Abstract: The present invention provides a measurement system of real-time spatially-resolved spectrum and time-resolved spectrum and a measurement module thereof. The measurement system includes an excitation light and a measurement module. The excitation light excites a fluorescent sample and the measurement module receives and analyzes fluorescence emitted by the fluorescent sample. The measurement module includes a single-photon linear scanner and a linear CCD spectrometer. The single-photon linear scanner selectively intercepts a light beam component of a multi-wavelength light beam that has a predetermined wavelength to generate a single-wavelength time-resolved signal, wherein the multi-wavelength light beam is generated by splitting the fluorescence. The linear CCD spectrometer receives the multi-wavelength light beam and generates a spatially-resolved full-spectrum fluorescence signal.

Abstract: An optical interference device 100 is disclosed herein. In a described embodiment, the optical interference device 100 comprises a phase shifter array 108 for receiving a collimated beam of light. The phase shifter array 108 includes an array of cells 128 for producing optical light channels from respective rays of the collimated beam of light, with at least some of the optical light channels having varying phase shifts. The optical interference device 100 further includes a focusing lens 110 having a focal distance and arranged to simultaneously produce, from the optical light channels, a focused beam of light in its focal plane and an image downstream the phase shifter array 108 for detection by an optical detector 116.

Abstract: A system for testing optical resolution of an optical device includes an optical resolution target assembly including a target that is heated. The target emits a first light beam at a first wavelength in response to being heated. The first light beam has first and second components that are discernible from one another when the target is heated. The system may also include an illuminator that emits light at a second wavelength that differs from the first wavelength onto the target. The target emits a second light beam having third and fourth components that are discernible from one another when the illuminator emits light at the second wavelength onto the target.

Abstract: A detection device for infrared radiation has a detection circuit of infrared radiation equipped with at least one photodetector. A readout circuit is electrically connected to the detection circuit, and is configured to process the signal emitted by the detection circuit. A Joule-Thomson cooler cools a cold table thermally and mechanically connected to the detection circuit and the readout circuit. The cold table including an internal cavity supplied with gaseous mixture. A relief port of the gas mixture is arranged at an input in the internal cavity. An output of the compressor feeds the relief port in a gaseous mixture. The input of the compressor receives the relaxed gaseous mixture from an output of the internal cavity.

Abstract: A wireless temperature sensor that has an ease of manufacture and an improved reliability is provided. The wireless temperature sensor includes a first structure having an antenna having an antenna electrode and a GND electrode disposed in an insulating substrate, a temperature detection device fixed on an opposite surface of the first structure to a surface in which the antenna electrode is disposed, and a second structure disposed on the side of a side wall of the temperature detection device and joined to the first structure. The temperature detection device is fixed on the first structure so as to be electrically connected to the antenna electrode and the GND electrode.

Abstract: A thermocouple and a method for making the thermocouple. The thermocouple includes a thermocouple element shaft and at least one sleeve coupled to the thermocouple element shaft in at least one location of the thermocouple element shaft that is expected to experience wear.

Abstract: A surface temperature sensor has a first geometric contact surface for determining the temperature in a vessel and a second geometric contact surface, wherein the first geometric contact surface and the second geometric contact surface are in point—and/or linear contact and at least partially spaced variably from this. For a long-term stability, low heat transfer resistance a metal foam is provided between the first geometric contact surface and the second geometric contact surface.

Abstract: A time domain integrated temperature sensor described by the present invention adopts a shaped clock signal to control the charging time of capacitors, so that the capacitors generate charging time delay signals related to the cycle of an input clock, and a pulse signal related to pulse width, temperature and the cycle of the input clock is generated through logical XOR (Exclusive OR) operation on a time delay signal generated when the capacitors are charged by one way of PTAT (Proportional To Absolute Temperature) current in an above control manner and a time delay signal generated when the capacitors are charged by one way of CTAT (Complementary To Absolute Temperature) current in the same manner; then, the same input clock signal is adopted for quantifying the pulse width of the pulse signal, the relevance of the obtained quantization result and the cycle of the input clock is completely offset, namely, an output value of the temperature sensor is unrelated to the input clock signal, thereby solving the pr

Abstract: A temperature sensor that includes a resin coating layer and is high in temperature detection accuracy is provided. The temperature sensor is provided with a resin coating layer that covers: an element body; and connection parts at which lead-out wires are respectively connected to lead wires. The resin coating layer includes an inner layer and an outer layer. The inner layer seals the element body and the connection parts, and is formed of PFA. The outer layer is disposed around the inner layer, and is formed of PTFE that has heat shrinkability and a melting point higher than a melting point of PFA. The outer layer has a rectangular-parallelepiped appearance shape and has a flat outer surface.

Abstract: A method includes measuring a first temperature difference between first heat entry and discharge parts on a first heat transfer path extending from a portion of a surface of the object to the first heat discharge part using a first thermopile, and measuring a second temperature difference between a second heat entry and discharge parts on a second heat transfer path extending from another portion of the surface of the object to the second heat discharge part using a second thermopile, and measuring a reference temperature at a predetermined position on the first or second heat transfer path using a temperature sensor, and calculating the internal temperature of the object using the measured first and second temperature differences, and the reference temperature, and at least one predetermined value excluding a physical property value of a non-heating part of the object located at a surface side of the object.

Abstract: A gas turbine engine (10) including a hybrid waveguide (84) for placement adjacent a flow path (17) for hot combustion gases in the engine. The waveguide includes first and second opposing ends (88, 90), and comprises a first section (100) formed of a first material extending from a transition region (104) to the first end (88) and a second section (102) formed of a second material extending from the transition region (104) to the second end (90). In one embodiment the first material is a metal or a ceramic and the second material is an electrically isolating material having a lower thermal conductivity than the material of the first section. In another embodiment a membrane (58) isolates a cavity (36) of the waveguide from combustion gas.

Abstract: A thermal analysis method includes: setting, by a processor, a first node to a first component and second nodes to a second component from among components of an electronic device, based on design information of the electronic device; assigning thermal information including a second temperature and a second heat quantity to each of the second nodes, based on a first temperature and a first heat quantity of each of areas of the second component; calculating a first thermal resistance between adjacent nodes included in the second nodes, based on the thermal information; calculating a second thermal resistance between the first node and each of the second nodes, based on the design information to generate a thermal network including the first node, the second nodes, the first thermal resistance, and the second thermal resistance; and performing thermal analysis using the thermal network.

Abstract: An optical manufacturing process sensing and status indication system is taught that is able to utilize optical emissions from a manufacturing process to infer the state of the process. In one case, it is able to use these optical emissions to distinguish thermal phenomena on two timescales and to perform feature extraction and classification so that nominal process conditions may be uniquely distinguished from off-nominal process conditions at a given instant in time or over a sequential series of instants in time occurring over the duration of the manufacturing process. In other case, it is able to utilize these optical emissions to derive corresponding spectra and identify features within those spectra so that nominal process conditions may be uniquely distinguished from off-nominal process conditions at a given instant in time or over a sequential series of instants in time occurring over the duration of the manufacturing process.

Abstract: A thermal insulation jacket system. The thermal insulation jacket system includes a thermal insulation jacket configured to surround a valve, a plurality of detection devices and a computing device. Each detection device is configured to detect a different temperature associated with the valve. The computing device is coupled to the thermal insulation jacket and is communicably connected to the plurality of detection devices. The computing device is configured to calculate real-time energy savings attributable to the thermal insulation jacket and perform at least one diagnostic analysis associated with the valve.

Abstract: Embodiments of solid-state stress sensors are presented herein. A sensor system may include a substrate, a first layer of sensing material disposed on a first surface of the substrate, and at least three electrodes forming a first and second electrode pair. The at least three electrodes may include a first electrode, a second electrode, and a third electrode. The first electrode may be disposed in a first plane and the second electrode and the third electrode may be disposed in a second plane, the first and second planes associated with a first direction parallel to the first surface. The first and second electrodes may be at least partially offset in the first direction. The first and third electrodes may be at least partially offset in the first direction. The sensor system may be configured to generate an output signal in response to a shear stress within the sensing material.

Abstract: System and methods for magnetic Tunnel Junction pressure sensors are provided. In at least one implementation, a pressure sensor device comprises a magnetic tunnel junction comprising a free layer structure, a tunnel barrier, and a reference layer structure, wherein one or more surfaces of the free layer structure is exposed to respond to a pressure medium; and a voltage source coupled to the magnetic tunnel junction, the voltage source providing electrical power to the free layer structure and the reference layer structure. The device further comprises a current detector coupled between the magnetic tunnel junction and the voltage source; and a pressure calculating device, configured to calculate a pressure based on a current detected by the current detector.

Abstract: Various embodiments of solid-state shear-stress sensors are presented. Some embodiments of a sensor system may include a substrate, a first layer of sensing material disposed on a first surface of the substrate, and at least two electrodes forming an electrode pair. The at least two electrodes may include a first electrode and a second electrode. The first electrode may be disposed in a first plane and the second electrode may be disposed in a second plane. The first and second planes may be associated with a first direction and may be substantially parallel to one another and the first surface. The first and second electrodes may be at least partially offset in the first direction. The sensor system may be configured to generate an output signal in response to a shear stress within the sensing material.

Abstract: The invention relates to a component with a material recess and a measuring element comprising at least one sensor which is inserted with a positive fit in the material recess. This sensor is arranged in such a manner in or on the measuring element such that the measuring direction of the sensor essentially corresponds to the action line of the contact angle.

Abstract: A pressure sensor measures pressure by measuring the deflection of a MEMS membrane using a capacitive read-out method. There are two ways to implement the invention. One involves the use of an integrated Pirani sensor and the other involves the use of an integrated resonator, to function as a reference pressure sensor, for measuring an internal cavity pressure.

Abstract: Aspects of the present disclosure relate to a pressure sensor header for use with a pressure-sensing device. The pressure sensor header can be used in high-temperature environments. A pressure sensor header of the present disclosure can include a header shell, a sealing header glass that is sealed to the header shell, one or more electrical connections electrically isolated from the header shell by the sealing header glass, and a plate for sealing to a pressure-sensing device to be incorporated onto the pressure sensor header. The plate may include one or more ribs that allow for sealing of the plate to the header shell. The pressure sensor header may include a ribbed insert for sealing to the header shell and plate.

Abstract: A pressure transmitter assembly for measuring a process pressure of an industrial process includes a pressure sensor configured to sense the process pressure. A process coupling couples the pressure sensor to the industrial process using an elongate housing with a fill fluid capillary. In one example configuration, at least one thermoelectric element is included within the elongate housing to apply heat to, or conduct heat away from, the process coupling in response to an applied electric current or signal, allowing fill fluid to be preheated to facilitate cold startup or calibration, and providing cooling of the process coupling during high temperature operation.

Abstract: A semiconductor pressure sensor comprising: a semiconductor substrate having a through-opening extending from a top surface to a bottom surface of the substrate, the through-opening forming a space between an inner part and an outer part of said substrate; a pressure responsive structure arranged on said inner part; a number of flexible elements extending from said inner part to said outer part for suspending the inner part within said through-opening; the through-opening being at least partly filled with an anelastic material. A method of producing such a semiconductor pressure sensor.

Abstract: Certain implementations of the disclosed technology include systems and methods for providing header assemblies for use with pressure sensors in high-temperature environments. Certain example implementations include a header assembly. The header assembly can include a header portion having a first side and a second side, the header portion including one or more bores extending through the header portion from the first side to the second side. In certain example implementations, one or more platinum header pins are disposed within and extending through the one or more bores of the header portion. In certain example implementations, the header assembly can include one or more brazing portions corresponding to the one or more platinum header pins. In certain example implementations, the platinum header pins are configured for electrical communication with corresponding electrodes of a leadless transducer element.

Abstract: A load measuring sensor set on an aircraft is used under the control of a control unit on the aircraft. The load measuring sensor set is calibrated and there is calibration data associated with it. A code is retrieved which identifies uniquely the sensor set, so that a remote database can be interrogated using the code to retrieve the correct calibration data for the sensor set, for use by the control unit. The sensor set may utilise an optical-fibre having a Fibre Bragg Grating arrangement which provides optical signature characteristics that provide the unique code and having a Fibre Bragg Grating arrangement configured to measure loads.

Abstract: Certain implementations of the disclosed technology may include systems and methods for dynamic pressure testing of transducers in communication with a liquid. A method is provided that can include dynamically pressurizing a liquid in a cavity associated with a housing. While dynamically pressurizing the liquid, the method includes simultaneously measuring: a change in volume of the liquid; a test frequency response, by a test transducer in communication with the liquid; and a reference frequency response, by a reference transducer in communication with the liquid. The method may further determine a normalized frequency response of the test transducer, based at least in part on the test frequency response and the reference frequency response. The method may further provide an indication of the normalized frequency response of the test transducer and an indication of the bulk modulus of the liquid.

Abstract: Methods and systems are provided for conducting an evaporative emissions system leak test. In one example, at engine shut-down, pressure stored in a coolant degas bottle is applied to a fuel system in order to pressurize the system. In this way, pressure build-up in the degas bottle may be advantageously utilized to enable a leak test to be conducted.

Abstract: Methods and systems are provided for increasing the robustness of engine off natural vacuum testing. In one example, following an engine-off event, a heat rejection inference is determined, and further adjusted based on a fuel level and ambient temperature. In this way, an evaporative emissions system leak test may be enabled under conditions where the leak test may otherwise not be executed, thus increasing opportunities for evaporative emissions system leak detection and correspondingly reducing bleed emissions.

Abstract: There is provided a leakage oil detection system including: a measurement device that includes a light source that causes a measured object which includes a leakage oil attachment part to be irradiated with ultraviolet rays, and an imaging device that detects fluorescence emitted from the leakage oil attachment part which is irradiated with the ultraviolet rays, and performs imaging on the measured object; and an analysis device that includes a driving control unit that controls operations of the light source and the imaging device, a recording unit that records an imaged image of the measured object which is imaged by the imaging device, and an image processing unit that calls the imaged image which is recorded in the recording unit and performs an image process.

Abstract: A gas monitoring apparatus according to the inventive concept includes a sound generator, a sound receiver, and a sound field signal processor. The sound generator continuously outputs a sound signal into a gas monitoring space. The sound receiver receives a sound signal reflected from the gas monitoring space. The sound field signal processor obtains sound field information on the received sound signal, calculates a sound field spectrum for the sound field information, uses a correlation between the calculated sound field spectrum and a reference sound field spectrum, and determines whether there are gas leak and mixing in the gas monitoring space, wherein the reference sound field spectrum is a sound field spectrum according to frequency measured in a case where a gas is not leaked in the gas monitoring space, and the sound signal is formed by a linear sum of sine waves that have a plurality of frequency components.

Abstract: A system for detecting a water-leaking part of a vehicle comprises; a sound wave generator disposed in a vehicle; a plurality of acoustic sensors disposed outside the vehicle and receiving a sound wave generated by the sound wave generator; a time-reversed signal generator configured to time-reverse sound wave signals received by the acoustic sensors and to transmit the time-reversed sound wave signals to the vehicle; and a controller configured to determine whether the vehicle has the water-leaking part based on the sound wave signals received by the acoustic sensors and the time-reversed sound wave signals generated by the time-reversed sound wave signal generator.

Abstract: A respiratory gas monitor testing system having a respiratory gas monitor coupled to a system for detecting a leak, wherein the system for detecting a leak has a flowmeter in fluid communication with both an inlet and an outlet of the respiratory gas monitor, with the exhaust of the flowmeter venting to atmosphere; a restriction valve, a sample pressure sensor, a flowmeter valve configured to allow the flowmeter to either measure sample flow rate or leak rate, a flow-smoothing buffer configured to improve flow measurement accuracy, and a system for simulating human breath; wherein the system for human breath at elevated airway pressure has an air source, a calibration gas source, a breath simulation valve, a calibration gas valve, a sample pressure sensor, an air reservoir, a pressurized bottle with a pressure regulator and an orifice, and an air pump.

Abstract: A method of detecting leakage in a compressed air system having a compressor includes configuring an electrical monitor to measure one or more electrical parameters indicative of operation of the compressor. The method further includes identifying periods of time during which the compressor is not in use; analyzing running times and intervals of the compressor between compressor operations during one or more of identified periods of time to establish a baseline for air leakage. The method further includes continuing to analyze running times and intervals of the compressor between compressor operations when the compressor is not in use. The method further includes notifying one or more users when running times and intervals between compressor operations vary from the baseline.

Abstract: A method for detecting a structural fault in a structure includes the steps of, (a) performing a Brillouin measurement at a point along a sensing optical fiber which operably cooperates with the structure, to obtain a Brillouin gain spectrum at that point; (b) identifying at least two curves which, when added together, best fit the Brillouin gain spectrum; (c) identifying if peaks of the least two curves occur at different frequencies so as to determine if the structure has a structural fault. There is further provided a corresponding apparatus for detecting a structural fault in a structure.

Abstract: A vibration exciter with load compensation for the dynamic excitation of test specimens includes a base, an actuator, an armature which can be moved by the actuator in an excitation direction relative to the base and guided by a linear guiding element parallel to the excitation direction, and a pneumatic load compensator which compensates for the gravity force of at least the armature and the test specimen being excited. A high-quality low-perturbation exciter signal is generated by minimizing friction and other nonlinearities occurring during the load compensation. The linear guiding element of the vibration exciter with load compensation includes an air bearing, and the load compensator includes the linear guiding element.

Abstract: An instrument has a light-emitting and light-receiving assembly including an image capture unit and image processing unit; a backscatterer and an opening provided therein; a support for receiving an ophthalmic lens between the assembly and backscatterer, the assembly, support and backscatterer placed so that an incident light beam traverses the lens, strikes the backscatterer, returns and re-traverses the lens to arrive at the capture unit; the light-receiving assembly, the support, backscatterer and opening configured so that the assembly receives light from the beam; and the opening and a drive device for cyclically driving and making the backscatterer perform an identical movement in each cycle, configured so that a fixed zone opposite the backscatterer includes at least one part of which, over the course of a cycle, every point is at times perpendicular to the opening and at times perpendicular to a solid portion part of the backscatterer.

Abstract: A calibration block and method of making the same are disclosed. The block includes a substrate having a base material with first and second opposite sides; a bond layer and a thermal barrier layer coated on the first side of the base material. The block further includes artificial defects configured in the substrate in the form of holes and notches. The holes on the base material extend from the second side to the first side, excluding the bond and thermal corrosion coated layers. At least some of the holes are adapted to incorporate screws or gel therein protruding above a height of the substrate to form the notches. Furthermore, at least some of the holes are adapted to incorporate a cut portion of original defects of the components therein to replicate original defects on the substrate.

Abstract: To accurately measure a tread radius of a rotating tire. A method for measuring a tread radius has a tread radius measuring process which comprises a measurement step, an averaging step, and a calculation step. In the measurement step, the radial distances from three laser displacement meters to the tread surface of the rotating tire are measured to obtain radial distance data y1, y2, y3 whose number is m per the entire circumference of the tire. In the averaging step, an averaged value y1N, y2N, y3N is obtained by averaging the remaining radial distance data from which noise data have been removed by performing a smoothing process on the number m of the radial distance data y1, y2, y3. In the calculation step, a tread radius TR is calculated from the averaged values y1N, y2N, y3N and the distances x1, x2, x3 of the laser displacement meters in the axial direction of the tire.

Abstract: A system is provided allowing for sanitary sampling of piping without disassembly thereof, the system having: a sampling port disposed in communication with a pipe, the sampling port having a distal portion in communication with an interior of the pipe and a proximal opening; a pressure retention ring having an open central portion, the pressure retention ring being configured to engage the proximal opening of the sampling port; and a septum disposed between the sampling port and the pressure retention ring having a lower section, an upper section and a central portion, wherein the lower section comprises an elastomeric portion of a first hardness having a diameter that is substantially the same as the interior diameter of the sampling port, wherein the upper section comprises an elastomeric portion of a second hardness having a diameter that is substantially the same as the interior diameter of the open central portion of the pressure retention ring, wherein the central portion of the septum extending from t

Abstract: The disclosure relates to devices, solutions and methods for collecting and processing samples of bodily fluids containing cells (as well as embodiments for the collection, and processing and/or analysis of other fluids including toxic and/or hazardous substances/fluids). In addition, the disclosure relates generally to function genomic studies and to the isolation and preservation of cells from saliva and other bodily fluids (e.g., urine), for cellular analysis. With respect to devices for collection of bodily fluids, some embodiments include two mating bodies, a cap and a tube (for example), where, in some embodiments, the cap includes a closed interior space for holding a sample preservative solution and mates with the tube to constitute the (closed) sample collection device. Upon mating, the preservation solution flows into the closed interior space to preserve cells in the bodily fluid. The tube is configured to receive a donor sample of bodily fluid (e.g.

Abstract: A clearing agent and mounting solution for microscopy is disclosed comprising at least trichloroethanol and/or derivatives thereof, where the refractive index of the solution is greater than or equal to about 1.3810. Also disclosed are methods of preparing specimens for microscopy.

Abstract: An iced conductor sleet jump simulation testing method is disclosed, where after an initial tension of a conductor and an initial displacement of the conductor in a static state are obtained by using a combination of a given meteorological condition and a typical meteorological condition, displacement and tension states of the conductor in a dynamic state at each discrete moment can be accurately and reliably predicted until a specific time arrives.

Abstract: A measuring instrument for thermogravimetrically determining the moisture content of a material, which includes a base (12), configured as a balance, with a base surface (22), and a hood (14) pivotably connected to the base. The hood has a weighing chamber lid (50), weighing chamber walls (52-56) and a heating element (44). The hood consists of an electronics module (36) that includes the heating element and an electronic power unit, and of a mechanical module (48) that includes the weighing chamber lid and all of the weighing chamber walls. The mechanical module (48) is rigidly and reversibly coupled to the electronics module so that the heating element, protrudes from a main body (42) of the electronics module and rises through a corresponding opening (58) in the rearward weighing chamber wall (56), with the main body being pivotably connected to the base and surrounding the electronic power unit.

Abstract: An airborne microbial measurement apparatus and a measurement method thereof are provided. An airborne microbial measurement apparatus according to an embodiment includes a discharge apparatus including a discharge electrode and a voltage supply unit applying a high voltage to the discharge electrode. A substrate is provided to a side of the discharge apparatus to collect an airborne microbe from air by a high voltage applied to the discharge electrode. A reagent injection apparatus supplies a dyeing reagent to the microbe collected on the substrate or a DNA of the microbe. A light emission measurement apparatus senses a quantity of light generated from the DNA to which the dyeing reagent is supplied. The discharge apparatus includes a controller controlling the voltage supply unit so that the voltage is applied to collect the airborne microbe or destroy an external wall of the collected airborne microbe.

Abstract: The present invention relates to methods for analyzing and modeling natural gas flow in subterranean shale reservoirs. In preferred embodiments, methodologies and techniques for determining and modeling natural gas flow in shale formations using methodologies and techniques capable of determining natural gas properties related to dual-continuum flow, permeability and pressure within a subterranean shale reservoir. In some embodiments, the natural gas properties are determined by subjecting a subterranean shale reservoir sample to pulse-decay analysis. In certain embodiments, the methodologies and techniques described herein may be used in various reservoirs exhibiting macroporosity and/or microporosity, such as fractured reservoirs and carbonate reservoirs composed of reservoir fluids.

Abstract: An analyzer of a component in a sample fluid includes an optical source and an optical detector defining a beam path of a beam, wherein the optical source emits the beam and the optical detector measures the beam after partial absorption by the sample fluid, a fluid flow cell disposed on the beam path defining an interrogation region in the a fluid flow cell in which the optical beam interacts with the sample fluid and a reference fluid; and wherein the sample fluid and the reference fluid are in laminar flow, and a scanning system that scans the beam relative to the laminar flow within the fluid flow cell, wherein the scanning system scans the beam relative to both the sample fluid and the reference fluid.

Abstract: An object is to provide a biomolecule analyzer capable of collecting and analyzing a biomolecule in a single cell without damaging neighboring cells. In order to achieve this object, a biomolecule analyzer according to the present invention is characterized by including a unit which obtains an optical image of a plurality of cells, a unit which disrupts a part or the whole of at least one cell of the plurality of cells, an array device in which regions for capturing a biomolecule in the cell released by the disrupting unit are arranged, and a unit which associates the region in which the biomolecule is captured in the array device with a portion corresponding to the cell disrupted by the disrupting unit in the optical image.

Abstract: The system includes a modulatable illumination source configured to illuminate a surface of a sample disposed on a sample stage, a detector configured to detect illumination emanating from a surface of the sample, illumination optics configured to direct illumination from the modulatable illumination source to the surface of the sample, collection optics configured to direct illumination from the surface of the sample to the detector, and a modulation control system communicatively coupled to the modulatable illumination source, wherein the modulation control system is configured to modulate a drive current of the modulatable illumination source at a selected modulation frequency suitable for generating illumination having a selected coherence feature length. In addition, the present invention includes the time-sequential interleaving of outputs of multiple light sources to generate periodic pulses trains for use in multi-wavelength time-sequential optical metrology.

Abstract: A gas analysis method includes irradiating a sample gas introduced into a gas cell with infrared light tuned to a wavelength corresponding to one absorption line of a target gas contained in the sample gas, measuring a sample signal value corresponding to intensity of transmitted light of the infrared light transmitted through the gas cell, evacuating the sample gas in the gas cell and then replacing by a reference gas, measuring a reference signal value corresponding to intensity of transmitted light of the infrared light transmitted through the reference gas, and calculating gas concentration at the one absorption line from ratio of the sample signal value to the reference signal value.

Abstract: A method of fabricating a gas sensor on a substrate and a gas sensor fabricated on a substrate that includes optical and electronic components are described. The method includes fabricating a laser to output light over a range of wavelengths within a waveguide, fabricating a splitter to split the light output by the laser to a reference waveguide and to a detection waveguide, fabricating a reference cell to house the reference waveguide and a reference gas. An output of the reference waveguide is coupled to a first optical detector and an output of the detection waveguide is coupled to a second optical detector to identify or quantify an ambient gas.

Abstract: A method of fabricating a gas sensor on a substrate and a gas sensor fabricated on a substrate that includes optical and electronic components are described. The method includes fabricating a laser to output light over a range of wavelengths within a waveguide, fabricating a splitter to split the light output by the laser to a reference waveguide and to a detection waveguide, fabricating a reference cell to house the reference waveguide and a reference gas. An output of the reference waveguide is coupled to a first optical detector and an output of the detection waveguide is coupled to a second optical detector to identify or quantify an ambient gas.