Abstract: An image display device includes a first substrate; a second substrate located to face the first substrate; an electro-optical layer between the first substrate and the second substrate; a plurality of pixel electrodes located between the electro-optical layer and the first substrate; a plurality of switching elements electrically connected with the plurality of pixel electrodes respectively; and a color filter included in a layer between the first substrate and the plurality of switching elements. A side of the first substrate opposite to a side thereof facing the electro-optical layer is an image display side.

Abstract: Disclosed are a bezel, a display module, and a display device. The bezel includes at least two spliced pieces, each of which includes L-shaped first and second wall faces, wherein: in two adjacent spliced pieces, the first wall face of one spliced piece includes a lapping section, and the first wall face of the other spliced piece includes an extending section extending to and lapping with the lapping section, wherein the extending section is fixed by a bolt to the lapping section. As compared with the prior art, in the technical solution according to the embodiments of the application, the adjacent spliced pieces can be connected without any additional secondary element, so that the structure of the bezel will become more compact, a space occupied by the bezel can be reduced, assembling of the bezel can be simplified, and a cost of producing the bezel can be lowered.

Abstract: A display module has therein a heat dissipater, an installation frame, a LCD plate, an optical membrane, a diffusion plate and a light board respectively and sequentially received inside the installation frame, a first space defined between the LCD panel and the optical membrane. A heat dissipater has a first inlet, a first outlet both of which are defined in the installation frame and form a first airway inside the first space and a screen respectively provided to the first inlet and the first outlet. The formation of the airway facilitates air convection inside the display module, which helps dissipate heat generated from the operation of the display module.

Abstract: The disclosure provides in some embodiments a method for fabricating a photoresist pattern, a color filter and a method for fabricating the same, and a display device. The method for fabricating a photoresist pattern includes coating negative photoresist on a base substrate to form a first photoresist layer, coating positive photoresist on the first photoresist layer to form a second photoresist layer, conducting a first exposure process on first regions of the second photoresist layer, conducting a first developing process to remove the positive photoresist within the first regions of the second photoresist layer and the negative photoresist within second regions of the first photoresist layer, so as to obtain a first photoresist pattern and a second photoresist pattern, conducting a second exposure process on the first photoresist pattern and the second photoresist pattern, and conducting a second developing process to remove the first photoresist pattern.

Abstract: A liquid crystal display device includes a first substrate, a second substrate, and a liquid crystal layer. The first substrate includes first wirings extending in a first direction, second wirings extending in a second direction, third wirings extending in the first direction. A center position of a width in the second direction of the third wiring disposed at boundary between blue and red pixels is displaced to a red pixel side from a center position of a width in the second direction of the first wiring disposed at boundary between the blue and red pixels. A center position of a width in the second direction of the third wiring disposed at boundary between the red and green pixels is displaced to the red pixel side from a center position of a width in the second direction of the first wiring disposed at the boundary between the red and green pixels.

Abstract: The present invention discloses a method for manufacturing a color filter, a color filter, and a liquid crystal panel. The method comprises: providing a substrate; and forming a plurality of color resistances on the substrate one by one using a color resistance forming process, with boundaries of adjacent color resistances being overlapped with each other. The color resistance forming process comprises: coating a photoresist material on the substrate to form a color resistance unit thereof; exposing the color resistance unit, with a light intensity received at the boundary of the color resistance unit being smaller than that received by the main body of the color resistance unit. Through the present invention, dark pixel lines at the boundary overlaps can be eliminated, and transmittance of the product can be enhanced.

Abstract: A display device including a substrate and a wire grid polarizer disposed on the substrate, wherein the wire grid polarizer includes a first wire grid layer having a first wire thickness and including a plurality of first wire grids separated from each other, a first middle layer disposed on the first wire grid layer, the first middle layer including a first portion having a first middle layer thickness and a second portion having a second middle layer thickness thinner than the first middle layer thickness, the second middle layer thickness being thinner than the first wire thickness, and a second wire grid layer disposed on the first middle layer and including a plurality of second wire grids separated from each other, the plurality of second wire grids overlapping the second portion of the first middle layer.

Abstract: A head-up display includes an image light output device for outputting image light, a first optical element, a second optical element, and a third optical element. The first optical element is provided to be inclined with respect to the output surface of the image light output device. The first optical element reflects the image light having a first polarization direction and allowing the image light having second polarization direction to pass through. The second optical element reflects the image light from the first optical element to the first optical element. The third optical element is disposed between the first and the second optical element, and converts the image light having the first polarization direction to the image light having the second polarization direction by allowing the image light to pass through back and forth. The image light passing through the first optical element is projected on a combiner.

Abstract: A back light module and a liquid crystal display apparatus are provided A back light module has a conductive frame, connected electrically to a reference voltage input terminal; a sealant frame displaced inside the conductive frame, wherein the sealant frame has a bottom surface adhered to a top surface of the conductive frame; a support structure displaced above the top surface of the conductive frame along the inside edges of the sealant frame; and a plurality of optical films disposed over the conductive film and being supported by the support structure. The plurality of optical films includes an upper brightness enhancement film, a lower brightness enhancement film, a diffuser film, a light guide plate; and a reflector film.

Abstract: A display apparatus includes a substrate and a plurality of LEDs. Each LED is attached to the substrate via conductive pads on a side of the LED. A diffuser having light diffusing characteristics is aligned with the plurality LEDs against a surface of the substrate. The diffuser is aligned so as to nest around at least one LED of the plurality of LEDs.

Abstract: A lighting device has a housing having a bottom part and an opening, the bottom part being formed with through holes, and a substrate having light sources mounted on one surface thereof, the substrate being placed outside of the bottom part of the housing such that light emitted from the light sources is passed through the respective through holes and radiated to the opening of the housing. The lighting device also has light guide parts, each of which has a cylindrical shape, inserted through the through holes of the bottom part of the housing for guiding the light emitted from the light sources, respectively, and diffusion lenses provided inside of the housing for diffusing the light guided by the light guide parts, respectively. Each of the light guide parts is hollow and configured to reflect the light by an inner surface thereof so as to guide reflected light to an associated diffusion lens.

Abstract: Embodiments of a device and a method of forming the same are described. The device includes a backlight unit and an image generating unit. The backlight unit includes an optical cavity having a top side, a bottom side, and side walls. The backlight unit further includes an array of light sources coupled to the optical cavity and a quantum dot film positioned within the optical cavity. The quantum dot film is configured to process, light received from the array of light sources and the backlight unit is configured to transit the processed light to the image generating unit. The method includes providing an optical cavity having a top side, a bottom side, and side walls. The method further includes coupling an array of light sources to the optical cavity and supporting a quantum dot film within the optical cavity.

Abstract: A display device according to one aspect of the present invention includes a first substrate including a pixel portion and a terminal portion, a second substrate arranged to face the pixel portion, a first light source device arranged in the terminal portion, and irradiating a first end surface of the second substrate with first light, a liquid crystal layer arranged between the first substrate and the second substrate, and a semiconductor element arranged on a side opposite to a side of the pixel portion across the first light source device, and electrically coupled with the terminal portion, wherein the first light is propagated while reflected between the first substrate and the second substrate, and the liquid crystal layer modulates the propagated first light.

Abstract: The invention provides a quantum dot color film substrate, manufacturing method thereof and an LCD apparatus. The manufacturing method comprises forming an organic transparent photo-resist layer on transparent sub-pixel areas of a transparent substrate; forming a red quantum dot layer, a green quantum dot layer on corresponding red sub-pixel areas and green sub-pixel areas respectively by a sputter printing process using the organic transparent layer as stop walls to improve printing precision. The manufacturing method is simple, and requires less time and facility cost.

Abstract: A display device includes: a first substrate; a second substrate facing the first substrate; a light amount control layer between the first substrate and the second substrate; a first line disposed on the first substrate and extending in a first direction and a second line disposed on the first substrate and extending in a second direction which intersects the first direction; a light blocking member disposed on the first substrate and overlapping at least one of the first line and the second line; a plurality of color conversion layers on the second substrate in respective pixel areas; and a partition wall among the plurality of color conversion layers, corresponding to the first line and the second line. The partition wall has a width less than a width of the light blocking member.

Abstract: A phase modulator for polarized light, comprising a first substrate with a first surface and a second substrate with a second surface, a liquid crystal layer between the two substrates and an electrode arrangement. The phase modulator is usable as a variable deflection grating, and liquid crystal materials which are currently conventional are usable for its production. A phase modulator has an out-of-plane angle of the liquid crystal molecules next to the two surfaces whose magnitude is greater than 0 but less than or equal to 45 degrees, and an electrode arrangement controllable such that an in-plane component of the liquid crystal molecule orientation is adjustable in an angle range of up to 180 degrees, and the rotation sense of the liquid crystal molecules next to the first surface is opposite to the rotation sense of the liquid crystal molecules next to the second surface.

Abstract: An array substrate, a display panel and a display device are disclosed. An array substrate includes a base substrate; the base substrate includes a display area and a peripheral area encircling the display area; a pixel array structure is disposed in the display area; arid at least one touch electrode is disposed in the peripheral area and arranged along an edge of the base substrate. In the array substrate, a touch electrode is disposed in a peripheral area, so that the objective of replacing physical keys can be achieved, and hence the bezel width of the display device employing the array substrate can be reduced.

Abstract: A pixel structure includes a plurality of pixel units arranged in an array. Each of the pixel units includes a first electrode, a second electrode and a thin film transistor, the first electrode having a plate-like structure, and the second electrode having a plurality of strip-shaped electrodes and connecting electrodes to connect the strip-shaped electrodes together. A slit is formed between each two adjacent strip-shaped electrodes, and an end of each slit facing towards the thin film transistor is angled. In any two adjacent pixel units in each column of pixel units, a structure of the second electrode in one pixel unit is in a mirror symmetrical relation with that in the other pixel unit relative to a row direction, and an aperture ratio of a pixel unit in which the slit of the second electrode is angled towards the thin film transistor is larger than an aperture ratio of the other pixel unit.

Abstract: An image display device includes a first substrate formed of a resin material; a second substrate located to face the first substrate, the second substrate being formed of a resin material having a different property from that of the first substrate; an electro-optical layer between the first substrate and the second substrate; a plurality of pixel electrodes located between the electro-optical layer and the first substrate; a plurality of switching elements electrically connected with the plurality of pixel electrodes respectively; and a color filter included in a layer between the first substrate and the plurality of switching elements.

Abstract: A high-definition liquid crystal display device is provided. A liquid crystal display device with a high aperture ratio is provided. A liquid crystal display device with a high contrast ratio and display quality is provided. A liquid crystal display device capable of being driven at a low voltage is provided. The display device includes, between a pair of substrates, a pixel electrode, a first common electrode, a second common electrode, and a liquid crystal layer. The pixel electrode and the first common electrode are positioned between the liquid crystal layer and one of the substrates. The second common electrode is positioned between the liquid crystal layer and the other substrate. The same potential is supplied to the first common electrode and the second common electrode. The first common electrode includes a portion overlapping with the second common electrode between the display regions of two adjacent subpixels that exhibit different colors.

Abstract: The present invention provides a liquid crystal display device that can improve the response speed from OFF state to ON state. The present invention includes a first substrate, a second substrate, a horizontal-alignment type liquid crystal layer between the first and second substrates, and pixels.

Abstract: The present disclosure provides a liquid crystal panel, which includes an array substrate, a color film substrate disposed opposite to the array substrate, and a polarizer including a main body and a extension part, a transparent conductive adhesive is disposed on the main body and the extension part, the main body is attached to a side of the color film substrate away from the array substrate through the transparent conductive adhesive, the extension part extends from the color film substrate, a ground point is disposed on the array substrate, and the extension part is attached to the ground point through the transparent conductive adhesive to form a discharge loop. The extension part is connected to the ground through the transparent conductive adhesive instead of the conductive silver plasma, it may achieve the technical effect of simplifying the production process, increasing the stability of the ground, and decreasing the production cost.

Abstract: The present disclosure provides a display substrate, a display panel and a display apparatus. An exemplary display substrate includes a first circuitry element and a second circuitry element in proximity to the first circuitry element, and an electrostatic releasing element, electrically insulated from each of the first and second circuitry elements, and located adjacent to each of the first and second circuitry elements, whereby allowing discharge of electrostatic charges to the electrostatic releasing element from at least one of the first and second circuitry elements, so as to prevent direct electrostatic discharge between the first circuitry element and the second circuitry element.

Abstract: An array substrate (200), a fabrication method of the array substrate (200), and a display panel and an electronic device having the array substrate (200) are provided. The array substrate (200) includes a base substrate (201), and a gate line (202), an insulating layer (204), a data line (208), and a first active pad layer (216) provided on the base substrate (201); wherein, the insulating layer (204) is provided on the gate line (202), the data line (208) is arranged on the gate line (202) through the insulating layer (204) and is arranged intersecting with the gate line (202), the first active pad layer (216) is arranged on the gate line (202) through the insulating layer (204) and is arranged overlapping with the gate line (202), and the first active pad layer (216) is arranged outside a region where the gate line (202) and the data line (208) overlap with each other.

Abstract: An array substrate and a manufacturing method thereof, a display panel and a display device are disclosed.

Abstract: The present disclosure discloses an array substrate, a display apparatus and a method for repairing faults of an array substrate, which belong to the field of display technologies. The array substrate comprises: a plurality of touch electrode lines, a plurality of data lines and a plurality of repair lines, wherein the plurality of touch electrode lines are intersected with and insulated from the plurality of data lines and the plurality of repair lines, and a repair line is parallel to a data line. The repair line is connected to parts on both sides of a disconnected position of the data line when the data line is disconnected. In embodiments of the present disclosure, when a data line in the array substrate is disconnected, the disconnected data line may be replaced by a repair line, thereby achieving repairing the disconnected data line and ensuring a display quality and a touch function of a display device.

Abstract: The present disclosure provides a wide viewing angle panel and a display device, in each row of sub pixels of the wide viewing angle panel, every three sub pixels constitute a pixel unit, which is arranged in an array, the pixel unit includes a first pixel unit and a second pixel unit, the brightness of the first pixel unit is higher than that of the second pixel unit, the area of the first pixel unit is equal to that of the second pixel unit, the first pixel unit and the second pixel unit are uniformly disposed on the array. The display device includes the wide viewing angle panel as descripted above. The present disclosure can increase the transmittance of the wide viewing angle panel, reduce the energy consumption of backlight, and make the design of the pixel unit distribution more flexible in the wide viewing angle panel.

Abstract: A display panel is disclosed, which includes: a first substrate; plural scan lines disposed on the first substrate and extending along a first direction; plural data lines disposed on the first substrate and extending along a second direction, wherein at least one pixel region is defined by the scan lines and the data lines, and the first direction and the second direction are different; a common electrode disposed in the pixel region; and a metal line electrically connecting to the common electrode and extending along the first direction, wherein the metal line has a first portion overlapping the common electrode and a second portion overlapping one of the data lines; wherein the first portion has a first maximum width along the second direction, the second portion has a second maximum with along the second direction, and the first maximum width is greater than the second maximum width.

Abstract: An electrochromic device comprising a counter electrode layer comprised of lithium metal oxide which provides a high transmission in the fully intercalated state and which is capable of long-term stability, is disclosed. Methods of making an electrochromic device comprising such a counter electrode are also disclosed.

Abstract: A color filter substrate, a display panel and a display device arc provided. The color filter substrate includes a base substrate, the base substrate being divided into a plurality of pixel units, each pixel unit including a plurality of sub-pixel units, a color filter being arranged in each sub-pixel unit.

Abstract: Onboard EC window controllers are described. The controllers are configured in close proximity to the EC window, for example, within the IGU. The controller may be part of a window assembly, which includes an IGU having one or more EC panes, and thus does not have to be matched with the EC window, and installed, in the field. The window controllers described herein have a number of advantages because they are matched to the IGU containing one or more EC devices and their proximity to the EC panes of the window overcomes a number of problems associated with conventional controller configurations.

Abstract: The invention relates to a device comprising a multilayered structure with a first portion and a second portion wherein the first portion is conceived to be rolled about a first roller, said device comprising a second roller for receiving the second portion for at least partially counteracting the effects of mechanical strain induced in the multilayered structure upon said rolling. The first roller is rotated in a first direction, whereby the second roller is rotated in a second direction. Preferably, the diameters of the first roller and the second roller are equal. Alternatively, the edge portions A, B of the multilayer structure are suitably interconnected by stoppers for preventing creeping.

Abstract: A liquid crystal optical device is described configured to provide variable beam steering or refractive Fresnel lens control over light passing through an aperture of the device. The device includes at least one layer of liquid crystal material contained by substrates having alignment layers. An arrangement of electrodes is configured to provide a spatially varying electric field distribution within a number of zones within the liquid crystal layer. The liquid crystal optical device is structured to provide a spatial variation in optical phase delay with a transition at a boundary between zones which is an approximation of a sawtooth waveform across the boundaries of multiple zones. The arrangement of electrodes, device layered geometry and methods of driving the electrodes increase the effective aperture of the overall optical device.

Abstract: An optical modulator for switching an optical signal of wavelength ? from one waveguide-electrode to another requires that both waveguide-electrodes be made of an electrically conducting material. Also, a non-conducting cross-coupling material fills a slot along a length L between the waveguide-electrodes. Importantly, cross-coupling material in the slot provides a separation distance xc between the waveguide-electrodes that is less than 0.35 microns. When a switching voltage V? is selectively applied to the waveguide-electrodes, a strong uniform electric field E is created within the cross-coupling material. Thus, E modulates the cross-coupling length of the optical signal by an increment ±? each time it passes back and forth through the cross-coupling material along the length L. Thus, after an N number of cross-coupling length cycles along the length L, when N? equals one cross-coupling length, the optical signal is switched from one waveguide-electrode to the other.

Abstract: A method of generating THz radiation includes the steps of generating optical input radiation with an input radiation source device (10), irradiating a first conversion crystal device (30) with the optical input radiation, wherein the first conversion crystal device (30) is arranged in a single pass configuration, and generating the THz radiation having a THz frequency in the first conversion crystal device (30) in response to the optical input radiation by an optical-to-THz-conversion process, wherein a multi-line frequency spectrum is provided by the optical input radiation in the first conversion crystal device (30), and the optical-to-THz-conversion process includes cascaded difference frequency generation using the multi-line frequency spectrum. Furthermore, a THz source apparatus being configured for generating THz radiation and applications thereof are described.

Abstract: The present application discloses a nonlinear optical crystal material, preparation method and application of the nonlinear optical crystal material. The nonlinear optical crystal material has an excellent infrared nonlinear optical performance, whose frequency-doubling intensity can reach 9.3 times of AgGaS2 with the same particle size, and it meets type-I phase matching; and its laser damage threshold can reach 7.5 times of AgGaS2 with the same particle size. The nonlinear optical crystal material has important application value in the frequency-converters which can be used for frequency doubling, sum frequency, difference frequency, optical parametric oscillation of laser in mid and far infrared waveband, and the like.

Abstract: An image capturing module includes a casing, a lens component arranged in the casing, and a lens shade disposed directly facing the lens component and having a thin plate shape. The lens shade includes a first bottom surface close to the lens, a second bottom surface disposed opposite to the first bottom surface and away from the lens, a snap portion configured to snap the lens shade with the casing, and a light incoming pathway running through the lens shade to allow external light to enter the lens. The light incoming pathway includes a first light inlet formed at the first bottom surface and a second light inlet formed at the second bottom surface. A size of the second light inlet is greater than a size of the first light inlet.

Abstract: A device for influencing light during the taking of photographs includes a support frame and an extensive covering wherein said support frame comprises a first stretcher rod which is attached to a first end portion of the covering and second stretcher rod which is attached to a second end portion of the covering which faces the first end portion, and wherein said support frame further comprises at least one spreader rod with end side receiving means, each having concave receiving surfaces for receiving the outer surface of respectively one stretcher rod, and wherein the at least one spreader rod with the length thereof is designed so as to retain, in the expanded state, the first stretcher rod and the second stretcher rod against the stretcher covering.

Abstract: A stabilizing assembly for an optical device includes a base plate having a blade curved to fit against a person's torso, a strap extending outwardly from the base plate; a socket defined in the base plate and a mounting screw spaced from the socket. The blade extends below the base plate and an adjustment member is located on the underside of the base plate a distance from a lower end of the blade. The optical device is engageable with the stabilizing assembly in two ways. Firstly, the blade is inserted between the person's torso and a waistband or belt. The strap is passed around the person's neck and an end of a monopod engaged with the optical device is inserted into the socket. Secondly, the optical device is directly engaged with the mounting screw and the assembly is placed on the ground supported by the blade and adjustment member.

Abstract: A ball joint arranged to couple an attachment part to a base part is provided. The ball joint comprises: a ball associated with said attachment part and provided with a groove having ends; a ball socket formed in the base part and provided with a recess; and a coupling element. The recess and the groove are arranged such that a respective part of a coupling element is allowed to move therein. The combined arrangement of the recess, the groove, and the coupling element allows the ball to move from a first end position to a second end position by a rotational movement of at least 360 degrees. The recess is larger than the part of the coupling element located therein.

Abstract: A phosphor wheel includes a disc-shaped substrate and a phosphor ring fixedly bonded to the substrate. At least three cut-out sections or openings are formed on a rim of the substrate. The shortest length from the center of the substrate to inner edges of the cut-out sections or inner edges of the openings is generally equal to a radius of an outer circumference of the phosphor ring.

Abstract: A light source device includes a solid light source, a transmissive fluorescent plate having a phosphor that is excited by excitation light for emitting fluorescent light in a traveling direction of the excitation light, and a color filter plate that cuts a part of a wavelength region of light supplied from the fluorescent plate for trimming the light into desirable color light. The light source device further includes a first reflective film disposed on a light path extending from the fluorescent plate to the color filter plate for reflecting at least a part of the excitation light.

Abstract: A phosphor wheel device includes a phosphor and a substrate which has a disc shape and on which the phosphor is provided, and the phosphor is provided in at least a portion of a circumference of a circle on the substrate. The circle is centered on the center of a rotational shaft of the substrate. The substrate includes a first opening and a plurality of second openings, and the plurality of second openings extend radially with respect to the center of the rotational shaft.

Abstract: A wavelength conversion structure and a projection device are provided. The wavelength conversion structure is disposed on a transmission path of an illumination light beam emitted by a light source of the projection device, and includes a rotary disc, a wavelength conversion material, and a scattering-reflective material. The rotary disc has a light-conversion region and a non-light-conversion region. The light-conversion region surrounds the non-light-conversion region. The wavelength conversion material is disposed on the rotary disc, and is aligned to the light-conversion region. An energy gap of the wavelength conversion material is smaller than photon energy of the illumination light beam. The scattering-reflective material is disposed on the rotary disc, and is aligned to the light-conversion region and not aligned to the non-light-conversion region. An energy gap of the scattering-reflective material is larger than the photon energy of the illumination light beam.

Abstract: In described examples, a first TIR or RTIR element is arranged to introduce at least red light to a first spatial light modulator for modulation thereof, and a second TIR or RTIR element is arranged to introduce at least green light to a second spatial light modulator for modulation thereof. At least one of the first and second TIR or RTIR elements is arranged to introduce blue light to at least one of the first and second spatial light modulators, respectively, for modulation thereof: time-sequentially apart from the first spatial light modulator's modulation of the introduced red light, to an extent the blue light is so introduced to the first spatial light modulator; and time-sequentially apart from the second spatial light modulator's modulation of the introduced green light, to an extent the blue light is so introduced to the second spatial light modulator.

Abstract: High contrast, glass-based, writeable/erasable front projection screens are provided. The screens include a transparent glass sheet which has a front surface and a back surface separated by a distance d. The back surface is in optical contact with a diffusing element. During use of the projection screen, the glass sheet transmits image light from a projector to the diffusing element and the diffusing element reflects a portion of that light back through the glass sheet to a user. The screens have a user-facing surface that is a writable/erasable surface. In embodiments, the distance d is less than or equal to 0.2 millimeters, the whiteness W of the projection screen is less than or equal to 0.5, and/or the contrast C of the projection screen is at least 75%.

Abstract: A mask, a manufacturing method thereof, and a patterning method employing the mask. In the mask, a plurality of masks can be combined into one mask. The pattern area (01) of the mask is provided with a first pattern section (10) and a second pattern section (20) which are not overlapped with each other; light of a first wavelength can run through the first pattern section (10) but light of a second wavelength cannot run through the first pattern section; the light of the second wavelength can run thorough the second pattern section (20) but the light of the first wavelength cannot run through the second pattern section; and the light of the first wavelength and the light of the second wavelength can run through the non-pattern area, or any of the light of the first wavelength and the light of the second wavelength cannot run through the non-pattern area. The mask is obtained by combining a plurality of masks.

Abstract: A reflective mask reducing reflection of out-of-band light. The reflective mask includes a light shielding frame formed in a mask region corresponding to a boundary region of a chip on a semiconductor substrate multiply exposed. The substrate of the light shielding frame includes a layer having a different refractive index or includes pores to change the path of incident out-of-band light to thereby suppress the out-of-band light from being reflected off the conductive film. The substrate also includes a layer having a different refractive index relative to out-of-band light reflected off the conductive layer. With the reflective mask of this configuration, influence on the wiring pattern dimension can be reduced and productivity of the semiconductors can be improved.

Abstract: A lithography mask production method includes (a) forming, in a reflection layer of a blank substrate, a reference pattern used as a reference in reflectivity measurement and a reflection pattern used for lithography; (b) measuring a reflectivity Rref of the reflection layer at the reference pattern and a reflectivity RLS of the reflection layer at the reflection pattern; and (c) determining an effective width of the reflection layer at the reflection pattern based on the reflectivity Rref and the reflectivity RLS.

Abstract: A method of making a photomask includes constructing a transmission cross coefficient (TCC) matrix representing an illumination source for supplying light to transmit through the photomask and a pupil for focusing the transmitted light onto a target substrate to produce a set of main features, generating kernels through decomposition of the TCC matrix, selecting ones of the kernels having odd symmetry, generating a field map kernel as a sum of self-convolutions of the odd symmetry kernels, generating a first field map by convolving an area of the photomask corresponding to the set of main features with the field map kernel, and making the photomask corresponding to the first field map. The method may include assigning first sub-resolution assist features (SRAFs) to those portions of the photomask area having corresponding said first field map values exceeding a nonnegative threshold, and making the photomask corresponding to the main features and first SRAFs.