Patents Issued in March 21, 2017
  • Patent number: 9601267
    Abstract: A power transmitter is configured to wirelessly transfer power to at least one power receiver. The power transmitter includes at least one excitation circuit configured to generate a time-varying first magnetic field in response to a time-varying electric current flowing through the at least one excitation circuit. The time-varying first magnetic field has an excitation frequency. The power transmitter further includes a plurality of magnetic oscillators. Each magnetic oscillator of the plurality of magnetic oscillators has a mechanical resonant frequency substantially equal to the excitation frequency. The plurality of magnetic oscillators is configured to generate a time-varying second magnetic field in response to the first magnetic field.
    Type: Grant
    Filed: November 11, 2013
    Date of Patent: March 21, 2017
    Assignee: QUALCOMM Incorporated
    Inventors: Hanspeter Widmer, Nigel P. Cook, Markus Bittner
  • Patent number: 9601268
    Abstract: A circuit for delivering power to a load from a wireless power supply comprises an inductor coil for placing in the electromagnetic field of an inductor coil of a supply and a switchable capacitor bank with capacitors switchable at least between a series and a parallel configuration. The voltage across the capacitor bank is used as a feedback control parameter for controlling the capacitor bank switching. A voltage regulator is used to supply the load with a constant voltage power supply derived from the capacitor bank output.
    Type: Grant
    Filed: November 25, 2013
    Date of Patent: March 21, 2017
    Assignee: NXP B.V.
    Inventors: Ajay Kapoor, Peter Thueringer
  • Patent number: 9601269
    Abstract: Disclosed is a coil for wirelessly transmitting or receiving power. The coil includes a coil unit formed by winding a plurality of wires insulated from each other; and a capacitor connected to the coil unit. The wires of the coil unit are shorted at a predetermined interval.
    Type: Grant
    Filed: April 24, 2012
    Date of Patent: March 21, 2017
    Assignee: LG INNOTEK CO., LTD.
    Inventor: Su Ho Bae
  • Patent number: 9601270
    Abstract: Described herein are improved configurations for providing a stranded printed circuit board trace comprising, a plurality of conductor layers, a plurality of individual conductor traces on each of the said conductor layers, and a plurality of vias for connecting individual conductor traces on different said conductor layers, the vias located on the outside edges of the stranded trace. The individual conductor traces of each layer may be routed from vias on one side of the stranded printed circuit board trace to vias on the other side in a substantially diagonal direction with respect to the axis of the stranded printed circuit board trace. In embodiments, the stranded printed circuit board trace configuration may be applied to a wireless power transfer system.
    Type: Grant
    Filed: February 26, 2014
    Date of Patent: March 21, 2017
    Assignee: WiTricity Corporation
    Inventors: Andre B. Kurs, Aristeidis Karalis, Morris P. Kesler, Andrew J. Campanella, Katherine L. Hall, Konrad J. Kulikowski, Marin Soljacic
  • Patent number: 9601271
    Abstract: A detecting device includes: a measurement coil made up of a first partial coil to which current in a particular direction is induced by a magnetic field to be supplied to a power reception coil configured to receive power, a second partial coil to which the current in the particular direction is induced by the magnetic field, and a third partial coil, which is disposed between the first and second partial coils, to which current in the opposite direction of the particular direction is induced by the magnetic field; a measurement unit configured to measure the voltage of the measurement coil as measurement coil voltage; and a foreign object detecting unit configured to detect a foreign object within the magnetic field based on the measurement coil voltage.
    Type: Grant
    Filed: April 23, 2014
    Date of Patent: March 21, 2017
    Assignee: Sony Corporation
    Inventors: Uichiro Omae, Takashi Miyamoto
  • Patent number: 9601272
    Abstract: A wireless power relay apparatus includes a relay resonator configured to relay power from a source resonator configured to wirelessly transmit the power, to a target resonator configured to wirelessly receive the power through a mutual resonance, the relay resonator having a higher quality factor than the source resonator and the target resonator.
    Type: Grant
    Filed: July 24, 2014
    Date of Patent: March 21, 2017
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Chi Hyung Ahn, Sang Wook Kwon, Ki Young Kim, Nam Yun Kim, Dong Zo Kim, Bong Chul Kim, Yun Kwon Park, Jae Hyun Park, Keum Su Song, Young Ho Ryu, Byoung Hee Lee
  • Patent number: 9601273
    Abstract: According to one embodiment, a winding device includes a supporting part, a pressing part, a movement part configured to move a positional relationship between the supporting part and the pressing part, a control part, a target movement speed calculation part configured to detect a target relative movement speed of the pressing part with respect to the supporting part, a wire feed speed detection part configured to detect a feed speed of the wire, a deviation amount calculation part configured to calculate a difference between a detection result of the target movement speed calculation part and a detection result of the wire feed speed detection part, and a determination part configured to determine that the wire has deviated from the movement path.
    Type: Grant
    Filed: March 12, 2014
    Date of Patent: March 21, 2017
    Assignee: KABUSHIKI KAISHA TOSHIBA
    Inventor: Chiayu Lin
  • Patent number: 9601274
    Abstract: In a capacitor module, a capacitor, a seal member that seals the capacitor, an electronic element electrically connected to the capacitor, a temperature sensor that measures a temperature around the capacitor, and a wire member electrically connected to the temperature sensor are provided. A holder holds at least the electronic element, the temperature sensor, and the wire member. The holder is fixed to the seal member while the temperature sensor is located between the electronic element and at least part of the capacitor via the seal member.
    Type: Grant
    Filed: March 20, 2014
    Date of Patent: March 21, 2017
    Assignees: DENSO CORPORATION, TOYOTA JIDOSHA KABUSHIKI KAISHA
    Inventors: Kazunari Kojima, Yoshiki Tomita
  • Patent number: 9601275
    Abstract: A dielectric ceramic composition includes a main component comprising (1-x)BaTiO3-x(Na1-yKy)NbO3, where 0.005?x?0.5 and 0.3?y?1.0; a first subcomponent comprising an element selected from the group consisting of Mn, V, Cr, Fe, Ni, Co, Cu and Zn; and a second subcomponent comprising SiO2.
    Type: Grant
    Filed: October 28, 2015
    Date of Patent: March 21, 2017
    Assignee: SAMSUNG ELECTRO-MECHANICS CO., LTD.
    Inventors: Seok-Hyun Yoon, Yun-Jung Park, Doo-Young Kim, Song-Je Jeon, Chang-Hun Kim
  • Patent number: 9601277
    Abstract: The present invention provides an anode body for capacitors, which is formed of a sintered body that is obtained by sintering a powder mixture of a tungsten powder and a tungsten trioxide powder, and wherein the ratio of the tungsten trioxide powder to the total amount of the tungsten powder and the tungsten trioxide powder is 1 to 13 mass %. The present invention is able to reduce the number of semiconductor layer formation wherein polymerization of a semiconductor precursor is carried out a plurality of times on a dielectric layer. Consequently, a solid electrolytic capacitor element, in which a semiconductor layer that is composed of a conductive polymer is formed on a dielectric layer that is formed on the outer surface layer and the inner surface layer of the fine pores of a tungsten sintered body, can be produced efficiently.
    Type: Grant
    Filed: May 17, 2013
    Date of Patent: March 21, 2017
    Assignee: SHOWA DENKO K.K.
    Inventors: Kazumi Naito, Shoji Yabe
  • Patent number: 9601278
    Abstract: A method of producing a super-capacitor provides a first substrate having a first base, forms a first electrode on the first substrate, and forms a separator so that the electrode is between the first base and the first separator. The method also micromachines holes through the separator, forms a chamber, and adds electrolyte, having ions, to the chamber. The electrolyte is in contact with the first electrode within the chamber. In addition, the holes are sized to permit transmission of the ions of the electrolyte through the holes.
    Type: Grant
    Filed: September 22, 2014
    Date of Patent: March 21, 2017
    Assignee: Analog Devices, Inc.
    Inventors: Yingqi Jiang, Kuang L. Yang
  • Patent number: 9601279
    Abstract: The present invention aims to provide an electrolyte solution that is less likely to lead to an increase in resistance and realizes high capacity retention factor even after continuous application of a high voltage, and to provide an electrochemical device. The present invention provides an electrolyte solution including: a nitrile compound; and a quaternary ammonium salt, the electrolyte solution having a potassium ion content of less than 10 ppm, a moisture content of 20 ppm or less, a tertiary amine content of 30 ppm or less, a heterocyclic compound content of 30 ppm or less, and an ammonia content of 20 ppm or less.
    Type: Grant
    Filed: August 8, 2013
    Date of Patent: March 21, 2017
    Assignee: DAIKIN INDUSTRIES, LTD.
    Inventors: Kenzou Takahashi, Meiten Koh
  • Patent number: 9601280
    Abstract: Micro-electromagnetically actuated latched miniature relay switches formed from laminate layers comprising a spring and magnet, electromagnetic coils, magnetic latching material, and transmission line with contacts. Preferably the miniature relay switches transmit up to about 50 W of DC or AC line power, and carry up to about 10 A of load current, with an overall volume of less than about 100 mm3. In addition to switching large power, the device preferably requires less than 3 V to actuate, and has a latching feature that retains the switch state after actuation without the need for external applied voltage or current.
    Type: Grant
    Filed: November 19, 2014
    Date of Patent: March 21, 2017
    Assignee: THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
    Inventors: Mark Bachman, Guann-Pyng Li, Yang Zhang, Minfeng Wang
  • Patent number: 9601281
    Abstract: The circuit breaker system contains a plurality of phase conductors, a circuit breaker having a plurality of breaker poles, and a short-circuit link having a star point and a plurality of link conductors combined at the star point. Each of the phase conductors is electrically conductively connected to in each case one of the breaker poles and each link conductor is electrically conductively connected to in each case one of the phase conductors in each case one of several first disconnectors to which short-circuit current can be applied. In order to avoid expenditure on assembly and downtimes of the circuit breaker system when carrying out simulation experiments with the aid of the short-circuit link, the circuit breaker system contains a second disconnector which, when closed, electrically conductively connects the star point to ground and which is opened when a short-circuit current is applied to the short-circuit current link.
    Type: Grant
    Filed: October 27, 2014
    Date of Patent: March 21, 2017
    Assignee: ABB Schweiz AG
    Inventors: Lukas Zehnder, Andreas Nohl
  • Patent number: 9601282
    Abstract: The power shut-off unit is equipped with two relays (2) connected to an external circuit, and a tabular baseplate (6). Multiple auxiliary electronic components (7) are mounted on the baseplate (6). The relays (2) are held so as to float over a mounting surface (13) via a pair of retaining members (8). A distance (d) equal to or greater than the thickness of the baseplate (6) is maintained between the relays (2) and the mounting surface (13). The baseplate (6) is not directly fixed to the mounting surface (13) and is connected to the relays (2) via multiple latching members (9). Because no load is acted upon the baseplate (6) by the relays (2), the baseplate (6) can be made thin.
    Type: Grant
    Filed: February 21, 2012
    Date of Patent: March 21, 2017
    Assignee: NISSAN MOTOR CO., LTD.
    Inventor: Taisuke Isonaga
  • Patent number: 9601283
    Abstract: Embodiments of the invention provide IGBT circuit modules with increased efficiencies. These efficiencies can be realized in a number of ways. In some embodiments, the gate resistance and/or voltage can be minimized. In some embodiments, the IGBT circuit module can be switched using an isolated receiver such as a fiber optic receiver. In some embodiments, a single driver can drive a single IGBT. And in some embodiments, a current bypass circuit can be included. Various other embodiments of the invention are disclosed.
    Type: Grant
    Filed: October 13, 2014
    Date of Patent: March 21, 2017
    Assignee: EAGLE HARBOR TECHNOLOGIES INC.
    Inventors: Timothy Ziemba, Kenneth E. Miller, John G. Carscadden, James Prager
  • Patent number: 9601284
    Abstract: A relay (1) includes a motor (20) and a primary electrical switch assembly (132). Primary electrical switching attachment points (113) are switched by a moveable switching link (101) which is moved in and out of the switch on an switched off position axially by the motor (20) in response to electrical signals delivered to the coil (26) via the flexible leads (32, 33). The switching link (101) includes a mercury reservoir (119). A piezoelectric disk bender (105) displaces mercury to close the gaps between the attachment points (113).
    Type: Grant
    Filed: March 17, 2014
    Date of Patent: March 21, 2017
    Assignee: ZONIT STRUCTURED SOLUTIONS, LLC
    Inventors: Steve Chapel, William Pachoud
  • Patent number: 9601285
    Abstract: An apparatus (such as a keyboard) has a plurality of keycaps and a corresponding light guide film disposed on the underside of those keycaps. The light guide film has a periphery, and at least portions of that periphery are thicker than in an interior portion of the light guide film. So configured, more light can be made available for backlighting purposes in the thicker portions than at the thinner portions. These teachings include determining the various (different) thicknesses to employ for the light guide film based upon desired backlighting of one or more of the plurality of keycaps.
    Type: Grant
    Filed: November 9, 2012
    Date of Patent: March 21, 2017
    Assignee: BlackBerry Limited
    Inventors: Xiaofeng Li, Chao Chen, Li Huang
  • Patent number: 9601286
    Abstract: Several mechanical features of an electronic device are provided. In some embodiments, the electronic device may include a bezel coupled to a housing. The bezel may include one or more snaps extending into the electronic device which may be operative to engage a cantilever spring extending from the inner surface of the housing. In some embodiments, the electronic device may include a window that is formed by coupling an outer layer to an inner layer that is larger than the outer layer. In some embodiments, the electronic device may include a chassis for supporting the window. In some embodiments, the electronic device may include a grounding clip for simultaneously grounding the bezel, the housing and a circuit board. In some embodiments, the electronic device may include a switch that includes a button molded into a base using a double shot process. In some embodiments, the electronic device may include a switch supporting bracket that includes a slot operative to receive a pin of the bezel.
    Type: Grant
    Filed: July 10, 2015
    Date of Patent: March 21, 2017
    Assignee: Apple Inc.
    Inventors: Stephen Brian Lynch, Pinida Jan Moolsintong, Leng Lim
  • Patent number: 9601288
    Abstract: Apparatus for floor cleaning, having a cavity that opens on the dashboard, a plurality of mechanically similar interchangeable keys, and suitable to be inserted completely into and operate with said cavity, two or more Hall-effect sensors arranged outside said cavity, at least one first key containing at least one magnet, and at least one second key including at least one respective second magnet, which are in functional correspondence with respective predefined sensors. Said magnets do not interfere with sensors to which they are not geometrically connected, and for this purpose they are aligned on a same straight line, and the insertion of said keys causes a movement of said magnets toward the respective sensors with a motion orthogonal to said straight line.
    Type: Grant
    Filed: May 22, 2014
    Date of Patent: March 21, 2017
    Assignee: NILFISK A/S
    Inventors: Paolo Valcarenghi, Filippo Marchetti
  • Patent number: 9601289
    Abstract: A ground fault circuit interrupter includes a reset key, a reset mechanism, a conductive assembly configured to connect a power supply input side to a load side, a leakage signal detection circuit, and an electromagnetic tripping mechanism. The reset mechanism comprises a reset support and a support return mechanism. The reset support comprises a reset bracket and a support reset spring. The support return mechanism comprises a reset pole, a reset key spring, a compression spring, a reset block, a compression spring container, a reset slider, and a contact conductive part. The contact conductive part is disposed at a lower end of the reset slider and is configured to align with a position of a switch contact on a first PCB board. A state of contact or separation between the contact conductive part and the switch contact is configured to control an on-off state of the conductive assembly.
    Type: Grant
    Filed: February 22, 2016
    Date of Patent: March 21, 2017
    Inventor: Ze Chen
  • Patent number: 9601290
    Abstract: An electromagnetic switching device, with several distinct regions (10, 20, 30, 40), where each region separates and places the terminals and the connection means in an improved form which make easy the identification of the terminals for the user when the contactor is fixed inside the panel; where the first region (10), have function of fixing the contactor on the panel and also houses the electromagnet; a second region (20) comprising the power terminals (21); a third region (30) that houses the auxiliary terminals (31, 32) and the command terminals (33); a fourth region (40)>> that is used for the connection of accessories; the third region presents a clear distinction between auxiliary terminals (31, 32) and command terminals (33), given by the asymmetry created viewed from the top; combined with a proposed uneven disposition X1 and X2 of the command terminals (31, 32) and auxiliary terminals (33) viewed from the front in the same third region.
    Type: Grant
    Filed: November 29, 2012
    Date of Patent: March 21, 2017
    Assignee: WEG DRIVES & CONTROLS—AUTOMAÇÃO LTDA
    Inventors: André De Barros Albuquerque, Ivo Detlev Günther, Juliano Bernardi Rosso, Leonardo Luiz Vetore
  • Patent number: 9601291
    Abstract: The present disclosure may fix the second yoke without using an upper cover and a lower cover, thereby having an effect of simplifying the entire structure, and reducing the fabrication cost, and decreasing the fabrication time.
    Type: Grant
    Filed: September 22, 2015
    Date of Patent: March 21, 2017
    Assignee: LSIS CO., LTD.
    Inventor: Jun Yong Jang
  • Patent number: 9601292
    Abstract: A switch for an electrical circuit includes a base, a rotatable cam having a first profile and a second profile, a solenoid, a link, and a member comprising a cam follower configured to follow the second profile. A first cycle of the solenoid includes a first energized state and a first de-energized state and the second cycle of the solenoid includes a second energized state and a second de-energized state. A first portion of the link couples to the solenoid, and a second portion of the link movably couples to the first profile of the cam. When the solenoid is in a first cycle, the member moves from a retracted position to an extended position, and when the solenoid is in a second cycle, the member moves from the extended position to the retracted position.
    Type: Grant
    Filed: February 8, 2016
    Date of Patent: March 21, 2017
    Assignee: Hubbell Incorporated
    Inventor: Joseph P. Gerovac
  • Patent number: 9601293
    Abstract: A base member includes a terminal fixing part for blocking an entire surface of an opening part of a housing at a position further inner than an opening end part of the housing when the base member is inserted in the housing. A first electrode part formed by a tip part of two bent stages that are composed of a horizontal part, a vertical part, and a horizontal part and configured by bending a portion of a part of the fixed side fixed a conductive member, which is continuous with a first external connection terminal, in a direction perpendicular to a continuous direction.
    Type: Grant
    Filed: May 25, 2012
    Date of Patent: March 21, 2017
    Assignee: Uchiya Thermostat Co., Ltd.
    Inventor: Hideaki Takeda
  • Patent number: 9601294
    Abstract: In a fuse unit that includes a bus bar whose bend parts separated from each other are arranged in parallel, and one pair of divided bodies formed by being divided into one side and the other side of the bus bar with the bend parts exposed, and in which the one pair of divided bodies is arranged into an L-letter shape by being bent at the bend parts, a partition wall that is to be arranged between the bend parts in a state of leaving the bend parts bent is provided on one divided body.
    Type: Grant
    Filed: March 4, 2015
    Date of Patent: March 21, 2017
    Assignee: Yazaki Corporation
    Inventor: Mami Nohara
  • Patent number: 9601295
    Abstract: Embodiments provide tripping unit of a circuit breaker. The tripping unit includes a magnet, a bimetal member extending alongside of the magnet, and an armature pivotable on the magnet, wherein the armature having an engagement portion engageable with the bimetal member at a moveable end of the bimetal member. Circuit breakers including triggering mechanisms and tripping units are also disclosed, as are low-profile, electronic circuit breakers including a maximum transverse width (Wt) limited to occupy only a single standard breaker panelboard location. System and methods are provided, as are other aspects.
    Type: Grant
    Filed: July 13, 2015
    Date of Patent: March 21, 2017
    Assignee: SIEMENS INDUSTRY, INC.
    Inventors: John DeBoer, Brian Timothy McCoy, Guang Yang, John Quentin Cowans
  • Patent number: 9601296
    Abstract: Embodiments provide a circuit breaker having a relatively low instantaneous current level at tripping. The circuit breaker includes a tripping mechanism coupled to a moveable electrical contact, the tripping mechanism including a tripping unit having a magnet, a bimetal member extending alongside of the magnet and having a moveable end, and an armature including an engagement portion being moveable as a result of motion the moveable end to trip the circuit breaker upon exceeding an instantaneous current level, and either the armature or the bimetal member includes a non-magnetic separating piece preventing a magnetic short circuit. System and method aspects are provided, as are other aspects.
    Type: Grant
    Filed: February 15, 2013
    Date of Patent: March 21, 2017
    Assignee: SIEMENS INDUSTRY, INC.
    Inventor: Guang Yang
  • Patent number: 9601297
    Abstract: Fuse assemblies in the form of fuse blocks and fuse holders include embedded permanent magnet arc suppression features that facilitate higher voltage operation of fusible circuit protection without increasing the size of the fuse assemblies. The embedded magnets apply an external magnetic field upon an overcurrent protection fuse and produce an arc deflection force to enhance arc quenching capability of the fuse without increasing its form factor.
    Type: Grant
    Filed: March 23, 2015
    Date of Patent: March 21, 2017
    Assignee: COOPER TECHNOLOGIES COMPANY
    Inventors: Xin Zhou, Robert Stephen Douglass, Vincent John Saporita
  • Patent number: 9601298
    Abstract: An electron gun supporting member includes an insulating supporting member configured such that its one end is connected to a predetermined member having a ground potential and other end is connected to a high-voltage electrode to which a high potential being a negative high potential for emitting electrons from an electron source is applied, so as to support the high-voltage electrode, and a metal film formed in a partial region, which contacts neither the high-voltage electrode nor the predetermined member, on the outer surface of the insulating supporting member.
    Type: Grant
    Filed: August 24, 2015
    Date of Patent: March 21, 2017
    Assignee: NuFlare Technology, Inc.
    Inventor: Nobuo Miyamoto
  • Patent number: 9601299
    Abstract: A photocathode is formed on a monocrystalline silicon substrate having opposing illuminated (top) and output (bottom) surfaces. To prevent oxidation of the silicon, a thin (e.g., 1-5 nm) boron layer is disposed directly on the output surface using a process that minimizes oxidation and defects, and a low work-function material layer is then formed over the boron layer to enhance the emission of photoelectrons. The low work-function material includes an alkali metal (e.g., cesium) or an alkali metal oxide. An optional second boron layer is formed on the illuminated (top) surface, and an optional anti-reflective material layer is formed on the boron layer to enhance entry of photons into the silicon substrate. An optional external potential is generated between the opposing illuminated (top) and output (bottom) surfaces. The photocathode forms part of novel sensors and inspection systems.
    Type: Grant
    Filed: July 22, 2013
    Date of Patent: March 21, 2017
    Assignee: KLA-Tencor Corporation
    Inventors: Yung-Ho Alex Chuang, John Fielden
  • Patent number: 9601300
    Abstract: A cathode element for a microfocus x-ray tube includes a heatable filament formed of a wire for thermionic emission of electrons for generating an electron beam. The filament, in a source area of the electron beam, has an elongate extension in two directions perpendicular to the electron beam.
    Type: Grant
    Filed: April 9, 2010
    Date of Patent: March 21, 2017
    Assignee: GE Sensing and Inspection Technologies GMBH
    Inventors: Eberhard Neuser, Andreas Schmitt, Wolfgang Sperner
  • Patent number: 9601301
    Abstract: A direct (DC) voltage is applied to an electrode at a voltage value to clamp a workpiece to an electrostatic chuck in a processing chamber. The electrode is embedded into the electrostatic chuck. An electrostatic chuck current through the electrode at the DC voltage is measured. A DC self bias induced on the workpiece by a plasma is determined based on the electrostatic chuck current and the applied voltage.
    Type: Grant
    Filed: May 20, 2014
    Date of Patent: March 21, 2017
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Sergey G. Belostotskiy, Chinh Dinh, Andrew Nguyen, Michael G. Chafin
  • Patent number: 9601302
    Abstract: An inspection apparatus capable of facilitating reduction in cost of the apparatus is provided. The inspection apparatus includes: beam generation means for generating any of charged particles and electromagnetic waves as a beam; a primary optical system that guides the beam into an inspection object held on a movable stage in a working chamber and irradiates the inspection object with the beam; a secondary optical system that detects secondary charged particles occurring from the inspection object; and an image processing system that forms an image on the basis of the detected secondary charged particles. The inspection apparatus further includes: a linear motor that drives the movable stage; and a Helmholtz coil that causes a magnetic field for canceling a magnetic field caused by the linear motor when the movable stage is driven.
    Type: Grant
    Filed: July 30, 2015
    Date of Patent: March 21, 2017
    Assignee: EBARA CORPORATION
    Inventors: Shoji Yoshikawa, Kiwamu Tsukamoto, Takeshi Murakami, Masahiro Hatakeyama, Tsutomu Karimata
  • Patent number: 9601303
    Abstract: A charged particle beam device for imaging and/or inspecting a sample is described. The charged particle beam device includes a beam emitter for emitting a primary charged particle beam; and a retarding field device for retarding the primary beam before impinging on the sample, the retarding field device including a magnetic-electrostatic objective lens and a proxy electrode. The charged particle beam device is adapted for guiding the primary beam along an optical axis to the sample for generating secondary particles released from the sample and backscattered particles. The proxy electrode comprises a first opening allowing the passage of the primary beam and at least one second opening for allowing the passage of off-axial backscattered particles. Further, a proxy electrode and a method for imaging and/or inspecting a sample by a charged particle beam are described.
    Type: Grant
    Filed: August 12, 2015
    Date of Patent: March 21, 2017
    Assignee: ICT INTEGRATED CIRCUIT TESTING GESELLSCHAFT FÜR HALBLEITERPRÜFTECHNIK MBH
    Inventor: Jürgen Frosien
  • Patent number: 9601304
    Abstract: According to embodiments of the present invention, an aberration correction apparatus is provided.
    Type: Grant
    Filed: August 25, 2015
    Date of Patent: March 21, 2017
    Assignee: NATIONAL UNIVERSITY OF SINGAPORE
    Inventor: Anjam Khursheed
  • Patent number: 9601305
    Abstract: An electron microscope specimen sample holder including a thin sheet base member with a first surface and an opposing second surface, the first surface defining a seat and support surface for a specimen holding film held by the sample holder, the base member including an aperture through the second surface exposing the holding film held by the sample holder, and including a grip engagement zone defined at least on part of the first surface arranged to engage a gripping device, and wherein at least one of the first or second surface has machine readable structures formed thereon arranged in patterns embodying data that defines at least one predetermined characteristic of the sample holder.
    Type: Grant
    Filed: November 11, 2014
    Date of Patent: March 21, 2017
    Assignee: HOWARD HUGHES MEDICAL INSTITUTE
    Inventors: John H. Price, Dravida Bock
  • Patent number: 9601306
    Abstract: A sample micromotion mechanism adapted to minimize an influence of a disturbance and adjust a sample drift rapidly and with high accuracy, and designed so as to be a compact, easy-to-place sample micromotion mechanism of a side-entry type that suppresses the occurrence of the sample drift and generates/displays high-resolution monitoring images and precisely drawn patterns. A charged particle device employing the sample micromotion mechanism operates followed by deformation which causes a strain. A strain measuring unit measures such strain. The sample micromotion mechanism imparts micromotion so as to reduce the strain in accordance with the measured strain value, thereby reducing deformation of the sample micromotion mechanism.
    Type: Grant
    Filed: March 9, 2015
    Date of Patent: March 21, 2017
    Assignee: Hitachi, Ltd.
    Inventors: Naruo Watanabe, Yoshio Takahashi
  • Patent number: 9601307
    Abstract: The present invention provides a high-throughput scanning electron microscope in which a wafer (9) is held by an electrostatic chuck (10), an image is obtained using an electron beam, and the wafer surface is measured, wherein even in a case where the temperature of the wafer (9) is changed due to the environmental temperature the electron scanning microscope is capable of preventing any loss in resolution or the deterioration of the measurement reproducibility caused by thermal shrinkage accompanied by temperature change of the wafer (9). A drill hole is provided on the rear surface of the electrostatic chuck (10), and a thermometer (34) is secured in place so that the front end is brought into elastic contact with the bottom surface of the drill hole.
    Type: Grant
    Filed: February 5, 2014
    Date of Patent: March 21, 2017
    Assignee: Hitachi High-Technologies Corporation
    Inventors: Seiichiro Kanno, Masashi Fujita, Naoya Ishigaki, Makoto Nishihara, Kumiko Shimizu
  • Patent number: 9601308
    Abstract: To analyze an element to be evaluated with high sensitivity and high accuracy in a short period of time, in an electron beam analyzer including a wavelength dispersive X-ray analyzer in an electron microscope. The electron beam analyzer has one diffraction grating in which a plurality of patterns having maximum X-ray reflectance with respect to the respective X-rays are formed. It simultaneously detects an X-ray as an energy reference and an X-ray spectrum to be evaluated. The positional displacement of X-ray energy due to the installation/replacement of the diffraction grating is corrected using the X-ray spectrum as the energy reference, thereby enabling to perform an analysis with high sensitivity and high accuracy in a short period of time.
    Type: Grant
    Filed: October 31, 2012
    Date of Patent: March 21, 2017
    Assignee: Hitachi, Ltd.
    Inventors: Yoshihiro Anan, Masanari Koguchi
  • Patent number: 9601309
    Abstract: Generally, the present disclosure provides a method and system for improving imaging efficiency for CPB systems while maintaining or improving imaging accuracy over prior CPB systems. A large field of view image of a sample is acquired at a low resolution and thus, at high speed. The low resolution level is selected to be sufficient for an operator to visually identify structures or areas of interest on the low resolution image. The operator can select one or more small areas of arbitrary shape and size on the low resolution image, referred to as an exact region of interest (XROI). The outline of the XROI is mapped to an x-y coordinate system of the image, and the CPB system is then controlled to acquire a high resolution image of only the XROI identified on the low resolution image. For 3D imaging, once the XROI is identified, each section of the sample can be iteratively imaged in the previously described manner, with the operator having the option to redefine the XROI later.
    Type: Grant
    Filed: May 14, 2012
    Date of Patent: March 21, 2017
    Assignee: Fibics Incorporated
    Inventors: Michael William Phaneuf, Ken Guillaume Lagarec
  • Patent number: 9601310
    Abstract: A method of mitigating the effects of environmental pressure variation while using a charged particle microscope is described. The charged particle microscope equipped with a barometric pressure sensor and an automatic controller configured to use the signal from the barometric sensor as an input to a control procedure to compensate for a relative positional error between the charged particle beam and the specimen holder.
    Type: Grant
    Filed: November 11, 2015
    Date of Patent: March 21, 2017
    Assignee: FEI COMPANY
    Inventors: Marco Hugo Petrus Moers, Albert Visscher
  • Patent number: 9601311
    Abstract: Laser sub-divisional error (SDE) effect is compensated by using adaptive tuning. This compensated signal can be applied to position detection of stage in ebeam inspection tool, particularly for continuous moving stage.
    Type: Grant
    Filed: March 3, 2016
    Date of Patent: March 21, 2017
    Assignee: HERMES MICROVISION INC.
    Inventors: Ying Luo, KuoFeng Tseng, Zhonghua Dong
  • Patent number: 9601312
    Abstract: A single column charged particle source with user selectable configurations operates in ion-mode for FIB operations or electron mode for SEM operations. Equipped with an x-ray detector, energy dispersive x-ray spectroscopy analysis is possible. A user can selectively configure the source to prepare a sample in the ion-mode or FIB mode then essentially flip a switch selecting electron-mode or SEM mode and analyze the sample using EDS or other types of analysis.
    Type: Grant
    Filed: February 24, 2016
    Date of Patent: March 21, 2017
    Assignee: FEI COMPANY
    Inventor: Brian Roberts Routh, Jr.
  • Patent number: 9601313
    Abstract: Techniques are described that facilitate automated extraction of lamellae and attaching the lamellae to sample grids for viewing on transmission electron microscopes. Some embodiments of the invention involve the use of machine vision to determine the positions of the lamella, the probe, and/or the TEM grid to guide the attachment of the probe to the lamella and the attachment of the lamella to the TEM grid. Techniques that facilitate the use of machine vision include shaping a probe tip so that its position can be readily recognized by image recognition software. Image subtraction techniques can be used to determine the position of the lamellae attached to the probe for moving the lamella to the TEM grid for attachment. In some embodiments, reference structures are milled on the probe or on the lamella to facilitate image recognition.
    Type: Grant
    Filed: November 6, 2015
    Date of Patent: March 21, 2017
    Assignee: FEI COMPANY
    Inventors: Valerie Brogden, Jeffrey Blackwood, Michael Schmidt, Dhruti Trivedi, Richard J. Young, Thomas G. Miller, Brian Roberts Routh, Jr., Stacey Stone, Todd Templeton
  • Patent number: 9601314
    Abstract: An ion implantation method in which an ion beam is scanned in a beam scanning direction and a wafer is mechanically scanned in a direction perpendicular to the beam scanning direction, includes setting a wafer rotation angle with respect to the ion beam so as to be varied, wherein a set angle of the wafer rotation angle is changed in a stepwise manner so as to implant ions into the wafer at each set angle, and wherein a wafer scanning region length is set to be varied, and, at the same time, a beam scanning speed of the ion beam is changed, in ion implantation at each set angle in a plurality of ion implantation operations during one rotation of the wafer, such that the ions are implanted into the wafer and dose amount non-uniformity in a wafer surface in other semiconductor manufacturing processes is corrected.
    Type: Grant
    Filed: June 13, 2012
    Date of Patent: March 21, 2017
    Assignee: SEN CORPORATION
    Inventors: Shiro Ninomiya, Tetsuya Kudo
  • Patent number: 9601315
    Abstract: A multiple charged particle beam lithography apparatus includes a weighting coefficient operation unit to operate a plurality of weighting coefficients that assign weights to doses of a plurality of different beams used for multiple pattern writing for each pixel of pixels, the each pixel being used as an irradiation unit region per beam of multiple charged particle beams; a dose operation processing circuitry to operate doses of the plurality of different beams weighted by using a corresponding weighting coefficient among the plurality of weighting coefficients for each of the pixels; and a writing mechanism that writes a pattern on a target object using the multiple charged particle beams such that corresponding pixels are irradiated with the plurality of different beams of the doses weighted respectively.
    Type: Grant
    Filed: November 18, 2015
    Date of Patent: March 21, 2017
    Assignee: NuFlare Technology, Inc.
    Inventors: Ryoh Kawana, Yasuo Kato
  • Patent number: 9601316
    Abstract: The present invention relates to an ignition device for igniting a high-current discharge of an electrical arc evaporator in a vacuum coating system. Ignition is performed by means of mechanically closing and opening a contact between the cathode and the anode. Contact is established by means of an ignition finger that can move on a forced path. On account of the forced path, the ignition finger can be moved by means of a simple mechanical drive to a park position, which is protected against coating, and said ignition finger can also be used to ignite a second target.
    Type: Grant
    Filed: August 9, 2013
    Date of Patent: March 21, 2017
    Assignee: OERLIKON SURFACE SOLUTIONS AG, PFAFFIKON
    Inventors: Siegfried Krassnitzer, Oliver Gstoehl, Juerg Hagmann
  • Patent number: 9601317
    Abstract: A cold plasma jet hand sanitizer and method of use are provided. A pair of opposing two-dimensional arrays of atmospheric pressure cold plasma jets is used to create a sterilizing volume. Any object placed into that volume will have its surface sterilized. The opposing arrays of plasma jets are operated electrically 180 degrees out of phase so that the opposing arrays of plasma jets essentially fire into each other in the absence of an intervening object, or directly impinge on the surface of an intervening object.
    Type: Grant
    Filed: June 24, 2016
    Date of Patent: March 21, 2017
    Assignee: Bovie Medical Corporation
    Inventor: Gregory A. Konesky
  • Patent number: 9601318
    Abstract: A plasma processing method is provided. In the method, a distribution of an amount of processing within a surface of a substrate by a plasma process performed on a film deposited on the substrate is obtained. Next, a flow speed of the plasma processing gas is adjusted by increasing the flow speed of the plasma processing gas supplied to a first area where the amount of processing is expected to be increased or by decreasing the flow speed of the plasma processing gas supplied to a second area where the amount of processing is expected to be decreased. Then, the plasma process is performed on the film deposited on the substrate by supplying the plasma processing gas having the adjusted flow speed into the predetermined plasma process area.
    Type: Grant
    Filed: May 12, 2015
    Date of Patent: March 21, 2017
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Shigehiro Miura, Hitoshi Kato, Jun Sato, Toshiyuki Nakatsubo, Hiroyuki Kikuchi