Abstract: The array substrate comprises a transparent substrate and a film layer which covers the transparent substrate and which is provided with a groove, wherein the film layer is further provided with protrusions which extend from sidewalls of the groove and are away from a bottom surface of the groove; and wherein the groove is used for accommodating frame adhesive. The frame adhesive is injected into a surface of a film layer along the groove, and part of the frame adhesive can flow into the groove and fill the groove. After the frame adhesive is solidified, a clamping connection can be formed between the frame adhesive in the groove and the film layer, so that the frame adhesive and the array substrate can be connected with each other more firmly.

Abstract: A method for fabricating liquid crystal display panels. The method includes forming at least one adhesive structure on a first substrate, to partition the first substrate into at least one dummy region and panel group regions, in which the dummy region is located between the two adjacent panel group regions; pouring liquid crystal into the dummy region and the panel group regions; and conjugating a second substrate at a side of the first substrate disposed with the adhesive structure, to seal spaces of the dummy region and the panel group regions between the first substrate and the second substrate, in which the liquid crystal can fill up the spaces of the panel group regions and at least a part of the spaces of the dummy region being sealed between the first substrate and the second substrate.

Abstract: The present disclosure provides a curved display panel. The curved display panel includes two substrates each having a first curvature, each of the two substrates including two first side regions with the first curvature and two second side regions; a sealant for bonding the two substrates together, the sealant having a first sealant portion configured to seal the first side regions and a second sealant portion configured to seal the second side regions, wherein a Young's modulus of the first sealant is less than a Young's modulus of the second sealant.

Abstract: A liquid crystal display includes: a first substrate on which a display area and a non-display area disposed on an outside of the display area are defined; a first insulating layer, which is disposed in the non-display area on the first substrate; a barrier pattern, which is disposed on the first insulating layer; a seal pattern, which is disposed on the barrier pattern to overlap the barrier pattern; and a second substrate, which is disposed to face the first substrate.

Abstract: A liquid crystal display according to the present invention includes a liquid crystal panel, an LED light source to irradiate a back surface side of the liquid crystal panel with light, a diffusion plate disposed between the liquid crystal panel and the LED light source, a reflection sheet disposed on a side opposite to the diffusion plate with respect to the LED light source, a panel holder disposed on a back surface side of the reflection sheet, and at least one photodetector disposed on the back surface side of the reflection sheet and to detect light reflected by a back surface of the diffusion plate and propagated in a gap between the reflection sheet and the panel holder.

Abstract: A liquid crystal display (LCD) assembly and an electronic device are provided. The LCD assembly includes: a touch screen, an upper substrate disposed parallel to the touch screen, a lower substrate disposed parallel to the upper substrate, a liquid crystal layer enclosed between the upper substrate and the lower substrate, an upper polarizer attached to a side of the upper substrate not adjacent to the liquid crystal layer, and a lower polarizer attached to a side of the lower substrate not adjacent to the liquid crystal layer. At least one fingerprint identification sensor is disposed between the upper polarizer and the lower polarizer, and each of the fingerprint identification sensors is electrically connected to the control chip. At least one light sensor is disposed between the upper polarizer and the lower polarizer, and each of the least one light sensor is electrically connected to the control chip.

Abstract: A method for liquid crystal alignment is provided, comprising step 1: coating liquid state alignment film material containing paramagnetic chain-like particles on a display region of a substrate; step 2: placing the substrate in a constant magnetic field, so that the paramagnetic chain-like particles are stably arranged in a direction of the magnetic field; step 3: removing the magnetic field; and step 4: adding liquid crystal material into the display region of the substrate, so that molecules of the liquid crystal material align in the orientation of the paramagnetic chain-like particles. According to the method of the present disclosure, the use of rubbing cloth can be avoided, and non-contact liquid crystal alignment can be realized.

Abstract: An embodiment of the present disclose provides a method for manufacturing alignment film, including: providing a mixture of a liquid crystal material and an alignment film precursor material; filling the mixture of the liquid crystal material and the alignment film precursor material between an upper substrate and a lower substrate to form a mixed liquid crystal layer; sealing the mixed liquid crystal layer in a liquid crystal cell; aligning the liquid crystal material in the mixed liquid crystal layer in a first predetermined direction; gathering the alignment film precursor material in the mixed liquid crystal layer onto at least one the upper substrate and the lower substrate; and curing the alignment film precursor material gathered on the at least one of the upper substrate and the lower substrate to form an alignment film, wherein an alignment channel in a second predetermined direction is formed in the alignment film.

Abstract: A display device is provided. The display device includes: a first substrate that comprises a first base substrate, an insulating layer located on the first base substrate, and a barrier layer located on the insulating layer; a second substrate that faces the first substrate; a liquid crystal layer that is located between the first substrate and the second substrate; and a first spacer that is located between the first substrate and the second substrate and is in contact with the first substrate, wherein the first substrate further comprises a second spacer that is located on the barrier layer and overlaps with the first spacer.

Abstract: A display device includes a seat holding the spacer. The seat is formed in a superposition region where at least the gate line, the semiconductor layer, the data line, and the organic insulator are superposed on one another in a laminated direction, the superposition region being a region facing the spacer. A whole outer periphery of the seat and the superposition region are superposed on each other in the laminated direction.

Abstract: A display device comprises spacers provided between a first substrate and a second substrate, wherein the first substrate includes: seats each of which holds the spacers, respectively; data lines; gate lines; thin film transistors; pixel electrodes corresponding to pixel regions; a common electrode facing the pixel electrodes; and common wirings being electrically connected to the common electrode, and each of the common wirings includes a bent part detouring around at least one of the seats.

Abstract: Electro-optical devices utilizing alternative transparent conductive oxide (TCO) layers, such as aluminum zinc oxide (AZO) and gallium zinc oxide (GZO), and indium composites, are able to replace traditional indium-tin-oxide (ITO) TCOs. As a result, the electro-optical devices of the embodiments of the present invention are able to achieve high operating performance, including: high light transmittance, fast response times and low applied voltages, which are comparable to those of electro-optical devices using (ITO) coated substrates, while also being low-cost.

Abstract: A liquid crystal display device includes: a first substrate; a second substrate disposed opposite to the first substrate, where a display area and a non-display area are defined in each of the first and second substrates; a liquid crystal layer disposed between the first substrate and the second substrate; a common voltage line disposed in the non-display area of the first substrate; a light-shielding pattern disposed on the common voltage line and including an open portion, which at least partially exposes the common voltage line; and a dummy color layer disposed below the common voltage line and at least partially overlapping the open portion. The light-shielding pattern includes a first stepped portion disposed on a side of the open portion and a second stepped portion disposed on another side of the open portion, and the dummy color layer overlaps at least one of the first and second stepped portions.

Abstract: According to the present disclosure, the liquid crystal display panel comprises an upper glass substrate, a lower glass substrate, and a blue backlight source. The upper glass substrate comprises a plurality of color-resist units, each color-resist unit comprising a red color-resist region, a green color-resist region, and a transparent region that are arranged spaced from one another, black matrixes that are arranged between each two adjacent regions, and first optical filter layers that are arranged on an outer surface of the upper glass substrate at positions corresponding to the red color-resist region and the green color-resist region. The lower glass substrate comprises second optical filter layers at positions corresponding to the red color-resist region and the green color-resist region. According to the present disclosure, the image display quality of the liquid crystal display panel can be further improved.

Abstract: The liquid crystal display panel comprises an upper glass substrate and a lower glass substrate, wherein the upper glass substrate comprises a plurality of color-resist units, each of which comprises a red color-resist element, a green color-resist element, and a blue color-resist element that are spaced from one another, and a plurality of black matrixes each being arranged between two adjacent color-resist elements; and wherein the lower glass substrate comprises a plurality of optical filter layers arranged on an outside surface thereof, said optical filter layers corresponding to red color-resist elements, green color-resist elements, and blue color-resist elements respectively, and each optical filter layer having a color the same as a corresponding color-resist element. The structure of the liquid crystal display panel according to the present disclosure is simple.

Abstract: The present invention provides a liquid crystal display panel, in which the spacing distance of the pixel electrodes that correspond to the green resist blocks from the pixel electrodes corresponding to red and blue resist blocks adjacent thereto is made greater than the spacing distance between the pixel electrodes corresponding to the red resist blocks and the pixel electrodes corresponding to the blue resist blocks, this being equivalent to expanding the distance between a green sub-pixel of the liquid crystal display panel and a blue sub-pixel and a red sub-pixel adjacent thereto, thereby reducing the possibility of the background light corresponding to the red and blue sub-pixels being diffused into the green sub-pixel and reducing the amount of green light mixed with peripheral portions of red and blue images and thus improving the issue of large view angle color shifting of the liquid crystal display panel; and also, cell thickness of the liquid crystal display panel corresponding to the green resist b

Abstract: The present application discloses a color filter, comprising: a substrate; a black matrix layer formed on the substrate; color film layers formed on at least one first sub-pixel opening area and a plurality of second sub-pixel opening areas on the substrate; wherein the size of the first sub-pixel opening area is smaller than the size of the second sub-pixel opening area; the size of the color film layer on the first sub-pixel opening area is smaller than the size of the color film layer on the second sub-pixel opening area; a flat layer formed on the color film layer; an alignment mark formed on the flat layer and located at a designated position around the first sub-pixel opening area; a spacer layer formed on the flat layer.

Abstract: A manufacturing method of an electro-optic device substrate, including forming a concave portion, which corresponds to a pixel, by etching a first surface of a light transmitting substrate, forming a lens layer including a micro lens formed by filling the concave portion with a lens material having a refractive index greater than that of the substrate, flattening a second surface of the lens layer opposite to a surface in which the microlens is formed, forming a light shielding film that surrounds a display area, in which the pixel is arranged, on the flattened second surface, and forming a light transmitting path layer that covers the second surface on which the light shielding film is formed.

Abstract: Disclosed is a transflective liquid crystal display panel and transflective liquid crystal display device. The transflective liquid crystal display panel includes: an array substrate which is provided thereon with a plurality of sub-pixel areas, each of the sub-pixel areas including a transmissive area and a reflecting area; and a polarizer arranged at an outer surface of the array substrate and having a first surface facing a backlight source. An area of the first surface, which corresponds to the reflecting area, is at least partly provided therein with a reflecting layer. The present disclosure achieves the technical effect of preventing the light emitted by a backlight source from being absorbed by the polarizer in the reflecting process, thus avoiding light loss and consequently improving the utilization rate of the backlight source. The display panel and the display device provided by the present disclosure are simple in structures, which greatly reduces the production cost thereof.

Abstract: A liquid crystal display is provided. The liquid crystal display includes a substrate including a reflective area and a transmissive area, a thin film transistor disposed on the substrate, a pixel electrode disposed on the thin film transistor, and a roof layer disposed facing the pixel electrode. The liquid crystal display further includes a plurality of microcavities formed between the pixel electrode and the roof layer, and a liquid crystal material disposed in the plurality of microcavities. The reflective area includes a first cell gap, and the transmissive area includes a second cell gap that is different from the first cell gap.

Abstract: A backlight assembly includes a light source portion including a plurality of light sources. The light sources are configured to emit light. A wavelength conversion member is disposed on the light source portion. The wavelength conversion member is configured to convert a wavelength of light emitted from the light source portion. The wavelength conversion member includes a first substrate disposed on the light source portion, a second substrate disposed on the first substrate, and a plurality of wavelength conversion layers interposed between the first substrate and the second substrate. Each of the plurality of wavelength conversion layers correspond to a light source of the plurality of light sources.

Abstract: The aspects disclosed herein relate to a display unit and a method for producing a display unit, is to provide a display unit which is easy to produce and is not susceptible to compressive and tensile stresses acting on the protective housing. This object is achieved in that the TFT module is disposed within a first housing half and the backlighting unit is disposed within a second housing half, and in that the first housing half is connected to the second housing half by means of a plurality of mounting elements, the mounting elements having predetermined breaking points.

Abstract: A polarization selection color filter includes: a first color conversion layer including a plurality of first quantum rods absorbing light of a first wavelength and emitting light of a second wavelength that is longer than the first wavelength; and a second color conversion layer including a plurality of second quantum rods disposed on the first color conversion layer, absorbing the light of the second wavelength and emitting light of a third wavelength that is longer than the second wavelength. The polarization selection color filter is applicable to a color filter array of a display device and may improve a contrast ratio.

Abstract: Disclosed is a backlight module which includes a plurality of light-emitting devices arranged in an array of multiple rows and multiple columns. Each row of light-emitting devices include a plurality of first light-emitting devices for emitting red light, a plurality of second light-emitting devices for emitting green light and a plurality of third light-emitting devices for emitting blue light. The first light-emitting device, the second light-emitting devices and the third light-emitting devices in each row of light-emitting devices are driven to sequentially emit light based on respective data signals in a light-emitting phase. Further disclosed are a method of driving the backlight module and a display device.

Abstract: A display panel and a display device are disclosed, and in a first substrate of the display panel, the first alignment film includes a plurality of first portions corresponding to the plurality of first alignment adjustment structures each having a first surface, the fluctuation direction of the first surface and the fluctuation direction of each first portion are consistent with the alignment direction of liquid crystal molecules in the liquid crystal layer induced by the first alignment film; in a second substrate of the display panel, the second alignment film includes a plurality of second portions corresponding to the plurality of second alignment adjustment structures, the fluctuation direction of the second surface and the fluctuation direction of each second portion are consistent with the alignment direction of the liquid crystal molecules in the liquid crystal layer induced by the second alignment film.

Abstract: A liquid crystal display device includes a first substrate, a second substrate disposed opposite to the first substrate, where a plurality of pixel regions is defined in the first or second substrate, a liquid crystal layer disposed between the first substrate and the second substrate, and a pixel electrode including: a body portion disposed in a pixel region on the first substrate, where a slit is defined in the body portion; an extension disposed on the first substrate near a boundary line of the pixel region to be spaced apart from the body portion and extending in a first direction, where an opening is defined between the body portion and the extension bar and extends in the first direction; and a connection electrode disposed on the first substrate and which electrically connects the body portion and the extension bar.

Abstract: According to an aspect, a liquid crystal display device includes a first substrate, a second substrate, a liquid crystal layer, a first electrode, and a second electrode. The first electrode includes an electrode base portion extending in a first direction, and a plurality of comb tooth portions extending in a second direction different from the first direction and protruding from the electrode base portion with a certain distance interposed therebetween. At least one of the first substrate and the second substrate includes a light-blocking part that reduces intensity of light passing therethrough at a position overlapping with at least one of the center of the comb tooth portion and the center between the adjacent comb tooth portions in a direction perpendicular to the first substrate.

Abstract: A liquid crystal panel includes: first and second substrates arranged to be opposite each other at a predetermined gap; a liquid crystal layer filled between the first and second substrates; alignment films; a counter electrode pattern formed on the first substrate; and a pixel electrode pattern formed on the first substrate so as to have a plurality of electrode branches, the pixel electrode pattern having a partial connection branch formed around a contact so as to transversely connect a plurality of electrode branches extending from the contact from among the plurality of electrode branches.

Abstract: A display substrate and a display device are provided. The display substrate includes: plural gate lines each having at least one end provided with plural first electrostatic discharge (ESD) units configured to discharge static electricity in the gate lines. The plural first ESD units have curvatures different from each other. By discharging the static electricity through the plural ESD units, in case one of the ESD units is broken down by electrostatic current, the other ones can continue working.

Abstract: Related to is a thin film transistor and a liquid crystal display device. The thin film transistor comprises a substrate, and a conductive laminate and a light-shielding layer that are both arranged on the substrate, wherein the light-shielding layer is located below and directly opposite to the conductive laminate. The thin film transistor is provided therein with the light-shielding layer for shading light from irradiating the conductive laminate, thereby effectively preventing unfavorable influences imposed on the electrical properties of oxides by illumination, and thus improving the electrical properties of the thin film transistor.

Abstract: A liquid crystal device which is used as an electro-optical device according to the present embodiment includes at least five capacitance electrodes that are stacked on a substrate in a state where dielectric films are interposed therebetween. Two capacitance electrodes which are stacked on odd-numbered layers among the at least five capacitance electrodes are electrically connected to a capacitance line through a contact hole that is a common contact hole.

Abstract: According to one embodiment, a display device comprises metal lines which are in contact with a structural electrode. A first filter overlaps with first and second pixels, and a second filter overlaps with second and fourth pixels. First to fourth structural electrodes overlap with first to fourth pixels respectively. A first slit extends between first and second pixels, and a second slit extends between third and fourth pixels. The first metal line is formed between first and second structural electrodes to cover part of the first slit, and the second metal line is formed between third and fourth structural electrodes to cover part of the second slit.

Abstract: Provided is a novel display panel that is highly convenient or highly reliable, a novel input/output device that is highly convenient or highly reliable, or a method for manufacturing a novel display panel that is highly convenient or highly reliable. The present inventors conceived a structure including a first intermediate film, a first electrode including a region in contact with the first intermediate film, a pixel that includes a first display element including the first electrode and a pixel circuit electrically connected to the first display element, a signal line electrically connected to the pixel, and a terminal that includes a third conductive film electrically connected to the signal line and a second intermediate film including a region in contact with the third conductive film.

Abstract: A display panel and a display device are disclosed. Each of pixels in the display panel includes a pixel area; a switch element located near an intersection of a data line and a scan line; a pixel electrode electrically connected to the switch element; and a common electrode located on the first substrate. The common electrode comprises first common electrodes superposing data lines or scan lines and having the same first width; and second common electrodes overlapping with respective pixel areas and having the same second width, the first width is the same as the second width. Alternatively, the common electrode comprises first slits, which have the same first slit width, located above data lines and scan lines, and second slits, which have the same second slit width and are located in respective pixel areas. The first slit width is the same as the second slit width.

Abstract: A display device is configured that the common electrode wiring layer is divided in a source wiring layer direction, the metal wiring layer is disposed above the source wiring layer at a position in contact with the upper part of the common electrode wiring layer, and the metal wiring layer is not disposed at a position where the common electrode wiring layer is divided. Alternatively, the metal wiring layer is not disposed at a position between the same colors as those at the division position of the common electrode wiring layer.

Abstract: A window assembly is provided that includes an electro-optic element with a first substantially transparent substrate defining first and second surfaces. The second surface has a first electrically conductive layer. A second substantially transparent substrate defines third and fourth surfaces. The third surface has a second electrically conductive layer. A cavity is defined between the first and second substrates. An electro-optic medium is disposed in the cavity. The electro-optic medium is variably transmissive such that the electro-optic element is operable between substantially clear and darkened states. A pane is positioned proximate the electro-optic element and an infrared reflective film is positioned on at least one of the pane and the electro-optic element.

Abstract: A method for driving electrochromic devices is revealed. The voltage that drives an electrochromic device is changed according to signals (such as temperature, time, quantity of electricity, current, etc) detected during coloration of the electrochromic device. The control mechanism of the present invention drives the electrochromic device by different voltages in multiple stages. During repetitive control of the coloration of the electrochromic device, the coloration of the electrochromic device becomes more uniform, the coloration time is shortened, and the service life is extended.

Abstract: A modular routing node includes a single input port and a plurality of output ports. The modular routing node is arranged to produce a plurality of different deflections and uses small adjustments to compensate for wavelength differences and alignment tolerances in an optical system. An optical device is arranged to receive a multiplex of many optical signals at different wavelengths, to separate the optical signals into at least two groups, and to process at least one of the groups adaptively.

Abstract: An optical parametric oscillator (3) is configured to provide first ultrashort output pulses comprising light of a first wavelength and second ultrashort output pulses comprising light of a second wavelength, wherein at least one of the first and second wavelengths is independently controllable. The optical parametric oscillator (3) comprises an optical resonator (10) containing first and second nonlinear optical elements (11, 12) and comprising an output coupler (13), an input system (14) configured to provide first pump pulses to the first nonlinear optical element (11) and second pump pulses to the second nonlinear optical element (12), and a control system (15).

Abstract: The invention provides an action camera apparatus including: a fixing base including a fixing face; and a rotation component including a camera and a rotation face, wherein there is an angle of 45 degrees between a plane where the rotation face lies, and a plane where a lens of the camera lies, wherein the rotation component is moveably connected with the fixing base, and the rotation face abuts the fixing face, wherein the rotation face can be rotated on the fixing face around a rotation axis which is a straight line perpendicular to the rotation face, and stop at a first preset position and a second preset position; and when the rotation face is rotated from the first preset position to the second preset position, the rotation face is rotated by 180 degrees bringing the lens of the camera into rotation by 90 degrees.

Abstract: This invention relates to a device comprised of at least two interchangeable modules, wherein at least one module has a power source and/or data storage unit and can transmit power and/or data to all of the electrically and mechanically mated modules. The device is designed for use in extreme weather environments, such as but not limited to, snow, rain, at elevation, and/or under pressure. In addition, each mating point between the at least two modules is waterproof. In a preferred embodiment, the device is comprised of a first module that is an optical head, with at least two optical lenses and can sense and capture image data. A second module is a handle comprised of a battery. When the first and second modules are electrically and mechanically mated, the two modules are secure and waterproof and the device operates as a 360° optical camera with an interchangeable power handle module.

Abstract: A light-providing device is provided, including a light guiding member, an LED (light-emitting diode), and a light distribution adjusting member, wherein the LED is disposed on the light guiding member. The light guiding member has an opening. The light distribution adjusting member has an inlet and an outlet. The inlet is connected to the opening. The shape or dimensions of the inlet is different from that of the outlet. A plurality of lights generated by the LED enter the light distribution adjusting member through the opening and the inlet, and leave the light distribution adjusting member through the outlet. The lights include a first light angular distribution at the inlet, and include a second light angular distribution at the outlet, wherein the second light angular distribution/the first light angular distribution is proportional to the inlet/the outlet.

Abstract: A projection screen assembly is disclosed including a projection screen and a projection screen frame. The projection screen frame includes a plurality of projection screen frame modules that may be coupled together to provide a projection frame for projection screens of different sizes.

Abstract: A method for repairing a lithography mask includes determining a defect region in the mask, selecting a predetermined peripheral region of the defect region, depositing a barrier layer on the predetermined peripheral region, and repairing the defect region. The mask may be a MoSi-binary type mask. The barrier layer may compensate for uncertainty occurring during the repair of the defect region. Because the repair processes only require determining the defect region and forming the barrier layer on the periphery of the defect region, and etching the defect, the novel method has a shorter repair time period, better repair effect and improved repair efficiency than conventional methods.

Abstract: A composition, a method fabricating the infrared ray transmitting filter, and an infrared ray sensor are provided. When the composition forms a film with a thickness of 1 ?m, transmittance of the film in a wavelength in a range from 400 nm to 700 nm is less than 4%, and transmittance of the film in a wavelength in a range from 900 nm to 1300 nm is more than 90%. The composition comprises an alkali-soluble resin at least containing an acrylic group, a carboxyl group, and a fluorene ring, a photoinitiator, an unsaturated monomer, a pigment mixture, and a solvent. The pigment mixture is formed by mixing a colorant dispersion and a pigment in a weight ratio from 60:40 to 70:30.

Abstract: A method of fabricating a color filter array including providing substrate, forming a multilevel structure that is attached to the substrate, etching the multilevel structure to expose first wells in the multilevel structure, filling at least the first wells in the multilevel structure with the first color component, curing the first color component, etching the multilevel structure to expose second wells in the multilevel structure, filling at least the second wells in the multilevel structure with a second color component, and curing the second color component.

Abstract: Organometallic precursors are described for the formation of high resolution lithography patterning coatings based on metal oxide hydroxide chemistry. The precursor compositions generally comprise ligands readily hydrolysable by water vapor or other OH source composition under modest conditions. The organometallic precursors generally comprise a radiation sensitive organo ligand to tin that can result in a coating that can be effective for high resolution patterning at relatively low radiation doses and is particularly useful for EUV patterning. The precursors compositions are readily processable under commercially suitable conditions. Solution phase processing with in situ hydrolysis or vapor based deposition can be used to form the coatings.

Abstract: Provided is a photosensitive resin composition which comprises: (A-1) a resin containing a structure represented by general formula (1); and (B) a photo-acid generating agent. In general formula (1), X, R1 to R7, m1 to m4, n1, n2, Y and W are each as defined in the description.

Abstract: The purpose of the present invention is to provide: a resin composition, a cured product of which has extremely low residual stress and exhibits excellent adhesion to a metal substrate such as a Pt, LT or Ta substrate after a wet heat test in the fields of semiconductors and MEMS/micromachine applications; a laminate of this resin composition; and a cured product of this resin composition or the laminate. The present invention is a photosensitive resin composition which contains an epoxy resin (A), a compound having a phenolic hydroxyl group (B) and a cationic photopolymerization initiator (C), and wherein: the epoxy resin (A) has a weighted average epoxy equivalent weight of 300 g/eq. or more; 20% by mass or more of the epoxy resin (A) is an epoxy resin represented by formula (1) and having an epoxy equivalent weight of 500-4,500 g/eq.; and the compound having a phenolic hydroxyl group (B) contains a phenolic compound having a specific structure.

Abstract: Lithographic apparatuses suitable for, and methodologies involving, complementary e-beam lithography (CEBL) are described. In an example, a blanker aperture array (BAA) for an e-beam tool includes a first column of openings along a first direction. The BAA also includes a second column of openings along the first direction and staggered from the first column of openings. The first and second columns of openings together form an array having a pitch in the first direction. A scan direction of the BAA is along a second direction, orthogonal to the first direction. The pitch of the array corresponds to half of a minimal pitch layout of a target pattern of lines for orientation parallel with the second direction.