Abstract: A converter comprises a non-isolated stage coupled to an input dc source, wherein the non-isolated stage is configured to operate at a PWM mode and the non-isolated stage is configured to operate at a buck converter mode in response to a first input voltage and operate to a boost converter mode in response to a second input voltage and a resonant stage coupled between the non-isolated stage and a load, wherein the resonant stage is configured to operate at a resonant mode.

Abstract: Methods and apparatuses for controlling synchronous start-up of power converters arranged in parallel in droop load share switched-mode power supplies are described. In one embodiment, a method may be performed by circuitry in a DC-DC power converter. The DC-DC power converter includes an inverting switch that converts input DC power to intermediate AC power, a transformer coupled to the inverting switch to receive the intermediate AC power and provide stepped-down AC power, and a synchronous rectifier coupled to the transformer to convert the stepped-down AC power to output DC power. The method comprises detecting that the inverting switch is not switching during start-up of the DC-DC power converter, and increasing a reference voltage set point of the DC-DC power converter in response to detecting that the inverting switch is not switching to force the inverting switch to start switching.

Abstract: Methods and systems for calibrating an inductor-inductor-capacitor (LLC) resonant converter are provided herein. The method includes calculating input voltage mathematically as a function of at least one of an output voltage, a load current, and tolerances of components of the LLC resonant converter and operating the LLC resonant converter in an open loop mode at a nominal resonant frequency. The method also includes measuring output voltage of the LLC resonant converter and comparing the measured output voltage to the calculated input voltage.

Abstract: A utility meter configured for connection to an AC power line includes a meter housing with a plurality of electronic components arranged within the meter housing and configured to provide consumption data. A power supply is also arranged within the meter housing. The power supply is configured to receive an AC voltage from the AC power line and supply a DC voltage to the electronic components. An AC line voltage booster is positioned connected to the power supply. The AC line voltage booster is configured to increase the voltage from the AC power line received by the power supply.

Abstract: An electric power converter has a stacked body formed by stacking a plurality of semiconductor modules and coolers, a capacitor, and positive and negative bus bars. Each of the bus bars is formed by two sheets of plate members, respectively. Each of the plate members has a body portion, a plurality of extended portions, and a plurality of terminal connecting portions. The terminal connecting portions are connected to power terminals of the semiconductor modules. The main body portion of each plate member are joined to each other so that the terminal connecting portion of the one of the plate members and the terminal connecting portion 44 of the other one of the plate member are disposed alternately in a stacking direction of the stacked body.

Abstract: The invention includes two parallel paths. A first path is composed of two contact ends of a first electronic switch and a first, third and fifth diodes, which connect in series. One contact end connects a first end of an AC source, and a control end connects a second end of the AC source. A second path is composed of two contact ends of a second electronic switch and a second, fourth and sixth diodes, which connect in series. One contact end connects the second end of the AC source, and a control end connects the first end of the AC source. The AC source is connected between the positive ends of the first and second diodes. The second end of the AC source separately connects negative ends of the first and third diodes through two capacitors. The first end of the AC source separately connects negative ends of the second and fourth diodes through another two capacitors. Negative ends of the fifth and sixth diodes connect together to form a voltage output end.

Abstract: An electric power receiving device according to the invention receives an electric power from a primary coil, with which a first alternating voltage is applied and through which a first alternate current flows. The device includes an electric power receiving section and a reducing-voltage generating section. The receiving section includes a secondary coil electromagnetically coupled to the primary coil and a capacitor connected to the secondary coil, and generates a second alternating voltage based upon the first alternating current. The generating section generates a reducing-voltage and applies the reducing-voltage to the receiving section, the reducing-voltage being capable of reducing a reactance voltage generated in the receiving section by a second alternating current generated in the receiving section due to the second alternating voltage, and the reducing-voltage being approximately equal to the second alternating voltage in frequency.

Abstract: The invention relates to a control device for triggering a semi-conductor switch of an inverter, the control device comprising: a switching signal amplification device, which is designed to amplify a switching signal generated by a control regulation of the inverter, and to generate a first switching control signal that triggers the semi-conductor switch in a switching mode; a current regulation device, which is coupled to a current sensor output of the semiconductor switch and is designed to generate a second switching control signal that triggers the semi-conductor switch in a linear mode; and a selection device, which is coupled to the switching signal amplification device and the current regulation device and is designed to output, on the basis of at least one mode selection signal, either the first switching control signal or the second switching control signal in order to trigger a control terminal of the semi-conductor switch.

Abstract: A power conversion apparatus that switches, with a relay unit, from a disconnected state to a connected state between a connector and at least one of a commercial power system and a load while a switching device is in an off state.

Abstract: A nanopositioning system for producing a coupling interaction between a first nanoparticle and a second nanoparticle. A first MEMS positioning assembly includes an electrostatic comb drive actuator configured to selectively displace a first nanoparticle in a first dimension and an electrode configured to selectively displace the first nanoparticle in a second dimensions. Accordingly, the first nanoparticle may be selectively positioned in two dimensions to modulate the distance between the first nanoparticle and a second nanoparticle that may be coupled to a second MEMS positioning assembly. Modulating the distance between the first and second nanoparticles obtains a coupling interaction between the nanoparticles that alters at least one material property of the nanoparticles applicable to a variety of sensing and control applications.

Abstract: Articles and methods in which an electric field is used to actuate a material are generally described. Provided in one embodiment is a method including applying an electric field to a ceramic material. Applying the electric field to the ceramic material can transform the ceramic material from a first solid phase to a second distinct solid phase. The applied electric field is less than a breakdown electric field of the ceramic material, according to certain embodiments.

Abstract: A self-power synchronized switch harvesting on inductor circuit for harvesting energy from a piezoelectric element generating an AC voltage, comprises an envelope detector having first and second capacitors connected in parallel with the piezoelectric element and functioning as negative and positive voltage detectors. An inductor is connected in parallel with the capacitors, and transistors are connected in circuit with the capacitors and inductor and are responsive to a change in voltage across the first capacitor from positive to negative to enable flow of positive voltage to the inductor until terminal voltage reaches a certain amount and current in the inductor reaches zero. A full-wave rectifier is connected to convert the AC output of the piezoelectric element to DC voltage, and a DC-DC converter is connected to adapt the power output of the rectified voltage.

Abstract: A method and apparatus for generating electricity by electromagnetic induction, using a magnetic field modulated by the formation, dissipation, and movement of vortices produced by a vortex material such as a type II superconductor. Magnetic field modulation occurs at the microscopic level, facilitating the production of high frequency electric power. Generator inductors are manufactured using microelectronic fabrication, in at least one dimension corresponding to the spacing of vortices. The vortex material fabrication method establishes the alignment of vortices and generator coils, permitting the electromagnetic induction of energy from many vortices into many coils simultaneously as a cumulative output of electricity. A thermoelectric cycle is used to convert heat energy into electricity.

Abstract: An actuator (1M, 1S) with a motor (12) and a motor controller (11) is configurable to operate as a master or a slave to another actuator which is coupled mechanically for driving a common load. For the case where the actuator (1M) is set as the master, the motor controller (11) receives on an input terminal (Y3) an external position control signal (pC), generates a motor control signal (sC) for controlling the motor (12) based on the position control signal (pC), and supplies the motor control signal (sC) to an output terminal (U5) for controlling a slave. For the case where the actuator (1S) is set as the slave, the motor controller (11) controls the motor (12) by supplying to the motor (12) the motor control signal (sC) received from the master. Controlling the actuators with a master improves workload balancing and reduces damages to transmission mechanics of the actuators.

Abstract: When a control device of a motor controller simultaneously rotates a first DC motor and a second DC motor by controlling a first circuit, a second circuit and a third circuit, the second circuit is shared. Further, the control device controls each of switch elements of the shared second circuit by using pulse-width modulation. Accordingly, the drive of the first DC motor and the second DC motor can be controlled with high accuracy by the change of a duty ratio of each of the switch elements of the shared second circuit.

Abstract: A method and apparatus for controlling a brushless direct current motor. An H-bridge is configured to couple a direct current power source to windings of the brushless direct current motor. The H-bridge comprises a plurality of switches. A motor controller is configured to close one of the plurality of switches to put the H-bridge in a coast configuration, wherein the windings of the motor are short circuited. A desired direction for a current impulse to the windings is identified. The one of the plurality of switches is opened in response to identifying a first desired direction for the current impulse to provide the current impulse in the first desired direction to the windings. Another of the plurality of switches is closed in response to identifying a second desired direction for the current impulse to provide the current impulse in the second desired direction to the windings.

Abstract: According to one embodiment, an over-voltage prevention device includes a first short-circuit device provided between a secondary side of a wound-rotor induction machine and a frequency converter configured to excite the secondary side by a three-phase AC current and having a function of short-circuiting between phases of the three-phase AC current, resistors each connected between the first short-circuit device and the frequency converter for each phase, and second short-circuit devices connected respectively to the resistors in parallel and having a function of short-circuiting between the frequency converter and the secondary side of the wound-rotor induction machine.

Abstract: A motor controller architecture and method of operating the same. The motor controller includes a function for estimating the low speed operation of the motor, for example by evaluating the response to a periodic excitation signal injected into the control loop of the controller architecture. Control logic for controlling the motor at transitional speeds between low speed control and high speed (back emf) control is provided in some embodiments.

Abstract: A method of estimating a rotational position of a motor having saliency, the method including the steps of a) superimposing, on a drive voltage for the motor, a measuring voltage having a predetermined frequency higher than a frequency of the drive voltage to generate three-phase voltages, and supplying the three-phase voltages to a stationary portion of the motor; b) in parallel with step a), extracting components of the predetermined frequency in three-phase currents flowing in the stationary portion as first, second, and third extracted currents; c) multiplying the first and second extracted currents together to acquire a first composite signal, multiplying the second and third extracted currents together to acquire a second composite signal, and multiplying the first and third extracted currents together to acquire a third composite signal; d) subjecting the first, second, and third composite signals to low-pass filtering to acquire first, second, and third filtered signals, respectively, the low-pass fil

Abstract: A motor control apparatus operates a power conversion circuit connected between a direct current power source and a motor, which performs mutual conversion between power at the direct current power source and power at the motor in response to a powering operation and a regenerative operation carried out by the motor. The motor control apparatus includes: a voltage command calculator that calculates a voltage command to the power conversion circuit; a suppression gain calculator that calculates a suppression gain such that an absolute value of an estimation value of a power source current or an absolute value of a detection value of the power source current is not more than a target value; and a voltage command suppressor that suppresses a voltage command by multiplying the suppression gain to the voltage command calculated by the voltage command calculator. Additionally, the suppression gain is within a range of 0 to 1.

Abstract: A control apparatus having high control performance is provided. A control apparatus according to an aspect of the present invention is a control apparatus that controls a DC motor, including a first current detection system that detects a current value of the DC motor, a second current detection system that detects a current value of the DC motor, and a control unit that controls the DC motor based on a signal indicating a current value input from the first or second current detection system, in which the second current detection system includes an amplifier.

Abstract: In one aspect, a method for controlling the operation of a power generation system configured to supply power to an electrical grid may generally include monitoring a rotor speed of a generator of the power generation system and determining a gain scaling factor based on the rotor speed, wherein the gain scaling factor increases with decreases in the rotor speed across a range of rotor speeds. In addition, the method may include adjusting a regulator gain to be applied within a current regulator of the power generation system based on the gain scaling factor and applying the adjusted regulator gain within the current regulator in order to generate a voltage command signal for controlling a power converter of the power generation system.

Abstract: A variable speed constant frequency (VSCF) power generator includes a rotating direct current (DC) power source, rotating multi-phase generator main field windings to generate a rotating alternating current (AC) power, and a rotating inverter configured to control alternating current (AC) generator field windings in response to output AC power generated by the VSCF power generator and DC power from the rotating DC power source. At least one generator main field sensor outputs a generator main field feedback signal based on the rotating AC power applied to the rotating multi-phase generator main field windings. Stationary multi-phase generator armature windings output constant voltage constant frequency AC power controlled by the rotating AC power. An electronic rotating power line communication (PLC) controller generates a control signal that adjusts the rotating AC power based on the rotating generator feedback signal, where the output AC power is controlled by adjusting the rotating AC power.

Abstract: A power control system for a generator includes a control unit, an input sensing unit, an output sensing unit, and a power conversion unit. The input sensing unit senses a voltage and a current, generated from the generator. The output sensing unit senses a load voltage and a load current, received by the load. The power conversion unit receives the voltage and the current, and converts the voltage and the current into the load voltage and the load current. The control unit judges and predicts the mechanical behavior of the generator to control the generator according to the received voltage, the current, the load voltage, and the load current.

Abstract: Methods and a voltage regulator are provided for distributing power sourcing in a hybrid power plant system. The voltage regulator is configured to monitor an output power of a generator and control an excitation signal provided to the generator based at least in part on the generator output power.

Abstract: A power generator unit includes a crankshaft-connecting unit and a power supply unit adapted to be arranged substantially in a left-right direction in which a crankshaft of a vehicle extends. The crankshaft-connecting unit includes a recharge generator adapted to be disposed on and actuated by the crankshaft, and a transmission shaft adapted to extend in parallel with and be driven rotatably by the crankshaft. The power supply unit includes a main shaft connected coaxially to the transmission shaft, and a supply generator connected to the main shaft and actuated by the main shaft. A portion of the transmission shaft is covered by the power supply unit.

Abstract: The present invention relates to a solar power generation assembly and method for providing same involving an array of solar generating modules on a dual-incline structure, which can achieve high energy yields over a wide range of azimuths/orientations. The assembly consists of canopy wings providing for the dual-incline structure, where, depending on specifications, the canopy wings can differ in length, width, angle of inclination, structural material and solar module or other material mounted on the surface. The canopy wings may be pivoted or hinged to enhance the energy generation and/or other functional benefits of the assembly or system, including display elements, advertising, rainwater/precipitation and snow drainage and collection and energy transmission.

Abstract: A solar array with successive rows of photovoltaic modules angled in opposing directions forming peaks and valleys between the rows with the valleys (i.e.: lower sides of the photovoltaic module rows) being mounted close together and the peaks (i.e.: upper sides of the photovoltaic module rows) being mounted far apart to improve system aerodynamics and permit ease of access for installers. Included is a system for connecting the upper sides of the photovoltaic modules to connectors that slide on bars extending between upper and lower mounting bases and for pivot locking the lower sides of the photovoltaic modules to the lower mounting bases.

Abstract: A passive solar tracking system to enhance solar cell output is provided. The passive solar tracking system includes a panel having at least one solar cell for solar-to-electric conversion and an actuator that is arranged for moving the panel to provide the variable facing direction of the panel. The actuator is directly driven by light such as sunlight to provide artificial heliotropism-type movements of the panel, so that the panel passively tracks and continuously faces the sun. The actuator may be made from a composite material including a matrix of liquid crystal elastomer material incorporating single-wall or multi-wall carbon nanotubes and an elastic skeleton defined by a 3D polyurethane fiber-network. An actuator housing may be arranged with respect to the actuator for enhancing delivery of stimulus to the actuator. The actuator housing may include a heat collector and a light concentrator for facilitating actuation of the actuator.

Abstract: A solar energy system for collecting and converting solar energy to electricity using photovoltaic devices. The system further includes reflective panels to concentrate incident solar energy onto an array of solar panels, as well as an automated sun tracking system to rotate the solar and reflective panels to follow the sun.

Abstract: An oscillator includes a circuit board including a supporting substrate (base member), a first VCXO (a first oscillator circuit), a second VCXO (a second oscillator circuit), and a ground terminal (terminal for ground). The first VCXO and the second VCXO are configured such that a second output frequency that is output from the second VCXO is higher than a first output frequency that is output from the first VCXO. The second VCXO is placed closer to the ground terminal than the first VCXO.

Abstract: There is provided an output stage comprising: a phase splitter for receiving an input signal and for generating first and second drive signals of opposite phase in dependence thereon; a DC offset signal generator for generating a DC offset signal; an adder for adding the DC offset signal to the first drive signal to provide a first modified drive signal; a subtractor for subtracting the DC offset signal from the second drive signal to provide a second modified drive signal; a first drive transistor associated with a first power supply voltage, for generating a first output signal in dependence on the first modified drive signal; a second drive transistor associated with a second power supply voltage, for generating a second output signal in dependence on the second modified drive signal; and a combiner for combining the first and second output signals to generate a phase combined output signal.

Abstract: A bias circuit for a transistor amplifier, the bias circuit comprising a low-pass filter block, a reference transistor, a sum node, a reference current source, and a current difference block, wherein the low-pass filter block is configured to sense a DC bias voltage at a control terminal of the transistor amplifier and provide the DC bias voltage to a control terminal of the reference transistor; the reference transistor is configured to output a bias current in response to the DC bias voltage and provide the bias current to the sum node; the sum node is configured to receive a reference current from the reference current source and combine the reference current with the bias current from the reference transistor to provide a difference current; and the current difference block is configured to receive the difference current from the sum node and provide the difference current to the control terminal of the transistor amplifier.

Abstract: Apparatus and methods for capacitive load reduction are disclosed. In one embodiment, a power amplifier system includes a plurality of power amplifiers and an envelope tracking module for generating a supply voltage for the power amplifiers. The power amplifier system further includes a switch and a decoupling capacitor operatively associated with a first power amplifier of the system. The switch is configured to electrically float an end of the decoupling capacitor when the first power amplifier is disabled so as to reduce capacitive loading of the envelope tracker and to operate as a dampening resistor when the power amplifier is enabled so as to improve the stability of the system.

Abstract: A distortion compensation apparatus including: a memory configured to store a plurality of distortion compensation coefficients for compensating distortion to an input signal amplified by an amplifier, each of the plurality of distortion compensation coefficients being associated with a different combination of two addresses, and a processor configured to receive temperature information associated with a temperature of the amplifier, generate a first address based on the input signal at a first time, generate a second address based on an average of the input signal during a previous period preceding the first time, the average being calculated based on the temperature information, select a distortion compensation coefficient from the plurality of distortion compensation coefficients based on the first address and the second address, and compensate distortion to the input signal based on the selected distortion compensation coefficient.

Abstract: Aspects of the present invention include a circuit that includes an input balun circuit responsive to an input signal, the input balun circuit being configured to provide two output signals that are out of phase with each other. The circuit further includes an actual switched amplification stage configured to direct one of the balun output signals to a phase inverter output, and a replica switched amplification stage connected in parallel with the actual switched amplification stage, wherein the actual switched amplification stage and the replica switched amplification stage are responsive to the two output signals from the input balun circuit to direct one of the balun output signals to the phase inverter output, and wherein the actual switched amplification stage and the replica switched amplification stage are configured to have a constant load impedance for both switch states that matches an impedance of the input balun circuit.

Abstract: An amplifier having orthogonal tuning elements is provided. In one embodiment, an amplifier comprises an input amplifier stage having a first tuning element used to control a first performance criteria of the amplifier; an output amplifier stage operatively coupled to the first amplifier stage; a bias circuit operatively coupled to the second amplifier stage and having a second tuning element used to control a second performance criteria of the amplifier; and wherein the first tuning element operates substantially independent of the second tuning element.

Abstract: The power stage at the output of a high-frequency generates operates in class D and comprises a voltage supply and a common earth, a first and a second switch linked to the common earth and periodically switched on at a high frequency F; these switches are linked to two common-mode inductors connected in a Guanella balun. Each common-mode inductor comprises two inductive lines with strong mutual coupling.

Abstract: Apparatus and method for an output stage of an amplifier are disclosed. A current source circuit provides current to a transistor connected to the amplifier output node to produce output voltage, and the current source circuit has two current mirror paths, one of which replicates the output voltage at the output node. As the output voltage approaches rail, more current is steered to the current mirror path not replicating the output voltage and provides additional current or voltage necessary to keep the current source circuit operational.

Abstract: Variable power ratio (VPR) directional couplers that permit an amount of power directed to different outputs to be varied and managed. In some embodiments, the power ratio of the VPR coupler is represented by an equivalent coupling factor C? corresponding to a conventional coupling factor C. The VPR coupler may include one or more variable reactive network (VRN) circuits, each configured to reflect a portion of power received from an input back toward the input, and to transmit a remainder of the power toward an output. An amount of power reflected and transmitted by the VRN circuit may be varied based on a control voltage applied to the VRN circuit. In one example, a plurality of VPR couplers can be arranged in series to create a versatile and simplified network for distributing signals to a plurality of end units.

Abstract: Techniques for simultaneously receiving multiple transmitted signals with independent gain control are disclosed. In an exemplary design, an apparatus (e.g., a wireless device, an integrated circuit, etc.) includes a low noise amplifier (LNA) and first and second receive circuits. The LNA amplifies a receiver input signal and provides (i) a first amplified signal for a first set of at least one transmitted signal being received and (ii) a second amplified signal for a second set of at least one transmitted signal being received. The first receive circuit scales the first amplified signal based on a first adjustable gain selected for the first set of transmitted signal(s). The second receive circuit scales the second amplified signal based on a second adjustable gain selected for the second set of transmitted signal(s). The first and second adjustable gains may be independently selected, e.g., based on the received powers of the transmitted signals.

Abstract: Embodiments herein include a replica communication path and monitor circuit to provide increased common mode transient immunity. As its name suggests, the monitor circuit monitors the replica communication path and produces an adjustment signal (common mode transient adjustment signal) to cancel presence of a common mode transient signal in one or more other communication paths conveying data signals.

Abstract: A power amplification module includes: a first bipolar transistor in which a radio frequency signal is input to a base and an amplified signal is output from a collector; a second bipolar transistor that is thermally coupled with the first bipolar transistor and that imitates operation of the first bipolar transistor; a third bipolar transistor in which a first control voltage is supplied to a base and a first bias current is output from an emitter; a first resistor that generates a third control voltage corresponding to a collector current of the second bipolar transistor at a second terminal; and a fourth bipolar transistor in which a power supply voltage is supplied to a collector, the third control voltage is supplied to a base, and a second bias current is output from an emitter.

Abstract: An apparatus and a method for controlling a volume in a mobile terminal are provided. The apparatus includes a motion detector and a controller. The motion detector outputs motion information from a user's movement. The controller determines the user's activity from the motion information output from the motion detector, and determines an appropriate output volume level responsive to the activity.

Abstract: Volume leveler controller and controlling method are disclosed. In one embodiment, A volume leveler controller includes an audio content classifier for identifying the content type of an audio signal in real time; and an adjusting unit for adjusting a volume leveler in a continuous manner based on the content type as identified. The adjusting unit may configured to positively correlate the dynamic gain of the volume leveler with informative content types of the audio signal, and negatively correlate the dynamic gain of the volume leveler with interfering content types of the audio signal.

Abstract: A controller and an output filter for a power converter, and a power converter employing at least one of the same. In one embodiment, the controller includes an error amplifier with first and second input terminals coupled to one of an operating characteristic and a reference voltage of the power converter, and a switch configured to couple the first and second input terminals to one of the operating characteristic and the reference voltage as a function of a power conversion mode of the power converter. In one embodiment, the output filter includes an output filter capacitor with a first terminal coupled to a first output terminal of a power converter, and an output filter inductor coupled between a second terminal of the output filter capacitor and a second output terminal of the power converter.

Abstract: A tunable impedance network and a method for tuning the tunable impedance network are disclosed. In one aspect, the tunable impedance network comprises a plurality of transformers connected in series. Each transformer has a primary winding and a secondary winding. The transformers have a voltage transformation ratio of N:1 with N>1. An impedance structure, acting as a resonant circuit together with the inductance of the secondary winding, is connected at the secondary winding of each transformer. A control circuit or processor is configured to tune the imaginary part of at least one of the impedance structures so as to change its resonance frequency to mimic a reference impedance. The control circuit is further configured to tune the real part of at least one of the impedance structures so as to change its Q-factor to mimic the reference impedance.

Abstract: The present disclosure may include, for example, a tunable capacitor having a decoder for generating a plurality of control signals, and an array of tunable switched capacitors comprising a plurality of fixed capacitors coupled to a plurality of switches. The plurality of switches can be controlled by the plurality of control signals to manage a tunable range of reactance of the array of tunable switched capacitors. Additionally, the array of tunable switched capacitors is adapted to have non-uniform quality (Q) factors. Additional embodiments are disclosed.

Abstract: A deviation in mounting a temperature sensor unit is eliminated. In a second cavity 47 for mounting a temperature sensor unit 3 of a base 4, exposed electrodes 6 that intersect at least an internal wall surface 474 of a second wall portion 45 are formed so as to be exposed within the second cavity 47. The exposed electrodes 6 include a pair of temperature sensor electrode pads 621 and 622 to which the temperature sensor unit 3 is bonded via a solder 13. The solder 13 is formed so as to cover an entire surface of the exposed electrodes 6 including the temperature sensor electrode pads 621 and 622 to which the temperature sensor unit 3 is bonded.

Abstract: A piezoelectric vibration piece includes: a base portion; a pair of vibration arm portions which extends in a first (+Y) direction from the base portion, and is arranged separately in a second (X) direction intersecting with the first (+Y) direction; and a support arm portion which extends in the first (+Y) direction from the base portion. The support arm portion, includes a first arm portion formed such that a width which is a length along the second (X) direction is gradually narrowed towards a tip end portion side of the support arm portion, and a second arm portion which extends in the first (+Y) direction from the first arm portion and is formed such that the width is broadened towards the tip end portion side.