supply pipe has a concentration meter that is provided on the upstream side than the branch point and measures the concentration of the hydrogen sulfide gas. The first supply pipe and the second supply pipe have ON/OFF valves that are provided on the downstream side of the branch point and perform ON/OFF control of the supply to the processing plant through the supply pipe.

Abstract: Methods of preparing polycrystalline aluminum nitride materials that have high density, high purity, and favorable surface morphology are disclosed. The methods generally comprises pressing aluminum nitride powders to form a slug, sintering the slug to form a sintered, polycrystalline aluminum nitride boule, and optionally shaping the boule and/or polishing at least a portion of the boule to provide a finished substrate. The sintered, polycrystalline aluminum nitride materials beneficially are prepared without the use of any sintering aid or binder, and the formed materials exhibit excellent density, AlN purity, and surface morphology.

Abstract: A preparation method of a battery composite material includes steps of providing phosphoric acid, iron powder, a carbon source and a first reactant, processing a reaction of the phosphoric acid and the iron powder to produce a first product, calcining the first product to produce a precursor, among which the formula of the precursor is written by Fe7(PO4)6, and processing a reaction of the precursor, the carbon source and the first reactant to get a reaction mixture and calcining the reaction mixture to produce the battery composite material. As a result, the present invention achieves the advantages of reducing grind time of fabricating processes, so that the prime cost, the time cost, and the difficulty of fabricating are reduced.

Abstract: A method for preparing a carbon microparticle from an organic raw material having lignin as a main constituent, wherein an aqueous solution with 5% total concentration of lignin and sodium hydroxide (the proportion in mass is 1:0.5) is spray-dried to prepare a complex microparticle. This complex microparticle is heat-processed under nitrogen atmosphere at 600° C. for one hour and cooled. Thereafter, this is washed with water and further dried to prepare a hollow carbon microparticle such as those shown in FIG. 2 (b). The prepared carbon microparticle is light-weight and has an equivalent specific surface area to commercially available activated charcoal.

Abstract: The carbon nanofiber has a content of oxygen controlled in a range of 8% by mass to 20% by mass and excellent dispersibility in polar solvents by means of an oxidization treatment carried out on a raw material of the carbon nanofiber. The above-described oxidization treatment is preferably carried out at 100° C. or higher using an mixed acid of nitric acid and sulfuric acid in which the nitric acid concentration is in a range of 10% by mass to 30% by mass. A carbon nanofiber dispersion liquid is obtained by dispersing the above-described carbon nanofiber in a polar solvent, and a carbon nanofiber composition contains the above-described dispersion liquid and a binder component.

Abstract: The present invention relates to a catalyst composition for the synthesis of multi-walled carbon nanotube having high apparent density in a manner of high yield. More particularly, this invention relates to a multi-component metal catalyst composition comprising i) main catalyst of Fe and Mo, ii) inactive support of Al and iii) optional co-catalyst at least one selected from Co, Ni, Ti, Mn, W, Sn or Cu. Further, the present invention affords multi-walled carbon nanotube having 5˜15 nm of fibrous diameter and 0.5˜4 ?m bundle diameter.

Abstract: The present invention relates to a continuous-feed furnace assembly and processes for preparing and continuously thermally exfoliating graphite oxide to give a highly exfoliated graphite.

Abstract: [Problems] To provide a process for efficiently producing trichlorosilane on an industrial scale by efficiently reusing the waste gas of after trichlorosilane is separated by condensation from the gas that is formed by the reaction of metallic silicon with hydrogen chloride. [Means for Solution] A process for producing trichlorosilane, including, independently from each other, a first production process for forming trichlorosilane by reacting metallic silicon with hydrogen chloride and a second production process for forming trichlorosilane by reacting metallic silicon with tetrachlorosilane and hydrogen; wherein trichlorosilane and other chlorosilane compounds are separated by condensation from trichlorosilane-containing gases formed by reaction in the first production process, and the waste gas from which trichlorosilane and other chlorosilane compounds have been separated by condensation is fed as a hydrogen source to the second production process.

Abstract: Disclosed is an organic dispersion of inorganic platelets, which includes an organic solvent and H-form inorganic platelets dispersed therein. The H-form inorganic platelets have a particle size of between about 20 and 80 nm and the organic dispersion has a sold content of between about 1 and 20 wt %. A method for forming the organic dispersion is also provided.

Abstract: Systems and methods for producing syngas and ammonia are provided. The method can include reforming a hydrocarbon in a first reaction zone in the presence of one or more first catalysts and steam at conditions sufficient to produce an effluent comprising a portion of the hydrocarbon, carbon monoxide, carbon dioxide, and hydrogen. The effluent can be reformed in a second reaction zone in the presence of one or more second catalysts and nitrogen at conditions sufficient to produce a syngas comprising methane, hydrogen, nitrogen, carbon monoxide, and carbon dioxide, or any combination thereof. At least a portion of the nitrogen and hydrogen in the syngas can be converted to ammonia to produce an ammonia effluent. The ammonia effluent can be separated to produce an ammonia product and a purge gas comprising nitrogen. At least a portion of the purge gas can be recycled to the hydrocarbon, the effluent, or a combination thereof.

Abstract: Process for preparing an aqueous cobalt sulfate solution having a pH in the range from 5 to 8, wherein (a) metallic cobalt is dissolved in aqueous sulfuric acid in an atmosphere of low-oxygen air, of hydrogen or of inert gas and (b) the resulting acidic cobalt sulfate solution is purified in an ion exchanger.

Abstract: Disclosed herein is an apparatus having a double wiper structure for sterilizing ballast water. Each wiper for use in removing foreign substances from an ultraviolet lamp has a double structure including a main wiper part and auxiliary wiper parts. The auxiliary wiper parts are disposed on opposite sides of the main wiper part so that when the wiper body is moved forward or backward, the corresponding auxiliary wiper part primarily removes foreign substances before the main wiper part wipes the ultraviolet lamp unit. Each auxiliary wiper part includes an inclined protrusion and a pointed part so that friction between the surface of the ultraviolet lamp and the auxiliary wiper part can be minimized. The main wiper part includes a first blade and a second blade that are respectively disposed on opposite sides of a depression formed in an inner circumferential surface of the main wiper part.

Abstract: In various embodiments, a fluid is treated by flowing the fluid through a flow cell having (i) a fluid entry, (ii) a fluid exit, (iii) a treatment region disposed between the fluid entry and exit, and (iv) an interior surface reflective to ultraviolet (UV) light, and diffusively reflecting UV light emitted from one or more UV light sources to illuminate the treatment region substantially uniformly, thereby treating the fluid.

Abstract: Provided is a desalting device which includes a tower body and a bulge portion bulging downward therefrom, and which prevents uneven flow and causes no dead space within the tower body. The desalting device includes a tower body having a bulge portion 1b bulging downward at a bottom portion thereof, an ion-exchange resin packed in the tower body, and a plurality of strainers 3 for collecting water being arranged within the bulge portion 1b. The strainers are arranged only in a central region of an inside of the bulge portion excluding an outer peripheral portion of the bulge portion.

Abstract: A device for interfering with removal of a riser tube from within a water treatment tank. The device includes a collar having a central region dimensioned to fixedly receive the riser tube; and at least one restraining arm extending from the collar away from the central region, wherein the at least one restraining arm is dimensioned to contact an inner wall of the water treatment tank when the riser tube is moved upwards with respect to the treatment tank thereby interfering with removal of the riser tube from the water treatment tank.

Abstract: The invention relates a magnetic particle control system positioning a magnetic particle (or magnetic particles) at a specific area, and more particular, to a magnetic particle control system including at least two magnets apart from each other, wherein a magnetic particle is positioned at a specific area between the at least two magnets by a repulsive force between the magnets. According to the exemplary embodiment of the invention, the magnetic particle can be consistently positioned at a wanted area by the at least two magnets with the same poles facing each other. Accordingly, the magnetic particle can be effectively controlled by arbitrarily adjusting the position of the magnets.

Abstract: A method for providing fluid treatment at a plurality of distinct points utilizing magnetic energy concentrated in a plurality of distinct areas along a fluid flow path. The instant invention prevents the formation and accumulation of contaminants within conduits and on equipment utilized in the transportation, delivery and processing of fluid columns. It may also be utilized to accelerate the separation of oil and water and increase the efficiency of oil/water separation equipment.

Abstract: Oily and/or solids-containing water is clarified by chemical treatment to form flocculated and agglomerated solid phases and a clear water phase. In the clarification process, microbubbles of air or other gas are introduced at atmospheric pressure, via an eductor or other suitable device, together with a flocculant. During the subsequent formation of floes and their agglomeration into larger masses, microbubbles become entrained within and adhered to the solid flocculated materials. The resulting masses are very buoyant and easily separated from the water via a variety of approaches that include skimming, decanting, filtration, and screening. This process results in a solids phase that may be disposed of as waste, if desired, and a highly clarified water phase.

Abstract: The present invention relates generally to stable percarboxylic acid compositions comprising, inter alia, at least two stabilizing agents, and various uses for water treatments, including water treatments in connection with oil- and gas-field operations. The present invention also relates to slick water compositions and gel based compositions that comprise stable percarboxylic acid compositions and the use thereof in oil- and gas-field operations.

Abstract: A water treatment device and methods of treating water such as cooling tower water, swimming pool water, and hot tub or spa water, are described. The water treatment device utilizes ultraviolet radiation, a magnetic field, and ozone fortified air to treat the water, typically resulting in reduced microbial contamination and reduced alkalinity in cooling tower water. Cooling tower water may consequently be run at higher cycles of concentration while reducing or eliminating deposition of minerals on cooling tower components. Swimming pool water and hot tub water treated with the water treatment device typically requires less chlorine, and chlorine levels are typically more stable than without the device.

Abstract: Embodiments of the invention describe an apparatus, method, and system of wastewater treatment using modular membrane bioreactor (MBR) cartridges. In one embodiment, said method of wastewater treatment includes adjusting the number of activated modular MBR cartridges in a container and adjusting the wastewater processing rate of the container to dynamically change the throughput of a fixed-size wastewater processing container. According to one embodiment, said method can include utilizing modular MBR cartridges to provide for a fault-tolerant wastewater treatment container.

Abstract: An aeration device includes a foam suppression system. The aeration device raises the level of oxygen and air in a body of substantially liquid fluid, such as an aerating-oxidizing pond, lagoon, basin, or reservoir. The aeration system is buoyant and floats on top of the body of fluid. The foam suppression system includes a submersible grinder pump coupled to a sprinkler head by a fluid conduction system. The submersible grinder pump draws in a fluid from beneath a surface of a body of fluid and pumps it through the fluid conduction system and out of the sprinkler head. The sprinkler head sprays the fluid drawn from beneath the fluid surface far outward onto an area surrounding the aeration device with surface foam. The falling water or fluid sprayed from the sprinkler head quashes the surface foam. The sprinkler head is disposed in a location on the aeration device suitable to suppress the surface foam.

Abstract: Provided are a manufacturing method for a glass molded body and a manufacturing apparatus for a glass molded body, which employs the manufacturing method. The manufacturing method includes the steps of: heating molds each containing a glass material; press-molding the glass material; and cooling the press-molded glass material. The heating step includes: heating the molds with heating members arranged on both sides of a conveying direction of a support for conveying the molds in one direction; and conveying the two molds through rotation of the support or the like so as to reverse, at least once, an arrangement order of the two molds, which are arranged on a supporting surface of the support conveying the molds between the heating members, with respect to the conveying direction of the support.

Abstract: A glass sheet is formed using a roll-to-roll glass soot deposition and sintering process. The glass sheet formation involves forming a first glass soot layer on a deposition surface of a soot-receiving device, removing the first glass soot layer from the deposition surface, and forming a second glass soot layer on the unsupported first glass soot layer. The resulting composite glass soot sheet is heated to form a sintered glass sheet. The glass sheet can be a substantially homogeneous glass sheet or a composite glass sheet having layer-specific attributes.

Abstract: An optical fiber preform that is used in a method in which a core rod that forms a core is inserted into a quartz tube that forms a cladding, and at the same time as they are fiber-drawn, the quartz tube and the core rod are formed into a single body, includes: a tapered portion that is formed by grinding an outer circumferential portion of a distal end portion of the quartz tube into a tapered shape; and a conical portion that is formed by welding a dummy tube that has substantially the same outer diameter as the outer diameter of a distal end portion of the tapered portion to the distal end portion of the tapered portion, and by applying heat to the dummy tube and stretching out the dummy tube, where the core rod is inserted inside the quartz tube.

Abstract: A glass substrate for p-Si TFT flat panel displays that is composed of a glass comprising 52-78 mass % of SiO2, 3-25 mass % of Al2O3, 3-15 mass % of B2O3, 3-25 mass % of RO, wherein RO is total amount of MgO, CaO, SrO, and BaO, 0.01-1 mass % of Fe2O3, and 0-0.3 mass % of Sb2O3, and substantially not comprising As2O3, the glass having a mass ratio (SiO2+Al2O3)/B2O3 in a range of 7-30 and a mass ratio (SiO2+Al2O3)/RO equal to or greater than 6. A method for manufacturing a glass substrate involves: a melting step of obtaining a molten glass by melting, by employing at least direct electrical heating, glass raw materials blended so as to provide the aforementioned glass composition; a forming step of forming the molten glass into a flat-plate glass; and an annealing step of annealing the flat-plate glass.

Abstract: To provide a crystallized glass housing excellent in properties suitable for a housing for an electronic device, such as shielding properties, high strength and production cost. A crystallized glass housing made of crystallized glass, said crystallized glass having a diffused transmittance of 15% or less in the entire light wavelength region of from 380 nm to 780 nm, as measured by using an integrated sphere.

Abstract: The invention provides a near-infrared absorption glass, a near-infrared absorption element and a near-infrared absorption filter each with good chemical stability and transmissivity property in the visible range. When such glass is 1 mm thick, the transmissivity of such glass is more than 80% at 400 nm, and more than 85% at 500 nm. The near-infrared absorption glass comprises cations such as P5+, Al3+, Li+, R2+ and Cu2+ as well as anions such as O2? and F?, wherein the R2+ refers to Mg2+, Ca2, Sr2+ and Ba2+, and wherein the content of the said Li+ is 1-15%. Furthermore, the water resistant stability DW of the said near-infrared absorption glass is Class 1 and the acid resistant stability DA is above Class 4.

Abstract: The invention relates to a lithium silicate glass ceramic, which contains at least 8.5 wt.-% transition metal oxide selected from the group consisting of oxides of yttrium, oxides of transition metals with an atomic number from 41 to 79 and mixtures of these oxides. The invention also relates to a corresponding lithium silicate glass, a process for the preparation of the glass ceramic and of the glass as well as their use.

Abstract: Provided herein are biocompatible scaffolds and methods of preparing such bioscaffolds. The methods provide a superior high surface area, interconnected nanomacroporous bioactive glass scaffold, by combining a sol-gel process and polymer sponge replication methods. The formation of a uniformly nanoporous and interconnected macroporous bioscaffold is demonstrated using a starting material comprising a 70 mol % SiO2—30 mol % CaO glass composition as an example. The bioscaffold includes a series of open, interconnected macropores with size from 300 to 600 ?m, as desired for tissue ingrowth and vascularization. At the same time, coexisting nanopores provide high-specific surface area (>150 m2/g), which is needed for enhancing the structure's degradation rate. These bioscaffolds hold promise for applications in hard tissue engineering.

Abstract: A bi-layer seed layer can exhibit good seed property for an infrared reflective layer, together with improved thermal stability. The bi-layer seed layer can include a thin zinc oxide layer having a desired crystallographic orientation for a silver infrared reflective layer disposed on a bottom layer having a desired thermal stability. The thermal stable layer can include aluminum, magnesium, or bismuth doped tin oxide (AlSnO, MgSnO, or BiSnO), which can have better thermal stability than zinc oxide but poorer lattice matching for serving as a seed layer template for silver (111).

Abstract: A glass element having a thickness from 25 ?m to 125 ?m, a first primary surface, a second primary surface, and a compressive stress region extending from the first primary surface to a first depth, the region defined by a compressive stress ?I of at least about 100 MPa at the first primary surface. Further, the glass element has a stress profile such that when the glass element is bent to a target bend radius of from 1 mm to 20 mm, with the center of curvature on the side of the second primary surface so as to induce a bending stress ?B at the first primary surface, ?I+?B<0. Still further, the glass element has a puncture resistance of ?1.5 kgf when the first primary surface of the glass element is loaded with a tungsten carbide ball having a diameter of 1.5 mm.

Abstract: A glass element having a thickness from 25 ?m to 125 ?m, a first primary surface, a second primary surface, and a compressive stress region extending from the first primary surface to a first depth, the region defined by a compressive stress ?I of at least about 100 MPa at the first primary surface. Further, the glass element has a stress profile such that it does not fail when it is subject to 200,000 cycles of bending to a target bend radius of from 1 mm to 20 mm, by the parallel plate method. Still further, the glass element has a puncture resistance of greater than about 1.5 kgf when the first primary surface of the glass element is loaded with a tungsten carbide ball having a diameter of 1.5 mm.

Abstract: A glass element having a thickness from 25 ?m to 125 ?m, a first primary surface, a second primary surface, and a compressive stress region extending from the first primary surface to a first depth, the region defined by a compressive stress ?I of at least about 100 MPa at the first primary surface. Further, the glass element has a stress profile such that it does not fail when it is held at a bend radius from about 1 mm to about 20 mm for at least 60 minutes at about 25° C. and about 50% relative humidity. Still further, the glass element has a puncture resistance of greater than about 1.5 kgf when the first primary surface of the glass element is loaded with a tungsten carbide ball having a diameter of 1.5 mm.

Abstract: A method for fabricating a high-density array of holes in glass comprises providing a glass sheet having a front surface and irradiating the glass sheet with a laser beam so as to produce open holes extending into the glass sheet from the front surface of the glass sheet. The beam creates thermally induced residual stress within the glass around the holes, and after irradiating, the glass sheet is annealed to eliminate or reduce thermal stress caused by the step of irradiating. The glass sheet is then etched to produce the final hole size. Preferably, the glass sheet is also annealed before the step of irradiating, at sufficiently high temperature for a sufficient time to render the glass sheet dimensionally stable during the step of annealing after irradiating.